JPH07296320A - Magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To obtain a magnetic head whose track width is precise enough not to have an allowance for a track discrepancy which causes a side erase and its manufacturing method. CONSTITUTION:A magnetic metal film 23 having a thickness larger than track width Tw is formed at least on the surfaces of one side of a substrate 22. After a pair of magnetic core blocks 25 and 26 are made to butt to each other to be joined, the medium sliding surface 20 side of a magnetic core block 29 is ground at least to a position (d) where the depth is zero so as to have thickness L of the thick magnetic metal film 23 exposed as the dimension of track width Tw and only the magnetic metal film 23 is left. A nonmagnetic part 10 which is removed by the grinding is refilled with a nonmagnetic material 21 to manufacture the magnetic head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head suitable for being mounted on a video tape recorder (hereinafter referred to as "VTR") and the like, and a manufacturing method thereof.

[0002]

2. Description of the Related Art For example, in a magnetic recording / reproducing apparatus such as a VTR, the recording signal has been increased in density and frequency, and in response to the increase in recording density, magnetic powder is used as a magnetic recording medium and Fe. A so-called metal tape using a powder of a ferromagnetic metal such as Co, Ni, or a so-called vapor deposition tape in which a ferromagnetic metal material is deposited on a base film by vapor deposition has been used. Along with this, head materials for magnetic heads are required to have high saturation magnetic flux density and high magnetic permeability.

On the other hand, along with the above-mentioned high-density recording, the recording track width to be recorded on the magnetic recording medium is being narrowed, and in response to this, the magnetic head having a very narrow track width is required. Has been done.

Therefore, a so-called laminate type magnetic head has heretofore been proposed in which a magnetic metal film serving as a magnetic core is formed on a non-magnetic substrate such as ceramics and used as a track portion. In the magnetic head, since the film thickness of the magnetic metal film is the track width of the recording / reproducing gap, it is possible to easily narrow the track by controlling only the film thickness of the magnetic metal film. Since the interface between the magnetic metal film and the auxiliary core is not parallel to the recording / reproducing gap, the interface does not operate as a pseudo gap, and the manufacturing process is simple.

By the way, the laminate type magnetic head described above is manufactured according to the following manufacturing process sequence.

First, as shown in FIG. 13, a magnetic metal film 1 serving as a magnetic core is formed on one surface of a strip-shaped non-magnetic substrate 101.
02 and the bonding film 103 are formed by a vacuum thin film forming method such as sputtering. The bonding film 103 is used to bond and integrate the non-magnetic substrates 101 on which the magnetic metal film 102 is formed in a step described later, and for example, a glass film for fusing, or Au, Ag for low temperature metal bonding, Pd or the like is used.

Next, as shown in FIG. 14, the non-magnetic substrate 101 on which the magnetic metal film 102 and the bonding film 103 are formed.
Magnetic core substrate 104 having a substantially rectangular shape in plan view by stacking and finally stacking non-magnetic substrate 101 and pressurizing and heating.
To make. Note that the illustration of the bonding film 103 is omitted in FIG.

Next, the magnetic core substrate 104 is set to A-
Cut out along the lines A ', BB', and CC '. Then, as shown in FIG. 15, a pair of magnetic core half blocks 105 and 106 which are substantially symmetrical to each other are formed.

Then, as shown in FIG. 16, a winding groove 107 extending along the longitudinal direction is formed in one magnetic core half block 105. Next, one surface of the magnetic core half block 106 in which the winding groove 107 is not formed and the groove forming surface of the magnetic core half block 105 in which the winding groove 107 is formed are smooth-polished.

Next, as shown in FIG. 17, a gap spacer 108 is formed on the abutting surfaces of the magnetic core half blocks 105 and 106 by a vacuum thin film forming method such as sputtering, and then the magnetic core half blocks 105 and 10 are formed.
The magnetic metal films 102 formed in 6 are aligned with each other, and the magnetic metal films 102 are butted so as to face each other and heated under pressure to produce a magnetic core block 109.

After that, the surface to be the medium sliding surface is lapped to a predetermined gap depth to form a medium sliding surface 120 shown by a solid arc-shaped line in FIG. 7 to secure the contact with the magnetic recording medium. . And finally, this magnetic core block 10
9 along the lines D-D 'and E-E'.
The laminated type magnetic head described above is completed by cutting the chip in parallel with.

