JPH07247178A - Method for cementing ti or ti-alloy with alumina - Google Patents
Method for cementing ti or ti-alloy with aluminaInfo
- Publication number
- JPH07247178A JPH07247178A JP3867294A JP3867294A JPH07247178A JP H07247178 A JPH07247178 A JP H07247178A JP 3867294 A JP3867294 A JP 3867294A JP 3867294 A JP3867294 A JP 3867294A JP H07247178 A JPH07247178 A JP H07247178A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- alumina
- cementing
- brazing material
- maximum length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば半導体製造用装
置等において使用する素材の内、ＴｉもしくはＴｉ合金
（以下Ｔｉ母材と言うこともある）とアルミナとを接合
する技術に関し、詳細にはＴｉ母材とアルミナの間に強
度及び真空気密性の良好な接合部を形成することができ
る様な接合方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for joining Ti or a Ti alloy (hereinafter also referred to as a Ti base material) and alumina among materials used in, for example, a semiconductor manufacturing apparatus, in detail. Relates to a joining method capable of forming a joint having good strength and vacuum tightness between a Ti base material and alumina.
【０００２】[0002]
【従来の技術】Ｔｉ母材とアルミナのように熱膨張係数
が異なる材料を接合するに際しては、健全な接合体を得
るという観点から、従来、被接合材の間に応力緩和材を
配置する方法（特開昭６１−２１５２７２）、接合体の
形状を工夫する方法（特開平４−７７３６９）、或は接
合後に接合体を加工する方法（特公平３−７１３９１）
などが検討され、残留応力の緩和を図ることが行われて
いる。2. Description of the Related Art When joining materials having different thermal expansion coefficients, such as a Ti base material and alumina, from the viewpoint of obtaining a sound joined body, conventionally, a stress relaxation material is arranged between the materials to be joined. (JP-A-61-215272), a method for devising the shape of the bonded body (JP-A-4-77369), or a method for processing the bonded body after bonding (Japanese Patent Publication No. 3-71391).
Etc. have been studied to reduce residual stress.
【０００３】特にＴｉ母材とアルミナの接合では、図１
に示すようにアルミナ側にＣｕ材を積層すると共にＴｉ
母材側にＦｅ−Ｎｉ−Ｃｏ合金を積層して各層間をろう
材により接合することが提案されている（特開平５−２
８６７７７）。In particular, when joining the Ti base material and alumina, as shown in FIG.
As shown in Fig. 3, the Cu material is laminated on the alumina side and Ti
It has been proposed to stack an Fe-Ni-Co alloy on the base material side and join each layer with a brazing material (Japanese Patent Laid-Open Publication No. 5-2.
86777).
【０００４】[0004]
【発明が解決しようとする課題】しかしながらたとえ上
記の様な方法でＴｉ母材とアルミナを接合したとして
も、上記積層体では、接合終了後の冷却過程で発生する
残留応力を十二分に低減することができず、使用中にア
ルミナ側から割れを生じるというトラブルは避け切れな
かった。However, even if the Ti base material and the alumina are bonded by the above-mentioned method, the residual stress generated in the cooling process after the bonding is sufficiently reduced in the above-mentioned laminated body. However, the problem of cracking from the alumina side during use was inevitable.
