JPH0737231A - Magnetic head and magnetic disk device - Google Patents

Magnetic head and magnetic disk device

Info

Publication number
JPH0737231A
JPH0737231A JP18246993A JP18246993A JPH0737231A JP H0737231 A JPH0737231 A JP H0737231A JP 18246993 A JP18246993 A JP 18246993A JP 18246993 A JP18246993 A JP 18246993A JP H0737231 A JPH0737231 A JP H0737231A
Authority
JP
Japan
Prior art keywords
magnetic head
slider
head slider
magnetic
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18246993A
Other languages
Japanese (ja)
Inventor
Ryuji Tsuchiyama
龍司 土山
Tetsuya Hamaguchi
哲也 浜口
Masaaki Matsumoto
真明 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18246993A priority Critical patent/JPH0737231A/en
Publication of JPH0737231A publication Critical patent/JPH0737231A/en
Pending legal-status Critical Current

Links

Landscapes

  • Supporting Of Heads In Record-Carrier Devices (AREA)

Abstract

PURPOSE:To make a movement smooth by making the generation of a floating force hardly occur while shortening a slider length to a traveling direction and floating a slider with air a little while providing an air bearing plane to the seeking direction when a magnetic head disk device is constituted of a magnetic head slider and a supporting body. CONSTITUTION:A flat part 1a and a taper part 1b are provided in a slider 1 and a magnetic transducer 1c is mounted on the side face of the flat part 1a. The contact state with the face of a recording medium is held by the flat part 1a to the traveling direction of the slider 1a and the slider is floated a little by the flat part 1a and the taper part 1b in the seeking direction. The supporting body 2 is constituted of parallel loading beams 2a, 2b and a spacer 2c, beams 2a, 2b are bent preliminarily and the slider 1 is held between beams at the fixing edge of one side. In such a constitution, the length of the slider 1 is made as short as possible, however, is 4.00mm since it includes an adhesion area for beams 2a, 2b, the air bearing plane is generated by the taper part and the flat part to the seeking direction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気ヘッドスライダ及び
その支持体及びその製造方法及び磁気ディスク装置に係
り、特に、高記録密度化,高信頼性化,低コスト化に優
れた磁気ヘッドスライダ及びその支持体及びその製造方
法及び磁気ディスク装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider, a support for the same, a method for manufacturing the same, and a magnetic disk device, and more particularly to a magnetic head slider excellent in high recording density, high reliability and low cost. The present invention relates to a support, a method for manufacturing the support, and a magnetic disk device.

【0002】[0002]

【従来の技術】従来の磁気ディスク装置に使用されてい
る磁気ヘッドスライダは従来の空気軸受を応用したもの
で、磁気記録媒体が回転中に空気力学的に発生する浮上
力と、磁気ヘッドスライダを支持する支持体から加えら
れた所定の荷重とが釣り合うように、磁気記録媒体面と
の距離が微小で、かつ、一定に保ちながら安定浮上して
いる。
2. Description of the Related Art A magnetic head slider used in a conventional magnetic disk device is an application of a conventional air bearing, which is used to reduce the aerodynamic levitation force generated during rotation of a magnetic recording medium and the magnetic head slider. The distance from the surface of the magnetic recording medium is very small so that the predetermined load applied from the supporting body is balanced, and the surface of the magnetic recording medium flies stably while keeping it constant.

【0003】走行する記録媒体面上には、ランナウトの
ような長波長・振幅大うねりからスライダ長から面粗さ
程度までの短波長・振幅微小うねりまでのあらゆる波長
・振幅のうねりが存在する。さらに、磁気ヘッドスライ
ダが磁気記録媒体の別の領域に記録再生するためにシー
ク(半径)方向に移動する場合、スライダにローリング
(横)方向のモーメントが作用する。したがって、スラ
イダがあらゆる波長・振幅のうねりに追従させ、かつシ
ーク方向に対しても動的に安定になるように、スライダ
は上下方向・ピッチング(前後)方向・ローリング
(横)方向の三自由度の運動に対して復元力が働くよう
なスライダ・支持系になっている。
On the surface of the recording medium that runs, there are undulations of all wavelengths and amplitudes, from long wavelengths and large amplitude undulations such as runouts to short wavelengths and small amplitude undulations from the slider length to surface roughness. Further, when the magnetic head slider moves in the seek (radial) direction for recording / reproducing in another area of the magnetic recording medium, a moment in the rolling (lateral) direction acts on the slider. Therefore, the slider has three degrees of freedom in the vertical direction, pitching (front-back) direction, and rolling (lateral) direction so that the slider can follow undulations of all wavelengths and amplitudes and is dynamically stable even in the seek direction. It is a slider / support system that exerts a restoring force on the movement of.

【0004】さらに、エレクトロニック デザイン(El
ectronic Design,5,March,1,1980年,60〜
63ページ)に論じられているような、磁界を印加した
り、残留磁界を検出する磁気トランスデューサが最小な
浮上量となりうる一方のスライダレールの流出端側面
に、薄膜素子としてリソグラフィ技術で形成されてい
る。
In addition, electronic design (El
ectronic Design, 5, March, 1980, 60-
A magnetic transducer for applying a magnetic field or detecting a residual magnetic field, as discussed on page 63), is formed as a thin film element by a lithographic technique on the side of the outflow end of one of the slider rails that can minimize the flying height. There is.