[0012]

In the conventional method of manufacturing a magnetic head, the magnetic metal film 10 formed on each of the pair of magnetic core half blocks 105 and 106 as described above.
It is strongly demanded that the two be matched with each other without causing a dimensional error in order to enable high-density recording by narrowing the track.

However, in the conventional method of manufacturing a magnetic head, variations in film thickness that occur during the formation of the above-described magnetic metal film 102 and track deviations that occur during track alignment (indicated by M2 in FIG. 17). It has not been easy to regulate the dimension of the track width Tw according to the above).

Therefore, when recording / reproducing is performed on the magnetic recording medium using the magnetic head obtained by cutting the magnetic core block 109 into chips by the above butt-joining, the track deviation M2 occurs. This track shift M2 has a big problem that a part which has been recorded once is re-recorded, that is, side erase occurs.

Therefore, the present invention has been proposed in view of such conventional technical problems, and a magnetic head having a highly precise track width and a highly reliable magnetic head by restricting the track width are provided. An object of the present invention is to provide a manufacturing method for manufacturing a magnetic head.

[0016]

In order to solve the above problems and achieve the object, a magnetic head according to the present invention has a magnetic core half body in which a magnetic metal film is sandwiched between a pair of substrates in the film thickness direction. In a magnetic head formed by abutting the end faces of the magnetic metal films present on the abutting faces of the magnetic core halves of each other and forming a magnetic gap between the abutting faces, among the medium sliding faces exhibited by the magnetic gap, The part excluding the magnetic metal film is a non-magnetic part filled with a non-magnetic material, and the magnetic metal film has a track width from the medium sliding surface to the depth zero position, and is made thicker than the track width after that. It is characterized by

Further, the method of manufacturing a magnetic head according to the present invention comprises a step of forming a magnetic metal film thicker than a track width on at least one surface of the substrate, and a plurality of substrates having the magnetic metal film formed thereon. A step of manufacturing a magnetic core substrate by stacking and joining and integrating the magnetic metal films so as to overlap each other in the film thickness direction; and a pair of magnetic layers that are substantially symmetrical to each other by cutting the magnetic core substrate in a direction orthogonal to the stacking direction. A step of forming a core half block, a step of forming a winding groove extending along a longitudinal direction on a cut surface of at least one magnetic core half block, and each magnetic metal of the pair of magnetic core half blocks The steps of making a magnetic core block by facing the end faces of the films to each other and gap-bonding the pair of magnetic core half blocks to each other, and the film thickness of the thick magnetic metal film are A step of polishing the medium sliding surface side of the magnetic core block to at least a position where the depth becomes zero so that only the magnetic metal film remains so as to be exposed as the size of the rack width; A step of filling the material, a step of forming a surface having a curvature by lapping the medium sliding surface side of the magnetic core block filled with the non-magnetic material, and the magnetic core block along the magnetic metal film. And a step of cutting chips.

The non-magnetic material is preferably a material having high wear resistance, and particularly preferably ceramics.

The magnetic metal film is a multi-layered film in which a thin magnetic metal thin film is laminated in multiple layers with an electrically insulating film interposed in order to avoid eddy current loss in the high frequency band of the magnetic head. Is preferred.

Further, the electrically insulating film is preferably SiO ₂ or Al ₂ O ₃ .

[0021]

In the magnetic head according to the present invention, the portion of the medium sliding surface presenting the magnetic gap excluding the magnetic metal film is a non-magnetic portion filled with a non-magnetic material, and the magnetic metal film slides on the medium. The track width is from the surface to the depth zero position,
Since it is made thicker than the track width after that, the magnetic path cross-sectional area of the magnetic core is secured to be wider, and the output is improved.

Further, since the non-magnetic material is filled in the portion removed by the above polishing, the abrasion resistance to the magnetic recording medium is excellent.

On the other hand, in the method of manufacturing a magnetic head according to the present invention, a magnetic metal film having a thickness larger than the track width is formed on at least one surface of the substrate. Therefore, when gap-bonding a pair of magnetic core blocks, even if a track shift occurs due to a shift in the joining between the end faces of the magnetic metal films, the shift can be absorbed.

