JP2007042190A - Slider and recording and reproducing apparatus provided therewith - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slider satisfying simultaneously that slider length is 4.06 mm or less, setting floating quantity is 1 to 5 μm, and difference of fly height from the most inner periphery to the most outer periphery is 1 μm or less. <P>SOLUTION: The slider is provided with an optical head which is attached to a pad being an air bearing plane by rotation of a recording disk and where a recording disk is irradiated with light from a light source, wherein the pad has a contact plane to come in contact with a recording plane of the recording disk when stopping rotation of the recording disk, and a two step plane formed at the rear part for the recording plane of air flow-in side of the contact plane. At the time, depth δs from the contact plane to a step plane of a first stage is in the range of 1 μm≤δs≤2.7 μm, and length Lx of the air flow-in direction being a longitudinal direction of the pad is in the range of 2.055 mm≤Lx≤3.2 mm. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a slider that floats and travels on the surface of a recording disk and a recording / reproducing apparatus including the slider, and in particular, a slider excellent in achieving high recording density and high reliability, and an optical disk device that mounts the slider or The present invention relates to a magnetic disk device.

  An information recording / reproducing apparatus using an optical disk as an optical information recording medium is known. This information recording / reproducing apparatus records and reads information signals with respect to an optical disc using an optical head equipped with an objective lens.

  2. Description of the Related Art As a means for high density recording of an optical disc, an optical disc apparatus using a slider provided with an objective lens is known. This slider generates a levitation force from the disk surface due to an increase in the pressure of the air flow caused by the high-speed rotation of the optical disk. When the slider balances with the pressing force that elastically presses the slider toward the disk surface, the levitation position is determined and Slightly floated state is maintained.

  However, conventionally, the set flying height of the slider on which the objective lens is mounted is required to have a high flying height of about 3 ± 2 μm (1 to 5 μm) in order to focus the objective lens on the disk surface. This flying height is about 100 times larger than the flying height of a magnetic slider used in a conventional magnetic disk apparatus of 30 nm or less.

  As a method for realizing such a high flying height of the slider, for example, a method in which the slider size is made larger than that of the conventional magnetic slider and the flying surface is made larger is conceivable. However, on the disk surface of the optical disk device, there is a runout with a wavelength larger than the slider length or a minute undulation about the slider length that is equal to or more than the disk surface of the magnetic disk device. When the slider length is increased, the followability of the slider with respect to these undulations decreases, so that data recorded when the slider comes into contact with the disk surface is destroyed, which may reduce the reliability of the optical disk.

  Therefore, in order to realize a flying height 100 times that of the conventional magnetic slider with a slider size comparable to that of the conventional magnetic slider, it is necessary to efficiently generate the maximum flying force with the minimum slider size. The lengths of conventional magnetic sliders that have been commercialized so far are 4.06 mm, 3.05 mm, 2.05 mm (nano size), and 1.25 mm (pico size), and must be at least smaller than 4.06 mm. There is.

  Also, such a flying slider is required to have a flying performance with a difference in flying height from the innermost circumference to the outermost circumference of the disk of 1 μm or less. In other words, a flying characteristic is required in which the flying height does not change with changes in peripheral speed. This is because the objective lens mounted on the slider is controlled by another objective lens, and if the flying height difference from the innermost circumference to the outermost circumference of the disk is 1 μm or more, recording / reproduction becomes difficult.

  For example, a taper surface is formed at the air inflow portion of a slider equipped with an objective lens, and an air flow generated by the rotation of the optical disk is guided between the head and the disk surface, and the pressure generated by the air flow is changed to the air flow of the head. A technique for floating a slider by a predetermined amount by acting on a bearing surface has been disclosed (see Patent Document 1).

  Further, the air bearing surface facing the magnetic disk is composed of a floating surface that comes into contact with the disk surface when the disk is stopped and a step surface formed rearward of the disk surface on the air inflow side of the floating surface. For example, a floating magnetic slider is disclosed in which the depth of the step surface with respect to the surface is less than 700 nm (see Patent Document 2). According to this configuration, the flying characteristics in which the flying height does not change with respect to the peripheral speed change are satisfied. However, since the set flying height is 100 nm or less, the flying height is too small to be used as a flying slider for use in an optical disk drive device.

  On the other hand, in order to put the ultra-thin optical disk medium into practical use, a stabilizer has been developed that reduces the surface vibration that occurs during high-speed rotation using the force of air. For example, a rod-like stabilizer having a spherical surface with a tip of a 20 mm diameter rod having a radius of 50 mm has been reported. By pressing this stabilizer against an ultra-thin optical disk medium having a thickness of 0.1 mm, surface deflection can be suppressed only in a narrow area of the disk surface where the air force generated at the tip of the stabilizer acts. Furthermore, by arranging a conventional fixed optical pickup having an objective lens on the opposite side of the disk area where the surface shake is reduced by the stabilizer, recording / reproduction on the surface of the ultra-thin optical disk medium is enabled (Non-Patent Document 1). reference).

  In addition, the two bearing surfaces formed on both sides of the slider and the bearing surface directly below the slider function as a stabilizer, and the flexible disk near the slider is supported by the positive pressure generated on these three bearing surfaces. A technique for reducing the surface runout of the flexible disk near the slider pole has been reported. According to this, since the flying gap is 0.8 μm to 6 μm, it is considered that the runout of the flexible disk near the slider pole is at least 10 μm or less (see Non-Patent Document 2).

  Further, in order to realize a high recording density of the magnetic disk device and a low flying height of the magnetic slider, for example, a first slider mounted with a magnetic head having a flying surface that can be an air bearing surface, and a first slider A two-rail second slider having a larger air bearing surface, and the first slider is attached to the second slider via a support member so as to be movable in a direction perpendicular to the air bearing surface. A magnetic slider is disclosed (see Patent Document 3). According to this, it is possible to reduce the flying height variation by the second slider to ensure stable flying, and to realize recording and reproduction by moving the first slider low.

