JPH0726730Y2 - 精密位置決め機構 - Google Patents

精密位置決め機構

Info

Publication number
JPH0726730Y2
JPH0726730Y2 JP1987082780U JP8278087U JPH0726730Y2 JP H0726730 Y2 JPH0726730 Y2 JP H0726730Y2 JP 1987082780 U JP1987082780 U JP 1987082780U JP 8278087 U JP8278087 U JP 8278087U JP H0726730 Y2 JPH0726730 Y2 JP H0726730Y2
Authority
JP
Japan
Prior art keywords
sample
moving
movement
probe
precision positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987082780U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6427844U (enrdf_load_stackoverflow
Inventor
皓二 梶村
雅敏 小野
千加良 宮田
文樹 坂井
茂 脇山
Original Assignee
工業技術院長
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1987082780U priority Critical patent/JPH0726730Y2/ja
Publication of JPS6427844U publication Critical patent/JPS6427844U/ja
Application granted granted Critical
Publication of JPH0726730Y2 publication Critical patent/JPH0726730Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Mechanical Control Devices (AREA)
  • Control Of Position Or Direction (AREA)
JP1987082780U 1987-05-29 1987-05-29 精密位置決め機構 Expired - Lifetime JPH0726730Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987082780U JPH0726730Y2 (ja) 1987-05-29 1987-05-29 精密位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987082780U JPH0726730Y2 (ja) 1987-05-29 1987-05-29 精密位置決め機構

Publications (2)

Publication Number Publication Date
JPS6427844U JPS6427844U (enrdf_load_stackoverflow) 1989-02-17
JPH0726730Y2 true JPH0726730Y2 (ja) 1995-06-14

Family

ID=31307521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987082780U Expired - Lifetime JPH0726730Y2 (ja) 1987-05-29 1987-05-29 精密位置決め機構

Country Status (1)

Country Link
JP (1) JPH0726730Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544355Y2 (enrdf_load_stackoverflow) * 1975-10-22 1980-10-17

Also Published As

Publication number Publication date
JPS6427844U (enrdf_load_stackoverflow) 1989-02-17

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