JPH0725024B2 - Lapping machine - Google Patents

Description

TECHNICAL FIELD The present invention relates to a lapping machine for precisely polishing a work.

[Prior Art] In a conventionally known planetary gear type double-sided lapping machine, a carrier is engaged between a sun gear and an internal gear, and a work held by a carrier driven in a planetary gear shape by both gears is held. The upper and lower surface plates are used for lapping.

However, in the above-mentioned conventional lapping machine, the work and the surface plate are slid relative to each other while rotating in the circumferential direction, so that the influence of the speed difference between the inner peripheral side and the outer peripheral side of the rotation is large, There was a drawback that it was difficult to maintain the lap accuracy. Therefore, in order to maintain the lapping accuracy, it is necessary to eliminate the influence of such a speed difference so that the surface plate and the work can be slidably contacted with each other over a wide area evenly.

By the way, it is generally said that the basic wrapping operation when wrapping a work is a figure-8 movement. In fact, in most cases, the method of wrapping while drawing a figure-8 is the method of wrapping. It is taken. Therefore, if such an 8-shaped lapping operation can be applied to the lapping machine as described above, it becomes possible to make the surface plate and the work piece slidably contact with each other over a wide area evenly, and the speed accompanying the rotation can be increased. Lapping accuracy can be improved by reducing the influence of the difference.

[Problems to be Solved by the Invention] An object of the present invention is to eliminate the influence of a speed difference caused by rotation of a surface plate and a work, and to make them slidably contact with each other over a wide area. It is to provide a board.

[Means for Solving the Problems] In order to solve the above-mentioned problems, the lapping machine of the present invention has upper and lower surface plates for polishing a work, and a swing for holding the work in a swing state between these surface plates. The swing means swingably pivots both ends of a holder capable of holding a work by a pair of swing arms, and these swing arms have a center of the holder having a figure eight shape. It is characterized in that both arms are connected to a rocking source that rocks synchronously so as to draw a curved locus, and each rocking arm is replaceably attached to one having a different length.

[Operation] The work to be polished is held by the holding tool, and is lapped by the upper and lower surface plates while swinging in a figure 8 shape by the holding tool.

Therefore, the work comes into sliding contact with the upper and lower surface plates uniformly over a wide area, and uneven wear of the surface plates does not occur.

[Examples] Hereinafter, examples of the present invention will be described in detail with reference to the drawings.

In FIGS. 1 and 2, reference numeral 1 is a machine body of a lapping machine, which machine body 1 includes a bed 1a, a column 1b standing on the bed 1a, and a cylinder (not shown) along the column 1b. No. 2) and a head 1c that can be moved up and down. On the bed 1a, a lower surface plate 2 whose entire surface is a polishing surface and a swinging means 4 for holding a workpiece 5 in a swinging state are provided. Is
An upper surface plate 3 whose entire surface is a polishing surface is attached to the head 1c.

The upper and lower surface plates 2 and 3 are attached by a method as shown in FIG. 3, and the specific configuration thereof will be sequentially described below.

First, the method of mounting the lower surface plate 2 will be described. The bed 1a has a lower surface plate shaft 7 rotatably supported by bearings, and a surface plate mounting portion 7a formed at the upper end of the lower surface plate shaft 7 The planetary gear 8 is rotatably arranged, and the lower platen 2 is swingably attached via an eccentric pin 9 standing on the planetary gear 8. A gear 7b is attached to the lower end of the lower platen shaft 7, and the gear 7b is connected to a drive source 12 via a drive system 11.

A center shaft 14 is rotatably inserted inside the lower platen shaft 7, a sun gear 15 meshing with the planet gears 8 and 8 is attached to the upper end of the center shaft 14, and an electromagnetic type is attached to the lower end. The brake 16 is attached.
The brake 16 switches between a non-restricted state in which the center shaft 14 can freely rotate and a restricted state in which the rotation is suppressed, and the switching is automatically performed according to the rotation speed of the drive source 12. ing. That is, when the rotation speed of the drive source 12 is small (for example, 0 to 50 rpm) as when lapping a work, the center shaft 14
That is, the sun gear 15 is constrained, and the planetary gears 8 and 8 revolve around the sun gear 15 while rotating around the sun gear 15 due to the rotation of the lower slab 7, so that the lower slab 2 rotates while eccentrically moving by the eccentric pins 9 and 9. However, when the rotation speed of the drive source 12 is large (for example, 50 to 150 rpm) as in the case of honing, the center shaft 14, that is, the sun gear 15 becomes free, and the planetary gears
Since 8 and 8 rotate together with the sun gear 15 without rotating, the lower surface plate 2 only rotates without eccentric movement.

