JP2000144349A - Iron base soft magnetic alloy - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the soft magnetic properties such as permeability or the like in a high-frequency region of an alloy while its low magnetostriction and high saturation magnetic flux density are maintained by allowing it to have a specified elemental compsn. and controlling its saturation magnetic flux density to a specified value. SOLUTION: This alloy has saturation magnetic flux density of >=1.5 T and has a compsn. represented by (Fe1-aZa)bBMyXz, where Z denotes one or more kinds of Ni and Co, M denotes one or more kinds among Ti, Zr, Hf, V, Nb, Ta, Mo and W, X denotes one or more kinds of P and C, (a), (b), (x), (y) and (z) showing the compositional ratios satisfy, by atomic %, 0<=a<=0.2, 75<=b<=93, 0.5<=x<=18, 4<=y<=9 and z<=5. Since the alloy has a structure consisting of essential fine crystalline phases composed of the crystal grains of Fe with a body-centered cubic structure of <=30 nm average crystal grain size and amorphous phases, magnetostriction is low, and it exhibits excellent soft magnetic properties as well as high saturation magnetic flux density.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an Fe-based soft magnetic alloy used for a magnetic head, a transformer, a choke coil and the like.

[0002]

2. Description of the Related Art The properties generally required of a soft magnetic alloy used for a magnetic head, a transformer, a choke coil and the like are as follows. High saturation magnetic flux density. High permeability. Low coercive force. Therefore, when manufacturing a soft magnetic alloy or a magnetic head, material research is being conducted on various alloy systems from these viewpoints. Conventionally, crystalline alloys such as sendust (Fe—Si—Al alloy), permalloy (Fe—Ni alloy), and silicon steel have been used for the above-mentioned applications.
e-based and Co-based amorphous alloys are also being used.

[0003]

However, in the case of a magnetic head, a more suitable magnetic material for a high-performance magnetic head is desired in order to cope with a higher coercive force of a magnetic recording medium accompanying a higher recording density. . Further, in the case of a transformer or a choke coil, miniaturization is required in accordance with miniaturization of electronic devices, and high-performance magnetic materials are desired. However,
Although Sendust described above has excellent soft magnetic properties, it has a drawback that the saturation magnetic flux density is as low as about 11 kG. Similarly, Permalloy also has a saturation magnetic flux density as low as about 8 kG in an alloy composition having excellent soft magnetic properties. However, silicon steel has a high saturation magnetic flux density, but is inferior in soft magnetic properties.

Further, among the above-mentioned amorphous alloys, although the Co-based alloy has excellent soft magnetic properties, the saturation magnetic flux density is insufficient at about 10 kG. Further, the Fe-based alloy has a high saturation magnetic flux density, and a magnetic flux density of 15 kG or more can be obtained, but the soft magnetic properties are insufficient. Further, the thermal stability of the amorphous alloy is not sufficient, and there is still an unsolved aspect. As described above, it is difficult to combine high saturation magnetic flux density with excellent soft magnetic characteristics.

Therefore, the present inventors have proposed a high saturation magnetic flux density Fe-based soft magnetic alloy which has solved the above-mentioned problems in Japanese Patent Laid-Open No. 5-9332.
No. 49 (Japanese Patent Application No. 2-108308) filed a patent application. One of the alloys according to this patent application has a high saturation magnetic flux density F characterized by a composition represented by the following formula:
e-based soft magnetic alloy. _{(Fe 1-f Co f)} g B h T 1i T 2j where T ₁ is, Ti, Zr, Hf, V , Nb, Ta, M
one or two or more elements selected from the group consisting of o and W, and contains one or both of Zr and Hf, and T ₂ is Cu, Ag, Au, Ni, Pd, Pt One or more elements selected from the group consisting of
≦ 0.05, g ≦ 92 at%, h = 0.5 to 16 at%, i
= 4 to 10 atomic%, and j = 0.2 to 4.5 atomic%.

Another one of the alloys according to the patent application is a high saturation magnetic flux density alloy having a composition represented by the following formula. Fe _g B _h T _1i T _2j However T1 is, Ti, Zr, Hf, V , Nb, Ta, M
o, one or two or more elements selected from the group consisting of W, and containing either or both of Zr and Hf, and T2 is selected from Cu, Ag, Au, Ni, Pd, and Pt. One or more elements selected from the group consisting of: g
≦ 92 at%, h = 0.5 to 16 at%, i = 4 to 10 at%, j = 0.2 to 4.5 at%.

