JPH0727992B2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH0727992B2
JPH0727992B2 JP15049588A JP15049588A JPH0727992B2 JP H0727992 B2 JPH0727992 B2 JP H0727992B2 JP 15049588 A JP15049588 A JP 15049588A JP 15049588 A JP15049588 A JP 15049588A JP H0727992 B2 JPH0727992 B2 JP H0727992B2
Authority
JP
Japan
Prior art keywords
electrode
heat dissipation
electrodes
semiconductor device
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15049588A
Other languages
Japanese (ja)
Other versions
JPH01316962A (en
Inventor
義夫 高木
学 岩西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15049588A priority Critical patent/JPH0727992B2/en
Publication of JPH01316962A publication Critical patent/JPH01316962A/en
Publication of JPH0727992B2 publication Critical patent/JPH0727992B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は半導体装置、特に樹脂封止形半導体装置の電
極形状に関するものである。
The present invention relates to an electrode shape of a semiconductor device, particularly a resin-sealed semiconductor device.

〔従来の技術〕[Conventional technology]

第5図〜第7図は従来のこの種半導体装置、ここではイ
ンバータ用6素子入り電力用半導体モジュールを示す図
で、図において、1は絶縁性放熱基板、2は絶縁性放熱
基板1上に設けられた導電層、3はプラス側の直流入力
端子用電極、4はマイナス側の直流入力端子用電極、51
〜53は三相交流出力端子用電極、61〜63はベース信号端
子用電極、71〜73はエミッタ信号端子用電極である。こ
こで直流入力端子用電極3、4、三相交流出力端子用電
極51〜53、ベース信号端子用電極61〜63およびエミッタ
信号端子用電極71〜73は導電層2上にハンダ付けされて
いる。8は電力用半導体チップ、9は電力用半導体チッ
プ8と導電層2を接続するアルミワイヤである。
FIGS. 5 to 7 are views showing a conventional semiconductor device of this type, here, a semiconductor module for power containing 6 elements for an inverter, in which 1 is an insulating heat dissipation substrate and 2 is an insulating heat dissipation substrate 1. Provided conductive layer, 3 is a positive side DC input terminal electrode, 4 is a negative side DC input terminal electrode, 51
Numerals 53 to 53 are three-phase AC output terminal electrodes, 61 to 63 are base signal terminal electrodes, and 71 to 73 are emitter signal terminal electrodes. Here, the DC input terminal electrodes 3 and 4, the three-phase AC output terminal electrodes 51 to 53, the base signal terminal electrodes 61 to 63, and the emitter signal terminal electrodes 71 to 73 are soldered on the conductive layer 2. . Reference numeral 8 is a power semiconductor chip, and 9 is an aluminum wire connecting the power semiconductor chip 8 and the conductive layer 2.

この従来のものでは放熱基板1上に導電層2を設け、さ
らにその上に直流入力端子用電極3、4、三相交流出力
端子用電極51〜53、ベース信号端子用電極61〜63、エミ
ッタ信号端子用電極71〜73および半導体チップ8を半田
付けしチップ8と導電層2をアルミワイヤ9で接続す
る。その後基板1にケースを接着しシリコンゲルを注入
し、最後にエポキシ樹脂で封止する。
In this conventional device, a conductive layer 2 is provided on a heat dissipation substrate 1, and electrodes 3 and 4 for DC input terminals, electrodes 51 to 53 for three-phase AC output terminals, electrodes 61 to 63 for base signal terminals, and an emitter are further provided thereon. The signal terminal electrodes 71 to 73 and the semiconductor chip 8 are soldered, and the chip 8 and the conductive layer 2 are connected by the aluminum wire 9. After that, a case is adhered to the substrate 1, silicon gel is injected, and finally sealed with an epoxy resin.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

この従来のものでは、以上のように構成されており、電
極板が樹脂に固定されているので、温度変動時に生じる
熱歪み、熱疲労などによって絶縁性放熱基板の絶縁層や
導電層が電極類の半田付部から剥がれたり、ひび割れ
し、これが絶縁不良、導通不良、短絡などを引き起こす
原因となっていた。そこで第6図および第7図に示すよ
うなコ字形の電極形状またはS字形の電極形状を採用し
ていた。
With this conventional structure, the electrode plate is fixed to the resin as described above, so that the insulating layer and the conductive layer of the insulating heat dissipation substrate are not affected by the thermal distortion and thermal fatigue that occur when the temperature changes. It was peeled off or cracked from the soldered part, which was a cause of poor insulation, poor continuity, short circuit, etc. Therefore, a U-shaped electrode shape or an S-shaped electrode shape as shown in FIGS. 6 and 7 is adopted.

