JPH0729142A - Thin-film magnetic recording medium and its manufacture and memory device - Google Patents

Abstract

PURPOSE:To attain specific high density by turning particles into a highly orientated and highly dispersed state via a physically evaporating ambience through an interaction between the wave energy from a wave driving body such as sound waves or the like and a light, etc., when a magnetic thin film is to be formed on a substrate in vacuum. CONSTITUTION:A supporting stage 2 of ceramic, Teflon, etc., is set in a vacuum box 1 of a sputtering apparatus. There are arranged wave driving bodies 4a, 4b so that particles physically evaporated on a, e.g. 3.5-inch aluminum non- magnetic substrate 3 having an NiP undercoating layer are transmitted onto the supporting stage 2 with accompanying the wave energy of sound waves and ultrasonic waves, and moreover, red semiconductor lasers 40a, 40b of a specific wavelength are provided. The wave energy from the wave driving bodies 4a, 4b is allowed to interact with the light or laser, whereby the particles are turned into a highly orientated and highly dispersed state through the physically evaporating ambience. Accordingly, recording with high density not smaller than 900Mb/in<2> or so is achieved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises thin film forming and various thin film forming bodies and processing bodies, processing methods and memories or manufacturing methods, manufacturing devices and storage devices, and various reusable semiconductor processes and devices. Something
In particular, a magnetic storage device such as a small-sized and large-capacity magnetic disk device, a magnetic tape device, a flexible disk device, and a magnetic card device, and a highly reliable and high-density recordable magnetic recording medium used therefor, and a manufacturing method and processing thereof. A method and a manufacturing apparatus.

[0002]

2. Description of the Related Art Magnetic recording media currently commercialized are mainly coating types using an organic binder, that is, those having a discontinuous medium. An oxide is used as the magnetic powder used in this discontinuous medium, and the magnetic particles are filled with an organic binder, so that the discontinuous medium is formed.
Naturally, the value of magnetization becomes small, and the film thickness becomes thicker when trying to obtain an output, which is not suitable for high density.

In recent years, the density of magnetic recording media has been remarkably improved, and a medium having a large coercive force, which is a continuous thin film medium, has been required. This continuous thin film medium capable of high density magnetic recording is formed by a physical method (PVD; Physical Vapor Depositio).
The current situation is that it is done in n). That is, a metal magnetic thin film, or an oxide or nitride magnetic thin film is formed by a method such as vacuum deposition, sputtering, ion plating, ion beam deposition, or ion assisted deposition. In particular, when the magnetic layer is a magnetic alloy, it has excellent characteristics, and the film forming apparatus is a high frequency sputtering method, RF, DC.
The magnetron sputtering method, bias sputtering method, RF sputtering method, or the like is used.

As a conventional example, there is a single layer film of CoPtCr (Cr, 1 to 17%) in Japanese Patent Laid-Open No. 59-88806. Further, in US Pat. No. 4,789,598, CoPtCr (C
r; 13 to 20%) and a multilayer film of CoPtCr (Cr; 17%) and Cr is described in JP-A-2-281414.

In all cases, a medium having a low medium noise, a high peak jitter, a high signal-to-noise ratio (SNR) and a small bit error rate during high density magnetic recording, and a magnetic recording apparatus using the medium are provided. It is an object.

[0006]

In the prior art, the characteristics of the magnetic recording medium suitable for high linear recording density and high track density have not been sufficiently taken into consideration. That is, in the prior art, IEEE Transactions. on. Magnetics, Vol. 22, 579-581 (1986) (IEEE)
E. Trans.on Magn. MAG-22, 579-581
As described in (1986) and U.S. Pat. No. 4,735,840, there is a problem in that the magnetic characteristics in the circumferential direction and the recording / reproducing characteristics become non-uniform depending on the film forming conditions.

In order to reduce this non-uniformity, conventionally, the center line average surface roughness along the circumferential direction of the disk substrate is 5 nm.
It had unevenness (texture). But 11
In order to perform recording / reproducing at a high linear recording density of 0 KBPI or more, it is necessary to keep the distance (spacing) between the head and the medium to about 0.1 μm or less. For this purpose, it is necessary to make the substrate as smooth as possible. is there. However, it has been found that the spacing between the head media cannot be stably narrowed to about 0.1 μm or less because the substrate plane becomes rough when the texture processing is performed. The quality of the servo signal is poor on the textured board, and accurate positioning cannot be done.
It was difficult to achieve higher track density than PI. These problems can be avoided if the texture is made smaller or eliminated from this, but the non-uniformity in the circumferential direction generally becomes extremely large, the orientation in the circumferential direction and the S / N ratio are high, and the high density is achieved. There is a problem that it is difficult to stably supply a suitable magnetic disk.

