JPH01260609A - Composite magnetic head and its manufacture - Google Patents

Composite magnetic head and its manufacture

Info

Publication number
JPH01260609A
JPH01260609A JP8852888A JP8852888A JPH01260609A JP H01260609 A JPH01260609 A JP H01260609A JP 8852888 A JP8852888 A JP 8852888A JP 8852888 A JP8852888 A JP 8852888A JP H01260609 A JPH01260609 A JP H01260609A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic film
film
track width
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8852888A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamamoto
山許 博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8852888A priority Critical patent/JPH01260609A/en
Publication of JPH01260609A publication Critical patent/JPH01260609A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To reduce an eddy current loss in a high frequency region, and to easily and precisely set track width by forming a multilayered magnetic film with high saturation magnetic flux density in a groove which is wider in width than the track widths at both the sides of a gap surface and in addition, is parallel with the gap surface and extends over its whole length. CONSTITUTION:The multilayered magnetic film consisting of a metallic magnetic film 3 and an insulation film 11 is formed in the groove 4 which is positioned at both the ends of a pair of core halves 1a, 1b as interposing a winding widow 9 part, a gap 8 surface and the gap and is wider in the width than the track width and is parallel with the gap surface and extends over the its whole length. Thus, the deterioration of a magnetic characteristic due to the eddy current loss due to the film thickness of the magnetic film can be reduced even in use for several tens of MHz, and in addition, since the grooves for regulating the track width Tw are worked on both the right and the left sides of the multilayered film of the metallic magnetic film 8 and the insulation film 11 by a grooving wheel, the track width Tw can be easily and precisely regulated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は複合型磁気ヘッド及びその製造方法に関し、
特に非磁性体と高飽和磁束密度の金属磁性体とからなる
磁気コアを有し、メタルテープ等の高保磁力媒体に信号
を記録再生する複合型磁気ヘッドに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a composite magnetic head and a manufacturing method thereof;
In particular, the present invention relates to a composite magnetic head that has a magnetic core made of a non-magnetic material and a metallic magnetic material with a high saturation magnetic flux density, and records and reproduces signals on a high coercive force medium such as a metal tape.

〔従来の技術〕[Conventional technology]

磁気記録技術において近年、高密度記録の要求から高保
磁力媒体(例えばメタルテープ)が使用されている。こ
の高保磁力媒体に信号を記録するには従来の高透磁率フ
ェライトでは不十分であり、第4図及び第5図に示すよ
うに高透磁率フェライト12と高飽和磁束密度を有する
金属磁性膜3、例えばセンダスト、Co系アモルファス
合金とを組み合わせた複合型磁気ヘッドが開発されてい
る(例えば、特開昭61−11909号公報参照)。
In recent years, in magnetic recording technology, high coercive force media (for example, metal tapes) have been used due to the demand for high-density recording. Conventional high magnetic permeability ferrite is insufficient for recording signals on this high coercive force medium, and as shown in FIGS. 4 and 5, a high magnetic permeability ferrite 12 and a metal magnetic film 3 having a high saturation magnetic flux density are used. For example, a composite magnetic head combining Sendust and a Co-based amorphous alloy has been developed (see, for example, Japanese Patent Laid-Open No. 11909/1983).