Further, the medium sliding surface side of the magnetic core block is polished to at least a position where the depth is zero so that the thickness of the thickly formed magnetic metal film is exposed as a dimension of the track width. Only the metal film remains. Therefore, even if the track shift occurs, the track width is regulated by this process. Therefore, there is no room to cause side erase.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings.

First, the structure of an embodiment of the magnetic head according to the present invention will be described. First embodiment

As shown in FIG. 1, the magnetic head of this embodiment includes a magnetic core half body 1 in which a magnetic metal film 3 is sandwiched between a pair of nonmagnetic substrates 11 and 12 in the thickness direction thereof.
Similarly, a magnetic core half body 2 in which a magnetic metal film 4 is sandwiched between a pair of nonmagnetic substrates 13 and 14 from the thickness direction thereof
However, the magnetic metal films 3 and 4 are joined and integrated so as to abut each other.

A magnetic gap G1 is formed between the abutting surfaces of the magnetic metal films 3 and 4, and the magnetic metal films 3 and 4 form a closed magnetic path. The magnetic head having such a structure is called a laminate type, and since the non-magnetic substrates 11, 12 and 13, 14 are used, the track width Tw of the magnetic gap G1.
Is determined by the film thickness of the metal magnetic films 3 and 4.

For the magnetic metal films 3 and 4, a ferromagnetic alloy material having a high saturation magnetic flux density and excellent soft magnetic characteristics is used in addition to various ferromagnetic materials. As, any of those known in the art can be used,
It does not matter whether it is crystalline or amorphous.

For example, Fe-Al-Si alloys, Fe-Ni-Al-Si alloys, Fe-Ga-Si alloys.
Alloys, Fe-Si-Co alloys, Fe-Ni alloys,
Fe-Al-Ge based alloy, Fe-Ga-Ge based alloy, F
e-Si-Ge based alloy, Fe-Si-Ga based alloy, Fe
-Si-Ga-Ru type alloys, Fe-Co-Si-Al type alloys, etc. Furthermore, in order to further improve the corrosion resistance and wear resistance, Co, Ti, Cr, Mn, M
o, Zr, Nb, Mo, Ta, W, Ru, Os, Rh,
B, Ir, Re, Ni, Pd, Pt, Hf, V, Pd,
At least one of N, C, O and the like may be added.

A ferromagnetic amorphous metal alloy, a so-called amorphous alloy (for example, an alloy composed of one or more elements of Fe, Ni, Co and one or more elements of P, C, B, Si, or these With Al as the main component, Ge, Be, S
n, In, Mo, W, Ti, Mn, Cr, Zr, Hf,
Examples thereof include metal-metalloid type amorphous alloys such as alloys containing Nb and the like, and metal-metal type amorphous alloys containing transition elements such as Co, Hf and Zr and rare earth elements as main components.

As a method for forming the metal magnetic films 3 and 4, there are vacuum thin film forming techniques typified by a sputtering method, a vacuum deposition method, an ion plating method, a cluster ion beam method and the like, which are excellent in film thickness controllability. Adopted.

On the other hand, the non-magnetic substrates 11, 12 and 1
As for 3 and 14, generally, non-magnetic ferrite, zirconium oxide-based ceramics, crystallized glass such as photoceram, non-magnetic iron oxide-based ceramics, titanate-based ceramics, or the like, or a bonding material in which these are bonded is used. However,
The material is not particularly limited as long as it has abrasion resistance to the magnetic recording medium. Such non-magnetic substrate 11, 1
2 and 13 and 14 have the same shape as the magnetic metal films 3 and 4, and sandwich the magnetic metal films 3 and 4 in the thickness direction.

In particular, the non-magnetic metal films 3, 4 and the non-magnetic substrates 11, 12 and 13, 14 of this embodiment are
Depth of the magnetic gap G1 from the medium sliding surface 20
Up to the position d where D becomes zero and after the depth zero position d,
Differences are made in each configuration.

First, the non-magnetic substrates 11, 12 and 1
The thickness of the magnetic metal films 3 and 4 sandwiched between 3 and 14 is the track width Tw from the medium sliding surface 20 to the position d where the depth (depth) is zero, but the position d where the depth is zero.
After that, it is made thicker than the track width Tw (in the figure, L
Indicate. ). In this embodiment, the width from the medium sliding surface 20 to the position d where the depth is zero, that is, the track width Tw.
And the thickness L of the magnetic metal films 3, 4 after the position d at which the depth is zero (the thickness from the medium sliding surface to the depth zero position / the thickness after the depth zero position) are about 1 / 1.5. Is set to.