Next, the inventors of the present invention have proposed, as an advanced alloy of the above-mentioned alloy, Japanese Patent Application Laid-Open No. 4-333546 (Japanese Patent Application No. 2-2).
No. 30135) filed a patent application for an alloy having the following composition. One of the alloys according to this patent application
One was an alloy having a high saturation magnetic flux density characterized by having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _y where Q is either or both of Co and Ni, and T
Is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo, and W, and contains one or both of Zr and Hf; ≤
0.05, b ≦ 93 at%, x = 0.5 to 8 at%, y =
4 to 9 atomic%.

[0008] Another one of the alloys according to the patent application is characterized by having a composition represented by the following formula. Fe _b B _x T _y where T is, Ti, Zr, Hf, V , Nb, Ta, Mo,
W is one or more elements selected from the group consisting of W, and contains one or both of Zr and Hf;
≦ 93 at%, x = 0.5 to 8 at%, y = 4 to 9 at%.

In recent years, however, electronic devices have been used at higher frequencies in accordance with higher efficiency. However, Japanese Patent Application Laid-Open No. 5-93249 (Fe
_{1-f Co f) g B} h T 1i T 2j become soft magnetic alloy of the composition, F
e _g B _h T _1i T _2j become soft magnetic alloy of the composition, according to JP-4-Patent _{333546 (Fe 1-a Q a} ) b B x T y becomes soft magnetic alloy of the composition, Fe _{b B x} T _y The soft magnetic alloy having the following composition has a problem that the magnetic permeability is low in a high frequency region around 100 kHz and the core loss is large in the high frequency region. Therefore, the present inventors have further studied the soft magnetic alloy described in Japanese Patent Application Laid-Open No. 5-93249, filed earlier, and among the elements added to these systems, S
JP-A-9-3608 discloses an Fe-based soft magnetic alloy capable of reducing core loss in a high frequency region by dissolving i, Al, Ge, and Ga in a bcc phase containing Fe as a main component. No.). However, the Fe-based soft magnetic alloy described in JP-A-9-3608 has problems that the magnetostriction increases and the saturation magnetic flux density decreases.

The present invention has been made in view of the above circumstances, and is an Fe-based soft magnetic alloy having excellent soft magnetic properties such as magnetic permeability in a high frequency range and low core loss while maintaining low magnetostriction and high saturation magnetic flux density. The task is to provide

[0011]

In order to achieve the above object, the present invention employs the following constitution. The Fe-based soft magnetic alloy of the present invention is represented by the following composition formula, and has a saturation magnetic flux density (Bs) of 1.5 T (tesla) or more. _{(Fe 1-a Z a)} b B x M y X z however, Z is Ni, 1 or two or more elements of Co, M is Ti, Zr, Hf, V, Nb, Ta, Mo, W X is one or two elements of P and C, and a, b,
x, y, and z are atomic% and 0 ≦ a ≦ 0.2, 75 ≦ b ≦ 9
3, 0.5 ≦ x ≦ 18, 4 ≦ y ≦ 9, z ≦ 5.

The Fe-based soft magnetic alloy of the present invention is represented by the following composition formula and has a saturation magnetic flux density (Bs) of 1.5 T
(Tesla) or more. _{(Fe 1-a Z a)} b B x M y X z T t However, Z is Ni, 1 or two or more elements of Co, M is Ti, Zr, Hf, V, Nb, Ta, Mo , W, one or more elements selected from W, X is one or two elements of P and C, and T is one or more elements selected from Si, Al, Ge, Ga A, b, x, y, z, and t, which are elements and indicate composition ratios, are atomic%, and 0 ≦ a ≦ 0.
2, 75 ≦ b ≦ 93, 0.5 ≦ x ≦ 18, 4 ≦ y ≦ 9,
z ≦ 5 and t ≦ 5.