【0005】従来の磁気ヘッドスライダの支持体は、特
開昭55−22296 号公報に記載されたように、段状をなす
低可撓性横枠によって互いに連結される二つの外側可撓
性指部を形成する矩形切欠部と、横枠から矩形切欠部へ
向けて延設される可撓性中央舌状部とを有する可撓体で
あるジンバル部と、ジンバル部を支持する弾性部と荷重
用ビーム部を兼用した部材と、兼用部材と中央舌状部と
の間に設置された荷重用突起部とを具備している。これ
らの構成によって、荷重用ビーム部から荷重用突起部を
介して加えられた所定の荷重と空気力学的に発生する浮
上力との釣り合いを保持している。同時に、磁気ヘッド
スライダに直接あるいは空気膜を介して外乱及びモーメ
ントが作用した場合に記録媒体面と接触しないように、
荷重用突起部を支点として、スライダを上下,ピッチン
グ,ローリングの三自由度の動きを可能にしている。
The conventional magnetic head slider support has two outer flexible fingers connected to each other by a stepped low-flexible lateral frame, as described in Japanese Patent Laid-Open No. 55-22296. A gimbal portion that is a flexible body having a rectangular cutout portion that forms a portion and a flexible central tongue portion that extends from the horizontal frame toward the rectangular cutout portion, an elastic portion that supports the gimbal portion, and a load. It has a member that also serves as a beam member for use, and a load projection that is installed between the member for dual use and the central tongue. With these configurations, the balance between the predetermined load applied from the load beam portion via the load projection portion and the aerodynamically generated levitation force is maintained. At the same time, when disturbance or moment acts on the magnetic head slider directly or through an air film, it should not come into contact with the surface of the recording medium.
With the load protrusion as a fulcrum, the slider can be moved in three degrees of freedom: vertical movement, pitching, and rolling.

【0006】最近の磁気ディスク装置の高性能化に対す
る要求は高記録密度化及び記録媒体の小径化である。そ
れらの磁気ヘッドスライダに対する要求は、スライダ寸
法を極力小さくして、かつ浮上量を微小化することであ
る。特に記録媒体と接触状態を保持させながら記録再生
する場合、磁気トランスデューサと記録媒体面とのすき
まがほぼ無くなり記録密度は飛躍的に向上する。
Recent demands for higher performance of magnetic disk devices include higher recording density and smaller recording media. The requirements for these magnetic head sliders are to minimize the slider size and to reduce the flying height. In particular, when recording and reproducing while keeping the contact state with the recording medium, the gap between the magnetic transducer and the recording medium surface is almost eliminated, and the recording density is dramatically improved.

【0007】磁気トランスデューサギャップ部が記録媒
体面上で安定に接触走行を保持させるには、記録媒体と
の間に空気膜が形成されないようにすることと、押付荷
重を微小にすることなどが必要である。押付荷重を微小
化することによって、接触面に常に作用する摩擦力によ
る摩耗を極力抑えることが可能となる。また媒体面に存
在するうねりに接触を保持しながら追従するため生じる
荷重変動を小さくするには支持体の荷重用ビーム部の上
下方向に対する剛性を小さくすることである。例えば、
押付荷重10mgf、荷重変動量±1mgf(10%)以下が
目標仕様の場合、従来の記録媒体面うねりの最大振幅は
10μm程度なので、荷重用ビーム部の上下方向に対す
る剛性の目標は0.1gf/mm 以下となる。また、摩擦力
によるピッチング方向のモーメントによってスライダが
ピッチング変動し、さらにシーク方向に移動する場合、
ローリング変動が加わり、間欠接触するため、荷重用ビ
ーム部のピッチング・ローリング方向に対する剛性は大
きくする必要がある。
In order for the magnetic transducer gap portion to maintain stable contact travel on the surface of the recording medium, it is necessary to prevent an air film from being formed between the magnetic transducer gap portion and the recording medium and to reduce the pressing load. Is. Minimizing the pressing load makes it possible to minimize wear due to the frictional force that constantly acts on the contact surface. Further, in order to reduce the load variation caused by following the swell existing on the medium surface while keeping the contact, it is necessary to reduce the rigidity of the support beam portion in the vertical direction. For example,
When the target specifications are a pressing load of 10 mgf and a load fluctuation amount of ± 1 mgf (10%) or less, the maximum amplitude of the conventional recording medium surface waviness is about 10 μm, so the target of the vertical rigidity of the loading beam is 0.1 gf / mm or less. Also, when the slider fluctuates in pitching due to the moment in the pitching direction due to frictional force and moves in the seek direction,
Since rolling fluctuations are added and intermittent contact occurs, it is necessary to increase the rigidity of the load beam portion in the pitching and rolling directions.

【0008】従来の浮上用支持体を接触走行に使用した
場合、従来の支持体の荷重は10gf程度に設計されてい
るために、荷重用ビーム部を長くして極力薄く設計する
ことになるが、同時にピッチング・ローリングに対する
剛性も小さくなる。
When the conventional levitation support is used for contact traveling, the load of the conventional support is designed to be about 10 gf, so that the beam part for loading is designed to be as long as possible and thin. At the same time, the rigidity against pitching and rolling is also reduced.