An abrasive supply hole 18 is formed in the center of the lower surface plate 2, and the supply hole 18 is a through hole 19 that opens to a side surface of the lower surface plate 2.
Flexible tube 20 connected to the through hole 19, through hole 2 formed from the lower platen shaft 7 to the center shaft 14
1 and a rotary joint 22 to connect to an abrasive source (not shown).

Next, a method of mounting the upper surface plate 3 will be described. The head 1c includes a hollow shaft 25 for rotating the upper platen 3.
And an eccentric oscillating hollow spindle 26 are rotatably supported by bearings, and an upper surface plate shaft 27 having an upper surface plate 3 attached to a lower end thereof is rotatably inserted into an eccentric position inside the hollow spindle 26. And the upper surface plate axis
An upper end portion 27a of 27 is loosely fitted inside the hollow shaft 25 so as to be swingable and rotatable.
b is formed, and the internal gear 27b and the gear 25a formed on the outer surface of the lower end portion of the hollow shaft 25 are meshed in a differential gear shape.

Further, the hollow shaft 25 and the hollow spindle 26 are provided with gears 25b and 26a, respectively, and these gears are gears 29a and 29a on the transmission shaft 29 connected to the drive system 11.
Gears 29b respectively meshing with b and meshing with the gear 26a on the hollow spindle 26 are slidable along the transmission shaft 29. Therefore, when the gear 29b is meshed with the gear 26a on the hollow spindle 26 as shown in FIG. 3 during lapping when the rotation speed of the upper platen 3 is low, the upper platen 3 is It is rotated by the hollow shaft 25 while being eccentrically oscillated by the spindle 26, and at the time of honing processing where the number of rotations of the upper surface plate is high, the gear 29b is moved upward along the transmission shaft 29 and separated from the gear 26a of the hollow spindle 26. In this case, since the hollow spindle 26 does not rotate, the upper surface plate 3 is simply rotated by the hollow shaft 25 without swinging.

In order to supply the polishing agent to the polishing surface of the upper surface plate 3, the upper surface plate shaft 27 is provided with a through hole 31 connected to an abrasive material source (not shown) through a rotary joint 32, and a supply hole from the abrasive material source. Tube 33
And a polishing agent box 34 for distributing the polishing agent fed through the pipe, and the through hole 31 communicates with a supply hole 35 opening in the center of the upper surface plate 3 and extends from the polishing agent box 34. The upper platen 3 communicates with a supply hole that opens in a portion other than the central portion of the upper platen 36.

The drive system 11 includes a main shaft 40 connected to the drive source 12 by sprockets 41, 42 and a chain 43, and a lower surface plate drive shaft 45 which can be connected to and disconnected from the main shaft 40 by an electromagnetic clutch 44.
And a transmission shaft 48 connected to the main shaft 40 via gears 46 and 47.
And a drive shaft 51 for the upper surface plate connected to the transmission shaft 48 via gears 49, 50, and the drive surface 51 for the upper surface plate is a head.
It can be lifted up and down together with 1c, therefore
Are movably attached to the transmission shaft 48 by a spline mechanism.

Further, as can be seen from FIGS. 2 to 4, the work swinging means 4 has a ring-shaped holder 54 for fitting and holding the work 5 directly or via an appropriate carrier. Both ends of the holder 54 are rotatably pivotally attached to the tips of the pair of swing arms 55, 55 by a center pin 56, and the base ends of the swing arms 55, 55 are swung via a serration mechanism. Axis 5
7 and the rocking shaft 57 is linked to a rocking source 58 such as a torque actuator. These rocking arms 55 and 55 are synchronized by the rocking source 58 with their operation timings slightly shifted from each other. By swinging the holder 54, the holder 54 is swung so that the center of the holder 54 draws an 8-shaped locus (see FIG. 5). At this time, the swing switches 55, 55 are set by the limit switches 59a to 59c to set the turning range and the neutral position (stop position).

The swing arms 55, 55 have a center pin 56 on the holder 54 side, a nut 60 on the swing shaft 57 side, and a collar 6 in order to change the size and shape of the 8-shaped locus. It can be exchanged for a different length by removing it, and therefore, swinging arms of various lengths are separately prepared. Thus, not only can the work be lapped under the optimum lap condition by appropriately changing the 8-shaped locus in this manner, but the work can be always struck by the surface plate 2,
It is possible to prevent sliding contact with the same position of 3 and prevent uneven wear of the surface plate.