【０００５】本発明はかかる問題点に鑑みてなされたも
のであって、Ｔｉ母材とアルミナの接合体を製造するに
際し、割れなどの欠陥を生じることがなく、しかも接合
強度が高く、接合部の真空気密性にも優れた接合部を得
ることができる様な接合方法の提供を目的とするもので
ある。The present invention has been made in view of the above problems, and in producing a joined body of a Ti base material and alumina, defects such as cracks do not occur, and the joining strength is high and the joining portion is high. It is an object of the present invention to provide a joining method capable of obtaining a joined portion having excellent vacuum airtightness.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成すること
のできた本発明接合方法の要旨を述べると、アルミナと
Ｔｉ母材の間に、アルミナ側からＴｉ母材側に向けて、 （Ａ）Ａｇ−Ｃｕ−Ｔｉ合金からなるろう材 （Ｂ）ＣｕまたはＣｕ合金からなる応力緩和材 （Ｃ）Ａｇ−Ｃｕ合金からなるろう材 （Ｄ）Ｆｅ−Ｎｉ−Ｃｏ合金 （Ｅ）前記（Ｃ）のＡｇ−Ｃｕ合金と同一または異なっ
たＡｇ−Ｃｕ合金からなるろう材 を順次積層し、前記ろう材を加熱溶融させて接合するに
当たり、（１）接合面の最大長さが３４ｍｍより長い場
合は、下記（１）式The gist of the joining method of the present invention which has been able to achieve the above object is as follows. Between the alumina and the Ti base material, from the alumina side toward the Ti base material side, (A) Brazing material made of Ag-Cu-Ti alloy (B) Stress relaxation material made of Cu or Cu alloy (C) Brazing material made of Ag-Cu alloy (D) Fe-Ni-Co alloy (E) Of (C) When a brazing material composed of an Ag-Cu alloy that is the same as or different from the Ag-Cu alloy is sequentially laminated, and when the brazing material is heated and melted and bonded (1) when the maximum length of the bonding surface is longer than 34 mm, Formula (1) below
【０００７】[0007]
【数３】 の関係を満足する様な条件を、また（２）接合面の最大
長さが３４ｍｍ以下の場合は、下記（２）式[Equation 3] If the maximum length of the joint surface is 34 mm or less, the condition (2) below should be satisfied.
【０００８】[0008]
【数４】 の関係を満足する様な条件を選択して接合を行うもので
ある。[Equation 4] The joining is performed by selecting the conditions that satisfy the relationship of.
【０００９】上記（１）式及び（２）式で示される関係
をグラフ化して説明すると、（１）式で示す関係は接合
面の最大長さ（ｄ）によって異なるので、ｄ＝５０ｍｍ
の場合を代表的に取り上げて図２に示した。また（２）
式で示す関係はｄ値に関係なく図３に示す通りとなる。
尚本発明における『接合面の最大長さ』とは、接合面の
平面視形状において最も離反した二点間の距離を言い、
具体例をもって示せば図４に例示する種々の接合面にお
ける長さｄである。The relationship expressed by the equations (1) and (2) will be described in the form of a graph. Since the relationship expressed by the equation (1) varies depending on the maximum length (d) of the joint surface, d = 50 mm.
The above case is representatively shown in FIG. Also (2)
The relationship represented by the formula is as shown in FIG. 3 regardless of the d value.
The "maximum length of the joint surface" in the present invention means the distance between the two most separated points in the plan view shape of the joint surface,
To give a concrete example, it is the length d at various joint surfaces illustrated in FIG.
【００１０】[0010]
【作用】本発明における一方の接合対象であるＴｉ母材
は、純ＴｉまたはＴｉ合金であり、Ｔｉ合金としてはそ
の種類を特定するものではなく、要はＴｉ基でありさす
れば良く、Ａｌ，Ｖ，Ｃｒ，Ｆｅ，Ｍｇ，Ｓｎ，Ｍｏ，
Ｚｒ，Ｃｕ，Ｎｉなどの如何なる合金元素を含んでいる
ものであっても良いが、中でも最も代表的なものを非限
定的に例示しておくと、Ｔｉ−６重量％Ａｌ−４重量％
Ｖ，Ｔｉ−５重量％Ａｌ−２重量％Ｃｒ−１重量％Ｆ
ｅ，Ｔｉ−５重量％Ａｌ−２．５重量％Ｓｎ，Ｔｉ−２
重量％Ｃｕ，Ｔｉ−２．５重量％Ｃｕ，Ｔｉ−１５重量
％Ｍｏ−５重量％Ｚｒ，Ｔｉ−１１．５重量％Ｍｏ−６
重量％Ｚｒ−４．５重量％Ｓｎ，Ｔｉ−５２．５重量％
Ｎｉ−１．５６重量％Ｆｅ−１．７９重量％Ｍｏなどを
挙げることができる。The Ti base material, which is one of the objects to be joined in the present invention, is pure Ti or a Ti alloy, and the type of Ti alloy is not specified. The point is that a Ti base is essential. V, Cr, Fe, Mg, Sn, Mo,
Although it may contain any alloying element such as Zr, Cu or Ni, the most typical one among them is, without limitation, Ti-6 wt% Al-4 wt%.
