JPH07335419A - Method of adjusting square ratio of fe radical soft magnetic alloy and fe radical soft magnetic alloy - Google Patents

Abstract

PURPOSE:To provide a Fe radical soft magnetic alloy in which a core loss is small in high frequency, which has high saturated flux density and high permeability, and in which a square ratio can be adjusted to a specific value, and also to provide a method of adjusting the square ratio. CONSTITUTION:A square ratio is 0.8 or higher or 0.3 or less and saturated flux density is 1.5 or higher and an absolute value of a magnetic strain (¦lambdas¦) is smaller than 1.0X10<-6> and Fe is a main component and one kind or two kinds or more of elements M, B selected from a group comprising at least Ti, Zr, Hf, V, Nb, Ta, Mo and W are included and an organization of at least 50% or more is composed of a fine crystal particle of a body-centered cubic structure of a mean crystal particle size 30nm or less.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention has a high saturation magnetic flux density, a small absolute value of magnetostriction, and an excellent squareness ratio in a specific range. Adjustment method.

[0002]

2. Description of the Related Art Conventionally, as magnetic core materials for transformers, choke coils, etc., 50% Ni-Fe permalloy magnetic cores and
A 0% Ni-Fe permalloy core is used. However, the magnetic core made of these magnetic materials has a large core loss in the high frequency region, and the temperature rise of the magnetic core is severe in the frequency band of several tens of kHz or more, which makes it difficult to use. Therefore, in recent years, a magnetic core made of a Co-based amorphous magnetic material has come to be used as a magnetic core for a switching power supply or the like by taking advantage of the characteristics that the core loss is low in a high frequency region and the high squareness is utilized. However, the Co-based amorphous magnetic core is
Not only is the raw material cost high and the price is high, but the saturation magnetic flux density is usually 1 T (tesla) or less, and several tens of kHz to 100 kHz.
In the frequency range of kHz, the saturation magnetic flux density is low, so that the magnetic flux density is easily restricted and there is a problem that the magnetic core cannot be sufficiently miniaturized.

On the other hand, a magnetic core made of an Fe-based amorphous magnetic material has a high saturation magnetic flux density, and is disclosed in, for example, JP-B-58-118.
As described in Japanese Patent No. 3, it is known that a DC BH curve having a high squareness ratio and a high maximum magnetic permeability can be obtained. However, in the magnetic core using the Fe-based amorphous alloy, there is a drawback that the core loss is large. Therefore, attempts have been made to improve the core loss by adjusting the additive element. There was still a problem that the core loss was large compared to. Furthermore, the magnetic core material is
Besides having low core loss, high saturation magnetic flux density, and high magnetic permeability, it is important to be able to adjust the squareness ratio.
That is, a high squareness ratio of 0.8 or more is a saturable core, and
A low choke ratio of 3 or less is a core for DC choke coil,
It is applied to transformer cores used in single-ended circuits. However, in the conventional soft magnetic material, the saturation magnetic flux density is 1.5 T or more, and the low magnetostriction (1 ×
^10-6 ), low core loss, and none that can adjust the squareness ratio to 0.8 or more or 0.3 or less.

[0004]

The present invention has been made in view of the above circumstances and has a small core loss in a high frequency range, a high saturation magnetic flux density of 1.5 T or more, a high magnetic permeability, and a squareness ratio. Can also be adjusted to a specific value F
It is an object of the present invention to provide an e-based soft magnetic alloy and a method for adjusting its squareness ratio.

[0005]

In order to solve the above-mentioned problems, the invention according to claim 1 has a squareness ratio of 0.8 or more or 0.3 or less and an absolute value of magnetostriction | λs | 0.0 x
In addition to being less than 10 ⁻⁶ , Fe as a main component and at least one element or two or more elements M and B selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, At least 50% of the structure has an average crystal grain size of 30
It is characterized by comprising fine crystal grains having a body-centered cubic structure of nm or less.

In order to solve the above-mentioned problems, the invention according to claim 2 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. Fe _b B _x M _{y where} M is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W, and containing any of Zr, Hf, and Nb,
b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
It is 9 atom%.

In order to solve the above problems, the invention according to claim 3 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y however Z is Ni, 1 kind or two kinds of Co, M is
One or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and containing any one of Zr, Hf and Nb, and a ≦ 0. .
2, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y =
It is 4 to 9 atom%.

In order to solve the above-mentioned problems, the invention according to claim 4 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. Fe _{b B x} M _{y X Z} where M is, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and contains any one of Zr, Hf, and Nb, and X is one or two of Cr, Ru, Rh, and Ir. Species or more, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, and Z ≦ 5 atom%.

In order to solve the above-mentioned problems, the invention according to claim 5 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X Z However, Z is Ni, 1 kind or two kinds of Co, M is T
i, Zr, Hf, V, Nb, Ta, Mo and W, which are one or more elements selected from the group consisting of:
Contains any one of Zr, Hf, and Nb, and X is Cr, R
One or more elements of u, Rh, and Ir, and a ≦ 0.2, b = 75 to 93 atom%, x = 0.5 to 18
Atomic%, y = 4 to 9 atomic%, Z ≦ 5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 6 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{Fe b B x M y X '} t where M is, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and containing any of Zr, Hf, and Nb,
X ′ is one or more of Si, Al, Ge and Ga, and b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, t ≦ 4. It is atomic%.

In order to solve the above-mentioned problems, the invention according to claim 7 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X 't however Z is Ni, 1 kind or two kinds of Co, M is
Ti, Zr, Hf, V, Nb, Ta, Mo, W is one or more elements selected from the group consisting of Zr, Hf, Nb, and X'is Si. ，
One or more of Al, Ge, and Ga, a
≦ 0.2, b = 75 to 93 atomic%, x = 0.5 to 18 atomic%, y = 4 to 9 atomic%, and t ≦ 5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 8 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{Fe b B x M y X z} X 't M ; however, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and containing any of Zr, Hf, and Nb,
X is one or more of Cr, Ru, and Ir, and X ′.
Is one or more of Si, Al, Ge and Ga, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y
= 4 to 9 atom%, z ≦ 5 atom%, and t = ≦ 4 atom%.