[0013] In the Fe-based soft magnetic alloy of the present invention,
One or two elements X of P and C are added to a (Fe or Fe-Z) -BM-based alloy or a (Fe or Fe-Z) -BMT-based alloy. Thereby, soft magnetic characteristics such as magnetic permeability in a high frequency region of 100 kHz or more can be increased without deteriorating the saturation magnetic flux density and magnetostriction. This is because P and C have a strong affinity with the above-mentioned M, particularly with Zr, and therefore, bcc containing Fe as a main component is used.
Phase does not form a solid solution in the phase (body-centered cubic phase) but remains in the amorphous phase.
In the same manner as described above, the decrease in Bs can be reduced, the specific resistance can be increased, and the soft magnetic characteristics such as the magnetic permeability at high frequencies can be improved. Further, P and C are inexpensive. By adding P and / or C, even if the addition amount of B or M is reduced, as described above, the saturation magnetic flux density and the magnetostriction are not deteriorated, and 100 kHz. Since the soft magnetic characteristics such as the magnetic permeability at the above high frequency can be improved, the cost can be reduced. Further, the addition amount of X is 5 atomic% or less, preferably 0.5 atomic% or more and 5 atomic% or less, and more preferably 0.5 atomic% or more and 3 atomic% or less. If the amount of X is less than 0.5 atomic%, the effect of increasing the specific resistance cannot be obtained, and if it exceeds 5 atomic%, the saturation magnetic flux density and the magnetic permeability deteriorate, which is not preferable.

Further, in the Fe-based soft magnetic alloy of the present invention, M in the above composition formula preferably contains at least one of Zr and Nb. M in the above composition formula is Z
When at least one of r and Nb is contained, the cost can be reduced while maintaining the effect of reducing the growth rate of the fine crystal nuclei and the ability to form the amorphous.

Further, the Fe-based soft magnetic alloy of the present invention exhibits a saturation magnetic flux density of 1.6 T (tesla) or more by adjusting the addition amount of each constituent element and the heat treatment conditions at the time of manufacturing described later. Is what you can do. If the saturation magnetic flux density of the obtained soft magnetic alloy is less than 1.5 T, the core material of a high frequency transformer manufactured using the alloy will cause magnetic saturation, and the soft magnetic characteristics will be reduced, which is not preferable. .

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the Fe-based soft magnetic alloy of the present invention will be described. The Fe-based soft magnetic alloy of the present invention is represented by any one of the following composition formulas and has a saturation magnetic flux density of 1.5 T or more. _{(Fe 1-a Z a)} b B x M y X z (Fe 1-a Z a) b B x M y X z T t

However, Z is one or more of Ni and Co.
More than one kind of element, M is Ti, Zr, Hf, V, Nb, T
one or more elements of a, Mo, W, X
Is one or two elements of P and C, and a, b, x, y, and z indicating the composition ratio are atomic%, and 0 ≦ a ≦ 0.
2, 75 ≦ b ≦ 93, 0.5 ≦ x ≦ 18, 4 ≦ y ≦ 9,
z ≦ 5. Further, the Fe-based soft magnetic alloy of the present invention includes:
T may be added to the above Fe or Fe-Z, B, M, and X, in which case T is Si, Al, Ge, Ga
And at least one element selected from the group consisting of: and t representing the composition ratio is t ≦ 5 in atomic%.

The Fe-based soft magnetic alloy of the present invention having the above composition has a body-centered cubic structure (bcc
Structure) mainly composed of a microcrystalline phase composed of Fe crystal grains,
Since it is composed of a microcrystalline phase and an amorphous phase, it has low magnetostriction, exhibits a high saturation magnetic flux density of 1.5 T or more, exhibits excellent magnetic permeability in a high frequency region, and has low core loss. Therefore, it is suitable as a core material for high frequency transformers and the like. Further, the Fe-based soft magnetic alloy of the present invention exhibits a saturation magnetic flux density (Bs) of 1.6 T (tesla) or more by adjusting the amount of each constituent element added and the heat treatment conditions during production described later. be able to. If the saturation magnetic flux density of the obtained soft magnetic alloy is less than 1.5 T, the core material of a high frequency transformer manufactured using the alloy will cause magnetic saturation, and the soft magnetic characteristics will be reduced, which is not preferable. .

In the composition system of the Fe-based soft magnetic alloy used in the present invention, the main components, Fe, Co, and Ni, are elements responsible for magnetism and are required to obtain a high saturation magnetic flux density and excellent soft magnetic characteristics. is important.