上記複合型磁気ヘッドはギャップ(G)を介して対峙す
る一対のコア半体1a、lbの記録媒体当接面7側に所
定の膜厚でガラス5a、5bをモールドし、補強ガラス
5a、5bに溝加工した後にこの溝4が完全に埋まるよ
うに金属磁性膜3をスパッタリングにより被着して製造
したものである。このような磁気ヘッドでは、金属磁性
膜3をギャップ(G)と直交する方向Pに延ばして記録
媒体当接面7のトラック幅対応部分に金属磁性膜3と高
透磁率フェライト12との接合面が表れないようにする
ことにより、再生時におけるコンタ−効果を防ぐことが
できる。な゛お、8は5in2゜Al2O2等の非磁性
材料からなるギャップである。9はコイル(図示せず)
を巻回するための巻線窓で、10はコア半体1a、lb
を溶着するための接合ガラスである。
The composite magnetic head has glass 5a, 5b molded to a predetermined thickness on the recording medium contacting surface 7 side of a pair of core halves 1a, lb facing each other with a gap (G) in between. After forming a groove, a metal magnetic film 3 is deposited by sputtering so that the groove 4 is completely filled. In such a magnetic head, the metal magnetic film 3 is extended in the direction P perpendicular to the gap (G), and a bonding surface between the metal magnetic film 3 and the high magnetic permeability ferrite 12 is formed in a portion corresponding to the track width of the recording medium contact surface 7. By preventing this from appearing, contour effects can be prevented during playback. Note that 8 is a gap made of a non-magnetic material such as 5 in 2° Al2O2. 9 is a coil (not shown)
10 is the winding window for winding the core half body 1a, lb
This is bonded glass for welding.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述のような従来の複合型磁気ヘッド及びその製造方法
では、信号を記録、再生する金属磁性膜のトラック幅部
分の金属磁性膜3が単層膜であるため、高周波領域で使
用する場合、渦電流損失により磁気特性が低下し、磁気
ヘッドの再生出力が低下するという問題があった。また
、金属磁性膜のトラック幅Twは補強ガラスに溝加工を
施すホイル(砥石)の幅で決まるため、トラック幅Tw
規制が非常に困難であり、バラツキが生じるという問題
があった。 この発明は上記のような問題点を解消する
ためになされたもので、高周波領域で金属磁性膜の渦電
流損失を軽減することができ、トラック幅規制を精度よ
くできる信頼性の高い複合型磁気ヘッド及びその製造方
法を提供することを目的とする。
In the conventional composite magnetic head and its manufacturing method as described above, since the metal magnetic film 3 in the track width portion of the metal magnetic film for recording and reproducing signals is a single layer film, when used in a high frequency region, vortex There was a problem in that the magnetic properties deteriorated due to current loss, and the reproduction output of the magnetic head decreased. In addition, the track width Tw of the metal magnetic film is determined by the width of the foil (grinding wheel) used to groove the reinforced glass, so the track width Tw
There was a problem that regulations were extremely difficult and variations occurred. This invention was made to solve the above-mentioned problems, and it is a highly reliable composite magnetic that can reduce eddy current loss in metal magnetic films in high frequency ranges and accurately regulate track width. The object of the present invention is to provide a head and a method for manufacturing the same.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係る複合型磁気ヘッドは、非磁性体またはフ
ェライトから成る一対のコアブロック半休の巻線窓部、
ギャップ面、及びギャップを挟んでその両端にトラック
幅よりも幅広でかつギャップ面に平行で全長に延びた溝
に、金属磁性膜と絶縁層とからなる多層磁性膜を形成し
たものである。
A composite magnetic head according to the present invention includes a winding window portion of a pair of core blocks made of a non-magnetic material or ferrite;
A multilayer magnetic film consisting of a metal magnetic film and an insulating layer is formed on the gap surface and in a groove wider than the track width and parallel to the gap surface and extending the entire length at both ends of the gap.

また、上記複合型磁気ヘッドの製造方法は、上記ギャッ
プ面9巻線溝部、及び溝部全面に上記多層磁性体膜を同
時に成膜し、記録媒体のトラックに対応する上記多層磁
性膜部分はトラック幅規制用の溝を設けることにより所
定のトラック幅に形成するようにしたことを特徴とする
ものである。
Further, in the manufacturing method of the composite magnetic head, the multilayer magnetic film is simultaneously formed on the gap surface 9 winding groove portions and the entire surface of the groove portion, and the multilayer magnetic film portion corresponding to the track of the recording medium has a track width. This is characterized in that the track width is formed to a predetermined width by providing regulating grooves.

〔作用〕[Effect]

この発明によれば、記録媒体当接面の金属磁性膜を絶縁
層を介して多層磁性膜としたので、高周波領域で金属磁
性膜の厚みによる渦電流損失を軽減でき、磁気ヘッドの
信頼性を向上することができる。また、記録媒体当接面
の金属磁性膜をスパッタする溝をトラック幅よりも幅広
に設け、溝加工用ホイルによりトラック幅を任意に設定
できるようにしたので、トラック幅の規制を高精度で行
うことができる。
According to this invention, since the metal magnetic film on the recording medium abutting surface is made into a multilayer magnetic film with an insulating layer interposed therebetween, it is possible to reduce eddy current loss due to the thickness of the metal magnetic film in the high frequency region, and improve the reliability of the magnetic head. can be improved. In addition, the groove for sputtering the metal magnetic film on the recording medium contact surface is made wider than the track width, and the track width can be set arbitrarily using a groove processing foil, making it possible to regulate the track width with high precision. be able to.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例による複合型磁気ヘッドの構
造を示す斜視図であり、第2図は第1図の平面図である
。図において、la、lbはコアブロック半休、2は非
磁性材、3は磁性体である金属磁性膜で、例えばセンダ
スト、アモルファス合金属などから成る。8は記録媒体
に信号を記録。
FIG. 1 is a perspective view showing the structure of a composite magnetic head according to an embodiment of the present invention, and FIG. 2 is a plan view of FIG. 1. In the figure, la and lb are half core blocks, 2 is a non-magnetic material, and 3 is a magnetic metal film, which is made of sendust, amorphous metal alloy, etc., for example. 8 records the signal on the recording medium.