In order to solve the above-mentioned problems, the invention according to claim 9 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X z X 't however Z may, Ni, 1 kind or two kinds of Co, M is T
i, Zr, Hf, V, Nb, Ta, Mo and W, which are one or more elements selected from the group consisting of:
Zr, Hf, or Nb is included, and X is Cr, Ru,
One or more of Ir, X'is Si, Al, G
one or more of e and Ga, and a ≦ 0.2,
b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
9 atomic%, z ≦ 5 atomic%, and t = ≦ 4 atomic%.

In order to solve the above problems, the invention according to claim 10 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. Fe _{b B x} M _y T _z where M is, Ti, Zr, Hf, V , Nb, Ta, M
One or two or more elements selected from the group consisting of o and W, and contains either or both of Zr and Hf, and T is Cu, Ag, Au, Pd, Pt, or Bi. One or more elements selected from the group consisting of
b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
10 atomic% and z ≦ 4.5 atomic%.

In order to solve the above problems, the invention according to claim 11 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{Fe b B x M y T z} X u where, M is, Ti, Zr, Hf, V , Nb, Ta, M
One or two or more elements selected from the group consisting of o and W, and contains either or both of Zr and Hf, and T is Cu, Ag, Au, Pd, Pt, or Bi. One or more elements selected from the group consisting of
X is 1 selected from the group consisting of Cr, Ru, Rh, and Ir.
One or two or more elements, b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%, u ≦ 5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 12 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y T z where, Z is Co, a or Ni,
M is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and
And includes either or both of Zr and Hf, and T
Is one or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and a ≦ 0.1,
b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
10 atomic% and z ≦ 4.5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 13 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y T z X u where, Z is Co, a or Ni,
M is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and
And includes either or both of Zr and Hf, and T
Is one or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and X is Cr,
1 or 2 selected from the group consisting of Ru, Rh and Ir
More than one element, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%, u ≦ 5 atomic%.

In order to solve the above problems, the soft magnetic alloy according to claim 1 has a composition represented by the following formula. Fe _b B _x M ′ _y T _z However, M ′ is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti, Nb, Including any of Ta, T is Cu,
One or more elements selected from the group consisting of Ag, Au, Pd, Pt, and Bi, and b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 Atomic%, z ≦
It is 4.5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 15 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. Fe _b B _x M ′ _y T _z X _u However, M ′ is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti, Containing either Nb or Ta, T is Cu,
One or more elements selected from the group consisting of Ag, Au, Pd, Pt, Bi, and X is Cr, Ru, R
one or more elements selected from the group consisting of h and Ir, b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, z ≦ 4 0.5 atomic% and u ≦ 5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 16 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M 'y T z where, Z is Co, either or both the Ni,
M'is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti,
Containing either Nb or Ta, T is Cu, Ag, Au,
1 or 2 selected from the group consisting of Pd, Pt and Bi
More than one element, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%.

In order to solve the above-mentioned problems, the invention according to claim 17 is such that the soft magnetic alloy according to claim 1 has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M 'y T z X u where, Z is Co, either Ni, or is both, M' is Ti, V, Nb, Ta, Mo, and W One or more elements selected from the group consisting of
It contains any one of Ti, Nb and Ta, and T is Cu, Ag,
One or more elements selected from the group consisting of Au, Pd, Pt and Bi, and X is Cr, Ru, Rh, I.
1 or 2 or more elements selected from the group consisting of r, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 6.5 to 1
8 atom%, y = 4 to 10 atom%, z ≦ 4.5 atom%, u ≦ 5
It is atomic%.

In order to solve the above-mentioned problems, the invention according to claim 18 is to claim 10, 11, 12, 13, 14, 1.
In the soft magnetic alloy according to 5, 16, or 17, z = 0.
It is set to 2 to 4.5 atom%.

In order to solve the above problems, a nineteenth aspect of the present invention is a method for adjusting the squareness ratio of an Fe-based soft magnetic alloy having the composition according to any one of the first to eighteenth aspects, wherein The squareness ratio is adjusted by forming a soft magnetic alloy from a molten alloy by a quenching method and then annealing it in a magnetic field.

[0024]

According to the present invention, since it has a special composition containing Fe, B and the element M as a basic system, it has a characteristic that core loss is small. In particular, F, which is known to show excellent soft magnetic properties
Even when compared with a magnetic core using an amorphous alloy of e-Si-B system, the Fe-based soft magnetic alloy according to the present invention shows excellent saturation magnetic flux density equal to or higher than that of Fe- The core loss is lower than that of the Si-B type amorphous alloy. Furthermore, the absolute value of magnetostriction is less than 1.0 × 10 ^-6 , and the squareness ratio is easily adjusted to 0.8 or more or 0.3 or less, so a high squareness ratio of 0.8 or more is required. The present invention can be applied to a saturable core, a DC choke coil core required a low squareness ratio of 0.3 or less, or a transformer core. Moreover, the squareness ratio can be easily adjusted to 0.8 or more by annealing in a magnetic field, and the squareness ratio can be reduced to 0.3 or less by controlling the magnetostriction by replacing a part of Fe with Co. Easy to adjust. By the way, in an Fe-Si-B based amorphous alloy having a high saturation magnetic flux density of about 1.5 T, the absolute value of magnetostriction becomes a large value of the order of 10 ^-5 . Therefore, when resin-molded, the magnetic characteristics including the core loss and the squareness ratio are deteriorated. On the other hand, in the case of the composition of the present invention, the absolute value of magnetostriction is on the order of 10 ^-6, which is smaller than that of the amorphous alloy, so core loss is reduced, and the possibility of deterioration of the squareness ratio due to resin molding is reduced. .