In the soft magnetic alloys having these compositions, F
The value of b indicating the amount of e added, or Fe, Co and / or
Alternatively, the value of b indicating the total amount of Ni added is 93 atomic%.
It is as follows. If b exceeds 93 atomic%, it is difficult to obtain an amorphous single phase by the liquid quenching method, and as a result, the structure of the alloy obtained after the heat treatment becomes non-uniform and high magnetic permeability cannot be obtained. It is not preferable. B is 75
If it is less than atomic%, a saturation magnetic flux density (Bs) of 1.5 T or more cannot be obtained, which is not preferable. Therefore, the range of b is set to 75 atomic% ≦ b ≦ 93 atomic%. Further, a part of Fe may be replaced by one or more elements Z of Co and Ni for adjustment of magnetostriction and the like. In this case, preferably, the content of Fe is 25% or less. Good. Outside this range, the magnetic permeability deteriorates. Therefore, the composition ratio a of Z in the above composition formula is preferably in the range of 0.2 or less.

B has the effect of increasing the ability of the soft magnetic alloy to form an amorphous phase, the effect of preventing the crystal structure from becoming coarse, and the effect of suppressing the formation of a compound phase that adversely affects magnetic properties in the heat treatment step. Conceivable. Also, Zr, Hf,
Nb is considered to hardly form a solid solution with α-Fe. However, by rapidly cooling the alloy to make it amorphous, Zr and Hf or Nb are dissolved in a supersaturated state. By adjusting the amount of solid solution to partially crystallize and precipitate as a fine crystalline phase, there is an effect of improving the soft magnetic properties of the obtained soft magnetic alloy. Further, in order to precipitate a fine crystal phase and to suppress the coarsening of the crystal grains of the fine crystal phase, it is considered that it is necessary to leave an amorphous phase which may be an obstacle to crystal grain growth at the grain boundary. . Further, the grain boundary amorphous phase is a Fe-M-based compound that deteriorates soft magnetic properties by forming a solid solution with elements M such as Zr, Hf, and Nb discharged from α-Fe by increasing the heat treatment temperature. It is thought to suppress generation. Therefore, Fe-Zr (Hf, N
It is important to add B to the b) type alloy.

If x, which indicates the amount of B added, is less than 0.5 atomic%, the amorphous phase at the grain boundary becomes unstable, so that a sufficient effect of addition cannot be obtained. When x exceeds 18 atomic%,
In the BM system and the Fe-B system, the tendency of boride formation is increased, heat treatment conditions for obtaining a fine crystal structure are restricted, and good soft magnetic characteristics cannot be obtained. By appropriately adding the amount of B as described above, the average crystal grain size of the precipitated fine crystal phase can be adjusted to 30 nm or less.

In order to easily obtain an amorphous phase,
It is preferable to include any of Zr, Hf, and Nb, which have particularly high amorphous forming ability.
It can be replaced with any of Ti, V, Ta, Mo, and W among A to 7A group elements. Zr, Hf, N
Among b, Hf is a very expensive element, and therefore it is more preferable to include one of Zr and Nb in consideration of the raw material cost. Such an element M is a relatively slow diffusion species, and the addition of the element M is considered to have an effect of reducing the growth rate of fine crystal nuclei and an ability to form an amorphous phase, and is effective in making the structure finer.

If y, which indicates the amount of the element M added, is less than 4 atomic%, the effect of reducing the nucleus growth rate is lost, and the crystal grain size becomes coarse, so that good soft magnetism cannot be obtained. Fe-Hf-B
In the case of a base alloy, the average crystal grain size at Hf = 5 at% is 13
In contrast, when Hf = 3 atomic%, the particle size is increased to 39 nm. If the value of y, which indicates the amount of the element M, exceeds 9 atomic%, the tendency of forming MB-based or Fe-M-based compounds increases, and good characteristics cannot be obtained.

Among them, Nb, Mo, and W have small absolute values of free energy of formation of oxides, are thermally stable, and hardly generate oxides. Therefore, when a soft magnetic alloy is produced by adding these elements, the entire atmosphere during the production is not an inert gas atmosphere but an atmosphere in the air, or a crucible nozzle used for rapidly cooling the molten metal. Since the production can be performed in the atmosphere while supplying an inert gas to the tip portion, the production conditions become easy, and the magnetic core material and the like used for the above-mentioned applications can be produced at low cost.