【0009】1990年電子情報通信学会秋季全国大会
予講集SC−5−1,5−268ペ−ジに記載されてい
る、接触走行しながら記録再生する方式は、主磁極励磁
形の単磁極ヘッドを上下に自由にスライドする可動部の
先端に取り付け、自重あるいはばねで可動部の先端を押
して支えている。ピッチング・ローリング方向に対して
は完全に剛であるが、押付荷重が1.8gf と大きいた
め、記録媒体面及びスライダ面の摩耗量が無視できなく
なり、この方式はMTBF50万時間を保証する磁気デ
ィスク装置には適用できない可能性がある。
The method of recording and reproducing while running in contact, which is described in the Preliminary Lecture of the National Conference of the Institute of Electronics, Information and Communication Engineers, Autumn Meeting, SC-5-1, 5-268, is a main magnetic pole excitation type single magnetic pole. The head is attached to the tip of the movable part that slides up and down, and the tip of the movable part is pushed and supported by its own weight or a spring. Although it is completely rigid in the pitching and rolling directions, the pressing load is as large as 1.8 gf, so the amount of wear on the recording medium surface and slider surface cannot be ignored. This method guarantees MTBF of 500,000 hours. May not be applicable to device.

【0010】アイ イー イー イー トランザクショ
ンズ オン マグネティクス(IEEETrans.MAG.),M
AG−27,6(1991)4921ページに記載され
ている前述の方式は、無潤滑の記録媒体面上で磁気トラ
ンスデューサ・スライダ・荷重ビーム・リード線を一体
化した超小型ヘッドを接触走行させる方式である。この
方式では超軽荷重(1mgf 以下)であるために記録媒体
及びスライダの摩耗量を微小化できるが、荷重ビームの
ローリング方向の剛性が小さいため、高速にシークする
とスライダがローリング変動したり過大な摩擦力が作用
し、記録媒体面が損傷する磁気ディスク装置の信頼性が
劣化するという問題が生ずる。またマイクロメカトロニ
クス,リソグラフィ技術を適用して製造するため製造プ
ロセスが複雑でかつ高コストとなる。
IE Transactions on Magnetics (IEEETrans.MAG.), M
The above-mentioned method described on page 4921 of AG-27,6 (1991) is a method of contact-traveling an ultra-compact head in which a magnetic transducer, slider, load beam and lead wire are integrated on an unlubricated recording medium surface. Is. With this method, the amount of wear of the recording medium and slider can be reduced because of the ultra-light load (1 mgf or less), but since the rigidity of the load beam in the rolling direction is small, the slider fluctuates or becomes excessive if the seek is performed at high speed. A frictional force acts and the surface of the recording medium is damaged, which causes a problem that reliability of the magnetic disk device deteriorates. In addition, the manufacturing process is complicated and costly because it is manufactured by applying micromechatronics and lithography technology.

【0011】[0011]

【発明が解決しようとする課題】上記従来の接触走行し
ながら記録再生する方式の磁気ヘッドスライダ及びその
支持体では、記録媒体面及びスライダ面の摩耗量を微小
化し、かつ高速回転,高速シークしながら安定な接触状
態を保持させるのは難しく、かつ製造過程が複雑でかつ
高コストとなる。
In the above-described conventional magnetic head slider of the system for recording / reproducing while traveling in contact, and its support, the amount of wear on the surface of the recording medium and the surface of the slider is minimized, and high speed rotation and high speed seek are performed. However, it is difficult to maintain a stable contact state, and the manufacturing process is complicated and costly.

【0012】本発明の目的は、接触走行しながら記録再
生する方式の磁気ヘッドスライダ及びその支持体におい
て、記録媒体面及びスライダ面の摩耗量を微小化し、か
つ高速回転・高速シークしながら磁気トランスデューサ
ギャップ部が記録媒体面上で安定な接触状態を保持させ
ることである。
An object of the present invention is to reduce the amount of wear of the recording medium surface and the slider surface in a magnetic head slider and its support for recording / reproducing while traveling in contact, and to perform magnetic rotation while performing high speed rotation / high speed seek. The gap portion is to maintain a stable contact state on the surface of the recording medium.

【0013】本発明の他の目的は、接触走行しながら記
録再生する方式の磁気ヘッドスライダ及びその支持体の
製造プロセスを簡単にかつ低コストで製造する製造方法
を提供することにある。
Another object of the present invention is to provide a manufacturing method for manufacturing a magnetic head slider of a system of recording / reproducing while traveling in contact and a supporting body thereof easily and at low cost.

【0014】[0014]

【課題を解決するための手段】走行方向に対しては空気
軸受面になりにくく、シーク時には空気軸受面になり得
るスライダ面、例えば、磁気ヘッドスライダにおいてシ
ーク方向の長さが走行方向に比べて長いスライダ面にフ
ラット部とテーパ部を設けることで解決できる。さら
に、前記磁気ヘッドスライダの支持体において、ピッチ
ング方向の剛性の方を上下方向に比べて大きく、望まし
くは百倍以上大きくすることで優れた高速シーク性能を
提案できる。荷重用ビーム部を二枚平行に重ね、前記二
枚の荷重用ビーム部間の端部に磁気ヘッドスライダを挾
み込み接着し、固定端とすることで、容易に本性能が実
現できる。該荷重用ビーム部の間に、固体潤滑剤、もし
くは液体潤滑剤を充填することで信頼性を向上できる。
本スライダ及びスライダ支持体を使用することで、高速
回転高速シーク性に優れた磁気ディスク装置を提供でき
る。
A slider surface which is unlikely to become an air bearing surface in the running direction and which can become an air bearing surface at the time of seek, for example, in a magnetic head slider, the length in the seek direction is shorter than that in the running direction. The problem can be solved by providing a flat portion and a tapered portion on the long slider surface. Further, in the support of the magnetic head slider, it is possible to propose excellent high-speed seek performance by increasing the rigidity in the pitching direction as compared with the rigidity in the vertical direction, preferably 100 times or more. This performance can be easily realized by stacking two load beam portions in parallel and by sandwiching and adhering the magnetic head slider to the end portion between the two load beam portions to form a fixed end. Reliability can be improved by filling a solid lubricant or a liquid lubricant between the load beam portions.
By using this slider and the slider support, it is possible to provide a magnetic disk device excellent in high-speed rotation and high-speed seekability.