JP-A-5-266529 JP-A-6-325530 JP-A-4-14687 International Symposium on Optical Memory 2003, “Technical Digest”, “High density Recording on Air Stabilizer Flexible Optical Disk”, p96. Proceedings of the 1987 Fall Meeting of the Japan Society for Precision Engineering, p609-612

  However, although the conventional flying type slider satisfies the flying characteristics in that the change in the flying height is small with respect to the change in the peripheral speed, the flying height set is 100 nm or less. Can not be used as.

  Further, since the conventional stabilizer is not supported by a flexible member such as a support of a magnetic slider, the stabilizer is translated (up and down), pitch (front and back), It cannot move following the roll (seek) direction. For this reason, when the stabilizer is brought closer to the surface of the ultra-thin optical disk medium, the aerodynamic force generated between the two becomes larger, and the effect of the stabilizer to reduce the surface shake of the surface of the ultra-thin optical disk medium increases. Therefore, there is a problem that it is easy to come into contact with the disk medium surface. Further, since the conventional stabilizer is provided on at least one of the disk medium surfaces, the recording capacity of the optical disk apparatus may be halved compared to the case where the conventional stabilizer is provided on both surfaces.

  For example, in the case of the stabilizer of Patent Document 3, the support member that supports the first slider can move following the translational direction of the surface vibration of the ultrathin optical disk medium surface, but the pitch, low It cannot move following the direction. Further, since the set flying height of the first slider is around 100 nm, it cannot be used for a flying slider mounted on an optical disk drive device.

  It is a first object of the present invention to provide a slider having a slider length of 4.06 mm or less, a set flying height of 1 to 5 μm, and a flying height difference from the innermost circumference of the disk to the outermost circumference of 1 μm or less simultaneously. .

  It is a second object of the present invention to provide a recording / reproducing apparatus equipped with a slider that suppresses surface deflection of the recording disk and has a restoring force with respect to translation, pitch, and roll motion. .

  In order to solve the first problem, the present invention provides a pad serving as an air bearing surface that receives the pressure of an air flow accompanying rotation of a recording disk, and the recording disk is irradiated with light from a light source attached to the pad. The pad includes a contact surface that contacts the recording surface of the recording disk when rotation of the recording disk stops, and a step surface and a recess that are sequentially formed behind the recording surface on the air inflow side of the contact surface. And the depth from the contact surface to the step surface is δs, the range of the condition of 1 μm ≦ δs ≦ 2.7 μm is satisfied. In this case, it is in a range satisfying the condition of 2.05 mm ≦ Lx ≦ 3.2 mm.

  That is, the present inventors have established a proportional relationship between the depth δs from the contact surface to the step surface and the flying height irrespective of the length of the pad in the longitudinal direction as the slider length and the peripheral speed of the recording disk. I found out that As a result, the length in the air inflow direction, which is the longitudinal direction of the pad, is set to a predetermined range of 4.06 mm or less of the allowable range, and the depth δs is set to the predetermined range, whereby the flying height is 1 to 5 μm. Can be in range. In addition, the flying height difference from the innermost circumference to the outermost circumference of the disk can be kept to 1 μm or less as long as it satisfies at least this condition.

  Similarly, when the pad has a pair of side rails formed along the air inflow direction at a set interval on the air inflow side of the contact surface, the depth δs and the length Lx in the longitudinal direction of the pad Are characterized by satisfying the conditions of 1.6 μm ≦ δs ≦ 4.4 μm and 2.05 mm ≦ Lx ≦ 3.2 mm, respectively. In this configuration, a step surface may be formed on the step surface along the side surface of the contact surface on the air inflow side that is sandwiched between the side rails.

  The slider of the present invention is a slider composed of a first slider portion and a second slider portion having a pad serving as an air bearing surface that receives the pressure of the air flow accompanying the rotation of the recording disk. The slider portion may be any one of the above sliders, and the second slider portion may be formed so as to be embedded in the contact surface of the first slider portion by mounting the optical head of the slider. In this case, for example, the second slider portion may be equipped with a recording / reproducing element instead of the optical head, or may be equipped with the recording / reproducing element together with the optical head.

  Moreover, it is preferable that the 2nd slider part forms a part of side surface by the side of the air inflow of a contact surface. According to this, since the contact surface is not formed on the air inflow side of the second slider portion, the length of the pad in the air inflow direction can be reduced correspondingly, and the slider size can be reduced. This makes it easier for the slider to follow even when waviness occurs on the disk surface of the recording disk, thereby further improving the reliability of the apparatus.

  In order to solve the second problem, the present invention supports a floating slider having any one of the above structures by a flexible gimbal portion, and the slider sandwiches a recording disk from both sides. The recording / reproducing apparatus is characterized by being arranged to face each other.

  According to this, for example, since the positive pressure of the inflow air by the slider acts on both sides of the ultra-thin recording disk, an effect as a stabilizer that suppresses the surface shake of the area sandwiched between the sliders can be obtained. Can do. Furthermore, each slider is supported by a flexible gimbal portion in addition to running following the waviness of the disk surface, so that the restoring force in the translation, pitch, and roll directions acts, and the recording disk Can be avoided.

  In this case, it is preferable that a plurality of a pair of sliders facing each other with the recording disk interposed therebetween are arranged on at least one of the upstream side, the downstream side, and the circumferential direction of the recording disk. As described above, by arranging the plurality of sliders so as to face the disk surface of the recording disk, the amplitude of the surface shake can be reduced in a predetermined region of the disk surface, and the vibration amplitude of the slider can be further suppressed.

  Further, it is preferable that the pair of sliders facing each other across the recording disk have different pad sizes. According to this, the recording disk is deformed in a convex shape toward the slider with the larger pad, for example, and this state is maintained, so that the uneven shape of the recording disk is compared with the case where the pad size is the same. The amplitude due to the surface vibration of the slider becomes smaller, and the vibration amplitude of the slider can be further suppressed.

  The present invention also includes a floating slider having a first slider portion and a second slider portion, the sliders are arranged to face each other across the recording disk from both sides, and the first slider portion Is supported by a flexible gimbal part, a slit part in which a slit in a plurality of directions is formed is formed in the gimbal part, and the second slider part is fixed and supported in the slit part. . That is, since the slit portion supports the second slider portion so that a restoring force acts on the motion of three degrees of freedom in the translation, pitch, and roll directions, the second slider portion has a surface deflection of the recording disk. Can be operated more flexibly, and contact between the slider and the recording disk can be avoided.

