JPH073275Y2 - 電流供給用電極 - Google Patents
電流供給用電極Info
- Publication number
- JPH073275Y2 JPH073275Y2 JP14010589U JP14010589U JPH073275Y2 JP H073275 Y2 JPH073275 Y2 JP H073275Y2 JP 14010589 U JP14010589 U JP 14010589U JP 14010589 U JP14010589 U JP 14010589U JP H073275 Y2 JPH073275 Y2 JP H073275Y2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- electrode
- current
- receiving plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006835 compression Effects 0.000 claims description 8
- 238000007906 compression Methods 0.000 claims description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Physical Vapour Deposition (AREA)
- Tunnel Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010589U JPH073275Y2 (ja) | 1989-12-01 | 1989-12-01 | 電流供給用電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010589U JPH073275Y2 (ja) | 1989-12-01 | 1989-12-01 | 電流供給用電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0380300U JPH0380300U (enrdf_load_stackoverflow) | 1991-08-16 |
| JPH073275Y2 true JPH073275Y2 (ja) | 1995-01-30 |
Family
ID=31687103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14010589U Expired - Lifetime JPH073275Y2 (ja) | 1989-12-01 | 1989-12-01 | 電流供給用電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073275Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-12-01 JP JP14010589U patent/JPH073275Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0380300U (enrdf_load_stackoverflow) | 1991-08-16 |
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