【0015】[0015]

【作用】走行方向に対してはスライダ長が短いために浮
上力が発生しにくく、記録媒体面と常に接触可能とな
る。シーク方向に対してはテーパ部とフラット部とによ
って空気軸受面が形成されるので、僅かに空気浮上し
て、スムーズに移動可能となる。
Since the slider length is short with respect to the running direction, the levitation force is unlikely to be generated, and the recording medium surface can always be contacted. In the seek direction, the air bearing surface is formed by the taper portion and the flat portion, so that the air is slightly floated and can be moved smoothly.

【0016】荷重用ビーム部の二枚平行で両端固定端の
一端を固定し、もう一端に荷重を加えた場合は長手方向
に引張・圧縮応力が作用し、モーメントが加わった場合
は厚さ方向に曲げ応力が作用する。曲げ応力による撓み
量は引張・圧縮応力に比べて大きいため、荷重用ビーム
部のピッチング方向の剛性の方が上下方向に比べて大き
くなる。したがって、荷重用ビーム部は、一方の固定端
とスライダ面とが常に平行になるように撓むので、記録
再生素子部が安定して媒体面で接触するため、優れた記
録再生特性を安定して得ることができる。
When two ends of the beam portion for loading are fixed in parallel and one end of both ends is fixed and a load is applied to the other end, tensile / compressive stress acts in the longitudinal direction, and when a moment is applied, in the thickness direction. Bending stress acts on. Since the amount of bending due to bending stress is larger than the tensile / compressive stress, the rigidity of the loading beam portion in the pitching direction is larger than that in the vertical direction. Therefore, the load beam portion bends so that one fixed end and the slider surface are always parallel to each other, and the recording / reproducing element portion stably contacts with the medium surface, so that excellent recording / reproducing characteristics are stabilized. Can be obtained.

【0017】[0017]

【実施例】以下、本発明の実施例を図1により説明す
る。図1に本発明の実施例の磁気ヘッドスライダ及びそ
の支持体を示す。磁気ヘッドスライダ1に、フラット部
1aとテーパ部1bを設け、フラット部1aの側面に磁
気トランスデューサ1cを搭載する。スライダ1が走行
方向に対してはフラット部1aで記録媒体面と接触状態
を保持し、シーク方向ではフラット部1aとテーパ部1
bで僅かに浮上させる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. FIG. 1 shows a magnetic head slider and its support according to an embodiment of the present invention. The magnetic head slider 1 is provided with a flat portion 1a and a taper portion 1b, and a magnetic transducer 1c is mounted on the side surface of the flat portion 1a. The slider 1 keeps contact with the surface of the recording medium at the flat portion 1a in the traveling direction, and the flat portion 1a and the taper portion 1 in the seek direction.
Slightly levitate with b.

【0018】磁気ヘッドスライダの支持体2は、平行な
二枚の荷重用ビーム部2a,2b,スペーサ2cから構
成されている。荷重が常に加わった状態にするために、
荷重用ビーム部2a,2bはあらかじめ撓ませ、一方の
固定端にはスライダ1が挾み込んである。
The support 2 of the magnetic head slider is composed of two parallel load beam portions 2a and 2b and a spacer 2c. In order to keep the load applied,
The load beam portions 2a and 2b are preliminarily bent, and the slider 1 is sandwiched at one fixed end.

【0019】平行に二枚重ねた荷重用ビーム部の上下方
向に対する剛性K(gf/mm)、ピッチング方向に対する
剛性Km(gf/mm)を次式に示す。
The rigidity K (gf / mm) in the vertical direction and the rigidity K m (gf / mm) in the pitching direction of the two load beam portions that are stacked in parallel are shown in the following equations.

【0020】[0020]

【数1】 [Equation 1]

【0021】ただし、スライダ1の長さをc(mm)、一
枚の荷重用ビーム部の長さ,厚さをそれぞれL(mm),
h(mm)、荷重用ビーム部のスライダ1側,スペーサ2
c側の固定端幅をそれぞれb1(mm),b2(mm)、荷重
用ビーム部2a,2b間距離をa(mm)、支持体2の材
質の縦弾性係数をE(gf/mm2 )とする。以下、本発明
の実施例の磁気ヘッドスライダの支持体の設計指針を示
す。
However, the length of the slider 1 is c (mm), and the length and thickness of one load beam portion are L (mm), respectively.
h (mm), slider 1 side of beam section for load, spacer 2
The fixed end widths on the c side are b 1 (mm) and b 2 (mm), the distance between the load beam portions 2a and 2b is a (mm), and the longitudinal elastic modulus of the material of the support 2 is E (gf / mm). 2 ) The design guideline for the support of the magnetic head slider of the embodiment of the present invention will be shown below.