  According to the present invention, it is possible to provide a slider in which the slider length is 4.06 mm or less, the set flying height is 1 to 5 μm, and the flying height difference from the innermost disk to the outermost disk is 1 μm or less.

  Further, according to the present invention, it is possible to provide a recording / reproducing apparatus equipped with a slider that suppresses surface deflection of the recording disk and has a restoring force with respect to translation, pitch, and roll motion.

  Hereinafter, a first embodiment of a flying head slider (hereinafter abbreviated as a slider) to which the present invention is applied will be described with reference to the drawings. FIG. 1 shows a three-dimensional perspective view of a slider and a support according to Embodiment 1 of the present invention. 2A and 2B are enlarged views of the slider according to the first embodiment of the present invention, in which FIG. 2A is a three-dimensional perspective view, and FIG. 2B is a side view. The slider 1 includes a pad 11 that can be an air bearing surface. An objective lens 1 a is provided on the back surface of the slider 1. The slider 1 is a positive pressure utilization type slider in which the pressure Q is aerodynamically generated in the pad 11.

  FIG. 3 is an enlarged perspective view showing a part of FIG. 2, and FIG. 3B shows one mode in which the ridge line portion of FIG. The slider 1 according to the first embodiment is provided with a pad surface 112 (hereinafter referred to as a contact surface) that contacts the disk medium surface when the disk of the recording medium is stopped, and a step 113 in the air inflow direction of the contact surface 112. And a first step surface 114 (hereinafter referred to as a step surface) and a second step surface 116 (hereinafter referred to as a recess surface) provided via the step surface 114 and the step portion 115. Is done. δs indicates the depth of the step surface 114 with respect to the contact surface 112 (hereinafter referred to as “step depth” as appropriate). δr indicates the depth of the recess surface 116 with respect to the contact surface 112 (hereinafter referred to as a recess depth as appropriate). The recess surface 116 is used for mounting the objective lens 1a as shown in FIG. The recess depth δr is set to a sufficiently large value (for example, 10 μm or more) so that no negative pressure is generated on the recess surface 116. The structure of the step surface 114 and the recess surface 116 of the pad 11 can be manufactured using a known lithography technique.

  FIG. 4 is a plan view of a support that supports the slider of the first embodiment. The support 2 includes a load beam portion 21, a gimbal portion 22 made of a flexible member, a gimbal hole 221, and a load projection portion (hereinafter referred to as a dimple) 23. A hole 221 having an outer diameter slightly larger than the outer dimension of the objective lens 1a is formed in the gimbal portion 22.

  FIG. 5 shows a side view of the slider according to the first embodiment when the slider is flying, wherein (a) shows the pitch direction and (b) shows the roll direction. The dimple 23 attached to the load beam portion 21 serves as a load application point at which the load F pressed from the load beam portion 21 acts on the slider 1. That is, with this point as a fulcrum, the slider 1 is provided so that a restoring force acts on a motion with three degrees of freedom in the translation (up and down), pitch (front and back), and roll (seek) directions. The position (Xp, Yp) of the dimple 23 which is a load application point is expressed as a dimensionless value of Xp = xp / Lx for the pitch direction and Yp = yp / Ly for the roll direction. Here, xp is the distance from the air inflow end of the slider, yp is the distance from the end of the slider side surface, Lx is the length in the longitudinal direction of the slider, and Ly is the length in the short direction of the slider.

  The slider 1 has a pitch posture angle θp representing the flying posture in the pitch direction and the roll direction, in which the pressing load F and the positive pressure Q generated aerodynamically at the position of the dimple 23 are balanced by the relational expression F = Q. In addition, the roll attitude angle θr, the outflow end flying height h2, the inflow end flying height h1, and the focal position flying height hf of the objective lens 1a are dynamically and stably floated.

  FIG. 6 shows the air bearing surface shapes ABS11 to ABS14 of the slider according to the first embodiment. ABS 11 has a slider length Lx of 3.2 mm, slider width Ly of 2.6 mm, ABS 12 has Lx of 3.05 mm and Ly of 2.4 mm, ABS 13 has Lx of 2.8 mm, Ly of 2.24 mm, and ABS 14 has Lx of Lx. 2.05 mm, Ly is 1.6 mm, the pressing load F is 14.7 mN, and the dimple positions xp / Lx and yp / Ly are both 0.5. Further, the air bearing surface shapes ABS11 to ABS14 are not provided with the recess surface 116, and the following air bearing surface shapes are also not provided with the recess surface 116. This is because even if the recess surface 116 is provided, the recess depth is increased, so that no levitation force is generated, and the levitation performance in the case where the recess surface 116 is not provided is equivalent.

  7 to 10, for each of the air bearing surface shapes ABS11 to ABS14, the minimum flying height hmin with respect to the step depth δs is calculated in the case of the rotational speed of 2132 rpm, the innermost circumference, the middle circumference, and the outermost circumference. The results are shown. From the figure, it was found that there is a step depth δsmax at which the minimum flying height hmin is the maximum value for each peripheral speed. This is because the compressible air flowing into the step air bearing surface is saturated, and by setting the step depth δs, it is possible to ascend with the highest efficiency. Further, it was found that the step depth δsmax at which the minimum flying height hmin becomes the maximum value decreases as the slider size decreases. Furthermore, it was found that the difference in the flying height from the innermost circumference of the disk to the outermost circumference satisfies approximately 1 μm or less.

  Next, a second embodiment of the slider to which the present invention is applied will be described. FIG. 11 shows the slider 1 according to the second embodiment, where (a) is a three-dimensional perspective view and (b) is a side view. The pad 11 of the slider 1 according to the second embodiment has a pair of side rails 117 formed along the air inflow direction at a certain interval on the air inflow side of the contact surface 112 with respect to the pad of the first embodiment. The difference is that it has. The length of the side rail 117 is Lr, and the distance between the base end portion of the side rail 117, that is, the end surface on the air inflow side of the step surface 114 is Ls. An objective lens 1 a is provided on the back surface of the slider 1.