In order to allow the holder 54 to be lifted when exchanging the swing arms 55, 55, as shown in FIG. 2, an elevating arm 64 which can be moved up and down and rotated by a cylinder is provided on the bed 1a. A support member 65 that supports the holder 54 is attached to the tip of the elevating arm 64. The supporting member 65 has screw rods 66 at both ends thereof, and these screw rods 6
The outer surface of the holder 54 is sandwiched between 6, 66.

In addition, at another position on the bed 1a, the upper and lower surface plates 2, 3
A correction medium surface plate 68 for correcting the above is provided. That is, on the bed 1a, an elevating and lowering arm 69 which is movable up and down by a cylinder is disposed, and a bifurcated support member 70 formed at the tip of the elevating and lowering arm 69 is screwed 71 to the intermediate platen 68. Is detachably supported. The medium surface plate 68
Is formed so that it can be fitted in the holder 54.
These surface plates are corrected by slidingly contacting the upper and lower surface plates 2 and 3 while being swung by.

When the work is polished by the lapping machine having the above structure, the work is fitted and held in the holder 54 directly or through an appropriate carrier with the upper surface plate 3 raised by the head 1c, After lowering the upper platen 3, the work is rocked by the holder 54, and the upper and lower platens 2 and 3 polish the workpiece. At this time, the polishing parts were
The polishing agent is supplied from the supply holes in 2 and 3.

Here, the swinging of the work by the holder 54 is performed as follows. That is, as shown in FIG. 5, the two rocking arms 55, 55 are rotated by the rocking source 58 with a slight timing deviation, and the center pin 56 is a → b → c →.
When moving in the order of d → e → f → g → h → a, the holder 54 swings accordingly, and the locus of the center point draws a figure 8 as shown by the chain line. Therefore, the work is also swung in the shape of a figure 8 and comes into sliding contact with the upper and lower surface plates 2 and 3 uniformly over a wide area.

If you want to change the work swing range, swing arm
Replace 55, 55 with another length.

Further, the upper and lower surface plates 2 and 3 are driven in different modes during the lapping process and the honing process with different numbers of turns, as described above. That is, during lapping processing in which the surface plates 2 and 3 rotate at low speed, both of these surface plates perform the above-described rotation and rocking motions, and during honing processing in which they rotate at high speed, the grinding accuracy is generated due to the vibration caused by rocking. These surface plates 2 and 3 are designed to rotate only in order to prevent a decrease in the temperature.

When the processing of the work is completed, the upper and lower surface plates 2, 3 and the holder 5
The drive of 4 is stopped and the upper surface plate 3 is lifted by the elevation of the head 1c, and the work is taken out. At this time, in order to prevent the work from adhering to the upper and lower surface plates 2 and 3, the abrasive agent supply hole is switched and connected to a pressure fluid source such as water or air by a solenoid valve, and pressure fluid is ejected from each supply hole. Can be allowed to.

[Effects of the Invention] According to the present invention having the above-described configuration, the work is held by the holder in the swinging means, and is polished by the upper and lower surface plates while swinging in a figure 8 shape by the swinging means. As a result, the surface plate and the work can be slidably contacted over a wide area on an average, thereby eliminating the influence of the speed difference due to the rotation of the surface plate and the work, and improving the polishing accuracy. it can.

Further, since the swinging arm in the swinging means can be exchanged with one having a different length so that the locus of the swinging movement can be changed, the work can be polished by selecting the optimum condition for it. Not only can this be done, but it is possible to prevent the workpiece from always slidingly contacting the same position of the surface plate, and to prevent uneven wear of the surface plate.

[Brief description of drawings]

FIG. 1 is a side view of a lapping machine according to the present invention, FIG. 2 is a plan view thereof, and FIGS. 3 and 4 are enlarged sectional views of essential parts thereof.
The figure is an operation explanatory view of the swinging means. 2 ... Lower surface plate, 3 ... Upper surface plate, 4 ... Swing means, 5 ...
Workpiece, 54 …… Holder, 55 …… Swing arm, 58 …… Swing source.

Claims (1)

[Claims] 1. A holding tool capable of holding a work, comprising upper and lower surface plates for polishing the work, and rocking means for holding the work in a rocking state between these surface plates. A swing source in which both ends are rotatably supported by a pair of swing arms, and these swing arms swing synchronously so that the center of the holder draws an 8-shaped locus. The lapping machine is characterized in that the swinging arms are exchangeably attached to those having different lengths.