【0022】3.5インチから2.5インチ、1.8イン
チ型のハード・ディスク装置(HDD)に搭載するため
に、本発明の実施例の磁気ヘッドスライダの支持体を機
械加工のし易さ,加工精度の観点から可能な限りコンパ
クトに設計した。荷重用ビーム部2a,2b間の距離a
は、大きくすると上下方向に対するピッチング方向の剛
性の比K/Km は増加する。しかし、ディスクが数枚実
装されている従来の前記装置のディスク間距離は約3.
0mm であり、そこにアップタイプ,ダウンタイプのヘ
ッドを搭載することを考慮し、距離aを1.0mm に選定
した。スライダ1の長さcは、支持体全体をコンパクト
にするために極力小さくしたいが、荷重用ビーム部2
a,2bとの接着面を含んでいるため4.0mm とした。
The magnetic head slider support of the embodiment of the present invention can be easily machined so as to be mounted on a hard disk device (HDD) of 3.5 inch to 2.5 inch, 1.8 inch type. From the standpoint of processing accuracy, the design is as compact as possible. Distance a between the load beam portions 2a and 2b
The ratio K / K m in the pitching direction of the rigidity against vertical direction is increased is increased. However, the distance between the disks of the conventional device in which several disks are mounted is about 3.
The distance a was set to 1.0 mm in consideration of mounting an up-type head and a down-type head on it. The length c of the slider 1 is desired to be as small as possible in order to make the entire support compact, but the load beam portion 2
Since it includes the adhesive surface with a and 2b, it was set to 4.0 mm.

【0023】荷重用ビーム部のスペーサ2c側の固定端
幅b2 については、従来の装置に搭載されている支持体
と同程度の4.0mm にした。スペーサ2c側の固定端幅
1は、磁気トランスデューサ1cを搭載可能で、かつ
シーク時に空気膜が形成するためにはある程度長くする
必要があるが、長くなるとねじり剛性が増加し、シーク
時のスライダが動きにくくなるため、2.0〜3.0mmと
選定した。
The fixed end width b 2 of the load beam portion on the side of the spacer 2c is set to 4.0 mm, which is about the same as that of the support mounted in the conventional apparatus. The fixed end width b 1 on the side of the spacer 2c needs to be long to some extent so that the magnetic transducer 1c can be mounted and an air film is formed at the time of seek, but if it becomes long, the torsional rigidity increases and the slider at the time of seek Since it becomes difficult to move, we chose 2.0-3.0 mm.

【0024】荷重用ビーム部の長さLは長くすると上下
方向の剛性Kは小さくなるが、荷重用ビーム部の固有振
動数が低下し、浮上安定性が悪化する。また、荷重用ビ
ーム部の厚さhは薄くなると上下方向の剛性Kは小さく
なるが、薄すぎても耐久性に問題が生じる。そこで、一
枚の荷重用ビーム部の厚さhを0.01mm 以上,0.04mm
以下の設計範囲として、設計仕様が押付荷重10mgf 以
下、荷重変動量±1mgf以内(10%)、荷重用ビーム
部の上下方向に対する剛性Kが0.1gf/mm以下となる
Lを数1を用いて計算した結果を表1に示す。ただし、
支持体2の材質は従来の安定浮上用支持体で使用してい
る材質と同様なステンレス鋼とした。
When the length L of the load beam portion is increased, the vertical rigidity K is reduced, but the natural frequency of the load beam portion is reduced, and the floating stability is deteriorated. Further, if the thickness h of the load beam portion becomes thin, the vertical rigidity K becomes small, but if it is too thin, durability will be a problem. Therefore, the thickness h of one load beam part should be 0.01 mm or more and 0.04 mm.
As the following design range, use the formula 1 in which the design specifications are such that the pressing load is 10 mgf or less, the load fluctuation amount is within ± 1 mgf (10%), and the vertical rigidity K of the loading beam part is 0.1 gf / mm or less. Table 1 shows the result of the calculation. However,
The material of the support 2 was the same stainless steel as that used in the conventional support for stable levitation.

【0025】[0025]

【表1】 [Table 1]

【0026】表1より、一枚の荷重用ビーム部の厚さh
の設計範囲が0.01mm 以上、0.04mm以下の場合、荷重
用ビーム部の長さLは10.0mm以上、38.0mm以下と
なった。従来の前述の装置に搭載されている荷重用ビー
ム部の長さは約20.0mm のため、本発明の実施例の磁
気ヘッドスライダの支持体は従来の前述の装置に搭載可
能となる。
From Table 1, the thickness h of one load beam portion is shown.
When the design range is 0.01 mm or more and 0.04 mm or less, the length L of the beam portion for loading is 10.0 mm or more and 38.0 mm or less. Since the length of the load beam portion mounted on the above-mentioned conventional device is about 20.0 mm, the support body of the magnetic head slider of the embodiment of the present invention can be mounted on the above-mentioned conventional device.

【0027】表1に示す形状寸法の支持体を作製するこ
とによって、荷重用ビーム部の上下方向の剛性を0.1g
f/mm程度 に、ピッチング方向の剛性を上下方向に比べ
て百倍以上大きくできた。
By producing a support having the shape and dimensions shown in Table 1, the vertical rigidity of the load beam portion is 0.1 g.
The rigidity in the pitching direction has been increased by a factor of 100 or more compared to the vertical direction at f / mm.

