JPH07294863A - Manufacture of liquid crystal electrooptic device - Google Patents

Abstract

PURPOSE:To prevent water from entering unit panels when a multiple-unit substrate is cut and separated and to improve the manufacture yield in the case of the manufacture of liquid crystal panels using the multiple-unit substrate. CONSTITUTION:When the joined body formed by joining an A substrate 1 and a B substrate 2 is cut and separated, a grinding device for grinding a semiconductor substrate is used, and both the A and B substrates are ground not to the overall thickness, but leaving certain thickness, and then are cut with external stress.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat type light valve device mainly used in a direct-view type electro-optical device and a projection type electro-optical device, for example, a simple matrix panel such as a TN system or a TF.
The present invention relates to a method of manufacturing a liquid crystal electro-optical device such as an active matrix panel of T type or MIM type.

[0002]

2. Description of the Related Art Conventionally, in most of mass production of direct-view type electro-optical devices and projection type electro-optical devices, a multi-chambered substrate is adopted as a flow substrate in order to improve efficiency. Therefore, in the manufacturing process, a panel separation process occurs after the AB substrates are bonded together. Usually, a glass grinder is used to divide into slits, but it is difficult to separate the recent high-definition patterns and small-panel multi-chambered substrates accurately according to size.

Therefore, a method has been implemented in which a grinding device for cutting a semiconductor substrate is used to grind and divide the semiconductor substrate to separate it with accurate dimensions.

[0004]

In the method of separating the multi-chambered substrate by using the grinding device for cutting the semiconductor substrate, there is a problem that the lubricating water sprayed from the device during the grinding enters the inside of the panel. If water enters the panel, a panel defect described later will occur.

(1) When lubricating water enters the inside of the panel, it is difficult to dry the inside, and even if it can be dried,
Substrates and minute fragments of the grinding blade mixed with the lubricating water remain inside the panel, which significantly affects the image quality and the life of the liquid crystal optical device. (2) If the liquid crystal injecting process is started while the water remains inside the panel, the device part of the vacuum system of the liquid crystal injecting device is broken by the water and does not function.

(3) A liquid crystal panel is manufactured by injecting liquid crystal into the inside of the panel. However, when the liquid crystal is mixed with the residual water inside the panel, the characteristics of the liquid crystal material itself are completely lost and the liquid crystal electro-optical device operates. Disappear. (4) Since the internal insulation state is lost due to the residual water inside the panel, a short circuit is likely to occur due to the potential difference inside or outside the panel in the pixel driving electric circuit constituent layer provided on at least one side. As a result, the drive circuit is destroyed and the liquid crystal electro-optical device does not operate.

Many kinds of problems occur when water enters the panel. Therefore, it is necessary to prevent the water from entering the panel during the manufacturing process.

[0008]

In order to solve the above-mentioned problems, the present invention uses a grinding method for separating a multi-chamfered panel from a thickness that can be divided by external stress instead of grinding the entire thickness of the substrate. I chose to leave only.

[0009]

In the liquid crystal electro-optical device cut and separated as described above, the lubricating water sprayed from the device during grinding and separation completely disappears from the inside of the panel.

[0010]

[Embodiment 1] FIG. 1 (A) is a view of a multi-panel, which has not been separated, viewed from above. The A substrate 1 is adhered by a B substrate 2, a single panel seal 3, and a waterproof seal 4 including each single panel portion 5 inside. Reference numeral 6 is an alignment mark when combining both AB substrates, and 7 is a common electrode extraction terminal.

As the A and B substrates, glass having a thickness of 0.4 mm was used. In order to separate the bonded assembly of the AB substrates thus combined, a grinding device for cutting a semiconductor substrate was used.
Grinding was performed so that a groove having a depth of 0.35 mm was formed so as to leave a residual portion of 5 mm. FIG. 1B shows the state of the substrate after the grinding.

FIG. 1B is a sectional view taken along the line aa 'in FIG. 1A. All the cut surfaces in the horizontal and vertical directions of the A and B substrates were ground with the residual portion of 0.05 mm left as described above. Then, when the AB substrate bonded body of 2 is placed on a thin rubber rubber and pressed, the ground portion is
It was cut cleanly.

Further, it was confirmed whether or not the water sprayed during the grinding remained in each single panel, but all the water did not enter the single panel. In the above examples, the waterproof seal 4 was provided, but even if the waterproof seal 4 was not used, it was possible to prevent water from entering the single panel at a high rate.

[0014]

[Effect] As described above, by adopting the cutting method of the present invention, it is possible to eliminate various defects that have been caused by the intrusion of water into the panel, and to greatly improve the manufacturing yield. I was able to.

[Brief description of drawings]

FIG. 1 is a schematic view of a joined body of an A substrate and a B substrate as seen from above.

[Explanation of symbols]

 1 A board 2 B board 3 Single panel seal 4 Waterproof seal 5 Single panel part 6 AB board alignment mark 7 Common electrode extraction terminal

Claims (1)

[Claims] 1. A method for manufacturing a liquid crystal electro-optical device using a multi-chamfered substrate, wherein when separating into a single panel, grinding is performed by leaving a part of the substrate thickness from the outer surface of the substrate constituting the cell, A method for manufacturing a liquid crystal electro-optical device, which comprises separating and cutting a single panel by external stress.