In the abutting of the magnetic metal films 3 and 4 from the medium sliding surface 20 to the depth zero position d, there is no track deviation due to a slight dimensional error due to processing and polishing in the manufacturing process described later. It has not occurred. Therefore, the magnetic metal films 3 and 4 are abutted on the abutting surfaces so as to face each other accurately, and the front gap G1 can be made highly accurate.

On the other hand, the nonmagnetic substrates 11, 12 and 1
The magnetic metal films 3, 4 among the medium sliding surfaces 20 of 3, 14
The portions 11a, 12a and 13a, 14a other than that are filled with a non-magnetic material 21 having high wear resistance, and the non-magnetic substrates 11, 12 and 13, 14 have a so-called two-layer fault structure. There is. As the non-magnetic material 21 having high wear resistance, SiC, ZrO ₂ , Fe ₂ O ₃ , Al
_{2 O 3, Al 2 O 3} -TiC, TiO 2, NiO-CaTi
The main component is O ₃ or the like. Therefore,
Even in sliding contact with a magnetic recording medium, its abrasion resistance is effectively exhibited.

Further, in the above magnetic head, the winding groove 7 for winding the coil (not shown) on the opposing surface of one of the magnetic core halves 2 while restricting the depth D of the magnetic gap G1 by one end thereof. Is provided. In addition,
It goes without saying that the present invention can be applied to a so-called double window type in which the winding groove 7 is also provided on the facing surface of the other magnetic core half body 1.

As described above, since the laminate type magnetic head having the above-described structure is a magnetic head having no dimensional error between the magnetic metal films 3 and 4, it is a highly accurate track that effectively meets the demand for narrowing the track. It has a width Tw. Further, the portion of the non-magnetic substrate 11, 12 and 13, 14 excluding the magnetic metal films 3, 4 of the medium sliding surface 20 is filled with a non-magnetic material 21 having high wear resistance. Therefore, it exhibits excellent wear resistance. Therefore, it becomes a suitable magnetic head mounted on a VTR or the like.

Next, a method of manufacturing the above magnetic head will be described.

First, as shown in FIG. 2, the above-mentioned Fe--Al--Si alloy, F, is formed on the main surface of the non-magnetic strip substrate 22.
The magnetic metal film 23 is formed by sputtering with a metal magnetic material such as an e-Ni-Al-Si alloy. When forming the magnetic metal film 23, the magnetic metal film 23 is formed thicker than the track width Tw in preparation for the subsequent polishing process. In this embodiment, the film thickness L of the magnetic metal film 23 is formed to be about 1.5 times thicker than the predetermined track width Tw in consideration of the deviation in the butting of the magnetic metal film 23.

Further, when sputtering the metal magnetic material, it is preferable to alternately sputter SiO ₂ or Al ₂ O ₃ and the metal magnetic material in order to avoid eddy current loss in the high frequency band of the magnetic head. . That is, a multi-layer film structure is formed by stacking a number of thin metal magnetic metal films with the insulating film interposed therebetween.

A bonding film is formed on the magnetic metal film 23. As the bonding film, a glass film for fusing or Au, Ag, Pd or the like for low temperature metal bonding is used.

Next, as shown in FIG. 3, a plurality of strip substrates 22 on which a magnetic metal film is formed are joined and integrated to form a magnetic core substrate 24. Then, this magnetic core substrate 24
As shown in FIG. 4, AA ′, BB ′, CC ′
A pair of magnetic core half blocks 25 and 26 that are substantially symmetrical to each other as shown in FIG.

Then, as shown in FIG. 6, after the winding groove 7 extending along the longitudinal direction is formed in one magnetic core half block 26, the pair of magnetic core half blocks 25, 26 is formed. Mirror the butt surface of.

Then, a gap spacer 28, which serves as a gap film, is formed on the polished surface by a vacuum thin film forming method such as sputtering so that the magnetic core half blocks 25 and 26 are opposed to each other by the respective magnetic metal films 23. While aligning the track, the butt joint is integrated. The magnetic core block 29 is produced by this joining and integration.
This joining and unifying is performed by glass fusion performed by pouring glass 27 into winding groove 7 as shown in FIG. As a result, the magnetic metal film 23 formed on each of the magnetic core half blocks 25 and 26 has an abutting surface,
A magnetic gap G1 that operates as a recording / reproducing gap is formed.

At this time, as shown in FIG. 7, due to variations in the film thickness of the magnetic metal film 23 during film formation, the matching accuracy, etc., the magnetic metal films 23 formed in the blocks 25 and 26 are separated from each other. Misalignment at the butt position (track shift) M
When 1 occurs, the deviation M1 is prevented by the following steps.

That is, as shown in FIG. 9, the medium sliding surface 20 side of the magnetic core block 29 is exposed so that the film thickness L of the thickly formed magnetic metal film 23 is exposed as the dimension of the track width Tw. Remove by scraping. Such processing is performed by polishing with a grindstone, grinding, or laser processing,
The medium sliding surface 20 side of the magnetic core block 29 is polished to a position d where the depth becomes zero, so that only the magnetic metal film 23 remains. As a result, in the magnetic core block 29, a large number of polished grooves are formed on the recording medium sliding surface 20 side. The surface removed by this polishing (the bottom surface of the polished groove) 20a may be processed as a surface having a constant curvature as shown in FIG. 9, or may be processed into a flat surface. You may.

In this embodiment, the thickness L of the magnetic metal film 23 is
Is formed thicker than the track width Tw in advance. Therefore, by utilizing this thickness, the magnetic metal film 23 is polished so as to eliminate the track deviation M1 and finely adjusted to finally determine the predetermined track width Tw.

Then, as shown in FIG. 10, SiC, Z are formed on the plurality of groove-shaped nonmagnetic portions 10 polished as described above.
_{rO 2, Fe 2 O 3,} Al 2 O 3, Al 2 O 3 -TiC, Ti
A non-magnetic material 21 mainly composed of O ₂ , NiO—CaTiO ₃ or the like and having high wear resistance is filled.

As a method of filling these non-magnetic materials 21, a vacuum thin film forming technique such as sputtering, a method of spraying fine particles called powder beam deposition at a high speed, and the like are used.

In the latter case of powder beam deposition, powders such as Al ₂ O ₃ , SlO ₂ and glass powder are used, the average particle size is 1 μm or less, the powder speed is 100 m / sec or more, and the pressure (nozzle, tank). 5 kg
Approximately 20 μm by spraying at f / cm ² for 5 minutes
The film thickness can be obtained. As described above, the powder beam deposition has an advantage that a film having a film thickness of about 0.1 to 100 μm can be formed at high speed in the atmosphere.

Then, as shown in FIG. 10, in order to secure the contact with the magnetic recording medium, the surface filled with the non-magnetic material 21 is lapped to a predetermined gap depth to have a constant curvature. The recording medium sliding surface 20 is formed.

Finally, the magnetic core block 29 is cut into chips along the lines DD 'and EE' to complete the magnetic head shown in FIG.

As described above, the present invention is to completely eliminate the deviation of the track width Tw by polishing the medium sliding surface by processing with a grindstone or laser processing. Therefore, in a so-called laminate type magnetic head in which the film thickness of the magnetic metal film 23 is the track width Tw of the recording / reproducing gap, a highly accurate track width Tw effectively corresponding to the narrow track demanded today.
Will be manufactured.

Second Example In the first example, the non-magnetic material 21 was used as the material for the strip substrate 22, but in the second example, as shown in FIG. The feature is that a magnetic material 31 such as ferrite is used as the material. Since the other configurations are the same as those in the first embodiment, the same configurations as those in the first embodiment are indicated by the same reference numerals in the drawings.
A duplicate description will be omitted.

Therefore, when the magnetic head is manufactured by the manufacturing method of the first embodiment, the medium sliding surface 20 side of the magnetic material 31 such as ferrite is polished and the above S
The non-magnetic material 21 having a high wear resistance and containing iC, ZrO ₂ , Fe ₂ O _3, etc. as a main component is filled.