即ち第6図において、11は導電層2の上に半田付けされ
一部分に電極の厚さ方向にコ字状に加工されたプラス側
の直流入力、12はプラス側直流入力端子用電極11と同様
の加工がなされたマイナス側直流入力端子用電極、131
〜133はプラス側直流入力端子用電極11と同様の加工が
なされた三相交流出力端子用電極である。
That is, in FIG. 6, 11 is a DC input on the plus side which is soldered on the conductive layer 2 and is partially processed in a U-shape in the thickness direction of the electrode, and 12 is the same as the electrode 11 for the DC input terminal on the plus side. Electrode for negative side DC input terminal, processed 131
Reference numerals 133 to 133 are three-phase AC output terminal electrodes that have been processed in the same manner as the plus side DC input terminal electrode 11.

ここで図示しないがこれらの各電極のコ字状部をS字状
に形成してもよい。141〜143は同一面上でS字状に形成
されたベース信号端子用電極、151〜153はベース信号端
子用電極141〜143と同様の形状に形成されたエミッタ信
号端子用電極、16はシリコンゲル17を介して絶縁性放熱
基板1上の導電層2、半導体チップ8、ワイヤ9、各電
極11、12、131〜133、141〜143、151〜153等を含むエポ
キシ樹脂層である。
Although not shown here, the U-shaped portion of each of these electrodes may be formed in an S-shape. Reference numerals 141 to 143 are base signal terminal electrodes formed in an S shape on the same surface, 151 to 153 are emitter signal terminal electrodes formed in the same shape as the base signal terminal electrodes 141 to 143, and 16 is silicon. It is an epoxy resin layer including the conductive layer 2, the semiconductor chip 8, the wires 9, the electrodes 11, 12, 131 to 133, 141 to 143, 151 to 153, etc. on the insulating heat dissipation substrate 1 via the gel 17.

このように構成されたもので、温度変動時にシリコンゲ
ル17が熱膨張し電極12に矢印18方向の引張り力がかかっ
た場合、電極12のコ字状部が第7図ロに示すように上方
に伸びるので、電極12と絶縁性放熱基板1との接合部に
過大な力がかかることがなくなる。
With such a configuration, when the silicon gel 17 thermally expands during temperature fluctuation and a tensile force is applied to the electrode 12 in the direction of the arrow 18, the U-shaped portion of the electrode 12 is moved upward as shown in FIG. Therefore, an excessive force is not applied to the joint between the electrode 12 and the insulating heat dissipation substrate 1.

しかし十分なベンド効果を得るにはコ字部またはS字部
を長くすること即ちダンパー長を大きくすること、コ字
部およびS字部の丸み半径を大きくすること等が必要で
あり、電極の長さおよび高さが大きくなる。従ってモジ
ュールの外形が大きくなり材料も多く必要である等の問
題点があった。
However, in order to obtain a sufficient bend effect, it is necessary to lengthen the U-shaped portion or the S-shaped portion, that is, to increase the damper length, and to increase the rounding radius of the U-shaped portion and the S-shaped portion. Increased length and height. Therefore, there has been a problem that the outer shape of the module becomes large and many materials are required.

この発明は、このような問題点を解消するためになされ
たもので、温度変動時に樹脂に固定された電極類と絶縁
性放電基板との間に生じる歪みを吸収すると同時にコン
パクトな半導体装置を提供することを目的とする。
The present invention has been made to solve such a problem, and provides a compact semiconductor device while absorbing the strain generated between the electrodes fixed to the resin and the insulating discharge substrate when the temperature changes. The purpose is to do.

〔課題を解決するための手段〕[Means for Solving the Problems]

この発明に係る半導体装置は、放熱基板に半導体素子と
共に取付けられる電極の一部を電極の長さ方向に垂直な
平面内に迂回して形成し、この電極と半導体素子を放熱
基板に対して樹脂層によって封止するようにしたもので
ある。
In the semiconductor device according to the present invention, a part of the electrode attached to the heat dissipation board together with the semiconductor element is detoured in a plane perpendicular to the length direction of the electrode, and the electrode and the semiconductor element are formed on the heat dissipation board with a resin. It is designed to be sealed by layers.

〔作用〕[Action]

この発明においては、電極の一部が長さ方向に垂直な平
面内で迂回して形成されているので、樹脂層によって固
定された電極と熱基板との間の歪みが電極の長さ方向の
寸法を大きくすることなく吸収され、絶縁不良、導電不
良、短絡などの不具合の発生を防止する。
In the present invention, since a part of the electrode is formed in a detour in a plane perpendicular to the lengthwise direction, strain between the electrode fixed by the resin layer and the thermal substrate is generated in the lengthwise direction of the electrode. It is absorbed without increasing the size and prevents problems such as poor insulation, poor conductivity and short circuits.

〔実施例〕〔Example〕

以下この発明の一実施例を第1図〜第4図にもとづいて
説明する。即ち第1図〜第4図において、211〜213は導
電層2上に半田付けされ一部分が長さ方向に垂直な平面
内でU字状に加工されたベース信号端子用電極、221〜2
23はベース信号端子用電極211〜213と同様に加工された
エミッタ信号用電極である。なおその他の構成は第5図
〜第7図に示す従来のものと同様であるので説明を省略
する。
An embodiment of the present invention will be described below with reference to FIGS. That is, in FIGS. 1 to 4, 211 to 213 are electrodes for base signal terminals, 221-2, which are soldered on the conductive layer 2 and partially processed into a U shape in a plane perpendicular to the length direction.
Reference numeral 23 is an emitter signal electrode processed in the same manner as the base signal terminal electrodes 211 to 213. The other structure is the same as that of the conventional structure shown in FIGS.

このように構成されたものでは、電極211〜213、221〜2
23は基板1に平行な面内でU字状に加工されているので
温度変動時にはこのU字状部が第4図ロに示すように伸
び電極211の矢印18方向の引張力を吸収して電極211と絶
縁性放熱基板1との間の接合部に過大な力が加えられる
のを防止する。従って電極の半田付部での絶縁不良、導
電不良、短絡などの不具合を防ぐことができる。
In the structure thus configured, the electrodes 211 to 213 and 221-2 are
Since 23 is processed in a U shape in a plane parallel to the substrate 1, this U shape absorbs the tensile force of the extending electrode 211 in the direction of arrow 18 as shown in FIG. An excessive force is prevented from being applied to the joint between the electrode 211 and the insulating heat dissipation substrate 1. Therefore, it is possible to prevent defects such as poor insulation, poor conductivity, and short circuit in the soldered portion of the electrode.

ここで矢印18方向への引張り力のみに対する作用につい
て説明したが、絶縁性放熱基板1とエポキシ樹脂16との
間にひずみが生じ、横方向の力が電極に加わったり、ま
た上方向、横方向などの合成力が電極に加わった場合も
第4図に示したと同様に電極のU字形加工部が変形し
て、その力を吸収するので放熱基板1と電極との接合部
に過大な力が加わることがなくなる。
Although the action against only the pulling force in the direction of the arrow 18 has been described here, a strain is generated between the insulating heat dissipation substrate 1 and the epoxy resin 16, and a lateral force is applied to the electrode, or an upward or lateral direction. Even when a combined force such as is applied to the electrode, the U-shaped processed portion of the electrode is deformed and absorbs the force as in the case shown in FIG. 4, so that an excessive force is applied to the joint between the heat dissipation board 1 and the electrode. No more joining.

