JPH0245423U - - Google Patents

Info

Publication number
JPH0245423U
JPH0245423U JP12334688U JP12334688U JPH0245423U JP H0245423 U JPH0245423 U JP H0245423U JP 12334688 U JP12334688 U JP 12334688U JP 12334688 U JP12334688 U JP 12334688U JP H0245423 U JPH0245423 U JP H0245423U
Authority
JP
Japan
Prior art keywords
pump
flow rate
detecting
rate detection
freed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12334688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0725632Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12334688U priority Critical patent/JPH0725632Y2/ja
Publication of JPH0245423U publication Critical patent/JPH0245423U/ja
Application granted granted Critical
Publication of JPH0725632Y2 publication Critical patent/JPH0725632Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP12334688U 1988-09-20 1988-09-20 真空排気系の流量検出装置 Expired - Lifetime JPH0725632Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Publications (2)

Publication Number Publication Date
JPH0245423U true JPH0245423U (enrdf_load_stackoverflow) 1990-03-28
JPH0725632Y2 JPH0725632Y2 (ja) 1995-06-07

Family

ID=31372112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12334688U Expired - Lifetime JPH0725632Y2 (ja) 1988-09-20 1988-09-20 真空排気系の流量検出装置

Country Status (1)

Country Link
JP (1) JPH0725632Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013209928A (ja) * 2012-03-30 2013-10-10 Ebara Corp 真空排気装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013209928A (ja) * 2012-03-30 2013-10-10 Ebara Corp 真空排気装置
JP2016205405A (ja) * 2012-03-30 2016-12-08 株式会社荏原製作所 真空排気装置

Also Published As

Publication number Publication date
JPH0725632Y2 (ja) 1995-06-07

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