In order to increase soft magnetic characteristics such as magnetic permeability in a high frequency region of 100 kHz or more without deteriorating the saturation magnetic flux density and magnetostriction, one or two elements X of P and C are contained. Have been. Such an element X is
Since it has a strong affinity with the above-mentioned element M, particularly with Zr, it does not form a solid solution with a bcc phase (body-centered cubic phase) containing Fe as a main component, but remains in an amorphous phase. And Bs
Can be reduced, the specific resistance can be increased, and soft magnetic characteristics such as magnetic permeability at high frequencies can be improved. Further, P and C are inexpensive, and these P and / or
Or, by adding C, even if the addition amount of B or M is reduced, as described above, the soft magnetic characteristics such as the magnetic permeability at a high frequency of 100 kHz or higher are maintained without deteriorating the saturation magnetic flux density and the magnetostriction. Therefore, the cost can be kept low. Z indicating the amount of X added is 5 atomic%
Or less, preferably 0.5 to 5 atomic%, more preferably 0.5 to 3 atomic%. If the amount of X is less than 0.5 atomic%, the effect of increasing the specific resistance cannot be obtained, and if it exceeds 5 atomic%, the saturation magnetic flux density and the magnetic permeability deteriorate, which is not preferable.

The soft magnetic alloy of the present invention includes Si, A
one or more elements T of l, Ge, and Ga
May be contained at 5 atomic% or less. These are known as metalloid elements, and form a solid solution in a body-centered cubic phase mainly containing Fe. If the content of these elements exceeds 5 atomic%, it is not preferable because the magnetostriction increases, the saturation magnetic flux density decreases, or the magnetic permeability decreases.

The element T has the effect of increasing the electric resistance of the soft magnetic alloy and reducing the iron loss, while Al has a great effect. Ge and Ga have the effect of reducing the size of crystal grains. Therefore, among Si, Al, Ge, and Ga, Al, Ge, and Ga have a particularly large effect.
It is more preferable to add l, Ge, and Ga alone or to add Al and Ge, Al and Ga, Ge and Ga, or Al, Ge, and Ga in combination.

In the soft magnetic alloy having the above composition,
In addition, Y, La, Ce, Pr, Nd, P
m, Sm, Eu, Gd, Tb, Dy, Ho, Er, T
m, Yb, Lu, Zn, Cd, In, Sn, Pb, A
s, Sb, Bi, Se, Te, Li, Be, Mg, C
The magnetostriction of the soft magnetic alloy can be adjusted by adding elements such as a, Sr, and Ba.

In the soft magnetic alloy having the above composition, H,
Even if unavoidable impurities such as N, O, and S are contained to such an extent that desired characteristics are not deteriorated, it is needless to say that the composition of the Fe-based soft magnetic alloy used in the present invention can be regarded as the same.

[0031] To produce the Fe-based soft magnetic alloy of the present invention, for _{example, (Fe 1-a Z a} ) b B x M y X z becomes amorphous alloy or crystalline containing an amorphous phase in the composition Alloy (however, Z
Is one or more elements of Ni and Co, and M is T
1 selected from i, Zr, Hf, V, Nb, Ta, Mo, W
X is one or two elements of P and C, and a, b, x, y, and z indicating the composition ratio are atomic%, and 0 ≦ a ≦ 0.2. , 75 ≦ b ≦ 93, 0.5 ≦
x ≦ 18, 4 ≦ y ≦ 9, and z ≦ 5. ) Or (Fe
_{1-a Z a) b B} x M y X z T t becomes amorphous alloy or crystalline alloy containing an amorphous phase in the composition (although, Z is Ni, 1 or two or more elements of Co , M is Ti, Zr, H
one or more elements selected from f, V, Nb, Ta, Mo, W; X is one or two elements of P and C;
T is one or more elements selected from Si, Al, Ge, and Ga, and indicates a, b, x, y, z,
t is atomic%, 0 ≦ a ≦ 0.2, 75 ≦ b ≦ 93, 0.
5 ≦ x ≦ 18, 4 ≦ y ≦ 9, z ≦ 5, t ≦ 5. )
Is melted by means such as arc melting or high frequency induction melting and then rapidly cooled to produce a ribbon mainly composed of an amorphous phase. Here, as a specific method for producing a ribbon having the above composition, a fluid cooling method as described in JP-A-4-323351, a quenching method using a single roll, or the like can be used. it can.