V, Ti-5 wt% Al-2 wt% Cr-1 wt% F
e, Ti-5 wt% Al-2.5 wt% Sn, Ti-2
Wt% Cu, Ti-2.5 wt% Cu, Ti-15 wt% Mo-5 wt% Zr, Ti-11.5 wt% Mo-6
Wt% Zr-4.5 wt% Sn, Ti-52.5 wt%
Ni-1.56 weight% Fe-1.79 weight% Mo etc. can be mentioned.
【００１１】他方の接合対象であるアルミナは、必ずし
も純アルミナである必要はなく、要はアルミナが主体と
なるものであれば良く、例えば、ＳｉＯ2 、Ｙ2 Ｏ3 、
ＭｇＯ、ＣａＯ、ＴｉＯ2 、ＺｒＯ2 、ＨｆＯ2 、Ｓｉ
Ｃ、ＴｉＣ、ＺｒＣ、ＷＣ、ＶＣ、ＴａＣ、Ｓｉ3 Ｎ
4 、ＺｒＮ、ＴｉＮ、ＴｉＢ2 などとの複合物質も本発
明に適用することができる。次にアルミナとＴｉ母材の
間に介在積層される前記（Ａ）〜（Ｅ）の各物質につい
て説明する。The alumina to be joined on the other side does not necessarily have to be pure alumina, and the essential point is that alumina is the main component. For example, SiO 2 , Y 2 O 3 ,
MgO, CaO, TiO 2 , ZrO 2 , HfO 2 , Si
C, TiC, ZrC, WC, VC, TaC, Si 3 N
Composite materials with 4 , ZrN, TiN, TiB 2 and the like can also be applied to the present invention. Next, each of the substances (A) to (E) that are interposed and laminated between the alumina and the Ti base material will be described.
【００１２】（Ａ）のＡｇ−Ｃｕ−Ｔｉ合金からなるろ
う材としては、汎用のＡｇ−Ｃｕ−Ｔｉ合金ろう材は全
て使用可能であり、代表的なものを非限定的に例示する
と、例えば７２重量％Ａｇ−２７重量％Ｃｕ−１重量％
Ｔｉ合金ろう材、７０．５重量％Ａｇ−２７．５重量％
Ｃｕ−２重量％Ｔｉ合金ろう材、６８．８重量％Ａｇ−
２６．７重量％Ｃｕ−４．５重量％Ｔｉ合金ろう材、６
３重量％Ａｇ−３５．２５重量％Ｃｕ−１．７５重量％
Ｔｉ合金ろう材などを挙げることができる。As the brazing material composed of the Ag-Cu-Ti alloy of (A), all of the general-purpose Ag-Cu-Ti alloy brazing materials can be used. 72 wt% Ag-27 wt% Cu-1 wt%
Ti alloy brazing material, 70.5% by weight Ag-27.5% by weight
Cu-2 wt% Ti alloy brazing material, 68.8 wt% Ag-
26.7 wt% Cu-4.5 wt% Ti alloy brazing filler metal, 6
3% by weight Ag-35.25% by weight Cu-1.75% by weight
Examples thereof include a Ti alloy brazing material.