  FIG. 12 shows the air bearing surface shape (ABS21, ABS24) of the slider of the second embodiment. ABS 21 has a slider length Lx of 3.2 mm, slider width Ly of 2.6 mm, ABS 24 has Lx of 2.05 mm and Ly of 1.6 mm, pressing load F is 14.7 mN, dimple position xp / Lx, yp / Ly Are both 0.5.

  13 and 14, using the air bearing surface shapes ABS24 and ABS21, the minimum flying height hmin with respect to the step depth δs was calculated for each peripheral speed under the rotation speed of 2132 rpm, the innermost circumference, the middle circumference, and the outer circumference conditions. Results are shown. From the figure, it was found that there is a step depth δsmax at which the minimum flying height hmin is the maximum value for each peripheral speed. Further, compared to the first embodiment, the second embodiment has a larger step depth δsmax at which the minimum flying height hmin becomes the maximum value and a larger maximum value of the minimum flying height hmin. As a result, it was found that the surface can be floated higher than in the first embodiment. That is, the second embodiment includes the side rail 117, and since the volume of air flowing into the step flying surface increases, the step depth dsmax at which the minimum flying height hmin becomes the maximum value and the minimum flying height hmin. We think that any of the maximum values of can be increased. From the figure, it was found that the difference in the flying height from the innermost circumference to the outermost circumference of the disk satisfied approximately 1 μm or less.

  FIG. 15 rearranges the calculation results obtained in FIGS. 7 to 10 and FIGS. 13 and 14, and the step height δsmax at which the minimum flying height hmin becomes the maximum value and the maximum of the minimum flying height hmin for each peripheral speed. The result of having calculated | required the relationship with value (hmin) max is shown. As shown in the figure, it was found that in both Embodiments 1 and 2, the proportional relationship between δsmax and (hmin) max almost coincides regardless of the slider size and the peripheral speed. This is because the increase rate of the step depth δsmax that maximizes the minimum flying height due to the increase in the slider size is the same as the increase rate of the step depth δsmax that maximizes the minimum flying height due to the increase in peripheral speed. I mean. Furthermore, since the proportional relationship can be assumed to pass through the origin, the validity as a physical phenomenon was also confirmed. Therefore, by setting the step depth δsmax provided on the air inflow side from 1 μm to 2.7 μm in the first embodiment and from 1.6 μm to 4.4 μm in the second embodiment, the slider length becomes 4.06 mm. In the following, it is possible to simultaneously satisfy the set flying height of 1 to 5 μm and the flying height difference from the innermost circumference to the outermost circumference of the disk of 1 μm or less.

  Here, the slider 1 of the second embodiment has a configuration in which the side rail 117 is added to the slider 1 of the first embodiment. As shown in FIG. 15, the condition of the first embodiment, that is, the step depth δsmax is 1 μm. Even in the range of 2.7 μm to 2.7 μm, a flying height of 1 to 5 μm and a flying height difference of 1 μm or less from the innermost circumference to the outermost circumference of the disk can be satisfied simultaneously. However, since the slider 1 of the second embodiment has a lower flying height with respect to the step depth δsmax than the first embodiment, the lower limit of the step depth δsmax is preferably 1.6 μm or more. On the other hand, the upper limit of the step depth δsmax of the second embodiment is allowed up to 4.4 μm.

  Next, FIG. 16 shows the air bearing surface shape ABS 10 of the slider 1 of the first embodiment. As for the size, the slider length Lx is 3.2 mm, the slider width Ly is 2.6 mm, the pressing load F is 14.7 mN, and the dimple positions xp / Lx and yp / Ly are both 0.5.

FIG. 17 shows a result of calculating the minimum flying height hmin with respect to the step surface length L _{S in} the case of the rotational speed 2132 rpm and the peripheral speed under the innermost peripheral condition using the air bearing surface shape ABS 10. As shown in the figure, it is found that there is a step length L _{S at} which the minimum flying height hmin is maximum when the step length L _S = 1.2 mm and the minimum flying height h min is the maximum value. By setting this step length L _S , it is possible to ascend with the highest efficiency.

  Further, FIG. 18 shows a result of calculating the minimum flying height hmin with respect to the pressing load F with respect to the rotational speed 2132 rpm and the peripheral speed under the innermost peripheral condition using the air bearing surface shape ABS11. As shown in the figure, it was found that when the pressing load F is changed in the range of 5 to 30 mN, the minimum flying height hmin changes in the range of 2 to 5 μm. Therefore, it is effective to change the pressing load as a method of adjusting the flying height.

  Next, a third embodiment of the slider to which the present invention is applied will be described. FIG. 19 shows a slider according to the third embodiment, where (a) is a three-dimensional perspective view and (b) is a side view. The pad 11 that can be the air bearing surface of the slider 1 of the third embodiment is the same as that of the second embodiment in that it includes the contact surface 112 and the side rail 117, but is sandwiched between the side rail 117 and the contact surface 112. The second embodiment is different from the second embodiment in that a step surface 1131 provided on the step surface 114 via a step portion 1131 and a step portion 1132 is formed along the side surface 113 on the air inflow side. δs1 indicates the depth of the step surface 118 with respect to the contact surface 112, and Ls1 indicates the length of the step surface 118 in the air inflow direction. An objective lens 1 a is provided on the back surface of the slider 1.

  FIG. 20 shows the air bearing surface shape (ABS31, ABS34) of the slider of the third embodiment. ABS 31 has a slider length Lx of 3.2 mm, slider width Ly of 2.6 mm, ABS 34 has Lx of 2.05 mm and Ly of 1.6 mm, pressing load F is 14.7 mN, dimple position xp / Lx, yp / Both Ly are 0.5.

21 and 22 show (a) the step surface depth ratio δ _S1 / δ _S for the air bearing surface shapes ABS31 and ABS34, and the rotational speed is 2132 rpm, the innermost circumference, the middle circumference, and the circumferential speed under the outer circumference conditions. The relationship with the minimum flying height hmin is shown, and (b) shows the calculation result of the relationship between the pitch posture angle θp and the depth ratio δ _S1 / δ _S1 of the step surface. 21 shows the ABS 31, and FIG. 22 shows the ABS 22. As shown in the figure, it was found that there is a depth rate δ _S1 / δ _{S at} which the minimum flying height hmin is the maximum value for each peripheral speed. Further, it was found that when the minimum flying height hmin is the maximum value, the pitch posture angle θp is almost zero. Therefore, it is effective to change δ _S1 / δ _S as a method of adjusting the pitch attitude angle θp. Further, by setting the pitch attitude angle θp to zero, the most efficient and high flight can be achieved.