As a result, the magnetic core halves 3 and 4 having the magnetic metal films 3 and 4 sandwiched by the substrate formed of the magnetic material 31 such as ferrite are butt-glass fused through the gap spacers to bond and integrate them. The manufactured magnetic head is manufactured. In the magnetic head according to the second embodiment manufactured in this way, since the substrate sandwiching the magnetic metal films 3 and 4 is the magnetic material 31 such as ferrite, a wider magnetic path cross-sectional area of the magnetic core is secured. Therefore, there is an advantage that the output is improved.

Third Embodiment The third embodiment is characterized in that the strip substrate 22 is made of a composite material using a magnetic material 41 such as ferrite and a non-magnetic material 42. The non-magnetic material 42 is arranged at a position where the winding window 7 is inclined from the position d where the depth is zero.

Therefore, when manufacturing the magnetic head according to the manufacturing method of the first embodiment, the medium sliding surface 20 of the non-magnetic material 42 on the magnetic material 41 such as ferrite.
The side is polished, and the non-magnetic material 21 having a high wear resistance and containing SiC, ZrO ₂ , Fe ₂ O ₃ or the like as a main component is filled.

As a result, the magnetic metal film 3 is formed by the substrate using the magnetic material 31 such as ferrite and the non-magnetic material 42.
A magnetic head is manufactured in which magnetic core halves 3 and 4 sandwiching 4 are butted and fused together through a gap spacer to join and integrate them. Third manufactured in this way
Like the magnetic head according to the second embodiment, the magnetic head according to the second embodiment has a wider magnetic path cross-sectional area of the magnetic core and thus has an advantage of improving output.

As described above, the magnetic head and the manufacturing method thereof according to the present invention can be combined with various composite materials.

[0063]

In the magnetic head according to the present invention, the portion of the medium sliding surface presenting the magnetic gap excluding the magnetic metal film is a non-magnetic portion filled with a non-magnetic material, and the magnetic metal film is the medium. The track width is from the sliding surface to the depth zero position, and thereafter, the track width is thicker than the track width. Therefore, since the magnetic path cross-sectional area of the magnetic core is ensured to be wider, the output is improved and the portion removed by the polishing is filled with the non-magnetic material.
Has the effect of excellent wear resistance.

In the method of manufacturing a magnetic head according to the present invention, a magnetic metal film having a thickness larger than the track width is formed on one surface of the substrate, and after the pair of magnetic core half blocks are joined together. , So that the thickness of the thickly formed magnetic metal film is exposed as the dimension of the track width, and the medium sliding surface side of the magnetic core block is polished at least to a position where the depth is zero to remove only the magnetic metal film. Since the non-magnetic material is filled in the remaining portion removed by the polishing, no track deviation occurs, and it is possible to effectively meet the demand for narrower tracks.

Therefore, in the magnetic head manufactured by the method for manufacturing a magnetic head according to the present invention, since no track deviation occurs, the problem of side erase can be solved.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a magnetic head according to the present invention.

FIG. 2 is a perspective view showing a method of manufacturing the magnetic head in the order of steps, showing a step of forming a magnetic metal film on a strip substrate.

FIG. 3 is a perspective view showing a method of manufacturing the magnetic head in the order of steps, and is a perspective view showing a step of manufacturing a magnetic core substrate by joining and integrating a plurality of film-shaped strip substrates.

FIG. 4 is a perspective view showing a method of manufacturing the magnetic head in the order of steps, showing a step of cutting out a magnetic core half block from a magnetic core substrate.

FIG. 5 is a perspective view showing a method of manufacturing the magnetic head, in order of steps, showing a pair of magnetic core half blocks manufactured.

FIG. 6 is a perspective view showing the method of manufacturing the magnetic head in the order of steps, showing a state in which one magnetic core half block is subjected to winding groove processing.

FIG. 7 is a perspective view showing a method of manufacturing the magnetic head in the order of steps, showing a state in which a pair of magnetic core half blocks are butted to each other to produce a magnetic core block, and a state in which a track dimension deviation occurs Show.

FIG. 8 is a perspective view showing the method of manufacturing the magnetic head in the order of steps, and showing a step of pouring glass into the winding groove of the magnetic core block.

FIG. 9 is a perspective view showing a method of manufacturing the above magnetic head in the order of steps, showing a step of forming a nonmagnetic portion for filling a nonmagnetic material by polishing the medium sliding portion surface side of the magnetic core block. Is.