Then, by heat-treating the produced ribbon, a part of the amorphous phase of the ribbon is crystallized, and the amorphous phase and a fine bcc-structure Fcc having an average grain size of 30 nm or less are formed.
A structure mixed with a fine crystal phase composed of crystal grains of e is obtained, and the desired Fe-based soft magnetic alloy is obtained.

The heat treatment resulted in the precipitation of a fine crystal structure composed of fine Fe crystal grains having an average crystal grain size of 30 nm or less and having a bcc structure. It is a tissue that heats up,
This is because, at a certain temperature or higher, a fine crystal phase composed of crystal grains having a body-centered cubic structure containing Fe as a main component and having an average crystal grain size of 30 nm or less is precipitated. The temperature at which the fine crystal phase composed of the Fe crystal grains having the bcc structure precipitates is about 480 to 550 ° C., depending on the composition of the alloy. At a temperature higher than the temperature at which the fine crystal phase of Fe precipitates, Fe ₃
B or Fe ₃ Zr when the alloy contains Zr
A compound phase which deteriorates soft magnetic properties such as The temperature at which such a compound phase precipitates is about 740 to 810 ° C., depending on the composition of the alloy.

Therefore, in the present invention, the holding temperature when heat-treating the amorphous alloy ribbon or the like is 480 ° C. to 810 ° C.
In the range, a fine crystal phase mainly composed of Fe crystal grains having a body-centered cubic structure is preferably precipitated, and is preferably set according to the composition of the alloy so that the compound phase is not precipitated.

The heating rate when the temperature is raised to the above-mentioned heat treatment temperature is preferably in the range of 20 to 200 ° C./min.
More preferably, the temperature is in the range of 200 ° C./min. If the heating rate is low, the production time will be long. Therefore, it is preferable that the heating rate is fast. However, the upper limit is about 200 ° C./min from the viewpoint of the performance of the heating device.

The time for keeping the amorphous alloy ribbon or the like at the above-mentioned holding temperature can be 0 to 60 minutes. Depending on the composition of the alloy, it is 0 minutes, that is, the temperature is lowered immediately after the temperature rise, and the holding time is reduced. Even without it, the desired effect can be obtained. Further, if the holding time is longer than 60 minutes, the magnetic properties are not improved, and the manufacturing time is prolonged and productivity is deteriorated, which is not preferable. In particular, in the case of a composition not containing Si, the intended effect can be obtained even if the holding time is 10 minutes or less. This is because when Si is added,
This is because it is necessary to sufficiently dissolve Si in Fe and to increase the holding time.

[0037]

The present invention will be described more specifically with reference to examples and comparative examples. [Example 1-3] to adjust the feed so that the (sample of _{Preparation) Fe 88 Zr 7 B 3 P} 2 having a composition, it was high-frequency melting in an N ₂ gas atmosphere to obtain a master alloy. Using a liquid quenching method in which the mother alloy is melted at high frequency in a nozzle in a N ₂ gas atmosphere, and the molten metal is blown out onto a copper roll rotating at a high speed from the nozzle to quench rapidly, the thickness is about 20 to 40 μm and the width is About 15mm
Alloy ribbon was obtained. Next, the obtained ribbon is 10 m in outer diameter.
Approximately fifteen sheets each having a diameter of 6 mm and an inner diameter of 6 mm were stacked, and heat-treated in a magnetic field to obtain samples (Examples 1 to 3). The conditions of the heat treatment in the magnetic field are as follows: a heating rate of 180 ° C./min, and a heat treatment temperature of 560 ° C. (833K) to 660 ° C. (93 ° C.).
3K), the holding time at this heat treatment temperature was 5 minutes, and the cooling rate (cooling rate) was 180 ° C./min. Comparative Example 1 A sample (Comparative Example 1) was obtained in the same manner as described above, except that, for comparison, a raw material adjusted to have a composition of Fe ₉₀ Zr ₇ B ₃ was used.

[Measurement] The obtained samples of Examples 1 to 3 and the sample of Comparative Example 1 were measured for saturation magnetic flux density (Bs) and specific resistance (R). Table 1 shows the results.

