JPH0737231Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0737231Y2
JPH0737231Y2 JP1989108799U JP10879989U JPH0737231Y2 JP H0737231 Y2 JPH0737231 Y2 JP H0737231Y2 JP 1989108799 U JP1989108799 U JP 1989108799U JP 10879989 U JP10879989 U JP 10879989U JP H0737231 Y2 JPH0737231 Y2 JP H0737231Y2
Authority
JP
Japan
Prior art keywords
substrate
ion
ground potential
insulator
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989108799U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348854U (OSRAM
Inventor
靖典 安東
潔 緒方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1989108799U priority Critical patent/JPH0737231Y2/ja
Publication of JPH0348854U publication Critical patent/JPH0348854U/ja
Application granted granted Critical
Publication of JPH0737231Y2 publication Critical patent/JPH0737231Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1989108799U 1989-09-18 1989-09-18 イオン注入装置 Expired - Fee Related JPH0737231Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989108799U JPH0737231Y2 (ja) 1989-09-18 1989-09-18 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989108799U JPH0737231Y2 (ja) 1989-09-18 1989-09-18 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0348854U JPH0348854U (OSRAM) 1991-05-10
JPH0737231Y2 true JPH0737231Y2 (ja) 1995-08-23

Family

ID=31657418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989108799U Expired - Fee Related JPH0737231Y2 (ja) 1989-09-18 1989-09-18 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0737231Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3430806B2 (ja) * 1996-07-25 2003-07-28 日新電機株式会社 イオン注入装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119177A (en) * 1976-03-31 1977-10-06 Nec Corp Target for charged particle
JPS5652860A (en) * 1979-10-01 1981-05-12 Mitsubishi Electric Corp Ion injection device

Also Published As

Publication number Publication date
JPH0348854U (OSRAM) 1991-05-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees