JPH07318878A - Production of liquid crystal display device and apparatus for production therefor - Google Patents

Abstract

PURPOSE:To provide a process for production of a liquid crystal display device capable of preventing destruction or deterioration by static electricity of a liquid crystal display element and generation of a defect by suction of foreign matter and an apparatus for production therefor. CONSTITUTION:This process for production of the liquid crystal display device comprises subjecting the surface of a glass substrate 1 to at least one treatment for production of the liquid crystal display element in the state of placing the glass substrate 1 on a metallic transporting jig 3 and transporting the transporting jig 3 and the glass substrate 1 between respective treating stages while bringing rollers 2 of the transporting device into contact with the transporting jig 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a liquid crystal display device and a manufacturing apparatus thereof. More specifically, in a manufacturing process such as an active matrix type color liquid crystal display device, the thin film transistor is destroyed or deteriorated due to static electricity generated between the glass substrate and the carrier device or between the glass substrate and the temperature control plate, The present invention relates to a method of manufacturing a liquid crystal display device and a manufacturing apparatus thereof that can prevent foreign substances from adsorbing to the surface of a glass substrate.

[0002]

2. Description of the Related Art In an active matrix type color liquid crystal display device, a thin film transistor array substrate and a color filter substrate formed on a surface of a glass substrate through a film forming process, a photoengraving process, an etching process and a resist removing process are respectively subjected to an alignment treatment. It is manufactured by injecting liquid crystal and mounting a drive circuit after assembling by applying.

Many processes are performed in these manufacturing processes. For example, in the manufacturing process of the thin film transistor array substrate, a series of processes of washing with pure water, drying, film formation, resist coating, exposure, development, etching and resist removal are repeated a plurality of times. In addition, an inspection step for inspecting the product is added in the middle of this processing step.

In the above-mentioned many processing steps, as a method of transferring the glass substrate between the steps, a method of placing the glass substrate 21 on the roller 22 of the transfer device shown in FIG. The method is such that it is inserted into and transferred by a transport vehicle. In these conventional examples, the glass substrate directly contacts the roller or cassette of the transport device.

[0005]

In the above-described method for manufacturing the liquid crystal display device and the manufacturing apparatus therefor, since the glass substrate is insulative, the glass substrate is transported between the roller of the transport device and the glass substrate during transport. The glass substrate is electrostatically charged by friction or peeling.

Further, the glass substrate is charged with static electricity not only during transportation but also during the heat treatment process. For example, in the heat treatment step of the glass substrate, the glass substrate is adsorbed on the temperature control plate and the glass substrate is removed after the heat treatment. This operation is specifically performed as follows. As shown in FIG. 6, first, the glass substrate 21 conveyed from the previous processing step is placed on the temperature control plate 23, and the air suction holes 24 (see FIG. 7) provided in the temperature control plate 23 are provided. The glass substrate 21
Are adsorbed on the temperature control plate 23. By controlling the heat of the temperature control plate 23 to the glass substrate 21, the glass substrate 21 is controlled to the set temperature,
Heat treatment is performed by maintaining the temperature for a predetermined time. After the heat treatment, as shown in FIG. 7, the air suction holes 24 provided in the temperature control plate 23 are opened to the atmosphere, and the pins 25 are projected from the surface of the plate to control the temperature of the glass substrate 21. Plate 23
Disengage from. When the glass substrate 21 is detached from the temperature control plate 23, the glass substrate 21 is peeled off to be charged with static electricity.

There is a problem in that the thin film transistor element formed on the glass substrate is broken or deteriorated by the electrostatic charge on the glass substrate. Also,
Since the foreign matter floating in the air is adsorbed on the glass substrate by the electrostatic force, there is a problem that a pattern of the thin film transistor at the portion where the foreign matter is adsorbed is missing or a short circuit occurs.

The present invention has been made to solve the above problems, and a method of manufacturing a liquid crystal display device capable of preventing destruction or deterioration of a thin film transistor element due to static electricity and eliminating defects due to adsorption of foreign matter, and It is an object of the present invention to provide a manufacturing device thereof.

[0009]

According to a method of manufacturing a liquid crystal display device of the present invention, at least one method for manufacturing a liquid crystal display element on the surface of a glass substrate is placed with the glass substrate placed on a conductive carrying jig. It is characterized in that the two treatments are performed and at the same time at least part of the conveying device is brought into contact with the conveying jig, the conveying jig and the glass substrate are conveyed between the respective treatment steps.

It is preferable that the carrying jig is made of metal.

It is preferable that a stopper for contacting the periphery of the glass substrate is provided on the upper surface of the carrying jig to prevent falling.