The Fe-based soft magnetic alloy having the composition according to the present invention is
The squareness ratio can be easily adjusted by quenching the molten alloy and manufacturing it and then annealing it in a magnetic field. Further, the magnetostriction can be adjusted by replacing a part of Fe with Co, and the squareness ratio can also be adjusted by adjusting the magnetostriction.

The present invention will be described below with reference to the drawings. FIG. 1 shows an example of a laminated magnetic core made of an Fe-based soft magnetic alloy according to the present invention. The laminated magnetic core A of this example is made of various soft magnetic alloys having compositions described later. A plurality of ring bodies 1 each having a band formed by punching are laminated by interposing an insulating layer therebetween. The Fe-based soft magnetic alloy has at least 5 of its structure.
0% or more has a structure composed of fine crystal grains having a body-centered cubic structure with an average crystal grain size of 30 nm or less.

As a first example of the soft magnetic alloy constituting the ring body 1, the composition formula of Fe _b B _x M _y is shown, and M
Is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W,
And contains any one of Zr, Hf, and Nb, and b = 7
It is possible to use those satisfying the relations of 5 to 93 atomic%, x = 0.5 to 18 atomic%, and y = 4 to 9 atomic%.

The soft magnetic alloy of the ring body 1
As an example of 2, (Fe_1-aZ_a)_b B_xM_yComposition formula
Z is one or two of Ni and Co, and M is
From Ti, Zr, Hf, V, Nb, Ta, Mo, W
One or more elements selected from the group consisting of
In addition, including any one of Zr, Hf, and Nb, a ≦ 0.
2, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y =
It is possible to use those satisfying the relation of 4 to 9 atom%.
It

As a third example of the soft magnetic alloy forming the ring body 1, it is represented by the composition formula of Fe _b B _x M _y X _z , where M is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W, and containing any of Zr, Hf, and Nb,
X is one or more of Cr, Ru, Rh and Ir, and b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, z ≦ 5 atom. Those satisfying the relation of% can be used.

The soft magnetic alloy of the ring body 1
As an example of No. 4, (Fe_1-aZ_a)_b B_xM_y X_ZSet of
In the formula, Z is one or two of Ni and Co,
M is Ti, Zr, Hf, V, Nb, Ta, Mo, W
One or more elements selected from the group consisting of
And contains any one of Zr, Hf, and Nb, and X is C
One or more elements of r, Ru, Rh, Ir
And a ≦ 0.1, b = 75 to 93 atom%, x = 0.5 to
18 atom%, y = 4-9 atom%, Z ≦ 5 atom%
Anything that can be added can be used.

[0031] As a fifth example of the soft magnetic alloy constituting the ring body _{1, Fe b B x M y} X ' is represented by a composition formula of _t, M is, Ti, Zr, Hf, V , Nb, Ta , Mo,
X'is one or more elements selected from the group consisting of W, and contains any of Zr, Hf, and Nb,
Is one or more of Si, Al, Ge and Ga, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y
It is possible to use those satisfying the relations of 4 to 9 atom%, and t ≦ 4 atom%.

The soft magnetic alloy of the ring body 1
As an example of 6, (Fe_1-aZ_a)_b B_xM_y X '_tof
It is represented by a composition formula, and Z is one or two of Ni and Co.
Seed, M is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W
Yes, and contains any of Zr, Hf, and Nb, and X ′
Is one or more of Si, Al, Ge and Ga.
Yes, a ≦ 0.2, b = 75 to 93 atom%, x = 0.5 to 1
Satisfies the relationship of 8 atom%, y = 4 to 9 atom%, and t ≦ 4 atom%.
What can be used can be used.

[0033] As a seventh embodiment of the soft magnetic alloy constituting the ring body _{1, Fe b B x M y} X z X ' is represented by a composition formula of _t, M is, Ti, Zr, Hf, V , Nb , Ta, M
one or more elements selected from the group consisting of o and W, and containing any of Zr, Hf, and Nb,
X is one or more of Cr, Ru, and Ir, and X ′.
Is one or more of Si, Al, Ge and Ga, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y
= 4 to 9 atom%, z ≦ 5 atom%, and t ≦ 4 atom%.

The soft magnetic alloy of the ring body 1
As an example of No. 8, (Fe_1-aZ_a)_b B_xM_yX_z X '
_tZ is one of Ni and Co, and
2 types, M is Ti, Zr, Hf, V, Nb, Ta, M
one or more elements selected from the group consisting of o and W
Is prime and contains any of Zr, Hf, and Nb,
X is one or more of Cr, Ru and Ir, X '.
Is one or more of Si, Al, Ge and Ga.
Yes, a ≦ 0.2, b = 75 to 93 atom%, x = 0.5 to 1
8 atom%, y = 4 to 9 atom%, z ≦ 5 atom%, t = ≦ 4 raw
Those that satisfy the relationship of child% can be used.

A ninth example of the soft magnetic alloy forming the ring body 1 is represented by the composition formula of Fe _b B _x M _y T _z , where M is Ti, Zr, Hf, V, Nb, Ta, Mo,
It is one or more elements selected from the group consisting of W, and contains either or both of Zr and Hf, and T is a group consisting of Cu, Ag, Au, Pd, Pt, and Bi. One or more elements selected from b
≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
A material satisfying the relations of 10 atomic% and z ≦ 4.5 atomic% can be used.