【0028】(実施例2)図2に、本発明の実施例の磁
気ヘッドスライダ及びその支持体と記録媒体,回転駆動
系,ヘッド,シーク系,記録再生系から構成されてい
る、本発明より成る磁気ディスク装置の実施例を示す。
図では記録媒体3に接触した状態で本発明のヘッドスラ
イダが走行及びシークしている状態の平面図及び側面図
を示す。支持体2で記録媒体3に押し付ける荷重は、支
持体2を取付基準面4と記録媒体3との取付高さHで調
整する。取付高さHは押付荷重による撓みに初期撓み,
フラット部の高さを加える。ただし、自重による撓みが
あるため、アップタイプ及びダウンタイプで初期撓みを
それぞれ調整する必要がある。本装置により、MTBF
50万時間を保証できた。
(Embodiment 2) FIG. 2 shows a magnetic head slider according to an embodiment of the present invention and its support, a recording medium, a rotary drive system, a head, a seek system, and a recording / reproducing system. An embodiment of the magnetic disk device will be shown.
In the drawing, a plan view and a side view of a state where the head slider of the present invention is running and seeking while in contact with the recording medium 3 are shown. The load applied to the recording medium 3 by the support 2 is adjusted by the mounting height H of the support reference surface 4 and the recording medium 3. The mounting height H is the initial deflection due to the deflection due to the pressing load,
Add the height of the flat part. However, since there is a deflection due to its own weight, it is necessary to adjust the initial deflection for the up type and the down type, respectively. With this device, MTBF
I was able to guarantee 500,000 hours.

【0029】(実施例3)押付荷重・摩擦力を微小化し
ても、摩耗は避けられない。発生した摩耗粉がスライダ
1と記録媒体3との間に侵入すると、接触状態が保持で
きなくなる。
(Embodiment 3) Wear is inevitable even if the pressing load and frictional force are reduced. If the generated abrasion powder enters between the slider 1 and the recording medium 3, the contact state cannot be maintained.

【0030】図3に摩耗粉侵入防止用の本発明の別の実
施例の磁気ヘッドスライダ10を示す。図3に示すよう
に、スライダ面はフラット部10a,テーパ部10b,1
0cから構成されており、フラット部10aを5角形に
することにより、走行方向から微小な摩耗粉が侵入しよ
うとしてもフラット部10aの側面10d,10eから
外側に排除される。このため、本構造により耐摺動信頼
性が一桁以上向上できた。また、側面10d,10eの
切削作用によって、記録媒体面に存在する微小突起がバ
ニッシュされるため、記録媒体面を平滑化できる効果も
あり、高再生出力が得られた。
FIG. 3 shows a magnetic head slider 10 according to another embodiment of the present invention for preventing abrasion dust intrusion. As shown in FIG. 3, the slider surface has a flat portion 10a, a tapered portion 10b, 1
0c, and by making the flat portion 10a pentagonal, even if minute abrasion powder tries to enter from the running direction, it is removed outside from the side surfaces 10d and 10e of the flat portion 10a. Therefore, this structure can improve the sliding resistance by one digit or more. Further, since the minute projections existing on the surface of the recording medium are burnished by the cutting action of the side surfaces 10d and 10e, there is an effect that the surface of the recording medium can be smoothed and a high reproduction output can be obtained.

【0031】(実施例4)図4に本発明の実施例の磁気
ヘッドスライダ及びその支持体の製造方法を示す。
(Embodiment 4) FIG. 4 shows a method of manufacturing a magnetic head slider and its support according to an embodiment of the present invention.

【0032】磁気トランスデューサ1cを搭載したブ
ロックを従来の機械加工法でフラット部1aとテーパ部
1bを加工して、スライダ1を製造する。媒体面の微小
なうねりに接触を保持しながら追従させるために、従来
の記録媒体3の面に存在する最小のうねり振幅は±0.
5nm 程度なので、フラット部1aの中心線平均面粗
さRa を0.5nm 以下にする。
The slider 1 is manufactured by processing the flat portion 1a and the tapered portion 1b of a block having the magnetic transducer 1c mounted thereon by a conventional machining method. The minimum waviness amplitude existing on the surface of the conventional recording medium 3 is ± 0.
Because about 5 nm, the central line average surface roughness R a of the flat portion 1a to 0.5nm or less.

【0033】荷重用ビーム部2a,2b、スペ−サ2
cを従来の機械加工法で製造する。
Load beam portions 2a and 2b, spacer 2
c is manufactured by conventional machining methods.

【0034】荷重用ビーム部2a,2bを平行に重
ね、両端をスライダ1及びスペーサ2cで挾み込み接着
する。
The load beam portions 2a and 2b are piled up in parallel, and both ends are sandwiched and bonded by the slider 1 and the spacer 2c.

【0035】二枚の荷重用ビーム部2a,2bを撓ま
せる。
The two load beam portions 2a and 2b are bent.

【0036】図5に一体化した本発明の実施例の磁気ヘ
ッドスライダ及びその支持体5を示す。従来の放電加工
及びレーザ加工によって、スライダ・支持体を一体化し
て製造した場合は、以上に示す製造方法に比べて製造プ
ロセスがさらに簡略化できた。
FIG. 5 shows the integrated magnetic head slider and its support 5 of the present invention. When the slider and the support are integrally manufactured by conventional electric discharge machining and laser machining, the manufacturing process can be further simplified as compared with the manufacturing method described above.

【0037】さらに、平行に二枚重ねた荷重用ビーム部
の間に、二流化モリブデン,カーボンなどの固体潤滑
剤、あるいはその他の液体潤滑剤を充填することによっ
て、二枚の荷重用ビーム部同士の摩擦による摩耗粉発生
の防止や、支持体の曲げ振動を円滑化できた。
Further, by filling a solid lubricant such as molybdenum difluide or carbon or another liquid lubricant between the two parallel load beam portions, the friction between the two load beam portions is increased. It was possible to prevent abrasion powder from being generated and smooth the bending vibration of the support.