  FIG. 23 shows a plan view of an embodiment of an optical disk drive apparatus or magnetic disk apparatus having a slider to which the present invention is applied. The optical disk drive apparatus or magnetic disk apparatus 4 includes a recording disk 3 and a drive unit 41 that rotates the recording disk 3, a floating slider 1 to which the present invention is applied and its support body 2, a positioning support arm 42, and a drive thereof. Part 43 and a circuit 44 for processing a recording / reproducing signal of an optical head mounted on the slider 1.

  Next, a fourth embodiment of a slider to which the present invention is applied will be described. FIG. 24 shows a state in which the slider floats on the recording disk 3, wherein (a) is a side view in the pitch direction and (b) is a side view in the roll direction. As shown in the figure, the upper slider 1 and the lower slider 1 face each other with the recording disk 3 therebetween, and are stably flying. The forces acting on the upper and lower sliders 1 are a pressing load F and a positive pressure Q generated aerodynamically. The force acting on the recording medium 3 is a positive pressure Q generated from the upper and lower sliders 1. Note that the slider 1 used in the fourth embodiment may use any of the sliders of the first to third embodiments.

  FIG. 25 is a side view showing a state in which the recording disk 3 of FIG. 24 is replaced with an ultra-thin disk 31 and travels, where (a) shows the pitch direction and (b) shows the roll direction. As shown in the drawing, the upper slider 1 and the lower slider 1 face each other on both sides of the ultrathin disc 31 and stably float with the ultrathin disc 31 interposed therebetween. The forces acting on the upper and lower sliders 1 are a pressing load F and a positive pressure Q generated aerodynamically. The force acting on the ultrathin optical disk medium 31 is a positive pressure Q generated from the upper and lower sliders 1. By supporting the ultra-thin disc 31 with the positive pressure Q generated from the upper and lower sliders 1, it is possible to reduce the surface runout of the ultra-thin disc 31 near the slider. Therefore, the slider 1 of the fourth embodiment has an effect of having a stabilizer function for reducing the surface shake of the ultrathin disk 31.

  Next, the mechanism of vibration generation with respect to the uneven surface runout of the ultrathin disk 31 of the slider 1 in the fourth embodiment will be described with reference to FIGS.

  FIG. 26 shows the pitch direction in a state where the upper and lower sliders are stably flying while keeping the outflow end flying height h2 constant on the disk medium surfaces on both sides when the ultrathin disk 31 is deformed with the deformation amount Cr. (A) shows the case where the ultra-thin disk 31 is deformed into a convex shape, and (b) shows the case where it is deformed into a concave shape. FIG. 27 shows the variation of the floating height h2 at the outflow end with respect to the deformation amount Cr of the ultrathin disc 31 in the case of the rotational speed 2132 rpm, the innermost circumference, the middle circumference, and the circumferential speed under the outer circumference conditions using the air bearing surface shape ABS 13. The calculated result is shown.

  As shown in FIG. 26A, when the ultrathin disk 31 is deformed into a convex shape, the outflow end flying height h2 of the upper slider 1 is about 0.15 μm larger than the deformation amount Cr = 0.5 μm. Thus, the outflow end flying height h2 of the lower slider 1 of the present invention is reduced by about 0.25 μm. On the other hand, as shown in FIG. 26B, when the ultra-thin disk 31 is deformed into a concave shape, the flying height h2 of the upper slider 1 is about 0.25 μm with respect to the deformation amount Cr = 0.5 μm. As a result, the outflow end flying height h2 of the lower slider 1 is increased by about 0.15 μm. That is, when the ultra-thin disk 31 has an uneven surface shake, the upper slider 1 and the lower slider 1 vibrate in the same phase, and the amplitude of the uneven surface shake of the ultra-thin disk 31 increases. It can be seen that the vibration amplitude of the upper and lower sliders 1 also increases.

  FIG. 28 is a side view showing a state in which the pair of sliders 1 are different in size and are stably levitated on both surfaces of the ultrathin disc 31, (a) is the pitch direction, (b) Represents the roll direction. In this way, by making the upper and lower slider sizes different, for example, by setting the upper slider 1 to be larger than the lower slider 1, the ultrathin disc 31 is convex as compared to the case where the upper and lower slider sizes are the same. It becomes easy to deform | transform into a shape, and it becomes difficult to deform | transform into a concave shape on the contrary. Therefore, by always deforming the ultra-thin disk 31 into a convex shape, the amplitude of the uneven surface vibration can be suppressed, and the vibration amplitude of the slider 1 can be reduced.

  FIG. 29 is a side view in the pitch direction in a state where the slider 1 and the fixed optical pickup 5 are arranged to face each other with the ultrathin disk 31 interposed therebetween and stably running.

  The fixed optical pickup 5 includes an objective lens 51, a movable coil 52, a parallel leaf spring 53, as described in, for example, Kyo Ono, 4 others, “Memory and Recording”, Ohmsha, page 109. The objective lens 51 includes a permanent magnet 54 and an iron core 55, and is configured such that a Lorentz force acts by causing a current to flow through the movable coil 52 and the objective lens 51 including the movable coil 52 translates. The upper slider 1 stably floats on one surface of the ultra-thin disk 31, and a fixed optical pickup 5 is provided below the slider. That is, by the configuration in which the positive pressure Q generated from the upper slider 1 and the component force of the attractive force T of the ultra-thin disk 31 are balanced, the surface runout of the ultra-thin disk 31 generated during high-speed rotation can be reduced. Further, since the slider 1 is supported by a flexible member that can move following the translation, pitch, and roll directions, the slider 1 can approach the disk surface, and the disk surface shake can be reduced. The effect of the stabilizer can be increased. Therefore, recording / reproduction of the disk surface 31 can be performed using the conventional fixed optical pickup 5.