The soft magnetic alloy of the ring body 1
As an example of 10, Fe_bB_xM_y T_zX_uComposition formula
, M is Ti, Zr, Hf, V, Nb, Ta,
One or more selected from the group consisting of Mo and W
It is an element and either or both of Zr and Hf
And T is Cu, Ag, Au, Pd, Pt, Bi
One or more elements selected from the group consisting of
X is selected from the group consisting of Cr, Ru, Rh, Ir
1 or 2 or more elements, and b ≦ 75 to 93
%, X = 0.5-18 atom%, y = 4-10 atom%, z ≦
Use those satisfying the relations of 4.5 atomic% and u ≦ 5 atomic%.
Can be

[0037] As an eleventh example of the soft magnetic alloy constituting the ring body _{1, (Fe 1-a Z} a) b B x M y T z
Z is either or both of Co and Ni, and M is Ti, Zr, Hf, V, Nb, Ta,
It is one or more elements selected from the group consisting of Mo and W, and contains one or both of Zr and Hf, and T is from Cu, Ag, Au, Pd, Pt, Bi. 1 or 2 or more elements selected from the group consisting of: a ≦ 0.1, b ≦ 75 to 93 atom%, x = 0.5 to 18
Those satisfying the relations of atomic%, y = 4 to 10 atomic%, and z ≦ 4.5 atomic% can be used.

[0038] As a twelfth embodiment of the soft magnetic alloy constituting the ring body _{1, (Fe 1-a Z} a) b B x M y T z
It is represented by the composition formula of X _u , Z is Co or Ni, or both, and M is Ti, Zr, Hf, V, Nb, T.
a, Mo, W, which is one or more elements selected from the group consisting of a, Mo and W, and contains one or both of Zr and Hf, and T is Cu, Ag, Au, Pd, Pt,
Bi is one or more elements selected from the group consisting of Bi, X is one or more elements selected from the group consisting of Cr, Ru, Rh, and Ir, and a ≦ 0. 1, b
≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
It is possible to use those satisfying the relations of 10 at%, z ≦ 4.5 at%, and u ≦ 5 at%.

A thirteenth example of the soft magnetic alloy constituting the ring body 1 is represented by the composition formula of Fe _b B _{x M'y} T _z , where M'is Ti, V, Nb, Ta, Mo, It is one or more elements selected from the group consisting of W and contains any one of Ti, Nb and Ta, and T is Cu,
One or more elements selected from the group consisting of Ag, Au, Pd, Pt, and Bi, and b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 Atomic%, z ≦
Those satisfying the relation of 4.5 atomic% can be used.

As a fourteenth example of the soft magnetic alloy constituting the ring body 1, it is represented by the composition formula of Fe _b B _{x M'y} T _z X _u , where M'is Ti, V, Nb, Ta, Mo, W
1 or 2 or more elements selected from the group consisting of and including any one of Ti, Nb and Ta, and T is
One or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and X is Cr, R
one or more elements selected from the group consisting of u, Rh and Ir, b ≦ 75 to 93 atom%, x = 6.5
18 atomic%, y = 4 to 10 atomic%, z ≦ 4.5 atomic%, u ≦
It is possible to use those satisfying the relationship of 5 atom%.

As a fifteenth example of the soft magnetic alloy forming the ring body 1, (Fe _1-a Z _a ) _b B _{x M'y} T _z
Z is one or both of Co and Ni, and M ′ is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W. Yes,
And contains any one of Ti, Nb, and Ta, and T is Cu, A
1 selected from the group consisting of g, Au, Pd, Pt and Bi
Or two or more elements, a ≦ 0.1, b ≦ 75 or more
A composition having a composition of 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, and z ≦ 4.5 atom% can be used.

As a sixteenth example of the soft magnetic alloy constituting the ring body 1, (Fe _1-a Z _a ) _b B _{x M'y} T _{z
Xu is} the composition, Z is Co or Ni, or both, and M'is Ti, V, Nb, Ta, M.
one or more elements selected from the group consisting of o and W, and containing any one of Ti, Nb, and Ta,
T is one or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and X is C
1 or 2 or more elements selected from the group consisting of r, Ru, Rh, and Ir, and a ≦ 0.1, b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, z ≦
A composition having a composition of 4.5 atomic% and u ≦ 5 atomic% can be used.

As the seventeenth example of the soft magnetic alloy forming the ring body 1, the ninth, tenth, eleventh, twelve, thirteenth,
In the soft magnetic alloy according to 14, 15, or 16, z =
It is set to 0.2 to 4.5 atom%.

In order to manufacture the ring 1, the alloy raw materials are mixed so as to have the above composition and melted to obtain an alloy melt, and then the melt is jetted onto a rotating metal roll made of copper or the like and rapidly cooled. Liquid quenching method. By this liquid quenching method, a ribbon-shaped ribbon in an amorphous state can be obtained. Once this thin strip is obtained, it is punched into a ring shape and used for the magnetic core. 500 for processed ribbon
It is preferable to perform an annealing treatment of cooling at ~ 700 ° C and then cooling. By this heat treatment, a fine crystal phase having a body-centered cubic structure mainly composed of Fe having an average grain size of 30 nm or less is precipitated in the amorphous phase, and the soft magnetic characteristics are improved.

In the Fe-based soft magnetic alloy of each composition described above,
The reason why the above composition is preferable. B is inevitably added to the alloy having the above composition. It is considered that B has the effect of increasing the amorphous-forming ability of the soft magnetic alloy and the effect of suppressing the formation of the compound phase that adversely affects the magnetic properties in the heat treatment step, and therefore B addition is essential. Originally, Zr and Hf hardly form a solid solution with α-Fe, but by rapidly cooling the entire alloy having the above composition to amorphize it, Zr and Hf are supersaturated as a solid solution, and a heat treatment to be performed thereafter. By adjusting the solid solution amount of these elements by partially crystallizing,
By precipitating as a fine crystalline phase, the soft magnetic properties of the obtained soft magnetic alloy can be improved and the magnetostriction of the ribbon can be reduced. Further, in order to precipitate the microcrystalline phase and suppress the coarsening of the crystal grains of the microcrystalline phase, it is considered necessary to leave the amorphous phase, which may hinder the crystal grain growth, at the grain boundary. . Furthermore, this amorphous phase forms a Fe-M-based compound that deteriorates soft magnetism by forming a solid solution with M elements such as Zr, Hf, and Nb that are discharged from α-Fe due to an increase in heat treatment temperature. It is thought to suppress. Therefore Fe-Zr
It is important to add B to the (Hf) -based alloy.