【0038】[0038]

【発明の効果】本発明によれば、記録媒体面及びスライ
ダ面の摩耗量を微小化し、かつ高速回転・高速シークし
ながら安定な接触状態を保持させることが可能となり、
接触走行しながら記録再生する方式で高密度化,高信頼
性化,低コスト性に優れた磁気ヘッドスライダ及びその
支持体及びその製造方法及び磁気ディスク装置を提供す
ることができる。
According to the present invention, it is possible to minimize the amount of wear on the recording medium surface and the slider surface, and to maintain a stable contact state while rotating at high speed and seeking at high speed.
It is possible to provide a magnetic head slider, a support therefor, a method of manufacturing the same, and a magnetic disk device which are excellent in high density, high reliability, and low cost by a method of recording and reproducing while traveling in contact.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例の磁気ヘッドスライダ及びその
支持体を示す斜視図。
FIG. 1 is a perspective view showing a magnetic head slider and its support according to an embodiment of the invention.

【図2】本発明の実施例の磁気ヘッドスライダ及びその
支持体が記録媒体に接触走行している状態の説明図。
FIG. 2 is an explanatory diagram showing a state in which a magnetic head slider and its support according to an embodiment of the present invention are in contact with a recording medium and traveling.

【図3】摩耗粉侵入防止用の本発明の実施例の磁気ヘッ
ドスライダを示す斜視図。
FIG. 3 is a perspective view showing a magnetic head slider according to an embodiment of the present invention for preventing abrasion dust intrusion.

【図4】本発明の実施例の磁気ヘッドスライダ及びその
支持体の製造方法を示す説明図。
FIG. 4 is an explanatory diagram showing a method of manufacturing a magnetic head slider and its support according to an embodiment of the present invention.

【図5】本発明の実施例の磁気ヘッドスライダ及びその
支持体を一体化した斜視図。
FIG. 5 is a perspective view in which the magnetic head slider of the embodiment of the invention and its support are integrated.

【符号の説明】[Explanation of symbols]

1…磁気ヘッドスライダ、1a…フラット部、1b…テ
ーパ部、1c…磁気トランスデューサ、2…磁気ヘッド
スライダの支持体、2a,2b…荷重用ビーム部、2c
…スペーサ、2c…スペーサ、c…スライダ1の長さ、
L…荷重ビーム部の長さ、b1 …荷重用ビーム部のスラ
イダ1側の固定端の幅、b2 …荷重用ビーム部のスペー
サ2c側の固定端の幅、h…荷重用ビーム部2b,2b
の厚さ、a…荷重用ビーム部2b,2b間距離。
DESCRIPTION OF SYMBOLS 1 ... Magnetic head slider, 1a ... Flat part, 1b ... Tapered part, 1c ... Magnetic transducer, 2 ... Magnetic head slider support body, 2a, 2b ... Loading beam part, 2c
... spacer, 2c ... spacer, c ... length of slider 1,
L ... Length of load beam part, b 1 Width of fixed end of load beam part on slider 1 side, b 2 Width of fixed end of load beam part on spacer 2c side, h ... Load beam part 2b , 2b
, A ... Distance between the load beam portions 2b and 2b.