【００１３】（Ｂ）のＣｕまたはＣｕ合金からなる応力
緩和材は、ＣｕまたはＣｕ合金の柔軟性を利用するもの
であり、この様な柔軟性を保持するものは全て使用でき
る。従ってまずＣｕとしては、無酸素Ｃｕ、タフピッチ
Ｃｕまたはリン脱酸Ｃｕなどの如何を問わずに用いるこ
とができ、またＣｕ合金としては、Ｃｕの柔軟性に悪影
響を与えない合金元素（例えばＺｎ，Ｓｎ，Ｐｂ，Ｆ
ｅ，Ａｌ，Ｍｎ，Ｎｉなどが非限定的に例示される）を
含むものが全て使用できる。Ｃｕの厚さは０．１ｍｍ以
上、１ｍｍ以下が望ましい。Ｃｕの厚さが、０．１ｍｍ
未満の場合には、応力緩和の効果が少なく、アルミナに
割れを生じることがある。一方Ｃｕの厚さが１ｍｍを超
えると、Ｃｕの強度が接合強度に対し支配的になってし
まうため、全体的な接合強度が低くなってしまう。The stress relaxation material (B) made of Cu or Cu alloy utilizes the flexibility of Cu or Cu alloy, and any material having such flexibility can be used. Therefore, first, Cu can be used regardless of whether it is oxygen-free Cu, tough pitch Cu, phosphorus deoxidized Cu, or the like, and as a Cu alloy, an alloying element (for example, Zn, Sn, Pb, F
e, Al, Mn, Ni, etc. are non-limiting examples). The thickness of Cu is preferably 0.1 mm or more and 1 mm or less. Cu thickness is 0.1mm
If it is less than the above range, the effect of stress relaxation is small and the alumina may be cracked. On the other hand, if the thickness of Cu exceeds 1 mm, the strength of Cu becomes dominant over the bonding strength, so that the overall bonding strength becomes low.
【００１４】（Ｃ）および（Ｅ）のＡｇ−Ｃｕ合金から
なるろう材としては、汎用のＡｇ−Ｃｕ合金ろう材は全
て使用可能であり、代表的なものを非限定的に例示する
と、例えば７２重量％Ａｇ−２８重量％Ｃｕ合金ろう
材、８５重量％Ａｇ−１５重量％Ｃｕ合金ろう材、５０
重量％Ａｇ−５０重量％Ｃｕ合金ろう材、６７重量％Ａ
ｇ−３３重量％Ｃｕ合金ろう材などを挙げることができ
る。（Ｃ）で用いるＡｇ−Ｃｕ合金と（Ｅ）で用いるＡ
ｇ−Ｃｕ合金は、同一であっても異なっていても良い。As the brazing material composed of the Ag-Cu alloys of (C) and (E), all the general-purpose Ag-Cu alloy brazing materials can be used. 72 wt% Ag-28 wt% Cu alloy brazing filler metal, 85 wt% Ag-15 wt% Cu alloy brazing filler metal, 50
Wt% Ag-50 wt% Cu alloy brazing filler metal, 67 wt% A
An example is a g-33 wt% Cu alloy brazing material. Ag-Cu alloy used in (C) and A used in (E)
The g-Cu alloy may be the same or different.
【００１５】（Ｄ）のＦｅ−Ｎｉ−Ｃｏ合金はＴｉ母材
よりも熱膨張係数が小さいため、Ｔｉ母材に接して配置
することにより、Ｔｉ母材の熱収縮を減少させる方向に
作用する。この様な条件を満足するＦｅ−Ｎｉ−Ｃｏ合
金としては、Ｆｅ−（２５〜３５重量％）Ｎｉ−（１３
〜２３重量％）Ｃｏ合金が汎用されており、代表的なも
のを非限定的に例示すると、Ｆｅ−３２重量％Ｎｉ−１
７重量％Ｃｏ合金、Ｆｅ−２９重量％Ｎｉ−１６重量％
Ｃｏ合金、Ｆｅ−２９重量％Ｎｉ−１７重量％Ｃｏ合
金、Ｆｅ−２６重量％Ｎｉ−２２重量％Ｃｏ合金などを
挙げることができる。Since the Fe-Ni-Co alloy (D) has a smaller coefficient of thermal expansion than the Ti base material, when it is placed in contact with the Ti base material, the thermal contraction of the Ti base material is reduced. . An Fe-Ni-Co alloy satisfying such conditions is Fe- (25 to 35% by weight) Ni- (13
-23% by weight) Co alloy is widely used, and a typical example is, without limitation, Fe-32% by weight Ni-1.
7 wt% Co alloy, Fe-29 wt% Ni-16 wt%
Examples include Co alloys, Fe-29 wt% Ni-17 wt% Co alloys, Fe-26 wt% Ni-22 wt% Co alloys, and the like.