When the B content of X is 0.5 atomic% or less, the amorphous phase at the grain boundaries becomes unstable, and a sufficient effect cannot be obtained. When x exceeds 18 atom%, BM system and Fe-
The tendency to form B-based borides becomes strong, and as a result, heat treatment conditions for obtaining a fine crystal structure are restricted, and good soft magnetic characteristics cannot be obtained. The B content in each of the above composition formulas is preferably 10 at% or less in order to obtain a high saturation magnetic flux density of 1.5 T or more in a wide composition range, but the B content is 10 to 12 at%. In the range of 10, the electric resistance of the alloy increases and the eddy current loss at high frequencies can be reduced, so the range of 10 to 18 atomic% may be used. Thus, by adding an appropriate amount of B, the average crystal grain size of the fine crystal phase to be precipitated becomes 30 nm or less.

In the composition formulas of the soft magnetic alloys of the first to seventeenth examples, in order to easily obtain the amorphous phase, any one of Zr, Hf, and Nb having a particularly high amorphous forming ability is contained. There is a need. In addition, Zr, Hf, and Nb are a part of other 4A to 6A group elements of Ti, V, Ta, Mo, and W.
Can be replaced with In the alloy of the present invention, the M element is a relatively slow diffusion species, and the addition of the M element is considered to have the effect of reducing the growth rate of fine crystal nuclei, and is essential for the refinement of the structure. However, the addition amount of M element Y
Is 4 atomic% or less, the effect of reducing the nucleus growth rate is lost, and as a result, the crystal grain size becomes coarse and good soft magnetism cannot be obtained. In the case of the Fe-Hf-B type alloy, the average crystal grain size at Hf = 5 atom% is 13 nm, whereas the average grain size is Hf.
= 3 atom%, the grain size becomes 39 nm. Y content is 9 atom%
If it exceeds, the tendency of formation of MB-type or Fe-M-type compounds becomes large, good characteristics cannot be obtained, and the tape-shaped alloy after liquid quenching becomes brittle and must be processed into a predetermined core shape. Will be difficult. Therefore, the range of Y is 4 to 9 atom%.
And

In the composition formula of the soft magnetic alloy of the above example, F
The amount b of e, Co and Ni is 93 atomic% or less. This is because when b exceeds 93 atom%, it becomes difficult to obtain an amorphous single phase by the liquid quenching method, and as a result, the structure of the alloy obtained after the heat treatment becomes non-uniform, resulting in high magnetic permeability. This is because it cannot be obtained. Also, saturation magnetic flux density 1.5T
In order to obtain the above, b is more preferably 75 atomic% or more, and therefore b is set to 75 to 93 atomic%. Further, if it is 80 atomic% or more, the composition range in which the saturation magnetic flux density of 1.5 T or more is obtained is widened, which is preferable.

Among the additional elements, Nb and Mo have small absolute free energy of oxide formation, are thermally stable, and are difficult to oxidize during production. Therefore, when these elements are added, the manufacturing conditions are easy and the manufacturing cost is low, and the cost is also advantageous. When manufacturing the soft magnetic alloy by adding these elements, specifically, in the atmosphere while partially supplying an inert gas to the tip of the nozzle of the crucible used when quenching the melt. Can be manufactured in an atmosphere of air.

In the soft magnetic alloy according to any one of claims 10 to 17, at least one element or two or more elements selected from Cu and Ag and Au of the same group as these elements, and Pd, Pt and Bi are added. It is preferable that the content is 0.5 atomic% or less. If the added amount of these elements is less than 0.2 at%, it becomes difficult to obtain excellent soft magnetic characteristics by the above-mentioned annealing, but the permeability is improved and the saturation magnetic flux density is slightly increased by increasing the heating rate. In order to improve the content of these elements, the content of these elements is set to 0.2.
It can be at most atomic%. However, by setting the contents of these elements to 0.2 to 4.5 atomic%, excellent soft magnetic characteristics can be obtained without increasing the heating rate so much. More preferably, the content is 0.2 to 4.5 atomic%.

Among these elements, Cu is particularly effective. Although the mechanism by which addition of Cu, Pd, etc. significantly improves the soft magnetic properties is not clear, the crystallization temperature was measured by a differential thermal analysis method.
It was confirmed that the crystallization temperature of the alloy to which Cu, Pd, etc. were added was slightly lower than that of the alloy to which it was not added.
It is considered that this is because the compositional fluctuation in the amorphous phase was increased by the addition of the above elements, and as a result, the stability of the amorphous phase was lowered and the crystalline phase was easily precipitated.

Although the reasons for limiting the alloy elements according to the present invention have been described above, in order to improve the corrosion resistance other than these elements, Cr, Mo, or platinum group elements such as Ru, Rh and Ir are added. Is also possible. If these elements are added in an amount of more than 5 atomic%, the saturation magnetic flux density is significantly deteriorated, so the addition amount must be suppressed to 5 atomic% or less. If necessary, Y, a rare earth element, Zn,
Cd, Ga, In, Ge, Sn, Pb, As, Sb, B
i, Se, Te, Li, Be, Mg, Ca, Sr, Ba
It is also possible to adjust the magnetostriction of the laminated magnetic core A by adding such elements as. In addition, in the thin strip 1, H, N,
Needless to say, even if the unavoidable impurities such as O and S are contained to such an extent that the desired characteristics are not deteriorated, they can be regarded as the same as the composition of the soft magnetic alloy used in the present invention.

Next, the insulating layer interposed between the layers of the ring body 1 is provided for the purpose of preventing dielectric breakdown between the layers and reducing heat generation by reducing eddy current loss. Alumina or magnesia in tape, inorganic material film or inorganic material tape or water glass,
A material in which inorganic particles such as boron nitride, silica sand, and quartz are dispersed, or a material in which these inorganic particles are coated on a resin tape or baked after coating as needed is appropriately used. As a resin material for the insulating layer, a solvent-type varnish tape in which an alkyd resin is dissolved in an organic solvent, a solvent-free varnish tape made of styrene monomer and unsaturated polyester resin, an acrylic resin, a polyester resin, an epoxy ester resin And the like.