  FIG. 30 shows a side view in the roll direction in a state where a plurality of sliders 1 are arranged with an ultra-thin disk 31 sandwiched and the vehicle is stably flying. (A) shows a mode in which two sliders 1 are arranged in the upper part and one slider 1 is arranged in the lower part between them. With the configuration in which the three positive pressures Q generated from the sliders 1 arranged at the upper and lower portions support the ultrathin disc 31, the ultrathin disc 31 is easily deformed into a convex shape (center of the figure) and deformed into a concave shape. It is difficult to do. Thus, by always deforming the ultra-thin disk 31 into a convex shape, the amplitude of the uneven surface vibration can be reduced, and the vibration amplitude of the slider 1 can be reduced. On the other hand, in (b), two pairs of sliders 1 facing each other with the ultra-thin disk 31 interposed therebetween are arranged, and one slider 1 is arranged at the lower part between them. The ultrathin disc 31 is supported by the positive pressure Q generated from the pair of sliders 1 and supported at two locations by the positive pressure Q generated from the lower slider 1. Is easily deformed into a convex shape (the center in the figure) and is difficult to deform into a concave shape. Thus, by always deforming the ultra-thin disk 31 into a convex shape, the amplitude of the uneven surface vibration can be reduced, and the vibration amplitude of the slider 1 can also be reduced.

  FIG. 31 shows another embodiment of FIG. 30, in which two pairs of sliders 1 facing each other with an ultra-thin disk 31 sandwiched therebetween are arranged, and a conventional fixed optical pickup 5 is arranged at the lower part between them. A state in which the vehicle floats stably on both surfaces of the ultra-thin disk 31 is shown. By using the positive pressure Q generated from the pair of sliders 1 to support the ultra-thin disc 31 at two locations, the surface runout of the ultra-thin disc 31 that occurs during high-speed rotation can be reduced. Therefore, it is possible to record / reproduce the ultrathin disk medium surface 31 using the conventional fixed optical pickup 5.

Next, a fifth embodiment of the slider 1 to which the present invention is applied will be described. FIG. 32 shows a three-dimensional perspective view of the slider 1 of the present embodiment. The slider 1 according to the fifth embodiment includes a contact surface 112 that comes into contact with the disk surface when the disk is stopped, a first step surface 114 provided on the air inflow side of the contact surface 112 via a step 113, and a contact surface 112. A slider having a three-step step surface, that is, a second step surface 1141 provided via a step 113 on the air outflow side and a third step surface 116 provided via a step 115, has a basic configuration. Are connected by two in the vertical and horizontal plane directions. Here, the step depth δ _S2 of the step surface 1141 with respect to the pad surface 112 is set so that a negative pressure is generated on the step surface 1141.

  The vibration amplitude reduction effect for the uneven surface vibration when the slider 1 of the fifth embodiment is floated on the ultrathin disk 31 will be described with reference to FIG. In FIG. 33, the slider 1 according to the fifth embodiment is disposed at the top, and the slider 1 according to the first embodiment is disposed at a substantially central portion of the slider 1, that is, at a position facing the position corresponding to the recess surface 116, for example. The side views of the state in which the upper and lower sliders 1 are stably levitated on both surfaces of the ultra-thin disk 31 are shown, (a) shows the pitch direction and (b) shows the roll direction.

  According to this configuration, positive pressure Q is generated from the four corners of the upper slider 1, negative pressure Q <b> 2 is generated at the center and the outflow end, and positive pressure Q is generated from the lower slider 1. The super thin disc 31 is supported by the upper positive pressure Q, the negative pressure Q2, the positive pressure Q, the negative pressure Q2, and the lower positive pressure Q, so that the central portion of the ultra thin disc 31 is easily deformed into a convex shape. It becomes difficult to deform into a concave shape. Therefore, by always deforming the ultra-thin optical disk 31 into a convex shape, the amplitude of the uneven surface vibration can be reduced, and the vibration amplitude of the slider 1 can also be reduced.

  FIG. 34 shows a configuration in which a conventional fixed optical pickup 5 is provided below the ultrathin disc 31 as another embodiment of FIG. A positive pressure Q is generated from the four corners of the slider 1 of the fifth embodiment arranged at the upper portion, and a negative pressure Q2 is generated from the central portion and the outflow end portion. With the configuration in which the ultrathin disc 31 is supported by the upper positive pressure Q, negative pressure Q2, positive pressure Q, and negative pressure Q2, the surface runout of the ultrathin disc 31 that occurs during high-speed rotation can be reduced. Therefore, recording and reproduction can be performed on the ultrathin disk medium surface 31 using the conventional fixed optical pickup 5.

  Next, a sixth embodiment of the slider 1 to which the present invention is applied will be described. FIGS. 35A and 35B are three-dimensional perspective views of the slider 1 according to the sixth embodiment. The slider 1 according to the sixth embodiment includes, for example, a first slider 101 including the slider 1 according to the first embodiment, a magnetic head mounted with a recording / reproducing element unit, an objective lens, or a second mounted with any of these. And a slider 102. A quadrangular hole having an outer diameter slightly larger than the outer dimension of the second slider 102 is formed in the vicinity of the outflow end of the first slider 101, that is, through the contact surface 112, and the second hole is formed in the second hole. The slider 1 is embedded. The difference between (a) and (b) in the figure is the difference between whether or not the first slider 101 and the second slider 102 are separated.

  In FIG. 35 (c), the first slider 101 has an air bearing surface shape ABS11 having a slider length Lx of 3.2 mm and a slider width Ly2.6 mm, and the second slider 102 has a size of Lx0.85 mm and Ly0.7 mm. The case of femto slider size is shown. As shown in the figure, a second slider 102 having a femto slider size can be mounted on the air bearing surface shape ABS 11.

  FIG. 36 shows a three-dimensional perspective view of the slider and its support according to the sixth embodiment. FIG. 37 shows a three-dimensional perspective view in which a part of the slider and the support of FIG. 36 is enlarged. The dimple 23 serves as a load application point at which the load F pressed from the load beam portion 21 is applied to the first slider 101, and the first slider 101 is translated, pitched, and rolled in this direction as a fulcrum. It is provided so that a restoring force acts on a motion with three degrees of freedom. In addition, a slit 222 is formed in the gimbal portion 22 made of a flexible member, and the second slider 102 is bonded and fixed to the center thereof.