また、この実施例においては、絶縁性放熱基板を使用し
た場合について説明したが、これらは金属ベース板上に
絶縁基板を載置したものでもよい。また各端子用電極を
長さ方向に垂直な平面内にらせん状に形成してもよい。
Further, although the case where the insulating heat dissipation substrate is used is described in this embodiment, these may be those in which the insulating substrate is placed on the metal base plate. Further, each terminal electrode may be spirally formed in a plane perpendicular to the length direction.

〔発明の効果〕〔The invention's effect〕

以上のようにこの発明による半導体装置は、電極の一部
を電極の長さ方向に垂直な平面内に迂回して形成してい
るので、電極の長さ方向の寸法を大きくすることなく、
電極と絶縁性放熱基板との間の接合部に過大な力が加わ
らず、絶縁不良、導通不良、短絡などの不具合が防止さ
れる。
As described above, in the semiconductor device according to the present invention, a part of the electrode is formed so as to detour in a plane perpendicular to the length direction of the electrode, so that the lengthwise dimension of the electrode is not increased.
Excessive force is not applied to the joint between the electrode and the insulating heat dissipation substrate, and defects such as poor insulation, poor continuity, and short circuit are prevented.

【図面の簡単な説明】[Brief description of drawings]

第1図〜第4図はいずれもこの発明の一実施例を示す図
で、第1図は全体を示す分解斜視図、第2図および第3
図は要部を示す正面図、側面図、平面図、第4図は作用
説明図の要部側面図、第5図および第6図はいずれも従
来のこの種半導体装置を示す斜視図、第7図は従来のも
のの作用説明用の要部側断面図である。 図中、1は絶縁性放熱基板、2は導電層、8は半導体チ
ップ、9はアルミワイヤ、11、12は直流入力端子用電
極、131〜133は三相交流出力端子用電極、211〜213はベ
ース信号端子用電極、221〜223はエミッタ信号端子用電
極、16はエポキシ樹脂、17はシリコンゲルである。 なお、図中同一符号は同一又は相当部分を示す。
1 to 4 are views showing an embodiment of the present invention, and FIG. 1 is an exploded perspective view showing the whole, FIG. 2 and FIG.
FIG. 4 is a front view, a side view, a plan view showing an essential part, FIG. 4 is a side view of an essential part of an operation explanatory view, and FIGS. 5 and 6 are perspective views showing a conventional semiconductor device of this kind. FIG. 7 is a side sectional view of a main part for explaining the operation of the conventional one. In the figure, 1 is an insulating heat dissipation substrate, 2 is a conductive layer, 8 is a semiconductor chip, 9 is an aluminum wire, 11 and 12 are electrodes for DC input terminals, 131 to 133 are electrodes for three-phase AC output terminals, and 211 to 213. Is a base signal terminal electrode, 221-223 are emitter signal terminal electrodes, 16 is an epoxy resin, and 17 is a silicon gel. The same reference numerals in the drawings indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】半導体素子が取付けられた放熱基板、この
放熱基板に取付けられ、一部が長さ方向に垂直な平面内
に迂回して形成された電極、この電極と半導体素子を上
記放熱基板に対して一体に封止する樹脂層を備えた半導
体装置。
1. A heat dissipation board to which a semiconductor element is attached, an electrode attached to this heat dissipation board, a part of which is formed by detouring in a plane perpendicular to the lengthwise direction, the electrode and the semiconductor element being the heat dissipation board. A semiconductor device that includes a resin layer that integrally seals with the semiconductor device.
JP15049588A 1988-06-17 1988-06-17 Semiconductor device Expired - Lifetime JPH0727992B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15049588A JPH0727992B2 (en) 1988-06-17 1988-06-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15049588A JPH0727992B2 (en) 1988-06-17 1988-06-17 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH01316962A JPH01316962A (en) 1989-12-21
JPH0727992B2 true JPH0727992B2 (en) 1995-03-29

Family

ID=15498114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15049588A Expired - Lifetime JPH0727992B2 (en) 1988-06-17 1988-06-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH0727992B2 (en)

Also Published As

Publication number Publication date
JPH01316962A (en) 1989-12-21

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