JPS52119177A - Target for charged particle - Google Patents

Target for charged particle

Info

Publication number
JPS52119177A
JPS52119177A JP3582376A JP3582376A JPS52119177A JP S52119177 A JPS52119177 A JP S52119177A JP 3582376 A JP3582376 A JP 3582376A JP 3582376 A JP3582376 A JP 3582376A JP S52119177 A JPS52119177 A JP S52119177A
Authority
JP
Japan
Prior art keywords
target
charged particle
enables
insulator
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3582376A
Other languages
Japanese (ja)
Inventor
Yasushi Okuyama
Tadahiro Hashimoto
Toshio Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3582376A priority Critical patent/JPS52119177A/en
Publication of JPS52119177A publication Critical patent/JPS52119177A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the target that enables the high precise photo-mask formation by covering some part of the front of the insulator as a target irradiating the charged particle, the back and the side withthe electric conductive foil that enables the transmission of the near ultraviolet visible rays.
COPYRIGHT: (C)1977,JPO&Japio
JP3582376A 1976-03-31 1976-03-31 Target for charged particle Pending JPS52119177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3582376A JPS52119177A (en) 1976-03-31 1976-03-31 Target for charged particle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3582376A JPS52119177A (en) 1976-03-31 1976-03-31 Target for charged particle

Publications (1)

Publication Number Publication Date
JPS52119177A true JPS52119177A (en) 1977-10-06

Family

ID=12452662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3582376A Pending JPS52119177A (en) 1976-03-31 1976-03-31 Target for charged particle

Country Status (1)

Country Link
JP (1) JPS52119177A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299124A (en) * 1987-05-29 1988-12-06 Hitachi Ltd X-ray exposure mask
JPH0348854U (en) * 1989-09-18 1991-05-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299124A (en) * 1987-05-29 1988-12-06 Hitachi Ltd X-ray exposure mask
JPH0348854U (en) * 1989-09-18 1991-05-10

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