JPS52119177A - Target for charged particle - Google Patents
Target for charged particleInfo
- Publication number
- JPS52119177A JPS52119177A JP3582376A JP3582376A JPS52119177A JP S52119177 A JPS52119177 A JP S52119177A JP 3582376 A JP3582376 A JP 3582376A JP 3582376 A JP3582376 A JP 3582376A JP S52119177 A JPS52119177 A JP S52119177A
- Authority
- JP
- Japan
- Prior art keywords
- target
- charged particle
- enables
- insulator
- covering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the target that enables the high precise photo-mask formation by covering some part of the front of the insulator as a target irradiating the charged particle, the back and the side withthe electric conductive foil that enables the transmission of the near ultraviolet visible rays.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3582376A JPS52119177A (en) | 1976-03-31 | 1976-03-31 | Target for charged particle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3582376A JPS52119177A (en) | 1976-03-31 | 1976-03-31 | Target for charged particle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119177A true JPS52119177A (en) | 1977-10-06 |
Family
ID=12452662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3582376A Pending JPS52119177A (en) | 1976-03-31 | 1976-03-31 | Target for charged particle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119177A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63299124A (en) * | 1987-05-29 | 1988-12-06 | Hitachi Ltd | X-ray exposure mask |
JPH0348854U (en) * | 1989-09-18 | 1991-05-10 |
-
1976
- 1976-03-31 JP JP3582376A patent/JPS52119177A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63299124A (en) * | 1987-05-29 | 1988-12-06 | Hitachi Ltd | X-ray exposure mask |
JPH0348854U (en) * | 1989-09-18 | 1991-05-10 |
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