FIG. 10 is a perspective view showing a method of manufacturing the magnetic head in the order of steps, showing a state in which a non-magnetic material of a magnetic core block is filled with a non-magnetic material and a medium sliding portion surface side is subjected to a lapping process. .

FIG. 11 is a perspective view showing a second embodiment according to the present invention.

FIG. 12 is a perspective view showing a third embodiment according to the present invention.

FIG. 13 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, showing a step of forming a magnetic metal film.

FIG. 14 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, showing a step of producing a magnetic core substrate and cutting out a magnetic core half block.

FIG. 15 is a perspective view showing a manufactured magnetic core half block, showing a conventional method of manufacturing a magnetic head in the order of steps.

FIG. 16 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, showing a step of forming a winding groove on a magnetic core half block.

FIG. 17 is a perspective view showing a state in which a pair of magnetic core blocks are butted, showing a conventional magnetic head manufacturing method in the order of steps, and showing a state in which track dimensional deviation occurs.

[Explanation of symbols]

 L Width of thickly formed magnetic metal film M1 Track deviation Tw Track width d Depth zero position 3,4 Magnetic metal film 23 (remaining) magnetic metal film 5, 6 Magnetic core half body 25, 26 Magnetic core Half block 10 Non-magnetic portion (polished groove portion) 11, 12, 13, 14 Non-magnetic substrate 20 Medium sliding surface 20a Polished groove bottom surface 21 (Non-magnetic material filled in the polished groove portion) 29 A pair of magnetic core blocks

Claims (8)

[Claims] 1. The magnetic core halves formed by sandwiching a magnetic metal film between a pair of substrates in the thickness direction of the magnetic metal halves are brought into contact with each other so that the end faces of the magnetic metal films present at the abutting faces of the magnetic core halves are abutted with each other. In a magnetic head having a magnetic gap formed between the surfaces, a portion of the medium sliding surface represented by the magnetic gap excluding the magnetic metal film is a nonmagnetic portion filled with a nonmagnetic material, and the magnetic metal film is formed. The magnetic head is characterized in that the track width is from the medium sliding surface to the depth zero position, and thereafter, the track width is thicker than the track width. 2. The magnetic head according to claim 1, wherein the non-magnetic material is ceramics. 3. The magnetic head according to claim 1, wherein the magnetic metal film is a laminated film in which a thin magnetic metal thin film is laminated in multiple layers with an electrically insulating film interposed therebetween. 4. The electrically insulating film is SiO ₂ or Al ₂ O.
The magnetic head according to claim 3, wherein it is _3. 5. A step of forming a magnetic metal film thicker than a track width on at least one surface of the substrate, and a plurality of substrates on which the magnetic metal film is formed are overlapped in the thickness direction of the magnetic metal film. Stacking and joining together to produce a magnetic core substrate, and cutting the magnetic core substrate in a direction orthogonal to the stacking direction to form a pair of magnetic core half blocks that are substantially symmetrical to each other. A step of forming a winding groove extending along the longitudinal direction on the cut surface of one magnetic core half block, and by making the end faces of the magnetic metal films of the pair of magnetic core half blocks face each other, A step of producing a magnetic core block by gap-bonding a pair of magnetic core half blocks to each other, and the thickness of the magnetic metal film formed to be thick is exposed as a dimension of a track width, A step of polishing the medium sliding surface side of the magnetic core block to a position where at least the depth is zero to leave only the magnetic metal film, a step of filling the portion removed by the polishing with a non-magnetic material, and a non-magnetic material Of the magnetic core block filled with the magnetic core block, a step of lapping the medium sliding surface side to form a surface having a curvature, and a step of cutting the magnetic core block into chips along the magnetic metal film. Head manufacturing method. 6. The method of manufacturing a magnetic head according to claim 5, wherein the non-magnetic material is ceramics. 7. The method of manufacturing a magnetic head according to claim 5, wherein the magnetic metal film is a laminated film in which a thin magnetic metal thin film is laminated in multiple layers with an electrically insulating film interposed therebetween. . 8. The electrically insulating film is SiO ₂ or Al ₂ O.
8. The method for manufacturing a magnetic head according to claim 7, wherein the number is ₃ .