JPH0731961Y2 - 平盤ラップ盤の研磨液供給装置 - Google Patents

平盤ラップ盤の研磨液供給装置

Info

Publication number
JPH0731961Y2
JPH0731961Y2 JP1989017708U JP1770889U JPH0731961Y2 JP H0731961 Y2 JPH0731961 Y2 JP H0731961Y2 JP 1989017708 U JP1989017708 U JP 1989017708U JP 1770889 U JP1770889 U JP 1770889U JP H0731961 Y2 JPH0731961 Y2 JP H0731961Y2
Authority
JP
Japan
Prior art keywords
polishing liquid
drive gear
carrier
flat plate
liquid supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989017708U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02110464U (en, 2012
Inventor
和仁 吉田
Original Assignee
株式会社精工舎
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社精工舎 filed Critical 株式会社精工舎
Priority to JP1989017708U priority Critical patent/JPH0731961Y2/ja
Publication of JPH02110464U publication Critical patent/JPH02110464U/ja
Application granted granted Critical
Publication of JPH0731961Y2 publication Critical patent/JPH0731961Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1989017708U 1989-02-17 1989-02-17 平盤ラップ盤の研磨液供給装置 Expired - Lifetime JPH0731961Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989017708U JPH0731961Y2 (ja) 1989-02-17 1989-02-17 平盤ラップ盤の研磨液供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989017708U JPH0731961Y2 (ja) 1989-02-17 1989-02-17 平盤ラップ盤の研磨液供給装置

Publications (2)

Publication Number Publication Date
JPH02110464U JPH02110464U (en, 2012) 1990-09-04
JPH0731961Y2 true JPH0731961Y2 (ja) 1995-07-26

Family

ID=31231732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989017708U Expired - Lifetime JPH0731961Y2 (ja) 1989-02-17 1989-02-17 平盤ラップ盤の研磨液供給装置

Country Status (1)

Country Link
JP (1) JPH0731961Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119057602B (zh) * 2024-11-07 2025-01-28 四川六方钰成电子科技有限公司 一种高纯大尺寸氧化铝陶瓷基板研磨机及工艺

Also Published As

Publication number Publication date
JPH02110464U (en, 2012) 1990-09-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term