  The slit portion 222 is composed of slits in a plurality of directions, and acts as a load application point for pressing the load F pressed from the load beam portion 21 against the second slider 102. In addition, the slit portion 222 is provided so that a restoring force acts on the second slider 102 with respect to a motion of three degrees of freedom in the translation, pitch, and roll directions. For example, when an objective lens is mounted on the rear surface of the second slider 102 as an optical head slider, a hole having an outer diameter slightly larger than the outer dimension of the objective lens is provided in the slit portion 222. In particular, when the second slider 102 is equipped with an objective lens, it is effective as a flying head slider for near-field light recording or heat-assisted magnetic recording.

In FIG. 38, the slider 1 of the present embodiment is disposed on the upper and lower portions of the ultra-thin disk 31, and
A side view of the state in which the upper and lower sliders 1 are stably levitated on both surfaces of the ultrathin disk 31 is shown. In the upper and lower sliders 1, since the first slider 101 can reduce the surface shake of the ultrathin disk 31, the second slider 102 can be recorded and reproduced with low flying.

  Further, the first slider 101 and the second slider 102 are divided and fixed to the gimbal portion 22 and the slit portion 222, respectively, so that the first slider 101 and the second slider 102 float. The amount difference can be increased to 1 to 5 μm. Therefore, without mounting the objective lens on the second slider 102, for example, a magnetic head composed of a recording / reproducing element unit is mounted, and the flying height h2 of the first slider 101 is set to a high flying height of about 1 to 5 μm. In addition, since the outflow end flying height h2 of the second slider 102 can be set to 50 nm or less, the slider 1 of Embodiment 6 can be used as a magnetic disk device.

  That is, when the slider 1 of this embodiment is stably flying, the second slider 102 protrudes in the thickness direction as compared with the first slider 101 by about 1 to 5 μm, which is the difference in the flying height between the two. ing. Since a positive pressure is generated on the air inflow end surface of the projecting portion of the second slider 102, the first slider 101 can have a high flying height. When a magnetic head and an objective lens composed of a recording / reproducing element unit are mounted on the second slider 102, for example, it can be used as a floating slider for heat-assisted magnetic recording. When only the objective lens is mounted, It can be used as a floating slider for optical discs or near-field optical recording.

  Next, a seventh embodiment of the slider 1 to which the present invention is applied will be described. FIG. 39 shows a three-dimensional perspective view of the slider of the seventh embodiment. As in the sixth embodiment, the slider 1 according to the seventh embodiment includes a first slider 101 and a second slider 102 including a magnetic head mounted with a recording / reproducing element unit or an objective lens. A square hole having an outer diameter slightly larger than the outer dimension of the slider 102 is provided near the outflow end of the first slider 101.

  In this embodiment, the air inflow end surface of the second slider 102 becomes a part of the step 113 between the contact surface 112 provided in the air inflow direction of the first slider 101 and the first step surface 114. Yes. With this structure, the size of the second slider 102 can be made smaller than the size of the second slider 102 of the fifth embodiment, so that the slider 1 can easily follow the waviness of the disk surface, and the high reliability of the apparatus. Can be realized. In the figure, the difference between (a) and (b) is whether or not the first slider 101 and the second slider 102 are separated. FIG. 39C shows a conventional femto slider in which the size of the first slider 101 is a slider length Lx2.05 mm and the slider width Ly1.6 mm, and the size of the second slider 102 is Lx0.85 mm and Ly0.7 mm. Indicates the case of size. As shown in the figure, the second slider 102 having a femto slider size can be mounted on the air bearing surface smaller than the air bearing surface shape ABS11.