再生するための5iOz、Al2O2等の非磁性材から
なるギャップ、4はコアブロック半体la。
A gap made of non-magnetic material such as 5iOz and Al2O2 for regeneration, and 4 a core block half la.

1bの記録媒体当接面7に設けられた溝であり、ギャッ
プ8を挟んでその両側にギャップ8面に対して平行で全
長に亘って延びており、この溝4における記録媒体(図
示せず)のトラックに対応する部分、ギャップ面には上
記金属磁性膜3がスパッタされている。9はコイルを巻
回するための巻線窓、10はコアブロック半休を接合す
るためのガラス、11は合金磁性膜3を多層に形成する
ための絶縁層であり、例えば5i02などの非磁性材か
ら成る。
This is a groove provided in the recording medium abutting surface 7 of the groove 4, and extends over the entire length on both sides of the gap 8 in parallel to the surface of the gap 8. ) The metal magnetic film 3 is sputtered on the gap surface and the portion corresponding to the track. 9 is a winding window for winding the coil, 10 is a glass for joining the core block halves, and 11 is an insulating layer for forming the alloy magnetic film 3 in multiple layers, and is made of a non-magnetic material such as 5i02. Consists of.

次に上記複合型磁気ヘッドの製造方法を工程順に第3図
(a)〜(f)を用いて説明する。
Next, a method for manufacturing the above composite magnetic head will be explained in order of steps with reference to FIGS. 3(a) to 3(f).

まず、第3図(alに示す工程において、非磁性材から
成るコアブロック半体1aのギャップ面20aに巻線窓
用の溝9を形成し、コアブロック半体la、lbのギャ
ップ面2Qa、20bに平行でトラック幅Twより広い
幅の溝4a〜4dを複数本形成し、ギャップ面20a、
20bを研磨する。
First, in the step shown in FIG. 3 (al), grooves 9 for winding windows are formed in the gap surface 20a of the core block half body 1a made of a non-magnetic material, and the gap surfaces 2Qa of the core block halves la, lb are formed. A plurality of grooves 4a to 4d are formed parallel to 20b and wider than the track width Tw, and the gap surface 20a,
Polish 20b.

次に、第3図(b)に示す工程において、上記ギャップ
面20a、20bと溝部4a〜4dと巻線窓9全面に同
時に合金磁性膜3a、3bと絶縁層11a、llbを交
互にスパッタリングし、多層磁性膜を形成する。
Next, in the step shown in FIG. 3(b), alloy magnetic films 3a, 3b and insulating layers 11a, llb are alternately sputtered simultaneously on the gap surfaces 20a, 20b, the grooves 4a to 4d, and the entire surface of the winding window 9. , forming a multilayer magnetic film.

次に第3図(C)の工程で、溝部4a〜4dに形成した
多層磁性膜の幅が所定のトラック幅になるように溝部4
a〜4dの両側にトラック幅規制用の溝30a〜30d
を形成し、非磁性体を充填した後ギャップ面40a、4
0bを研磨して、非磁性材であるS iOz 、Al2
O2等のギャップ材をギャップ突き合わせ面にスパッタ
リングする(図示せず)。
Next, in the step of FIG. 3(C), the grooves 4a to 4d are adjusted so that the width of the multilayer magnetic film formed in the grooves 4a to 4d becomes a predetermined track width.
Grooves 30a to 30d for track width regulation on both sides of a to 4d
After forming and filling the non-magnetic material, the gap surfaces 40a, 4
After polishing 0b, the non-magnetic material SiOz, Al2
Sputter a gap material such as O2 onto the gap abutting surfaces (not shown).