[0039]

[Table 1]

As is clear from the results shown in Table 1, the samples of Examples 1 to 3 using the alloy ribbon having the composition of Fe ₈₈ Zr ₇ B ₃ P ₂ have a high specific resistance and a high saturation magnetic flux. It can be seen that a high density of 1.59 T or more was obtained. Further, it can be seen that the sample of Example 2 in which the heat treatment temperature was 610 ° C. had a higher saturation magnetic flux density than the sample of Comparative Example 1 using the alloy ribbon having the composition of Fe ₉₀ Zr ₇ B ₃ .
When the magnetostriction (λs) of the samples of Examples 1 to 3 was measured, it was low magnetostriction and there was no problem in practical use.

The frequency dependence of the magnetic permeability (μ) of the obtained sample was measured by an inductance method. Table 2 shows the results.
Shown in

[0042]

[Table 2]

As is apparent from the results shown in Table 2, the samples of Examples 1 and 2 using the alloy ribbon having the composition of Fe ₈₈ Zr ₇ B ₃ P ₂ are made of Fe ₉₀ Zr ₇ B ₃ . Compared to the sample of Comparative Example 1 using the alloy ribbon having the composition, the magnetic permeability in the high frequency region of 100 kHz or higher is higher, and it is understood that the soft magnetic characteristics in the high frequency region are excellent. Further, the sample of Example 3 having a heat treatment temperature of 660 ° C. has a higher magnetic permeability in the high frequency region of 100 kHz to 1000 kHz than the sample of Comparative Example 1, and has excellent soft magnetic characteristics in the high frequency region. You can see that.

The core loss of the obtained sample at 100 kHz was measured using an AC magnetization tester (MMS03759, manufactured by Ryowa Electronics Co., Ltd.). The results are shown in Table 3.

[0045]

[Table 3]

As is clear from the results shown in Table 3 above,
The samples of Examples 1 to 3 were made of Fe ₉₀Zr₇B_ThreeComposition
100 kHz compared to the sample of Comparative Example 1 using the alloy ribbon of
It can be seen that the core loss at z is small.
From the above, Fe₈₈Zr₇B_ThreeP_TwoAlloy ribbon of different composition
The samples of Examples 1 to 3 using are high in specific resistance,
Low magnetostriction and exhibit a saturation magnetic flux density of 1.5T or more
And magnetic permeability in the high frequency range of 100 kHz or more
It can be seen that the soft magnetic characteristics such as are excellent.

FIG. 1 shows the results of examining the structural change of the alloy ribbon having the composition of Fe ₈₈ Zr ₇ B ₃ P ₂ before and after the heat treatment by X-ray diffraction. Here, the heat treatment conditions are as follows.
0 ° C./min, heat treatment temperature 610 ° C. (883 K), holding time at this heat treatment temperature is 5 minutes, temperature decreasing rate (cooling rate)
Is 180 ° C./min. From FIG. 1, a halo diffraction pattern peculiar to amorphous was observed in the quenched state, and a diffraction pattern peculiar to body-centered cubic crystal was observed after heat treatment. From the amorphous phase
It can be seen that the bcc phase (body-centered cubic) containing e as a main component changed to a precipitated one. Further, since no precipitate of P or the compound of P is observed in the heat-treated one,
It is considered that P remains in the amorphous phase.

Example 4 Raw materials were adjusted so as to have the respective compositions shown in Tables 4 and 5 below, and were mixed with a mother alloy under the same conditions as when the samples of Examples 1 to 3 were prepared. After that, using a liquid quenching method, the thickness is about 20 to 40 μm and the width is about 15 mm
After obtaining the alloy ribbon of No. 1, about 15 sheets punched in an annular shape having an outer diameter of 10 mm and an inner diameter of 6 mm were stacked, and heat treatment was performed in a magnetic field to obtain various samples (Nos. 1 to 30). In addition,
The heat treatment temperature at this time is 640 ° C. (913).
K). The magnetic properties of the obtained various samples and the Fe (b
The results of examining the grain size of the crystal grains of ccFe) are also shown in Tables 4 and 5. The magnetic permeability was 1 kHz, 5
The values at mOe and the values at 300 kHz and 5 mOe were measured.