In the conventional thin film medium manufacturing method, it is difficult to provide anisotropy in the circumferential direction of the magnetic disk on a smooth substrate without texture.

The object of the present invention is 110 KBPI, 5 KTPI, that is, 550 Mb / in ² or more, and further 900 Mb / in.
Even if the center line average surface roughness is 3 nm, preferably 1.55 nm or less, which is compatible with high density in ² or more, the magnetic characteristics in the head traveling direction are uniform, and the medium noise is small. It is an object of the present invention to provide a technique for a thin film magnetic recording medium having excellent recording / reproducing characteristics, a method for manufacturing the thin film magnetic recording medium, a manufacturing apparatus, a magnetic disk device using this medium, a semiconductor process and the like.

[0010]

In order to achieve the above object, the present invention uses a non-magnetic substrate having a surface center line average surface roughness of 3 nm or less, which enables stable and low flying of a magnetic head. A compression wave of a sound wave or an ultrasonic wave, which can give effective energy from the outside to plasma-like or vapor-like particles forming a thin film on the substrate, that is, particles obtained by a sputter evaporation method, an evaporation method or an ion beam sputtering method, preferably Uses a thin film forming device equipped with equipment for generating controlled longitudinal and transverse waves and an electromagnetic wave, preferably a laser, and uses sound wave, ultrasonic wave, microwave mode, superposed mode of sound wave / ultrasonic wave / microwave, interference wave, Particles vaporized, sputtered, or converted into plasma by using electromagnetic waves (laser or maser) (see laser ablation method and sputtering method, advanced application technology of particle beam) Concerning symposium, 3rd, 1
November 992, P283-) by the ion acoustic method (see; Fusion Research, Vol. 67, No. 6, 1992, 6).
The method for forming a thin film which is effectively controlled, excited, and increased in energy, and a thin film medium according to the present method and the same are used.

In the present invention, plasma-like particles such as sputter-evaporated particles are directly subjected to various wave motions in a vacuum container (tank).
Ultrasonic waves, such as sound waves with variable vibration and compression waves, and preferably interference waves of longitudinal and transverse waves, and by interacting with a laser or maser, more effective energy is given to excite the thin film with desired characteristics. It provides a medium.

INDUSTRIAL APPLICABILITY The present invention can be diverted to manufacture automobile parts, various electric / electronic parts, and semiconductor devices, and a thin film forming body, a manufacturing method and manufacturing apparatus therefor, a processing body and processing method,
It is also applicable as a memory and a storage device.

By controlling the wave mode of the interference wave, particularly excellent characteristics can be obtained. This is because the strain or lattice vibration on the substrate (see; Atom transfer process induced by electronic excitation, 1992, Scientific Research Society of Japan, P2-) plays an extremely important role in thin film growth. (Reference: Atomic Control Surface Project, New Technology Agency, Creative Science and Technology Research Group, December 1992, Part 3, P6
9-).

That is, by applying a sound wave or an ultrasonic wave having a wave mode of an interference wave to excite particles and further strengthen the interaction with a laser or a maser, atoms and ions which are metastable and hardly exist in a usual manufacturing method. Can be realized more effectively, the dispersibility and composition segregation can be controlled along with the orientation of the underlayer or magnetic layer, and the segregation state can be controlled.
The size of the particles can also be made uniform.

In the case of a magnetic disk, according to this method,
Thus, it is possible to provide a medium suitable for high-density recording, which has a high output, a small noise, and a magnetic characteristic distribution in the circumferential direction of 7% or less. Especially the center line average surface roughness R of the medium surface
By applying the present invention to a substrate having a of 3 nm or less, the distribution of magnetic characteristics in the head traveling direction (circumferential direction in the case of a disk) can be made uniform to 7%, which is particularly preferable.

