JPH0731497Y2 - イオン質量分析装置 - Google Patents

イオン質量分析装置

Info

Publication number
JPH0731497Y2
JPH0731497Y2 JP1986030779U JP3077986U JPH0731497Y2 JP H0731497 Y2 JPH0731497 Y2 JP H0731497Y2 JP 1986030779 U JP1986030779 U JP 1986030779U JP 3077986 U JP3077986 U JP 3077986U JP H0731497 Y2 JPH0731497 Y2 JP H0731497Y2
Authority
JP
Japan
Prior art keywords
analysis
magnetic flux
electromagnet
flux density
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986030779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62142151U (enExample
Inventor
輝明 金築
秀一 川原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1986030779U priority Critical patent/JPH0731497Y2/ja
Publication of JPS62142151U publication Critical patent/JPS62142151U/ja
Application granted granted Critical
Publication of JPH0731497Y2 publication Critical patent/JPH0731497Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP1986030779U 1986-03-03 1986-03-03 イオン質量分析装置 Expired - Lifetime JPH0731497Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986030779U JPH0731497Y2 (ja) 1986-03-03 1986-03-03 イオン質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986030779U JPH0731497Y2 (ja) 1986-03-03 1986-03-03 イオン質量分析装置

Publications (2)

Publication Number Publication Date
JPS62142151U JPS62142151U (enExample) 1987-09-08
JPH0731497Y2 true JPH0731497Y2 (ja) 1995-07-19

Family

ID=30835905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986030779U Expired - Lifetime JPH0731497Y2 (ja) 1986-03-03 1986-03-03 イオン質量分析装置

Country Status (1)

Country Link
JP (1) JPH0731497Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130358A (en) * 1981-02-05 1982-08-12 Nippon Telegr & Teleph Corp <Ntt> Full automatic ion implantation device

Also Published As

Publication number Publication date
JPS62142151U (enExample) 1987-09-08

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