It is preferable to provide an air suction hole in the carrying jig.

As another manufacturing method, at least one process for manufacturing a liquid crystal display element is applied to the surface of the glass substrate with a metal foil attached to the back surface of the glass substrate, and at least a part of the carrier device is provided. The glass substrate may be conveyed between the processing steps while being in contact with the metal foil.

As still another manufacturing method, a liquid crystal display device is manufactured on the surface of the glass substrate with a conductive film sheet having a volume resistivity of 10 ¹⁰ Ω · cm or less attached to the back surface of the glass substrate. It is also possible to carry out at least one of the above processes and carry the glass substrate between the processing steps while contacting at least a part of the carrying device with the film sheet.

The liquid crystal display device of the present invention is characterized by including a carrying jig made of a conductive material, which is in contact with the back surface of the glass substrate.

It is preferable that the carrying jig is made of metal.

[0017]

In the method of manufacturing the liquid crystal display device according to the present invention, the electrostatic charge on the glass substrate is suppressed by placing the glass substrate on the conductive transport jig for processing or transporting.
This prevents damage or deterioration of the thin film transistor element due to static electricity, and also prevents generation of defects due to adsorption of foreign matter.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a liquid crystal display device according to the present invention and an embodiment of the manufacturing device will be described below with reference to the drawings.

[Embodiment 1] FIG. 1 is a perspective explanatory view showing a method of transporting a glass substrate in an embodiment of a method of manufacturing a liquid crystal display device of the present invention, and FIG. 2 is an embodiment of a method of manufacturing a liquid crystal display device of the present invention. FIG. 3 is a perspective explanatory view showing a state in which a glass substrate is placed on the carrying jig in FIG. In FIG. 2, the carrying jig 3 has the same outer dimensions as the glass substrate 1 having a thickness of about 1.1 mm, and is made of a metal plate having a thickness of about 0.5 mm, for example, a stainless plate or an aluminum plate. The glass substrate 1 is placed on the upper surface. The thickness of the metal plate is not particularly limited, but is usually 0.1 to 3.0 mm.
Of these, 0.5 to 1.0 mm is preferable in order to eliminate the deformation of the carrying jig and reduce the weight.

According to the present embodiment, the glass substrate 1 is placed on the carrying jig 3 made of a conductive metal plate and subjected to a process for manufacturing a liquid crystal display device, and as shown in FIG. Since the glass substrate 2 and the transfer jig 3 are transferred between the processing steps while the transfer jig 3 is in contact with the roller 2 of the transfer device, there is no friction or peeling between the roller 2 and the transfer jig 3. Although it occurs, the electrostatic charge of the glass substrate 1 becomes very small as compared with the conventional manufacturing method.

In the heat treatment step of the glass substrate, the carrier jig 3 on which the glass substrate 1 is placed is adsorbed on the temperature control plate and heat treatment is performed in that state. Therefore, since the glass substrate and the temperature control plate do not come into direct contact with each other, the glass substrate is not charged when it is separated from the temperature control plate. For example, when the glass substrate adsorbed on the temperature control plate was released as in the conventional manufacturing method, the electrostatic potential peeled and charged on the glass substrate was 9 kV, but according to this example, the measurement sensitivity ( The potential became 10 V or less.

By controlling the charging of the glass substrate with static electricity as described above, it is possible to prevent the thin film transistor element formed on the glass substrate from being destroyed or deteriorated by static electricity. Further, the foreign matter floating in the air due to the electrostatic force is less likely to be adsorbed on the glass substrate, and it is possible to prevent the occurrence of defects such as a missing pattern of the thin film transistor or a short circuit due to the foreign matter.

In the present specification, the "conveying jig" means a member made of a conductive material, which is interposed between the glass substrate and the manufacturing apparatus, and has a plate shape in this embodiment. It is a broad concept including metal foils and film sheets described later in addition to objects.

[Embodiment 2] FIG. 3 is a perspective explanatory view of a carrying jig used in another embodiment of the manufacturing method of the liquid crystal display device of the present invention. In the embodiment shown in FIG. 3, a stopper 4 made of stainless steel or the like for preventing the glass substrate from falling is provided on the surface of a conveying jig 3 made of a stainless steel plate having a size larger than the outer dimensions of the glass substrate. is there. Stopper 4 width 5
It is formed by fixing a strip-shaped stainless steel plate having a thickness of 0.5 mm and a thickness of 0.5 mm on the surface of the transport jig 3 in a U-shape. The cross-sectional shape of the stopper may be a shape other than that shown in this embodiment, for example, a circular shape, and its size can be appropriately selected according to the thickness of the glass substrate and the like.