If Ra is smaller than 0.2 nm, the head adheres to the medium surface, which is not preferable.
The above is preferable.

By using this medium, the flying height of the magnetic head can be reduced to 0.05 μm or less, and by combining with the magnetoresistive head, a high density device of 900 Mb / in ² or more can be provided. The surface roughness of the substrate is 0.1 nm or more and 2 nm
This effect is remarkable in the following cases. Further, by forming a protective layer on the magnetic layer so that the center line average surface roughness thereof is larger than the value of the substrate, it is possible to more effectively prevent adhesion and increase in tangential force during CSS. Therefore, it is particularly preferable.

An example of the interference wave will be described later in detail with reference to FIG. Further, by applying a bias of about -400 V during film formation and simultaneously performing a high orientation process of forming a film at 10 W / cm ² or more, the coercive force of the magnetic desk and the electromagnetic characteristics such as squareness and uniformity can be further improved. It can also be improved.

Further, in the present invention, when a sound wave, an ultrasonic wave, a microwave and a laser or a maser are applied to particles in a plasma state, that is, sputter-evaporated particles, a magnetic field is further applied to obtain various magnetic anisotropies. it can. As the non-magnetic substrate, at least the surface has a high strength and has a high trapping property for flying particles, such as an Al alloy substrate plated with NiP, a Ti substrate, glass, silicon, SiC, crystallized glass or a ceramic substrate. It is preferable to use a material that effectively absorbs wave energy for controlling orientation and segregation. Since the orientation, anisotropy, and texture can be controlled by this method, the method can be applied to magnetic head materials, such as permalloy thin films for MR reproducing elements and amorphous magnetic materials for recording. This device can be used as a semiconductor manufacturing device and a manufacturing device for various parts such as automobiles.

[0020]

Function: At least Nb, Cr, M on a ceramic, crystallized glass, tempered glass, carbon, Si, SiC, Ti substrate or a substrate obtained by plating an aluminum alloy with NiP.
CoCrPt, CoCrTa, CoNiCr, CoNiP through a single underlying layer of o, W, CrTi, or the like.
When at least one magnetic layer such as t is formed, crystal grains are further miniaturized by applying sound waves, ultrasonic waves, microwaves, lasers, masers, etc. to various physically evaporated particles from the inside. At the same time, the dispersibility is increased and the segregated state of the crystal grain size is made uniform, so that the film structure is suitable for noise reduction. The magnetic layer is made of Cr, M having a thickness of 0.5 or more and 10 nm or less.
o, W, CrTi, CrSi, Nb, C, B, Ta, V
It is particularly preferable to divide it into at least two layers with a non-magnetic layer such as the above because noise can be significantly reduced.

Furthermore, when a thin film is formed by the usual vapor deposition method or sputtering method, the surface roughness distribution of the substrate,
Due to the distribution of substrate temperature and the growth of particles of oblique incidence component,
In particular, when the center line average surface roughness Ra of the substrate is as small as 2 nm or less, the magnetic characteristics in the disk circumferential direction fluctuate significantly, but this method can impart wave energy of ultrasonic waves and ultrasonic waves and electromagnetic wave energy. In addition, the distribution due to the above disturbance can be suppressed, and physical vaporized particle groups and binding states that do not exist in the energy state by the ordinary film forming method also exist, the orientation can be easily controlled and the characteristics can be made uniform. You can also

If Ra is smaller than 0.1 nm, the head sticks to the surface of the medium, which is not preferable.

The wave state can be roughly divided into three modes, namely, a longitudinal wave mode, a transverse wave mode, and an interference wave mode in which a sound wave and a laser are interacted with each other. In particular, the mutual interference wave mode effective in the present invention is obtained from the interaction between different waves such as sound waves, ultrasonic waves, longitudinal waves of microwaves and transverse waves, and laser and maser.

Further, sound waves, ultrasonic waves, microwaves, lasers, and masers may be waved in any mode. In addition, this effect during thin film formation is
The frequency, phase, and amplitude of the applied sound waves, ultrasonic waves, and lasers are equal, and it is remarkable when the frequency matches an integer multiple of the vibration of the substrate (strictly including the film), but even if it is different good.