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】磁気記録媒体に信号の記録あるいは再生可
能な磁気トランスデューサを搭載し、回転する前記磁気
記録媒体の面上で接触あるいは間欠接触走行しながら記
録再生し前記磁気記録媒体の別の領域に記録あるいは再
生するために移動する磁気ヘッドスライダにおいて、走
行方向に対して、前記磁気記録媒体面上で空気軸受面に
なりにくいスライダ面を設け、前記磁気記録媒体の別の
領域に記録あるいは再生するために移動する場合に、空
気軸受面になりうるスライダ面を設けたことを特徴とす
る磁気ヘッド。
1. A magnetic recording medium is provided with a magnetic transducer capable of recording or reproducing a signal, and recording / reproduction is performed while traveling or contacting intermittently on the surface of the rotating magnetic recording medium, and another area of the magnetic recording medium. In a magnetic head slider that moves for recording or reproduction, a slider surface that does not easily become an air bearing surface on the magnetic recording medium surface in the traveling direction is provided, and recording or reproduction is performed in another area of the magnetic recording medium. A magnetic head provided with a slider surface which can be an air bearing surface when the magnetic head is moved to move.
【請求項2】磁気記録媒体に信号の記録あるいは再生可
能な磁気トランスデューサを搭載し、回転する前記磁気
記録媒体の面上で接触あるいは間欠接触走行しながら記
録再生し前記磁気記録媒体の別の領域に記録あるいは再
生するために移動する磁気ヘッドスライダに荷重を加え
る荷重用ビーム部を設けた磁気ヘッドスライダの支持体
において、ピッチング方向の剛性を上下方向の剛性に比
べて極端に大きくしたことを特徴とする磁気ヘッドスラ
イダの支持体。
2. A magnetic recording medium is provided with a magnetic transducer capable of recording or reproducing a signal, and recording / reproducing is performed while traveling or contacting intermittently on the surface of the rotating magnetic recording medium, and another area of the magnetic recording medium. In a support of a magnetic head slider provided with a load beam portion for applying a load to a magnetic head slider that moves for recording or reproducing, the rigidity in the pitching direction is made extremely larger than the rigidity in the vertical direction. And a magnetic head slider support.
【請求項3】請求項1において、長手方向が前記磁気記
録媒体の別の領域に記録あるいは再生するために移動す
る方向と同一であるスライダ面にフラット部とテーパ部
とを設けた磁気ヘッドスライダ。
3. A magnetic head slider according to claim 1, wherein a flat portion and a taper portion are provided on a slider surface whose longitudinal direction is the same as a moving direction for recording or reproducing in another area of the magnetic recording medium. .
【請求項4】請求項2において、ピッチング方向の剛性
が上下方向の剛性の百倍以上大きくした磁気ヘッドスラ
イダの支持体。
4. A magnetic head slider support according to claim 2, wherein the rigidity in the pitching direction is 100 times greater than the rigidity in the vertical direction.
【請求項5】請求項2において、前記荷重用ビーム部を
二枚平行に重ね、前記二枚の荷重用ビーム部間の端部に
請求項1に記載の磁気ヘッドスライダを挾み込み接着し
固定端とした磁気ヘッドスライダの支持体。
5. The magnetic head slider according to claim 2, wherein the two load beam portions are overlapped in parallel, and the magnetic head slider according to claim 1 is sandwiched and bonded to an end portion between the two load beam portions. Support for magnetic head slider as fixed end.
【請求項6】請求項1に記載の磁気ヘッドスライダ及び
請求項5に記載の磁気ヘッドスライダの支持体におい
て、前記磁気ヘッドスライダと前記磁気ヘッドスライダ
の支持体を一体に製造した磁気ヘッドスライダ及びその
支持体の製造方法。
6. The magnetic head slider according to claim 1 and the support for the magnetic head slider according to claim 5, wherein the magnetic head slider and the support for the magnetic head slider are manufactured integrally. A method for manufacturing the support.
【請求項7】請求項1または2において、前記磁気ヘッ
ドスライダ及び前記磁気ヘッドスライダの支持体を使用
した磁気ディスク装置。
7. A magnetic disk device according to claim 1, wherein the magnetic head slider and a support for the magnetic head slider are used.
【請求項8】請求項3または5において、前記一枚の荷
重用ビーム部の厚さを0.01mm 以上、0.04mm 以下
で、前記荷重用ビーム部の長さを10.0mm以上、38.
0mm以下である磁気ヘッドスライダ及びその支持体。
8. The load beam portion according to claim 3 or 5, wherein the thickness of the load beam portion is 0.01 mm or more and 0.04 mm or less, and the length of the load beam portion is 10.0 mm or more, 38. .
A magnetic head slider of 0 mm or less and its support.
【請求項9】請求項3において、前記走行方向に対して
は前記磁気記録媒体面上で空気軸受面になりにくいスラ
イダ面を5角形の形状にした磁気ヘッドスライダ。
9. The magnetic head slider according to claim 3, wherein the slider surface, which is less likely to become an air bearing surface on the magnetic recording medium surface in the traveling direction, has a pentagonal shape.
【請求項10】請求項5において、前記二枚の荷重用ビ
ーム部間に固体潤滑剤あるいは液体潤滑剤を充填させた
磁気ヘッドスライダの支持体。
10. The magnetic head slider support according to claim 5, wherein a solid lubricant or a liquid lubricant is filled between the two load beam portions.
JP18246993A 1993-07-23 1993-07-23 Magnetic head and magnetic disk device Pending JPH0737231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18246993A JPH0737231A (en) 1993-07-23 1993-07-23 Magnetic head and magnetic disk device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18246993A JPH0737231A (en) 1993-07-23 1993-07-23 Magnetic head and magnetic disk device

Publications (1)

Publication Number Publication Date
JPH0737231A true JPH0737231A (en) 1995-02-07

Family

ID=16118813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18246993A Pending JPH0737231A (en) 1993-07-23 1993-07-23 Magnetic head and magnetic disk device

Country Status (1)

Country Link
JP (1) JPH0737231A (en)

Similar Documents

Publication Publication Date Title
US7375930B2 (en) Apparatus for PZT actuation device for hard disk drives
US8169745B2 (en) Head gimbal assembly having balanced weight, and disk drive unit with the same
US8213127B2 (en) Microactuator, head gimbal assembly, and magnetic disk drive
JP3139323B2 (en) Magnetic disk drive and slider
JPH04345978A (en) Magnetic head support mechanism for magnetic disk device, control method for its support mechanism, and magnetic disk device
US6914752B2 (en) Magnetic recording disk drive with continuous contact air-bearing slider
JP2001076413A (en) Head slider for flexible magnetic disk
JPH11213589A (en) Magnetic head slider supporting mechanism and magnetic disk device provided with the same
JPH0737231A (en) Magnetic head and magnetic disk device
JP2783231B2 (en) Contact magnetic disk drive
JP3033670B2 (en) Contact type magnetic disk drive
JP3045095B2 (en) Magnetic head support mechanism and method of assembling magnetic disk drive having the same
JP2571564B2 (en) Floating head slider support mechanism
JPS6085476A (en) Floating head mechanism
JP3687831B2 (en) Magnetic head support mechanism
JPH0823976B2 (en) Magnetic recording / reproducing device
JPS63234470A (en) Head slider supporting device
JP2757807B2 (en) Magnetic recording / reproducing device and magnetic head support mechanism
JPH08273318A (en) Magnetic memory device
JPH076539A (en) Magnetic head slider and magnetic storage device
JPH03219473A (en) Transducer supporting device
JP3966229B2 (en) Head support mechanism, head drive device, and disk device
JP3252828B2 (en) Magnetic disk drive
JP2007042190A (en) Slider and recording and reproducing apparatus provided therewith
JP2539075B2 (en) Magnetic recording / reproducing device