次に、第3図Fdlの工程で、コアブロック半体la、
lbのトラック幅Tw同士を位置合わせし、ガラス棒1
0を巻線窓9に挿入後、ガラス棒1゜を溶融してコアブ
ロック半体1a、lbを接合し一体化する。
Next, in the process of FIG. 3 Fdl, the core block half la,
Align the track widths Tw of lb and insert the glass rod 1
0 into the winding window 9, the glass rod 1° is melted and the core block halves 1a and lb are joined and integrated.

その後、第3図(e)の工程で、コアブロック半体la
、lbを一点鎖線M、Nで切断し、第3図(flの工程
で一対のコアブロック1aの巻線溝9に所定のコイル(
図示せず)を巻回することにより、記録媒体に信号を記
録再生する複合型磁気ヘッドを完成する。
After that, in the step shown in FIG. 3(e), the core block half la
, lb are cut along dashed lines M and N, and in the process of FIG. 3 (fl), a predetermined coil (
(not shown), a composite magnetic head for recording and reproducing signals on a recording medium is completed.

このように本実施例によれば、上述のように信号記録再
生のための磁性体膜を金属磁性膜3と絶縁膜11の多層
膜にしたので、数十MHzで使用しても磁性膜の膜厚に
よる渦電流損失による磁気特性の低下が軽減され、品質
のよい信頼性の高い磁気ヘッドを得ることができる。ま
た、トラック幅Tw以上の幅を有する溝4に埋込まれた
金属磁性膜と絶縁膜との多層膜の左右両側に溝加工用水
イルによりトラック幅Tw規制用の溝加工を施すように
したので、トラック幅Tw規制を容易にかつ高精度で行
うことができる。
According to this embodiment, the magnetic film for recording and reproducing signals is made of a multilayer film consisting of the metal magnetic film 3 and the insulating film 11, as described above, so that even when used at several tens of MHz, the magnetic film remains stable. Deterioration of magnetic properties due to eddy current loss due to film thickness is reduced, and a high quality and highly reliable magnetic head can be obtained. In addition, grooves for regulating the track width Tw are formed on both left and right sides of the multilayer film of a metal magnetic film and an insulating film embedded in the groove 4 having a width equal to or larger than the track width Tw. , the track width Tw can be easily and accurately regulated.

なお、上記実施例ではギャップ(G)がアジマスを有し
ない場合について述べたが、この発明の技術思想はこれ
に限らず、本発明はビデオヘッドのどとくギャップ(C
,)がアジマスを有する場合についても適用できる。
Although the above embodiment describes the case where the gap (G) has no azimuth, the technical idea of the present invention is not limited to this, and the present invention also applies to the video head throat gap (C).
, ) has an azimuth.

また、上記実施例ではコアブロック半体1a。Further, in the above embodiment, the core block half body 1a.

1bに非磁性材を用いたが、これは高透磁率フェライト
でもよく、上記実施例と同様の効果を得ることができる
Although a non-magnetic material is used for 1b, a high magnetic permeability ferrite may be used instead, and the same effect as in the above embodiment can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、高保磁力媒体との組み
合わせに適した高飽和磁束密度の金属から成る磁性体を
絶縁層との多層磁性膜としたので、高周波領域で金属磁
性膜の膜厚による渦電流損失を軽減でき、また、多層磁
性膜をスパッタする溝をトラック幅よりも幅広に形成し
、溝加工用ホイルよりトラック幅を任意に設定できるよ
うにしたので、トラック幅を容易に精度よく設定でき、
信頼性の高い複合型磁気ヘッドを得ることができる。
As described above, according to the present invention, since the magnetic material made of a metal with a high saturation magnetic flux density suitable for combination with a high coercive force medium is made into a multilayer magnetic film with an insulating layer, the thickness of the metal magnetic film can be increased in the high frequency region. In addition, the grooves for sputtering the multilayer magnetic film are formed wider than the track width, and the track width can be set arbitrarily using the groove processing foil, making it easy to adjust the track width with precision. Well configurable,
A highly reliable composite magnetic head can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例による複合型磁気ヘッドの
構造を示す斜視図、第2図は第1図の平面図、第3図(
a)〜(f)は第1図の複合型磁気ヘッドの製造工程を
示す図、第4図は従来の磁気ヘッドを示す斜視図、第5
図は第4図の平面図である。 la、lbはコアブロック半休、2は非磁性体、3は金
属磁性膜、4は溝、5はガラス、7は記録媒体当接側、
8はギャップ、9は巻線窓、IOは接合ガラス、11は
絶縁膜、12は高透磁率フェライト、20 a、  2
0 b、  40 a、  40 bはギャップ面、3
0a〜30dは溝である。 なお図中同一符号は同−又は相当部分を示す。
FIG. 1 is a perspective view showing the structure of a composite magnetic head according to an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG.
a) to (f) are diagrams showing the manufacturing process of the composite magnetic head shown in FIG. 1, FIG. 4 is a perspective view showing a conventional magnetic head, and FIG.
The figure is a plan view of FIG. 4. la and lb are half core blocks, 2 is a non-magnetic material, 3 is a metal magnetic film, 4 is a groove, 5 is glass, 7 is a recording medium contact side,
8 is a gap, 9 is a winding window, IO is a bonding glass, 11 is an insulating film, 12 is a high permeability ferrite, 20 a, 2
0 b, 40 a, 40 b are gap surfaces, 3
0a to 30d are grooves. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (2)