The waveform is usually a sine wave, but a pulse wave is also possible. For example, when a NiP underlayer is provided on aluminum with a diameter of 5.25 inches and a thickness of 2 mm, a frequency of about 35 kHz or an integral multiple thereof, 7
The ultrasonic wave of W and the laser of 670 nm and 1 W may be propagated in the space. Similarly, for example, in the case of 3.5 inches and thickness 1.2 mm, ultrasonic waves of about 52 kHz, 5 W and 0.15 kHz.
A 5W laser is preferred. Further, it is more effective to rotate the disk during the film formation.

FIG. 1 shows a sectional view of an embodiment of the thin film forming apparatus of the present invention. A pair of wave driving bodies 4a, 4b and a pair of semiconductor lasers 40a, 40b are installed (with a special reinforcing body) so that the frequencies of sound waves and ultrasonic waves may be matched, and the laser may be visible light. It is also possible to slightly shift them to generate interference wave modes of sound waves and ultrasonic waves to further cause mutual interference with the laser.

Here, the surface of the magnetic surface was smooth by any method. Further, by applying a magnetic field from a magnet at the same time as a sound wave, an ultrasonic wave, a microwave and a laser or a maser, the magnetic anisotropy direction of the metal magnetic particles on the substrate is further aligned in a desired direction by the interaction between the two. It is particularly desirable because it can be done.

Further, it is desirable to properly use the above modes according to the specifications of the recording / reproducing characteristics required from the specifications of the apparatus. That is, when reproduction output is particularly required,
A laser of the same phase or a maser is superposed on the in-phase mode (longitudinal wave or transverse wave) of both ultrasonic or microwave driving bodies in which a crystal with higher circumferential orientation and higher integrity is grown. In particular, when extremely low noise is required, the segregation state is promoted and the interference wave modes, that is, modes and phases, capable of growing uniform and fine crystal grains are made different. When the average characteristics of both are required, one of the interference wave modes (sound wave, ultrasonic wave, microwave) is set to 0.
Sound wave of 001 to 20 kHz, the other is 25 to 500 kHz
It is desirable that the superposed wave as z ultrasonic waves interact with the laser and the maser.

As described above, the medium according to the present invention can control the orientation and texture even if the center line average surface roughness of the substrate is 2 nm or less, so that the magnetic properties are excellent in uniformity and the noise can be reduced. . In particular, when a magnetic layer is formed on such a smooth surface, the signal from the disk is sufficiently uniform even when evaluated in units of about 1/10 of the track width (0.5 μm or less), and the quality of the servo signal is improved. It is particularly preferable because it is improved by a factor of two or more as compared with the conventional disc. If the surface roughness of the substrate is smaller than 0.1 nm, the manufacturing cost becomes extremely high and the head easily sticks to the medium, which is not preferable. The substrate may or may not be textured, but it is more preferable not to texture it because the quality of the servo signal is higher, and this effect is more remarkable.

Since this medium has low noise and excellent uniformity of characteristics, a high S / N of 6 KTPI or more and 150 KBPI or more can be realized by combining with a magnetoresistive head having particularly high reproducing sensitivity, and 900 Mb A high-density magnetic disk device of / in ² or more can be provided. Here, by providing a protective film on the surface of the magnetic surface such that its average surface roughness (Ra) is larger than the value of the substrate, it is possible to suppress an increase in adhesive force and tangential force during CSS, and to improve reliability. Can be significantly improved. This is because increasing the surface roughness prevents the moisture in the air from aggregating between the head and the medium. This medium can be achieved by once providing a protective film and then leaving a protrusion in an area of about several percent using a mask, or growing a different phase during the formation of the protective film. As the surface roughness, the maximum protrusion height Rp is 25 nm or less, more preferably 20 n.
By setting m or less, apparent spacing between head media can be reduced, and high recording density of 900 Mb / in ² or more can be achieved.

If the above technique is applied to automobiles, various electric / electronic parts, and semiconductors, a highly reliable and high-performance thin film forming body, a manufacturing method and a manufacturing apparatus therefor, a processing body and a processing method, and a memory, which have not been hitherto available. And it is clear that a storage device can be provided.