In this embodiment, the glass substrate 1 can be prevented from dropping from the carrying jig 3 during carrying, and the effect of suppressing the charging of the glass substrate can be obtained as in the case of the first embodiment.

[Embodiment 3] FIG. 4 is a perspective view of a carrying jig used in still another embodiment of the method for manufacturing a liquid crystal display device of the present invention. In FIG. 4, the air suction holes 5 are provided in the transport jig 3 made of a metal plate such as a stainless steel plate having the same size as the outer dimensions of the glass substrate so as to have the same arrangement as the air suction holes of the temperature control plate. It is a thing. The diameter of the air suction hole 5 may be set to be the same as the air suction hole of the temperature control plate.

In this embodiment, the adhesion between the temperature control plate and the glass substrate is improved even if the transfer jig 3 is interposed,
The heat conduction from the temperature control plate to the glass substrate is improved, and the temperature control characteristics are improved. At the same time, Example 1
Similarly, the effect of suppressing the charging of the glass substrate can be obtained.

In the first to third embodiments described above, a metal plate such as a stainless plate was described as an example of the carrying jig, but the present invention is not limited to this, and for example, CFR.
The carrying jig may be made of a conductive material such as P (carbon fiber reinforced plastic).

[Embodiment 4] In Embodiments 1 to 3, a conductive metal plate is used as a carrying jig. Instead of this carrying jig, a metal foil is attached to the back surface of the glass substrate,
A liquid crystal display device may be manufactured on the surface of the glass substrate. Specifically, an aluminum foil having a thickness of about 0.05 mm is attached to the back surface of the glass substrate with an adhesive, and the manufacturing process and the transportation of the liquid crystal display device are performed. After the manufacturing of the liquid crystal display device is completed, the aluminum foil is peeled off from the glass substrate.
As the metal foil, an aluminum alloy foil can be used in addition to the aluminum foil. The thickness is usually about 0.04 to 0.2 mm, especially 0.04 to 0.2 mm.
It is preferably about 0.08 mm.

Also in the manufacturing method of this embodiment, the effect of suppressing the charging of the glass substrate can be obtained as in the first embodiment.

Example 5 Further, a conductive film sheet such as ST poly conductive film manufactured by Achilles Co., Ltd. was attached to the back surface of the glass substrate to manufacture a liquid crystal display element on the surface of the glass substrate. May be. Specifically, a conductive film sheet having a thickness of about 0.05 mm and a volume resistivity of about 10 ⁶ to 10 ¹⁰ Ω · cm is attached to the back surface of the glass substrate with an adhesive, and the manufacturing process and transportation of the liquid crystal display device are performed. Do. After manufacturing the liquid crystal display device, the conductive film sheet is peeled off from the glass substrate.

In the manufacturing method of this embodiment, 10 ⁶ to 10
By adopting a film sheet having a volume resistivity of about ¹⁰ Ω · cm, it is possible to suppress the generation of static electricity that occurs when the film sheet is peeled off after the manufacturing of the liquid crystal display device is finished, and the glass substrate The effect of suppressing charging can also be obtained.

[0033] Although the conductive film sheet and volume resistivity of ^{10 6} ~10 10 Ω · cm in the present embodiment, the present invention is not intended to be particularly limited to this range, 10 ¹⁰
If it is Ω · cm or less, the same effect can be obtained.

The thickness of the film sheet is not particularly limited, but is usually 0.05 to 1.0 mm, preferably about 0.05 to 0.1 mm.

[Embodiment 6] As an example of an apparatus for manufacturing a liquid crystal display device equipped with the carrying jig shown in the above-mentioned Embodiment 3, for example, a carrying jig made of a metal plate such as a stainless steel plate shown in Embodiment 3 is used. The tool 3 is built in the manufacturing apparatus, and the glass substrate is taken in and out by the robot arm from the cassette set in the loader section and the unloader section of the manufacturing apparatus.
The glass substrate is placed on the substrate so that the glass substrate can be transported and processed in the manufacturing apparatus.

In this case, the carrying jig 3 is not limited to the one shown in the third embodiment, and is made of a conductive material that comes into contact with the back surface of the glass substrate in the carrying step or the processing step in the manufacturing apparatus. If a carrying jig made of a material is used, it is possible to achieve the above-described action and effect of suppressing the charging of the glass substrate.

[0037]

Since the present invention is constructed as described above, it has the following effects.

By placing an insulating glass substrate on a conductive carrying jig, performing manufacturing process steps, and carrying between the process steps, electrostatic charging of the glass substrate can be suppressed. As a result, it is possible to prevent the thin film transistor element formed on the glass substrate from being destroyed or deteriorated by static electricity. In addition, the foreign matter floating in the air due to the electrostatic force is less adsorbed to the back surface of the glass substrate, and it is possible to prevent the occurrence of defects such as a missing pattern of the thin film transistor element and a short circuit due to the foreign matter.

