JPH0725632Y2 - 真空排気系の流量検出装置 - Google Patents

真空排気系の流量検出装置

Info

Publication number
JPH0725632Y2
JPH0725632Y2 JP12334688U JP12334688U JPH0725632Y2 JP H0725632 Y2 JPH0725632 Y2 JP H0725632Y2 JP 12334688 U JP12334688 U JP 12334688U JP 12334688 U JP12334688 U JP 12334688U JP H0725632 Y2 JPH0725632 Y2 JP H0725632Y2
Authority
JP
Japan
Prior art keywords
flow rate
pump
exhaust system
vacuum exhaust
system flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12334688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245423U (enrdf_load_stackoverflow
Inventor
章 山村
Original Assignee
日本フェローフルイディクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本フェローフルイディクス株式会社 filed Critical 日本フェローフルイディクス株式会社
Priority to JP12334688U priority Critical patent/JPH0725632Y2/ja
Publication of JPH0245423U publication Critical patent/JPH0245423U/ja
Application granted granted Critical
Publication of JPH0725632Y2 publication Critical patent/JPH0725632Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP12334688U 1988-09-20 1988-09-20 真空排気系の流量検出装置 Expired - Lifetime JPH0725632Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Publications (2)

Publication Number Publication Date
JPH0245423U JPH0245423U (enrdf_load_stackoverflow) 1990-03-28
JPH0725632Y2 true JPH0725632Y2 (ja) 1995-06-07

Family

ID=31372112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12334688U Expired - Lifetime JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Country Status (1)

Country Link
JP (1) JPH0725632Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置

Also Published As

Publication number Publication date
JPH0245423U (enrdf_load_stackoverflow) 1990-03-28

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