JPH0731960Y2 - 平面研削研磨装置の砥液供給機構 - Google Patents
平面研削研磨装置の砥液供給機構Info
- Publication number
- JPH0731960Y2 JPH0731960Y2 JP2852887U JP2852887U JPH0731960Y2 JP H0731960 Y2 JPH0731960 Y2 JP H0731960Y2 JP 2852887 U JP2852887 U JP 2852887U JP 2852887 U JP2852887 U JP 2852887U JP H0731960 Y2 JPH0731960 Y2 JP H0731960Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polishing liquid
- carrier
- liquid supply
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 112
- 239000007788 liquid Substances 0.000 title claims description 56
- 239000006061 abrasive grain Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2852887U JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2852887U JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136867U JPS63136867U (enExample) | 1988-09-08 |
| JPH0731960Y2 true JPH0731960Y2 (ja) | 1995-07-26 |
Family
ID=30831576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2852887U Expired - Lifetime JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731960Y2 (enExample) |
-
1987
- 1987-02-27 JP JP2852887U patent/JPH0731960Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63136867U (enExample) | 1988-09-08 |
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