【００１６】この様なＦｅ−Ｎｉ−Ｃｏ合金を用いるに
当たっては、Ｔｉ母材の厚さに対応してＦｅ−Ｎｉ−Ｃ
ｏ合金の厚さを定めることが必要であり、そのための条
件式を種々研究した結果、前記（１）式および（２）式
で示されることが分かった。（１）式および（２）式は
接合面の最大長さ（ｄ）によってｄ値＝３４ｍｍを境界
に区別されており、ｄ値が３４ｍｍより長い場合には、
（１）式の条件を満足する厚さのＦｅ−Ｎｉ−Ｃｏ合金
を接合する。この様にしておけば、アルミナとＴｉ母材
との熱膨張係数差で発生する残留応力を低減することが
できる。この条件を満足していないと、アルミナ側に残
留する応力を十分に低減することができず、あるいはＦ
ｅ−Ｎｉ−Ｃｏ合金とアルミナとの熱膨張係数差により
発生する残留応力が大きくなりアルミナ側に割れを生じ
てしまう。When using such an Fe-Ni-Co alloy, Fe-Ni-C is used in accordance with the thickness of the Ti base material.
It is necessary to determine the thickness of the o alloy, and as a result of various studies on the conditional expressions therefor, it was found that the expressions are represented by the above expressions (1) and (2). The expressions (1) and (2) are distinguished by the maximum length (d) of the joint surface at the boundary of d value = 34 mm. When the d value is longer than 34 mm,
An Fe-Ni-Co alloy having a thickness satisfying the condition of formula (1) is joined. By doing so, the residual stress generated due to the difference in thermal expansion coefficient between the alumina and the Ti base material can be reduced. If this condition is not satisfied, the residual stress on the alumina side cannot be reduced sufficiently, or F
The residual stress generated due to the difference in coefficient of thermal expansion between the e-Ni-Co alloy and alumina becomes large, and cracks occur on the alumina side.
【００１７】一方接合面の最大長さが３４ｍｍ以下の場
合は、アルミナ側に残留する応力は接合面の最大長さに
影響されず、アルミナ側に残留する応力を低減し、アル
ミナの割れを防止するには、Ｔｉ母材とＦｅ−Ｎｉ−Ｃ
ｏ合金の厚さの関係を（２）式で示す条件を満足するよ
うに設定するのが適切であることを究明した。On the other hand, when the maximum length of the joint surface is 34 mm or less, the stress remaining on the alumina side is not affected by the maximum length of the joint surface, the stress remaining on the alumina side is reduced, and cracking of alumina is prevented. To achieve this, Ti base material and Fe-Ni-C
It has been clarified that it is appropriate to set the relationship of the thickness of the o alloy so as to satisfy the condition represented by the formula (2).
【００１８】[0018]
【実施例】次に本発明の実施例について比較例と比較し
て説明する。実施例１ （図５参照） 直径５０ｍｍ，内径４０ｍｍの円筒形状である純Ｔｉ円
筒２１と直径５０ｍｍの円盤形状であるアルミナ２７と
の接合において、アルミナ２７側から順にＡｇ−Ｃｕ−
Ｔｉ合金ろう材（７２重量％Ａｇ−２７重量％Ｃｕ−１
重量％Ｔｉ合金ろう材）２６、無酸素Ｃｕ２５、Ａｇ−
Ｃｕ合金ろう材（７２重量％Ａｇ−２８重量％Ｃｕ合金
ろう材）２４、Ｆｅ−２９重量％Ｎｉ−１７重量％Ｃｏ
合金２３、およびＡｇ−Ｃｕ合金ろう材（７２重量％Ａ
ｇ−２８重量％Ｃｕ合金ろう材）２２を積層して配置
し、真空炉中で８５０℃に加熱することにより、前記各
ろう材を溶融させて接合を行った。接合した試験片につ
いて、外観観察および超音波探傷により無酸素Ｃｕ２５
とアルミナ２７との接合界面の検査を実施した。試験結
果を表１に示す。EXAMPLES Next, examples of the present invention will be described in comparison with comparative examples. Example 1 (see FIG. 5) In joining a pure Ti cylinder 21 having a cylindrical shape with a diameter of 50 mm and an inner diameter of 40 mm and an alumina 27 having a disk shape with a diameter of 50 mm, Ag—Cu— in order from the alumina 27 side.