To cover the insulating layer on the ring body, for example, a method of depositing inorganic particles on the surface of the ring body 1 by electrophoresis, a method of coating by thermal spraying, a method of coating the inorganic layer by sputtering or vacuum deposition is used. A coating method or the like can be appropriately used. Alternatively, silica sand, quartz, or the like may be used alone or in a mixture to inject the resin into the insulating layer.

The laminated magnetic core A constructed as described above.
Is mainly composed of a soft magnetic alloy having the above composition, and therefore exhibits an extremely excellent saturation magnetic flux density of about 1.5 to 1.70 T (tesla), and core loss in a high frequency range of about 100 kHz is reduced. The amount of heat generated is small and the characteristics are not deteriorated. Therefore, it contributes to reduction in size and weight of the magnetic core.

2 and 3 show a second embodiment of the laminated magnetic core made of the Fe-based soft magnetic alloy according to the present invention. The laminated magnetic core C of this embodiment is The E-shaped iron cores 5 and 5 are arranged to face each other and combined, and a coil 7 is provided in the combined portion. Each of the iron cores 5 is formed by stacking E-shaped thin plates 5A punched out from a soft magnetic alloy ribbon of the above composition.
It is composed of a base portion 5a of the mold, leg portions 5b formed on both end sides thereof, and a protrusion portion 5c formed on the center side of the base portion 5a. In the iron cores 5 and 5, the legs 5b and the protrusions 5c are overlapped with each other, and the iron cores 5 and 5 are joined together with the adhesive layer 6 interposed therebetween, and the coil 7 is provided on the outer periphery of the overlapped portion of the protrusions 5c. It is wound and combined. The thin plate 5A
They are laminated in the state of being individually insulated by an insulating layer or an insulating coating as necessary, and the iron core 5,
Void portions may be provided intermittently in the adhesive layer 6 between the five.

Even in the laminated magnetic core C having the structure of this example, the thin plates 5 and 5 made of soft magnetic alloy exhibiting excellent soft magnetic characteristics.
Since these are laminated, they exhibit excellent soft magnetic properties and low core loss, contributing to the reduction in size and weight of the magnetic core. In addition, since the E-shaped iron cores 5 and 5 are vertically stacked to form a coil, the number of assembling steps is reduced as compared with the magnetic core in which E-shaped and I-shaped iron core thin plates are alternately combined one by one. In addition to facilitating the manufacture, the insulating layer 6 or the void portion is provided between the magnetic cores 5 and 5, so that the reduction rate of the magnetic permeability of the iron core at the time of DC superposition can be improved.

[0058]

EXAMPLE A material was prepared so as to have a composition shown in Table 1 below, which was melted in a crucible with a nozzle by high-frequency melting to obtain a molten alloy, which was then nozzled on a copper roll rotating at a high speed. Performed a liquid quenching method in which it was blown from
An alloy ribbon having a thickness of 15 to 20 μm was obtained. The obtained ribbon was punched into a ring shape having an outer diameter of 10 mm and an inner diameter of 6 mm, which was subjected to a heat treatment of heating at 600 to 650 ° C. for 1 hour, and then an insulating paper was attached for insulation. A magnetic core was formed by stacking 20 insulating-processed ring bodies, windings were performed, and AC magnetization test equipment (MMS manufactured by Ryowa Electronics Co., Ltd.)
0375) was used to measure the core loss. The results are shown in Table 1.

[0059]

[Table 1]

As is clear from the results shown in Table 1, the laminated magnetic core made of the Fe-based soft magnetic alloy according to the present invention is excellent in the range of 1.5 to 1.70 Tesla (T). It also showed a saturated magnetic flux density and exhibited extremely excellent characteristics with little core loss at 100 kHz.

Next, (Fe _0.985 Co _0.015 ) ₉₀ Zr ₇ B ₃
Using a sample of the following composition, this sample at 600 ℃,
FIG. 4 shows the result of obtaining the hysteresis loop of the sample obtained by annealing for 1 hour in the parallel magnetic field of 30 Oe. For comparison, FIG. 5 shows the results of obtaining a hysteresis loop of a sample obtained by annealing the same sample at 600 ° C. in a non-magnetic field for 1 hour. In the sample shown in FIG. 4, the squareness ratio (Br / Bs) is 0.91.
The squareness ratio was 0.72 in the sample shown in FIG. From the above, it has been clarified that the Fe-based soft magnetic alloy according to the present invention can be adjusted to a high squareness ratio by annealing at a high temperature in a magnetic field.

FIG. 6 shows the squareness ratios of various samples in which the magnetostriction was adjusted in the range of the numerical value of the composition ratio x from 0 to 0.05 in the samples of the composition (Fe _{1 -X} Co _X ) Zr ₇ B ₃ . The result of having measured change is shown. The stress was applied by impregnation with an epoxy resin, and the applied stress value was -140 MPa. From the results shown in FIG. 6, it is apparent that the squareness ratio can be controlled in a low range by controlling the magnetostriction. Therefore 0.
It is clear that it is easy to obtain a low squareness ratio of 3 or less.

FIG. 7 is a graph showing the composition of (Fe _1-X Co _X ) Zr ₇ B _{3 in} the samples of different annealing temperatures.
It shows the relationship between the added amount and the magnetostriction. As is clear from the results shown in FIG. 7, the sample of the composition according to the present invention is Co
It is apparent that the magnetostriction value can be easily adjusted by adjusting the content. From the above, it is apparent that in the sample having the composition according to the present invention, the magnetostriction can be adjusted by adjusting the Co content, and the squareness ratio can be adjusted accordingly.