[0049]

[Table 4]

[0050]

[Table 5]

From the results shown in Tables 4 and 5, it is found that Fe, B, and M (Nb or Zr) contain P or C as an element X by 0.5.
The saturation magnetic flux density (Bs) of the sample to which atomic% is added exceeds 1.45 T, and is 1.57 T at the maximum (Sample No. 9).
It can be seen that a high saturation magnetic flux density can be obtained. Further, regarding the magnetic permeability, the magnetic permeability at 1 kHz is 17
A value of 2,000 or more was obtained, which is an excellent numerical value of 22000 (sample No. 6) at the maximum. further,
The permeability at high frequency at 300 kHz is 380
0 or more, up to 4600 (Sample No. 15)
It was found that a higher value was obtained than in Comparative Example 1 described in (1). Further, the coercive force (Hc) is 0.08
０．１0.14 (Oe), which is a low value, which indicates that excellent soft magnetic characteristics are exhibited. In addition, bccF of each sample
As shown in Tables 4 and 5, the average crystal grain size of the crystal grains of e shows a value of 12 to 17 nm, and by having such a small crystal grain size, the composition and the It can be seen that each sample having a composition ratio within the range of the present invention has excellent soft magnetic properties.

[0052]

As described above, in the Fe-based soft magnetic alloy of the present invention, the (Fe or Fe-Z) -BM alloy or the (Fe or Fe-Z) -B-M- By adding one or two elements X of P and C to a T-based alloy, low magnetostriction, a saturation magnetic flux density of 1.5 T or more, and a high-frequency region of 100 kHz or more can be exhibited. Soft magnetic characteristics such as magnetic permeability can be improved. Further, P and C are inexpensive. By adding these P and / or C, even if the addition amount of B or M is reduced, the saturation magnetic flux density and the magnetostriction are not deteriorated as described above.
Since soft magnetic characteristics such as magnetic permeability at a high frequency of 00 kHz or more can be improved, cost can be reduced. Further, in the Fe-based soft magnetic alloy according to the present invention, in which M in the above composition formula contains at least one of Zr and Nb, the growth rate of fine crystal nuclei is reduced. While maintaining the effect and amorphous forming ability,
Costs can be kept low. Further, the Fe of the present invention
A base soft magnetic alloy having a saturation magnetic flux density of 1.6 T (tesla) or more can be obtained by adjusting the amount of each constituent element added, the heat treatment conditions at the time of manufacture, and the like.

[Brief description of the drawings]

FIG. 1 is a graph showing an X-ray diffraction pattern showing a structural change of an alloy ribbon having a composition of Fe ₈₈ Zr ₇ B ₃ P ₂ before and after heat treatment.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Satoshi Ito 1-7 Yukitani Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akinobu Kojima 1-7 Yukitani Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihiro Makino 1-7, Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihisa Inoue 35 Kawachimoto Hasekura, Aoba-ku, Sendai City, Miyagi Prefecture Housing 11-806 (72) Inventor Ken Masumoto 3-8-22 Uesugi, Aoba-ku, Sendai, Miyagi Prefecture

Claims (4)

[Claims] 1. An Fe-based soft magnetic alloy represented by the following composition formula and having a saturation magnetic flux density (Bs) of 1.5 T (tesla) or more. _{(Fe 1-a Z a)} b B x M y X z however, Z is Ni, 1 or two or more elements of Co, M is Ti, Zr, Hf, V, Nb, Ta, Mo, W One or more elements selected from the group consisting of
A, b, x,
y and z are atomic%, 0 ≦ a ≦ 0.2, 75 ≦ b ≦ 93,
0.5 ≦ x ≦ 18, 4 ≦ y ≦ 9, z ≦ 5. 2. An Fe-based soft magnetic alloy represented by the following composition formula and having a saturation magnetic flux density (Bs) of 1.5 T (tesla) or more. _{(Fe 1-a Z a)} b B x M y X z T t However, Z is Ni, 1 or two or more elements of Co, M is Ti, Zr, Hf, V, Nb, Ta, Mo , W, one or more elements selected from the group consisting of
T or T is one or two or more elements selected from Si, Al, Ge, and Ga, and a, b, x, y, z, and t indicating the composition ratio are in atomic%. , 0 ≦ a ≦ 0.2,
75 ≦ b ≦ 93, 0.5 ≦ x ≦ 18, 4 ≦ y ≦ 9, z ≦
5, t ≦ 5. 3. The Fe-based soft magnetic alloy according to claim 1, wherein M in the composition formula includes at least one of Zr and Nb. 4. The Fe-based soft magnetic alloy according to claim 1, wherein the Fe-based soft magnetic alloy has a saturation magnetic flux density (Bs) of 1.6 T (tesla) or more.