JPH0735291Y2 - イオン源 - Google Patents

イオン源

Info

Publication number
JPH0735291Y2
JPH0735291Y2 JP1988035717U JP3571788U JPH0735291Y2 JP H0735291 Y2 JPH0735291 Y2 JP H0735291Y2 JP 1988035717 U JP1988035717 U JP 1988035717U JP 3571788 U JP3571788 U JP 3571788U JP H0735291 Y2 JPH0735291 Y2 JP H0735291Y2
Authority
JP
Japan
Prior art keywords
ion source
microwave
source chamber
ion
microwaves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988035717U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01141759U (enrdf_load_stackoverflow
Inventor
義孝 笹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988035717U priority Critical patent/JPH0735291Y2/ja
Publication of JPH01141759U publication Critical patent/JPH01141759U/ja
Application granted granted Critical
Publication of JPH0735291Y2 publication Critical patent/JPH0735291Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1988035717U 1988-03-16 1988-03-16 イオン源 Expired - Lifetime JPH0735291Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988035717U JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988035717U JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Publications (2)

Publication Number Publication Date
JPH01141759U JPH01141759U (enrdf_load_stackoverflow) 1989-09-28
JPH0735291Y2 true JPH0735291Y2 (ja) 1995-08-09

Family

ID=31262360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988035717U Expired - Lifetime JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Country Status (1)

Country Link
JP (1) JPH0735291Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003204236A (ja) * 2002-11-14 2003-07-18 Showa Shinku:Kk 圧電素子の周波数調整装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616384B2 (ja) * 1984-06-11 1994-03-02 日本電信電話株式会社 マイクロ波イオン源
JPS62290054A (ja) * 1986-06-09 1987-12-16 Mitsubishi Electric Corp マイクロ波によるガスのイオン化方法およびイオン源装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003204236A (ja) * 2002-11-14 2003-07-18 Showa Shinku:Kk 圧電素子の周波数調整装置

Also Published As

Publication number Publication date
JPH01141759U (enrdf_load_stackoverflow) 1989-09-28

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