In particular, if a metal carrying jig is used,
The electrostatic charge on the glass substrate can be preferably suppressed, and the heat conduction from the temperature control plate to the glass substrate in the heat treatment step is also good.

Further, the glass substrate can be prevented from falling by providing a stopper for preventing the glass substrate from contacting the peripheral edge of the glass substrate on the upper surface of the carrying jig.

Further, by providing an air suction hole in the transfer jig, the temperature control plate and the glass substrate can be separated from each other even if the transfer jig intervenes when the temperature control plate sucks air from the transfer jig. The adhesiveness is improved, heat conduction from the temperature control plate to the glass substrate is improved, and temperature characteristics are improved.

Further, with the metal foil attached to the back surface of the glass substrate, at least one treatment for manufacturing a liquid crystal display element is applied to the surface of the glass substrate, and at least a part of the carrier is brought into contact with the metal foil. Even if the glass substrate is transported between the processing steps while being carried out, the effect of suppressing the charging of the glass substrate can be obtained.

On the back surface of the glass substrate, 10 ¹⁰ Ω · cm
While the conductive film sheet having the following volume resistivity is attached, at least one treatment for producing a liquid crystal display element is performed on the surface of the glass substrate, and at least a part of the transport device is brought into contact with the film sheet. Even if the glass substrate is transported between the processing steps, the effect of suppressing the charging of the glass substrate can be obtained.

The apparatus for manufacturing a liquid crystal display device of the present invention has a transport jig which is in contact with the back surface of the glass substrate and is made of a conductive material. And put it on a processing tool for manufacturing, and
By transporting between the processing steps, electrostatic charging of the glass substrate can be suppressed.

In particular, if a metal carrying jig is used,
The electrostatic charge on the glass substrate can be preferably suppressed, and the heat conduction from the temperature control plate to the glass substrate in the heat treatment step is also good.

[Brief description of drawings]

FIG. 1 is a perspective explanatory view showing a method of transporting a glass substrate in an embodiment of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 2 is a perspective explanatory view showing a state in which a glass substrate is placed on a carrying jig in an embodiment of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 3 is a perspective explanatory view of a carrying jig used in another embodiment of the manufacturing method of the liquid crystal display device of the present invention.

FIG. 4 is a perspective explanatory view of a carrying jig used in still another embodiment of the method for manufacturing the liquid crystal display device of the present invention.

FIG. 5 is a schematic perspective view showing a conventional method of transporting a glass substrate.

FIG. 6 is a perspective view showing a state of a conventional glass substrate heat treatment step.

FIG. 7 is a perspective view showing a state in which a glass substrate is detached in a conventional glass substrate heat treatment process.

[Explanation of symbols]

1 glass substrate, 2 rollers, 3 conveying jig, 4 stoppers, 5 air suction holes.

Claims (8)

[Claims] 1. With a glass substrate placed on a conductive transport jig, at least one treatment for manufacturing a liquid crystal display element is performed on the surface of the glass substrate, and at least a part of the transport device is transported and treated. A manufacturing method of a liquid crystal display device, wherein a transfer jig and a glass substrate are transferred between respective processing steps while being in contact with a tool. 2. The manufacturing method according to claim 1, wherein the carrying jig is made of metal. 3. The method of manufacturing a liquid crystal display device according to claim 1, further comprising a stopper for preventing a drop coming into contact with a peripheral edge of the glass substrate, which is provided on an upper surface of the carrying jig. 4. The method of manufacturing a liquid crystal display device according to claim 1, wherein the conveying jig is provided with an air suction hole. 5. With a metal foil attached to the back surface of the glass substrate, at least one treatment for manufacturing a liquid crystal display element is performed on the surface of the glass substrate, and at least a part of a carrier device is brought into contact with the metal foil. A method of manufacturing a liquid crystal display device, characterized in that the glass substrate is transported between each processing step while being carried out. 6. At least one treatment for producing a liquid crystal display device on the surface of the glass substrate, with a conductive film sheet having a volume resistivity of 10 ¹⁰ Ω · cm or less attached to the back surface of the glass substrate. A method of manufacturing a liquid crystal display device, characterized in that the glass substrate is transported between the processing steps while at least a part of the transport device is brought into contact with the film sheet. 7. An apparatus for manufacturing a liquid crystal display device, comprising a carrying jig made of a conductive material, which is in contact with the back surface of the glass substrate. 8. The manufacturing apparatus according to claim 7, wherein the carrying jig is made of metal.