[0032]

【Example】

(Embodiment 1) A cross-sectional view of a magnetic disk of the present invention and a schematic cross-sectional view of an example of a manufacturing apparatus are shown in FIGS. In Figure 3,
Reference numeral 3 is a non-magnetic substrate made of glass, carbon, Si, Ti, SiC, NiP plated Al alloy, ceramic or the like. 51
Is Cr, Mo, W, CrTi, Nb, Cr-W, Cr-
A nonmagnetic underlayer made of at least one thin film of Mo, Cr-Si, or the like, 52 is CoCrTa, CoCrPt, Co
A single magnetic layer such as NiPt or CoNiCr or a multilayer magnetic layer having a non-magnetic intermediate layer, 53 is B, C, i-C, B ₄ C, Z
It is a protective layer of rO ₂ , SiO ₂ , Al ₂ O _3, etc. A lubricant 54 such as perfluoroalkylpolyether having a polar, adsorptive, and reactive end group may be formed on the surface of the protective film. The method for forming this disc will be described in more detail. Sputtering equipment vacuum box 1 ceramic,
A support base 2 made of a material such as Teflon is arranged. A substrate 3 such as a 3.5-inch aluminum non-magnetic substrate having a NiP underlayer is mounted on the support base 2, and the physically evaporated particles on the non-magnetic substrate 3 have wave energy of sound waves and ultrasonic waves. Wave drive bodies 4a, 4 so as to be transmitted with
b and 670nm, 0.5W red semiconductor laser 4
0a and 40b are installed. Surface roughness Ra of the substrate is 3n
m, and the substrate temperature during film formation was 250 ° C. further,
The magnets 5a and 5b (electromagnets or permanent magnets) for applying a magnetic field are arranged according to the purpose.

The wave drive bodies 4a and 4b in FIG. 1 are annular. Further, in the figure, one of 0.001 to
Although the superposition mode in which the sound wave of 20 kHz and the ultrasonic wave of 25 to 500 kHz (3 to 7 W in each case) are used for the other is shown, naturally other variable modes are also effective. Further, a high energy laser, that is, an ArF excimer laser having a wavelength of 193 nm, preferably a pulse wave or the like can be added from the outside. Further, the evaporation sources in the apparatus are CrSi, Nb, Cr.
-W, Cr-Mo, Cr, CrTi, Mo, W, etc. targets for non-magnetic underlayers or intermediate layers, FeCoNiC
Magnetic material targets such as r, CoCrTa, CoCrPt, and CoNiCr; targets for protective films such as C, B, B ₄ C, and WC are provided (only magnetic targets are shown in the figure).

Using this apparatus, 2.5 ″ φ, Ra 1.2 nm
Cr underlayer in each wave mode on the carbon substrate of
Gas pressure 3 mTorr, 50 nm at _{^{15W / cm 2, CoCr 0.}} 16 Pt
_{0. 4} 20 nm magnetic layer, 15 nm of the C protective layer was formed by DC magnetron sputtering, finally a perfluoroalkyl polyether having adsorptive polar group to 5nm is formed from the vacuum layer is taken out disk. Each disk is a recording / reproducing head with a thin film head having a gap length of 0.25 μm and a track width of 2.5 μm as a recording portion and a magnetoresistive element having a permalloy as a magnetic pole as a reproducing portion, and a flying height of 900 Mb at a flying height of 900 Mb. Table 1 shows the characteristics when recording / reproducing under the condition of / in ² .

That is, the disk manufacturing method of the present invention involving laser and wave energy to particles during sputter evaporation is
It can be seen that in each case, the S / N ratio is high and the output fluctuation is small at 7% or less. The highest S / N is obtained for the adaptation of interference waves, but in all cases, the S / N is 4 or more, and 900 Mb / in
^The device operated with 8-9 conversion and PRML with an areal recording density as high as ² and an error rate of 10 ^-9 .

It should be noted that the carbon protective layer was formed using a mask.
nm etching and providing a 5 μmφ convex portion and an area ratio of 4% provided Ra of the medium surface of 2.3 nm, and
Almost no tangential force was observed after S10K times.

[0037]

[Table 1]

(Example 2) A carbon substrate having a diameter of 1.3 "was used as the substrate, and the nonmagnetic protective layer was formed by applying a bias of -400 V to form (WNb) N having an average film thickness of 25 nm. A magnetic disk was formed under the same conditions as in Example 1.
By applying waves even when forming the protective layer, the height is 6 nm.
Of the main component NbN grows, and the surface roughness of the disk is R
It was 11 nm at p. Comparing the tangential force after CSS for 10 k times between the present disks A to C and the disk of Comparative Example D, the tangential force increased by 2.7 g in D, whereas the tangential force in Examples A to C increased. No increase was observed at all, indicating extremely good sliding resistance. The magnetic characteristics and recording / reproducing characteristics also showed good characteristics similar to those of the examples.