FIG. 8 shows the frequency dependence of the core loss in the sample of the comparative composition Fe ₇₈ Si ₉ B ₁₃ and the sample of the composition of the present invention (Fe _0.985 Co _0.015 ) ₉₀ Zr ₇ B ₃ . The saturation magnetic flux density of each sample is also shown in the figure. The sample according to the present invention has Fe-Si- in all frequency regions.
The core loss is lower than that of the B-based amorphous alloy sample. Furthermore,
Fe-S in a sample with a saturation magnetic flux density of more than 1.5T
Since the i-B type amorphous alloy sample has a magnetostriction of the order of 10 ^-5 , it can be seen that the core loss after molding is significantly increased. On the other hand, in the sample having the composition according to the present invention, when the stress applied by the resin mold is large (σ = −140 MPa) and when the stress is small (σ = −9.6 MPa).
There is almost no difference from the case before resin molding. Therefore, in the case of the sample of the composition according to the present invention, the core loss hardly changes even when stress is applied by resin molding,
There is a characteristic that deterioration of the magnetic characteristics including the squareness ratio is unlikely to occur.

[0065]

As described above, the present invention is a Fe-based soft magnetic alloy having a special composition, and 50% or more of the structure is composed of crystal grains having an average crystal grain size of 30 nm or less.
It exhibits the above-mentioned high saturation magnetic flux density, has a small core loss, a small absolute value of magnetostriction, and can easily obtain a squareness ratio of 0.8 or more, or 0.3 or less. In particular, the alloy according to the present invention has excellent saturation magnetic flux density equal to or higher than that of the Fe-Si-B based amorphous alloy known to exhibit excellent soft magnetic properties. Above, it has a low core loss, and is less likely to cause deterioration of soft magnetic characteristics including the squareness ratio even when resin-molded. Further, in the composition according to the present invention, the magnetostriction can be easily adjusted by substituting a part of Fe with Co, and the squareness ratio can be easily adjusted by adjusting the magnetostriction. Therefore, it is possible to obtain a prism having a squareness ratio of 0.8 or more, or a squareness ratio of 0.3 or less. On the other hand, the squareness ratio can be adjusted by obtaining an Fe-based soft magnetic alloy having the composition according to the present invention from a molten alloy by a quenching method and then annealing it in a magnetic field. By this method, an Fe-based soft magnetic alloy having a high squareness ratio of 0.8 or more or an Fe-based soft magnetic alloy having a low squareness ratio of 0.3 or less can be easily produced. Therefore, it is possible to obtain an Fe-based soft magnetic alloy for a DC choke coil or a transformer core of a single-ended circuit that requires a low squareness ratio of 0.3 or less, and a high squareness ratio of 0.8 or more is required. A Fe-based soft magnetic alloy for a saturable core can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first example of a laminated magnetic core formed by using an Fe-based soft magnetic alloy according to the present invention.

FIG. 2 is an exploded perspective view showing a second example of a laminated magnetic core formed by using an Fe-based soft magnetic alloy according to the present invention.

FIG. 3 is a perspective view of the laminated magnetic core of the second example.

FIG. 4 is a diagram showing a hysteresis loop of a sample having a composition of (Fe _0.985 Co _0.015 ) ₉₀ Zr ₇ B _{3 and} annealed in a magnetic field at 600 ° C.

FIG. 5 is a diagram showing a hysteresis loop of a sample having a composition of (Fe _0.985 Co _0.015 ) ₉₀ Zr ₇ B _{3 and} annealed at 600 ° C. in a non-magnetic field.

FIG. 6 is a diagram showing a relationship between magnetostriction and squareness ratio before and after resin molding of a sample having a composition of (Fe _1-X Co _X ) Zr ₇ B ₃ .

FIG. 7 is a diagram showing a relationship between Co content and magnetostriction in a sample having a composition of (Fe _1-X Co _X ) Zr ₇ B ₃ .

FIG. 8 is a diagram showing the frequency dependence of the core loss of the Fe—Co—Zr—B system sample of the composition according to the present invention and the core loss of the Fe—Si—B system sample of the comparative composition.

[Explanation of symbols]

 1 ring body A laminated magnetic core C laminated magnetic core

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁶ Identification number Internal reference number FI Technical indication location C22C 38/14 (72) Inventor Kiyosaku Suzuki 1-7 Yukiya Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihiro Makino 1-7 Yukiya Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Ken Masumoto 3-8-22 Uesugi, Aoba-ku, Sendai-shi, Miyagi (72) ) Inventor Akihisa Inoue Kawauchi Mubanchi, Aoba-ku, Sendai City, Miyagi Prefecture Kawauchi Housing 11-806

Claims (19)

