JPH0724775A - Suction chuck - Google Patents

Abstract

PURPOSE:To prevent erroneous suction and damage of a workpiece by making a suction face and a face of the workpiece parallel. CONSTITUTION:A suction chuck has a suction section 1 which vacuum-sucks a workpiece 10, a hold shaft 2 connected to the suction section, a fixed plate 3 which has an opening for passing the hold shaft by loose fitting and is fixed to a handling device, a movable plate 4 which is fixed to the hold shaft and has an opening, a conical positioning pin 5 which is fixed to the fixed plate and whose bottom face is fitted in the opening of the movable plate, and a helical spring 8 which is provided around the hold shaft and applies tensile force between the fixed plate and the suction section.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction chuck used for handling a work. With the progress of automation of semiconductor device manufacturing processes, suction chucks are often used in the handling mechanism of semiconductor wafers and other workpieces.

[0002]

2. Description of the Related Art FIG. 3 is an explanatory view of a conventional suction chuck. In the figure, the suction part 11 can move up and down in the direction of the arrow, and is provided with a spring 12 for absorbing a shock when the suction surface contacts the work 10.

Although not shown, a vacuum suction opening is provided on the suction surface of the suction portion 11 to suck and hold the work.

[0004]

In the suction chuck having the structure as in the conventional example, when the work is placed in an unstable manner as shown in the figure, the suction surface of the suction portion 11 and the surface of the work become parallel to each other. However, a gap is created between them and the work is not adsorbed. Also, the corner of the adsorption surface hits the work during adsorption, and the impact may damage the work.

An object of the present invention is to prevent the suction error and the damage of the work by making the suction surface and the surface of the work parallel to each other during the suction.

[0006]

[Means for Solving the Problems] To solve the above problems, there is provided a suction part 1 for vacuum-sucking a work 10, a holding shaft 2 connected to the suction part, and an opening penetrating the holding shaft with a loose fit. And a fixing plate 3 fixed to the handling mechanism,
Movable plate fixed to the holding shaft and having an opening 4
A conical positioning pin 5 fixed to the fixed plate and having a bottom surface fitted into the opening of the movable plate; and a tension provided between the fixed shaft and the fixed plate and the suction portion. This is achieved by a suction chuck having a helical spring 8.

[0007]

Function According to the present invention, a mechanism for making the two surfaces parallel to each other when the suction surface and the work surface are in contact with each other (see FIG. 1).
By attaching the to the suction chuck, suction mistakes are prevented.

Further, according to the present invention, since the degree of freedom in the moving direction of the suction portion is larger than that of the conventional one, the impact on the work is reduced,
Prevents damage to the work. FIG. 1 is a diagram illustrating the principle of the present invention.

In the figure, 1 is a suction part, 2 is a holding shaft connected to the suction part, 3 is a fixed plate, 4 is fixed to the holding shaft, a movable plate having an opening, and 5 is fixed to the fixed plate and is movable. A conical positioning pin whose bottom fits in the opening of the plate, 6 is a nut that fixes the movable plate and the holding shaft, 7 is a joint for the suction pipe, 8 is a fixed plate and a suction unit that are provided around the holding shaft. A helical spring that gives tension between them, 9 is a guide plate that limits the movable range of the movable plate, and 10 is a workpiece.

In this structure, when the suction surface of the suction portion 1 comes into contact with the work due to the mounted state of the work 10, the suction surface slightly rotates around the holding shaft and tilts as shown in the figure. It becomes parallel to the surface of the work and attracts the work.

When the work is lifted in this state, the center of the holding shaft is restored to its original vertical position and normal handling is performed.

[0012]

Embodiments FIGS. 2A and 2B are explanatory views of an embodiment of the present invention. 1 (A) is a front view and FIG. 1 (B) is a side view.

In the figure, 1 is a suction part, 2 is a holding shaft, and 3
Is a fixed plate fixed to the handling mechanism, 4 is a movable plate, 5 is a positioning pin, 6 is a nut, 7 is a suction pipe joint, 8 is a spring, and 9 is a guide plate. The arrow indicates the moving direction of the adsorption unit 1.

Next, the operation of the chuck of the embodiment will be described. (1) When handling, the suction part 1 can move within the range limited by the guide plate 9 by the amount of backlash of the movable plate 4. Therefore, the suction part 1 can be attached to the work depending on the situation where the work is placed. By rotating around the contact point as a fulcrum, the suction surface of suction unit 1 becomes parallel to the surface of the work. (2) After the work is attracted, the center of the holding shaft can be held by the positioning pin 5 as the helical spring 8 extends. (3) In the conventional mechanism, the suction part was able to move only in the vertical direction, but since a new rotation direction was added, the shock during suction can be absorbed more than in the conventional example.

[0015]

According to the present invention, the suction surface and the surface of the work are parallel to each other at the time of suction, and the impact can be mitigated to prevent the suction error and the damage of the work. As a result, the operation rate was improved due to the reduction of handling mistakes.

[Brief description of drawings]

FIG. 1 is an explanatory view of the principle of the present invention.

FIG. 2 is an explanatory diagram of an embodiment of the present invention.

FIG. 3 is an explanatory view of a suction chuck according to a conventional example.

[Explanation of symbols]

1 Adsorption part 2 Holding shaft connected to the adsorption part 3 Fixed plate 4 Movable plate fixed to the holding shaft and having an opening 5 Conical positioning pin fixed to the fixed plate and the bottom of which fits into the opening of the movable plate 6 Nut for fixing the movable plate and the holding shaft 7 Coupling for suction pipe 8 Spiral spring that gives tension between the fixed plate and the suction part 9 Guide plate for limiting the movable range of the movable plate 10 Workpiece

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yuichi Hata Inventor Yuichi Hata 4 Kadota-cho Industrial Park, Aizuwakamatsu City, Fukushima Prefecture Fujitsu Tohoku Electronics Co., Ltd. (72) Takayuki Kasukabe 4 Kadota-cho Industrial Park, Aizuwakamatsu City, Fukushima Prefecture Shares Company Fujitsu Tohoku Electronics

Claims (1)

[Claims] 1. A suction unit (1) for vacuum-sucking a work (10).
A holding shaft (2) connected to the suction part, a fixing plate (3) having an opening penetrating the holding shaft with a loose fit and fixed to a handling mechanism, and a fixing plate (3) fixed to the holding shaft. A movable plate (4) having an opening, a conical positioning pin (5) fixed to the fixed plate and having a bottom surface fitted in the opening of the movable plate, and provided around the holding shaft and A suction chuck comprising a fixed plate and a helical spring (8) for applying tension between the suction portion.