Ti alloy brazing material (72 wt% Ag-27 wt% Cu-1
Wt% Ti alloy brazing material) 26, oxygen-free Cu 25, Ag-
Cu alloy brazing material (72% by weight Ag-28% by weight Cu alloy brazing material) 24, Fe-29% by weight Ni-17% by weight Co
Alloy 23, and Ag-Cu alloy brazing filler metal (72 wt% A
g-28 wt% Cu alloy brazing material) 22 was laminated and arranged, and each brazing material was melted and joined by heating to 850 ° C. in a vacuum furnace. Oxygen-free Cu25 was applied to the joined test pieces by visual observation and ultrasonic flaw detection.
The joint interface between alumina and alumina 27 was inspected. The test results are shown in Table 1.
【００１９】[0019]
【表１】 [Table 1]
【００２０】表１の実施例で示すように、Ｔｉ母材とＦ
ｅ−Ｎｉ−Ｃｏ合金の厚さおよび接合面の最大長さ
（ｄ）の関係が（１）式の条件を満足する場合は、接合
後のアルミナ中の残留応力が低減され、その結果アルミ
ナ側に割れを生じない健全な接合体を提供できた。一方
比較例で示す様に、Ｔｉ母材とＦｅ−Ｎｉ−Ｃｏ合金の
厚さおよび接合面の最大長さ（ｄ）の関係が（１）式の
条件を満足しない場合には、残留応力が十分に軽減され
ないため、アルミナ側に割れがみられ、健全な接合体に
はなっていないことが分かった。As shown in the examples of Table 1, Ti base material and F
When the relationship between the thickness of the e-Ni-Co alloy and the maximum length (d) of the joint surface satisfies the condition of expression (1), the residual stress in the alumina after joining is reduced, and as a result, the alumina side It was possible to provide a sound joined body that does not crack. On the other hand, as shown in the comparative example, when the relationship between the thickness of the Ti base material and the Fe-Ni-Co alloy and the maximum length (d) of the joint surface does not satisfy the condition of the expression (1), the residual stress is Since it was not sufficiently reduced, cracks were seen on the alumina side, and it was found that a sound bonded body was not obtained.
【００２１】実施例２（図６参照） いずれも直径３４ｍｍ，内径２０ｍｍの円筒形状である
純Ｔｉ円筒３１とアルミナ円筒３７の接合において、ア
ルミナ３７側から順にＡｇ−Ｃｕ−Ｔｉ合金ろう材（７
０．５重量％Ａｇ−２７．５重量％Ｃｕ−２重量％Ｔｉ
合金ろう材）３６、タフピッチＣｕ３５、Ａｇ−Ｃｕ合
金ろう材（７２重量％Ａｇ−２８重量％Ｃｕ合金ろう
材）３４、Ｆｅ−３２重量％Ｎｉ−１７重量％Ｃｏ合金
３３、およびＡｇ−Ｃｕ合金ろう材（７２重量％Ａｇ−
２８重量％Ｃｕ合金ろう材）３２を積層して配置し、８
５０℃、Ａｒ雰囲気中で加熱接合した。接合した試験片
について、外観観察および超音波探傷によりタフピッチ
Ｃｕ３５とアルミナ３７との接合界面の検査を実施し
た。試験結果を表２に示す。 Example 2 (see FIG. 6) In joining a pure Ti cylinder 31 and an alumina cylinder 37, each of which has a diameter of 34 mm and an inner diameter of 20 mm, the Ag-Cu-Ti alloy brazing filler metal (7
0.5 wt% Ag-27.5 wt% Cu-2 wt% Ti
Alloy brazing material) 36, tough pitch Cu 35, Ag-Cu alloy brazing material (72 wt% Ag-28 wt% Cu alloy brazing material) 34, Fe-32 wt% Ni-17 wt% Co alloy 33, and Ag-Cu alloy Brazing material (72 wt% Ag-
28 wt% Cu alloy brazing material) 32 is laminated and arranged,
Heat bonding was performed at 50 ° C. in an Ar atmosphere. With respect to the joined test piece, the joint interface between the tough pitch Cu 35 and the alumina 37 was inspected by visual observation and ultrasonic flaw detection. The test results are shown in Table 2.