It is a three-dimensional perspective view of the slider and support body of Embodiment 1 of this invention. It is an enlarged view of the slider of Embodiment 1 of this invention, (a) is a three-dimensional perspective view, (b) is a side view. It is a perspective view which expands and shows a part of FIG. 2, (b) shows the aspect which chamfered the ridgeline part of (a). It is a top view of the support body of Embodiment 1 of this invention. It is a side view at the time of the floating travel of the slider of Embodiment 1 of this invention, (a) represents the pitch direction and (b) represents the roll direction. It is a top view which shows the flying surface shape of the slider of Embodiment 1 of this invention. In the slider of Embodiment 1 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. In the slider of Embodiment 1 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. In the slider of Embodiment 1 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. In the slider of Embodiment 1 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. It is a figure which shows the slider of Embodiment 2 of this invention, (a) is a three-dimensional perspective view, (b) is a side view. It is a top view which shows the flying surface shape of the slider of Embodiment 2 of this invention. In the slider of Embodiment 2 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. In the slider of Embodiment 2 of this invention, it is a diagram which shows the relationship between step depth (delta) s and minimum flying height hmin. It is a diagram showing the relationship between the step depth δsmax at which the minimum flying height hmin becomes the maximum value and the maximum value (hmin) max of the minimum flying height hmin. It is a top view which shows the flying surface shape of the slider of Embodiment 2 of this invention. In the slider of the second embodiment of the present invention, it is a graph showing the relationship between the length L _S and the minimum flying height hmin of the step surface. In the slider of Embodiment 2 of this invention, it is a diagram which shows the relationship between the pressing load F and the minimum flying height hmin. It is a figure which shows the slider of Embodiment 3 of this invention, (a) is a three-dimensional perspective view, (b) is a side view. It is a top view which shows the flying surface shape of the slider of Embodiment 3 of this invention. In the slider according to the third embodiment of the present invention, (a) is a diagram showing the relationship between the depth ratio δ _S1 / δ _S of the step surface and the minimum flying height hmin, and (b) is the pitch posture angle θp and the step surface. it is a graph showing the relationship between the depth ratio δ _{S1 /} δ _S of. In the slider according to the third embodiment of the present invention, (a) is a diagram showing the relationship between the depth ratio δ _S1 / δ _S of the step surface and the minimum flying height hmin, and (b) is the pitch posture angle θp and the step surface. it is a graph showing the relationship between the depth ratio δ _{S1 /} δ _S of. In Embodiment 3 of this invention, it is a top view of the optical disk drive device or magnetic disk device provided with the slider. In Embodiment 4 of this invention, it is a side view which shows a mode that a slider floats on a recording disk, (a) represents a pitch direction and (b) represents a roll direction. In Embodiment 4 of this invention, it replaces with the recording disk of FIG. 24 by the ultra-thin disk, and it is a side view which shows a mode that (a) is a pitch direction, (b) is a roll. FIG. 25 is a side view in the pitch direction in a state in which the ultra-thin disk is deformed with a deformation amount Cr, where (a) represents a convex shape and (b) represents a concave shape. It is a diagram which shows the result of having calculated the fluctuation | variation of the outflow end floating amount h2 with respect to deformation amount Cr of an ultra-thin disk for every circumferential speed. In Embodiment 4 of this invention, it is a side view which shows the state which the slider is flying on both surfaces of an ultra-thin disk, (a) represents a pitch direction and (b) represents a roll direction. In Embodiment 4 of this invention, a slider and a fixed optical pick-up are arrange | positioned at the upper and lower sides of an ultra-thin disk, and it is a side view of the pitch direction which shows the state which the slider is flying. In Embodiment 4 of this invention, it is a side view of the roll direction which shows the state which has arrange | positioned multiple sliders on the upper and lower sides of an ultra-thin disk, and is flying. In Embodiment 4 of this invention, it is a side view of the roll direction which shows the state which has arrange | positioned the slider and the fixed optical pick-up on the upper and lower sides of an ultra-thin disc, and the slider is flying. It is a three-dimensional perspective view of the slider of Embodiment 5 of the present invention. It is a side view explaining the mechanism of the vibration amplitude reduction effect with respect to the surface shake on the unevenness | corrugation of the ultra-thin disk of the slider of Embodiment 5 of this invention, (a) represents a pitch direction and (b) represents a roll direction. ing. FIG. 34 is a side view showing a state in which a fixed optical pickup is provided in the lower part of the ultra-thin disc as another aspect of FIG. 33. The slider of Embodiment 6 of this invention is shown, (a), (b) is a three-dimensional perspective view, (c) is a top view. It is a three-dimensional perspective view of the slider and its support body of Embodiment 6 of this invention. It is the three-dimensional perspective view which expanded a part of slider and its support body of FIG. In Embodiment 7 of this invention, it is a side view which shows the state which has arrange | positioned the slider to the upper and lower parts of an ultra-thin disc, and the upper and lower sliders are flying on both surfaces of the ultra-thin disc. The slider of Embodiment 7 of this invention is shown, (a), (b) is a three-dimensional perspective view, (c) is a top view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Slider 11 Pad 51 Objective lens 52 Moving coil 53 Parallel plate spring 54 Permanent magnet 55 Iron core 101 1st slider 102 2nd slider 112 Contact surface 113,115 Step part 114 Step surface 116 Recessed surface 117 Side rail δs Step depth distance between δr recess depth hmin minimum flying height L _S air inlet-side end of the

Claims (11)

A pad serving as an air bearing surface that receives the pressure of the air flow accompanying the rotation of the recording disk, and an optical head that is attached to the pad and irradiates light from a light source onto the recording disk,
The pad includes a contact surface that comes into contact with the recording surface of the recording disk when rotation of the recording disk is stopped, and a step surface and a recess surface that are sequentially formed behind the recording surface on the air inflow side of the contact surface. Have
When the depth from the contact surface to the step surface is δs,
1 μm ≦ δs ≦ 2.7 μm in a range that satisfies the condition,
When the length in the air inflow direction which is the longitudinal direction of the pad is Lx,
A slider having a range satisfying a condition of 2.05 mm ≦ Lx ≦ 3.2 mm. A pad serving as an air bearing surface that receives the pressure of the air flow accompanying the rotation of the recording disk, and an optical head that is attached to the pad and irradiates light from a light source onto the recording disk,
The pad includes a contact surface that comes into contact with the recording surface of the recording disk when rotation of the recording disk is stopped, and a step surface and a recess surface that are sequentially formed behind the recording surface on the air inflow side of the contact surface. A pair of side rails formed along the air inflow direction with a set interval on the air inflow side of the contact surface,
When the depth from the contact surface to the step surface is δs,
1.6 μm ≦ δs ≦ 4.4 μm, which satisfies the condition
When the length in the air inflow direction which is the longitudinal direction of the pad is Lx,
A slider having a range satisfying a condition of 2.05 mm ≦ Lx ≦ 3.2 mm. The slider according to claim 2, wherein a step surface is formed on the step surface along a side surface of the contact surface on the air inflow side that is sandwiched between the side rails. In a slider composed of a first slider part and a second slider part having a pad serving as an air bearing surface that receives the pressure of an air flow accompanying the rotation of the recording disk, the first slider part comprises: 4. The slider according to claim 3, wherein the second slider portion is mounted with the optical head of the slider and is embedded in the contact surface of the first slider portion. . The slider according to claim 4, wherein the second slider portion forms a part of a side surface of the contact surface on the air inflow side. The slider according to claim 4 or 5, wherein the second slider portion is mounted with a recording / reproducing element instead of the optical head. 6. The slider according to claim 4 or 5, wherein the second slider portion mounts a recording / reproducing element together with the optical head. 8. A recording / reproducing apparatus, wherein the slider according to claim 1 is supported by a flexible gimbal portion, and the slider is arranged to face the recording disk from both sides. . 9. The recording according to claim 8, wherein a plurality of the pair of sliders arranged on both sides of the recording disk are arranged on at least one of the upstream side, the downstream side, and the circumferential direction of the recording disk. Playback device. 10. The recording / reproducing apparatus according to claim 8, wherein the pair of sliders disposed on both sides of the recording disk have different pad sizes. A slider according to any one of claims 4 to 7 is disposed so as to be opposed to each other from both sides of the recording disk, the first slider portion is supported by a flexible gimbal portion, and the gimbal portion A recording / reproducing apparatus characterized in that a slit portion in which slits in a plurality of directions are formed is formed, and the second slider portion is fixed and supported in the slit portion.

Images