(Example 3) Under the same conditions except that the substrate was a 3.5 "φ organic film such as polyimide or PET, the floppy disk-shaped medium was longitudinal wave + laser, transverse wave + laser, interference wave + laser. In any mode, the excellent characteristics similar to those in Table 1 were obtained.The output fluctuation was 1.7% when the film was formed on the tape-shaped medium by the interaction of the longitudinal wave mode and the laser. And the least, 6.6% in interference wave,
It was 7% in transverse waves. For S / N, 900 Mb /
All were 4 or more under the condition of in ² .

(Embodiment 4) A DC magnetron sputtering apparatus having targets on both sides of the substrate was used, and the surface roughness Ra was 0.1, 1, 1.5, 2, 3, 5, 7, 10 nm and the outer diameter was 2 nm. 0.5 ″ φ NiP plated AI alloy disk substrate, substrate temperature 300 ° C., Ar gas pressure 1 mTorr, input power density 10
W / cm ² Cr ₀ with a thickness of 100nm in. ₉ Ti _{0. 1} alloy and a nonmagnetic underlayer, Co having a thickness of _{30nm 0. 82 Cr 0. 14} Pt 0. 04 magnetic layer, the thickness of 25 nm (W _{0. 8 -Mo 0. 2) 0.} 3 C 0. 7 protective film wave driver of the present invention, respectively (75 kHz, 10 W)
Further, a semiconductor laser of 670 nm and 1 W was made to interact in the longitudinal wave mode to form sequentially. Finally, a perfluoroalkyl polyether having a polar group was formed to a thickness of 5 nm to obtain a magnetic disk.

FIG. 4 shows the relationship between the output fluctuation (%) and the surface roughness Ra (nm) when evaluated under the same conditions as in Example 1. Compared to the comparative example without wave energy (J curve) and the case with wave energy (H curve), an output fluctuation of 7% or less was obtained with any center line average surface roughness (R curve of the present invention, Interaction between wave energy of sound waves and laser). This effect is particularly remarkable when Ra is 1.7 nm or less.

(Embodiment 5) As another method for obtaining a more effective double-sided simultaneous continuous thin film medium as in Embodiment 1, FIG. 2 is a schematic view of a film forming apparatus and film forming method by another sputtering method of the present invention. Indicates. That is, Ar ions are turned into plasma by electric discharge and the target 60 is sputtered. By applying wave energy of sound waves, ultrasonic waves, microwaves and laser or maser to particles such as sputtering atoms, molecules, and ions from the target. It is applied to the substrate with energy excitation, homogenization, high orientation, and effective strain and surface treatment. The same was true when the wave energy of sound waves, ultrasonic waves, and microwaves and laser or maser were applied alternately.

Here, FeC is used as the target material 60.
Those made of oNiCr or cobalt-based alloy can be used. As a magnetic recording medium having a ferromagnetic metal thin film layer as a recording layer, it is preferable to make the incident direction of the ferromagnetic material oblique with respect to the substrate in order to obtain a magnetic recording medium having high orientation and excellent magnetic characteristics. What is obtained in consideration of this is, in particular, that the wave drive body shown in FIG. 2 is inclined (θa, θb = 15).
4a ', 4b') longitudinal waves (arrow 111), and it is another feature of the present invention to add interaction with a laser or a maser. That is, due to the synergistic effect (condition setting) of the vertical method of the substrate 3 and the wave energy, the continuous thin film medium has higher orientation, higher density (fine particle fineness), and higher S / N (fine particle uniform orientation). )
Furthermore, high reliability can be expected.