[Claims] 1. A squareness ratio of 0.8 or more or 0.3 or less, an absolute value of magnetostriction | λs | of less than 1.0 × 10 ⁻⁶ , Fe as a main component, and at least Ti,
Body center containing at least 50% of the structure having an average crystal grain size of 30 nm or less, containing one or more elements M and B selected from the group consisting of Zr, Hf, V, Nb, Ta, Mo and W An Fe-based soft magnetic alloy characterized by comprising fine crystal grains of cubic structure. 2. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. Fe _b B _x M _y where M is, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and containing any one of Zr, Hf, and Nb, b = 75 to 93 atom%, x = 0.5 to 18 Atomic%, y =
It is 4 to 9 atom%. 3. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y however Z is Ni, 1 kind or two kinds of Co, M is
One or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and containing any one of Zr, Hf and Nb, and a ≦ 0. .
2, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y =
It is 4 to 9 atom%. 4. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. Fe _{b B x} M _{y X Z} where M is, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and contains any one of Zr, Hf, and Nb, and X is one or two of Cr, Ru, Rh, and Ir. Species or more, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, and Z ≦ 5 atom%. 5. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X Z However, Z is Ni, 1 kind or two kinds of Co, M is T
i, Zr, Hf, V, Nb, Ta, Mo and W, which are one or more elements selected from the group consisting of:
Contains any one of Zr, Hf, and Nb, and X is Cr, R
One or more elements of u, Rh, and Ir, and a ≦ 0.2, b = 75 to 93 atom%, x = 0.5 to 18
Atomic%, y = 4 to 9 atomic%, Z ≦ 5 atomic%. 6. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{Fe b B x M y X '} t where M is, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and containing any of Zr, Hf, and Nb,
X ′ is one or more of Si, Al, Ge and Ga, and b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, t ≦ 4. It is atomic%. 7. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X 't however Z is Ni, 1 kind or two kinds of Co, M is
Ti, Zr, Hf, V, Nb, Ta, Mo, W is one or more elements selected from the group consisting of Zr, Hf, Nb, and X'is Si. ，
One or more of Al, Ge, and Ga, a
≦ 0.2, b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 9 atom%, and t ≦ 4 atom%. 8. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{Fe b B x M y X z} X 't M ; however, Ti, Zr, Hf, V , Nb, Ta, M
one or more elements selected from the group consisting of o and W, and containing any of Zr, Hf, and Nb,
X is one or more of Cr, Ru, and Ir, and X ′.
Is one or more of Si, Al, Ge and Ga, b = 75 to 93 atom%, x = 0.5 to 18 atom%,
y = 4 to 9 atomic%, z ≦ 5 atomic%, and t = ≦ 4 atomic%. 9. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. _{(Fe 1-a Z a)} b B x M y X z X 't however Z may, Ni, 1 kind or two kinds of Co, M is T
i, Zr, Hf, V, Nb, Ta, Mo and W, which are one or more elements selected from the group consisting of:
Zr, Hf, or Nb is included, and X is Cr, Ru,
One or more of Ir, X'is Si, Al, G
one or more of e and Ga, and a ≦ 0.2,
b = 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
9 atomic%, z ≦ 5 atomic%, and t = ≦ 4 atomic%. 10. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. Fe _{b B x} M _y T _z where, M is, Ti, Zr, Hf, V , Nb, Ta, M
One or two or more elements selected from the group consisting of o and W, and contains either or both of Zr and Hf, and T is Cu, Ag, Au, Pd, Pt, or Bi. One or more elements selected from the group consisting of
b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
10 atomic% and z ≦ 4.5 atomic%. 11. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. _{Fe b B x M y T z} X u where, M is, Ti, Zr, Hf, V , Nb, Ta, M
One or two or more elements selected from the group consisting of o and W, and contains either or both of Zr and Hf, and T is Cu, Ag, Au, Pd, Pt, or Bi. One or more elements selected from the group consisting of
X is 1 selected from the group consisting of Cr, Ru, Rh, and Ir.
One or two or more elements, b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%, u ≦ 5 atomic%. 12. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. _{(Fe 1-a Z a)} b B x M y T z where, Z is Co, a or Ni,
M is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and
And includes either or both of Zr and Hf, and T
Is one or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and a ≦ 0.1,
b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to
10 atomic% and z ≦ 4.5 atomic%. 13. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. _{(Fe 1-a Z a)} b B x M y T z X u where, Z is Co, a or Ni,
M is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and
And includes either or both of Zr and Hf, and T
Is one or more elements selected from the group consisting of Cu, Ag, Au, Pd, Pt and Bi, and X is Cr,
1 or 2 selected from the group consisting of Ru, Rh and Ir
More than one element, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 0.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%, u ≦ 5 atomic%. 14. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. Fe _b B _x M ′ _y T _z However, M ′ is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti, Nb, Including any of Ta, T is Cu,
One or more elements selected from the group consisting of Ag, Au, Pd, Pt, and Bi, and b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 Atomic%, z ≦
It is 4.5 atomic%. 15. The Fe-based soft magnetic alloy according to claim 1 or 2, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula. Fe _b B _x M ′ _y T _z X _u However, M ′ is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti, Containing either Nb or Ta, T is Cu,
One or more elements selected from the group consisting of Ag, Au, Pd, Pt, Bi, and X is Cr, Ru, R
One or more elements selected from the group consisting of h and Ir, b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, z ≦ 4. 0.5 atomic% and u ≦ 5 atomic%. 16. The F-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. _{(Fe 1-a Z a)} b B x M 'y T z where, Z is Co, either or both the Ni,
M'is one or more elements selected from the group consisting of Ti, V, Nb, Ta, Mo and W, and Ti,
Containing either Nb or Ta, T is Cu, Ag, Au,
1 or 2 selected from the group consisting of Pd, Pt and Bi
More than one element, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 6.5 to 18 atom%, y = 4 to 10 atom%, z ≦
It is 4.5 atomic%. 17. The F according to claim 1, wherein the Fe-based soft magnetic alloy has a composition represented by the following formula.
e-based soft magnetic alloy. _{(Fe 1-a Z a)} b B x M 'y T z X u where, Z is Co, either Ni, or is both, M' is Ti, V, Nb, Ta, Mo, and W One or more elements selected from the group consisting of
It contains any one of Ti, Nb and Ta, and T is Cu, Ag,
One or more elements selected from the group consisting of Au, Pd, Pt and Bi, and X is Cr, Ru, Rh, I.
1 or 2 or more elements selected from the group consisting of r, a ≦ 0.1, b ≦ 75 to 93 atom%, x = 6.5 to 1
8 atom%, y = 4 to 10 atom%, z ≦ 4.5 atom%, u ≦ 5
It is atomic%. 18. In the Fe-based soft magnetic alloy, z =
2. The content is 0.2 to 4.5 atomic%.
The Fe-based soft magnetic alloy according to any one of 0, 11, 12, 13, 14, 15, 16 or 17. 19. A method for adjusting the squareness ratio of an Fe-based soft magnetic alloy having the composition according to claim 1, wherein the soft magnetic alloy having the composition is formed from a molten alloy by a quenching method. A method for adjusting the squareness ratio of an Fe-based soft magnetic alloy, which comprises adjusting the squareness ratio by annealing in a magnetic field.