【特許請求の範囲】[Claims] (1)一対の対峙するコアブロック半体を非磁性体また
はフェライトから構成し、信号記録再生のための磁性体
膜を有する磁気ヘッドにおいて、上記コアブロック半体
のギャップ面、巻線窓部、及びギャップ面を挟んでその
両側にトラック幅より幅広でかつギャップ面に平行で全
長に延びた溝に、飽和磁束密度の高い金属磁性膜と絶縁
層とからなる多層磁性膜を形成したことを特徴とする複
合型磁気ヘッド。
(1) In a magnetic head in which a pair of opposing core block halves are made of a non-magnetic material or ferrite and have a magnetic film for recording and reproducing signals, a gap surface of the core block halves, a winding window portion, A multilayer magnetic film consisting of a metal magnetic film with high saturation magnetic flux density and an insulating layer is formed in a groove wider than the track width and parallel to the gap surface and extending the entire length on both sides of the gap surface. A composite magnetic head with
(2)信号記録再生のための磁性体膜を有する磁気ヘッ
ドにおいて、 非磁性体またはフェライトから成る一対のコアブロック
半休のギャップ面に巻線窓、及びトラック幅より幅広で
かつギャップ面に平行に全長に延びた溝を形成する第1
の工程と、 上記巻線窓、ギャップ面、及び溝部全面に飽和磁束密度
の高い金属磁性膜と絶縁層とを交互にスパッタリングし
て多層磁性膜を同時に成膜する第2の工程と、 上記溝部の多層磁性膜の両側にトラック幅規制用の溝を
形成して上記多層膜磁性膜を所定のトラック幅になるよ
うに形成する第3の工程と、上記一対のコアブロック半
体を上記ギャップ面を突き合わせて接合する第4の工程
とを含むことを特徴とする複合型磁気ヘッドの製造方法
(2) In a magnetic head having a magnetic film for recording and reproducing signals, a winding window is provided on the gap surface of a pair of half core blocks made of non-magnetic material or ferrite, and a winding window is provided wider than the track width and parallel to the gap surface. A first groove forming a groove extending the entire length.
a second step of simultaneously forming a multilayer magnetic film by alternately sputtering a metal magnetic film with a high saturation magnetic flux density and an insulating layer on the winding window, the gap surface, and the entire surface of the groove; a third step of forming track width regulating grooves on both sides of the multilayer magnetic film to form the multilayer magnetic film so as to have a predetermined track width; and a fourth step of butting and joining the composite magnetic heads.
JP8852888A 1988-04-11 1988-04-11 Composite magnetic head and its manufacture Pending JPH01260609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8852888A JPH01260609A (en) 1988-04-11 1988-04-11 Composite magnetic head and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8852888A JPH01260609A (en) 1988-04-11 1988-04-11 Composite magnetic head and its manufacture

Publications (1)

Publication Number Publication Date
JPH01260609A true JPH01260609A (en) 1989-10-17

Family

ID=13945339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8852888A Pending JPH01260609A (en) 1988-04-11 1988-04-11 Composite magnetic head and its manufacture

Country Status (1)

Country Link
JP (1) JPH01260609A (en)

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