It should be noted that the tilt drive support 10 is provided in the bell jar 1.
a and 10b are wave drivers 4a, 4a ', 4b and 4b' (sound waves, ultrasonic waves), supporters 42a and 42b are semiconductor lasers 40a and 40b with a special reinforcing member, and a transparent quartz cover for preventing particle scattering. 41a and 41b are attached. It is desirable that the substrate be rotated during film formation in order to ensure uniformity of film thickness. At this time, the mask 66 is placed in front of the substrate.
(Window) may be provided. Further, a target material 60 is installed on the electrode portion 61, which further includes a power source for plasma generation (100 for RF, 101 for high-voltage DC), a support metal fitting 62,
A circuit is composed of the lead wires 63 and 64, the electrode plate 65, and the like. In the figure, the power source for sonic wave, ultrasonic wave, microwave drive, laser, maser, and circuit configuration are controlled externally, 71 for holding vacuum is a rotary pump,
70 is a cryopump. These may be turbo pumps.

As the sound wave for energy excitation, it is particularly preferable to use a supersonic wave (microwave ultrasonic wave) of 1 GHz or more, which is excellent in production, or an interaction between a magnetron type and light, preferably a laser or a maser. It is also possible to use an evaporation source such as an electron beam or ion beam method to form a film by the evaporation method.

This embodiment will be described in more detail below. The film forming conditions were the same as in Example 4, and the surface roughness of N was 2 nm.
An Al alloy substrate with an outer diameter of 5.25 ″ φ plated with 10 μm of iP was rotated (not shown) at 50 rpm to give wave energy, and a film thickness of 35 nm was used together with CoNiPtCr (ultrasound and laser). ° Average incident angle 50 °
And WC protection with a film thickness of 25 nm was formed under the same conditions. Finally, a 7 nm amine-based organic lubricant was formed to obtain a magnetic disk.

When this disk was evaluated under the same conditions as in Example 1, the S / N ratio was 4.3 and the output fluctuation was 3.8%.

(Sixth Embodiment) FIGS. 5A and 5B show a recording / reproducing separated type magnetic head 83 having a magnetic disk 81 described in the first to fourth embodiments and a reproducing section using a magnetoresistive effect. It was incorporated in the magnetic disk device 90. With this medium, positioning can be performed with high precision, and the spacing is 0.05
By making the thickness to be μm, a magnetic disk device that operates at a high recording density of 900 Mb / in ² can be provided. Note that 82
Is a drive unit for high-speed rotation of 7,000 rpm, 84 is a head drive unit for high-accuracy positioning, and 85 is a highly decoded signal processing circuit processing system of the PRML system.

(Embodiment 7) FIG. 6 shows an EB excellent in productivity.
The main schematic sectional drawing of the Example of the method of this invention by the method (Electron Beam) is shown. This method is particularly characterized in that it is possible to use the electron beams 200a and 200b of low energy to high energy. That is, the electron gun 20 shown in the drawing
The magnetic alloy 20 in the boards (sauces) 202a and 202b using the electron beam (electron beam) from 1a and 201b.
3a and 203b are evaporated. To these evaporated particles,
The wave energies of sound waves and ultrasonic waves and the lasers 40a and 40b are applied from the wave drive bodies 4a and 4b installed in the space, and rotated (70 rpm) by the particles in the high energy excited state obtained by their interaction. It is vapor-deposited in a highly oriented and highly dispersed state on the .5-inch substrate 3 while giving more effective strain, that is, lattice vibration.

The manufacturing method and conditions here are almost the same as those in the above-mentioned embodiment, but in particular, the vacuum degree of film formation is 10 ^-6 to 10 ^-9.
I went to Torr. Further, in this system, the rotating substrate 3 is continuously supplied from another cavity provided in the vacuum chamber (not shown because it is well known). In addition, visible light laser 0.1.
The wave energy (output) of the sound wave and the ultrasonic wave was set to 1 W or more in the range of 1 W to 10 W, but it is preferably 7 W to
155W is good. Furthermore, under the film forming conditions, when the wave energy frequency was 57 KHz and 15 W, a sufficient effect was obtained at a vacuum pressure of 10 ^-6 to 10 ^-9 Torr, but when the wave energy of this ultrasonic wave was increased, that is, Frequency 57k
In the case of Hz and 35 W, a sufficient effect was obtained in the interaction with the laser even at a vacuum pressure of 10 ^-3 to 10 ^-5 Torr. Even if ions (Ar, B, P, S, N, etc.) were further applied within the range of the vacuum pressure of 10 Torr to the vacuum pressure of 10 ⁻⁶ Torr, similarly good results were obtained.

