JPH0736350Y2 - 光デバイス - Google Patents
光デバイスInfo
- Publication number
- JPH0736350Y2 JPH0736350Y2 JP13156189U JP13156189U JPH0736350Y2 JP H0736350 Y2 JPH0736350 Y2 JP H0736350Y2 JP 13156189 U JP13156189 U JP 13156189U JP 13156189 U JP13156189 U JP 13156189U JP H0736350 Y2 JPH0736350 Y2 JP H0736350Y2
- Authority
- JP
- Japan
- Prior art keywords
- optical device
- waveguide
- film body
- substrate
- control electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 43
- 239000000758 substrate Substances 0.000 claims description 39
- 230000000694 effects Effects 0.000 claims description 14
- 239000011800 void material Substances 0.000 description 10
- 238000005530 etching Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000003014 reinforcing effect Effects 0.000 description 6
- 239000000470 constituent Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13156189U JPH0736350Y2 (ja) | 1989-11-11 | 1989-11-11 | 光デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13156189U JPH0736350Y2 (ja) | 1989-11-11 | 1989-11-11 | 光デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0369132U JPH0369132U (enrdf_load_stackoverflow) | 1991-07-09 |
| JPH0736350Y2 true JPH0736350Y2 (ja) | 1995-08-16 |
Family
ID=31679062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13156189U Expired - Lifetime JPH0736350Y2 (ja) | 1989-11-11 | 1989-11-11 | 光デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0736350Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-11-11 JP JP13156189U patent/JPH0736350Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0369132U (enrdf_load_stackoverflow) | 1991-07-09 |
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