(Embodiment 8) As in Embodiment 5, when automobile bumpers, LSIs, wirings, drilling blades for processing, tapes, etc. were prepared, higher reliability than before was obtained.

[0052]

According to the present invention, the characteristics are uniform and the noise characteristics are excellent. Further, even when the distance (spacing) between the head and the medium is reduced to 0.05 μm or less, the head stably floats and has high resistance. Since it is possible to manufacture and provide a thin film magnetic recording medium that has sliding characteristics and can obtain a high servo signal even at a high track density, it is possible to provide a magnetic storage device that operates even at a high recording density of 900 Mb / in ² .

[Brief description of drawings]

FIG. 1 is a system diagram of a manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a system diagram of a manufacturing apparatus according to a second embodiment of the present invention.

FIG. 3 is a sectional view of a magnetic recording medium according to the present invention.

FIG. 4 is a characteristic diagram of the medium of the present invention.

FIG. 5 is an explanatory diagram of a magnetic storage device of the present invention.

FIG. 6 is a partial explanatory view of a third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Sputtering apparatus vacuum box, 2, 2 '... Support stand, 3 ... Substrate, 4a, 4a', 4b, 4b '... Wave drive body, 5a,
5b ... Magnet (electromagnet), 10a, 10b ... Tilt drive support, 40a, 40b ... Light, laser (semiconductor laser), 4
1a, 41b ... Transparent quartz cover (for preventing particle scattering), 4
2a, 42b ... Supporting tool (for laser), 60 ... Target material, 61 ... Electrode part, 62 ... Supporting metal, 63, 64 ... Lead wire, 65 ... Electrode flat plate, 66 ... Mask, 70 ... Cryopump (or diffusion) Pump), 71 ... rotary pump, 100 ... RF power supply, 101 ... high voltage DC power supply.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Akira Ishikawa Akira Ishikawa 1-280, Higashi Koikeku, Kokubunji, Tokyo (72) Central Research Laboratory, Hitachi, Ltd. (72) Kenzo Sugino 1-280 Higashi Koikeku, Kokubunji, Tokyo Hitachi Ltd. Central Research Laboratory

Claims (11)

[Claims] 1. A thin film magnetic recording medium including at least one magnetic layer formed directly or via at least one intermediate layer on a non-magnetic substrate, wherein the center line average surface roughness of the medium surface is 3 nm or less. A thin film magnetic recording medium having a thickness of 0.2 nm or more and a characteristic variation in the circumferential direction of 7% or less. 2. A method for producing a thin film magnetic recording medium, which comprises forming a thin film containing a sound wave, an ultrasonic wave, a microwave and an electromagnetic wave in the physical vaporization when the intermediate layer and / or the magnetic layer is included. 3. The method for manufacturing a thin film magnetic recording medium according to claim 2, wherein the sound wave, the ultrasonic wave, and the laser at the time of forming the thin film are sine waves or pulse waves. 4. A method of manufacturing a thin film magnetic recording medium, characterized in that when a thin film is formed on a substrate, a surface treatment in which a sound wave and a laser are superposed is applied. 5. A method for manufacturing a thin film magnetic recording medium, wherein a laser is used for surface treatment of a thin film for controlling adsorption of unwanted particles after forming a thin film by applying a sound wave or an ultrasonic wave. 6. A method of manufacturing a thin film magnetic recording medium, characterized in that a sound wave and a laser are applied alternately when the thin film is formed. 7. A method of manufacturing a thin film magnetic recording medium, characterized in that an electron beam or an ion beam is used for physical vaporization. 8. The thin film magnetic recording medium according to claim 1, wherein the non-magnetic substrate has a center line average surface roughness of 1.55 nm or less and 0.05 nm or more. 9. The thin film magnetic recording medium according to claim 1, wherein a protective layer is provided on the magnetic layer so that the average surface roughness thereof is larger than that of the substrate. 10. A magnetic storage device according to claim 1, comprising the thin film magnetic recording medium and a magnetic head having a reproducing means utilizing a magnetoresistive effect, and having an areal recording density of 900 Mb / in ² or more. 11. Claims 1, 2, 3, 4, 5, 6, 7, 8
Alternatively, in 9, a thin film forming body diverted to automobiles, various electric / electronic parts, and semiconductors.