【００２２】[0022]
【表２】 [Table 2]
【００２３】表２の実施例で示すように、Ｔｉ母材とＦ
ｅ−Ｎｉ−Ｃｏ合金の厚さの関係が（２）式の条件を満
足する場合は、接合後のアルミナ中に残留する応力が低
減され、アルミナ側に割れのない健全な接合体を提供す
ることが可能であった。一方比較例で示すように、Ｔｉ
母材とＦｅ−Ｎｉ−Ｃｏ合金の厚さの関係が（２）式の
条件を満足しない場合には、残留応力が十分に軽減され
ないためアルミナ側に割れが見られ、健全な接合体は得
られなかった。As shown in the examples of Table 2, Ti base material and F
When the thickness relationship of the e-Ni-Co alloy satisfies the condition of the expression (2), the stress remaining in the alumina after bonding is reduced, and a healthy bonded body without cracks on the alumina side is provided. It was possible. On the other hand, as shown in the comparative example, Ti
When the relationship between the thickness of the base material and the thickness of the Fe-Ni-Co alloy does not satisfy the condition of the expression (2), the residual stress is not sufficiently reduced, so cracks are seen on the alumina side, and a sound bonded body is obtained. I couldn't do it.
【００２４】実施例３（図７参照） いずれも接合面が一辺４０ｍｍの正方形であるＴｉ−６
重量％Ａｌ−４重量％Ｖ合金ブロック４１とアルミナブ
ロック４７を接合するに当たり、アルミナ４７側から順
にＡｇ−Ｃｕ−Ｔｉ合金ろう材（７２重量％Ａｇ−２７
重量％Ｃｕ−１重量％Ｔｉ合金ろう材）４６、リン脱酸
Ｃｕ４５、Ａｇ−Ｃｕ合金ろう材（７２重量％Ａｇ−２
８重量％Ｃｕ合金ろう材）４４、Ｆｅ−２９重量％Ｎｉ
−１６重量％Ｃｏ合金４３、およびＡｇ−Ｃｕ合金ろう
材（７２重量％Ａｇ−２８重量％Ｃｕ合金ろう材）４２
を積層して配置し、真空炉中８５０℃に加熱することに
より前記各ろう材を溶融させて接合体を得た。得られた
試験片について、外観観察および超音波探傷によりリン
脱酸Ｃｕ４５とアルミナ４７との接合界面の検査を実施
した。試験結果を表３に示す。 Example 3 (see FIG. 7) In each case, Ti-6 is a square having a joint surface of 40 mm on a side.
When joining the wt% Al-4 wt% V alloy block 41 and the alumina block 47, an Ag—Cu—Ti alloy brazing filler metal (72 wt% Ag-27) is sequentially placed from the alumina 47 side.
Wt% Cu-1 wt% Ti alloy brazing filler metal) 46, phosphorus deoxidized Cu 45, Ag-Cu alloy brazing filler metal (72 wt% Ag-2)
8 wt% Cu alloy brazing material) 44, Fe-29 wt% Ni
-16 wt% Co alloy 43, and Ag-Cu alloy brazing filler metal (72 wt% Ag-28 wt% Cu alloy brazing filler metal) 42
Were laminated and arranged, and each brazing material was melted by heating at 850 ° C. in a vacuum furnace to obtain a joined body. With respect to the obtained test piece, the joint interface between the phosphorous deoxidized Cu 45 and the alumina 47 was inspected by visual observation and ultrasonic flaw detection. The test results are shown in Table 3.
【００２５】[0025]
【表３】 [Table 3]
【００２６】表３の実施例で示すように、Ｔｉ母材とＦ
ｅ−Ｎｉ−Ｃｏ合金の厚さおよび接合面の最大長さ
（ｄ）の関係が（１）式の条件を満足する場合は、接合
後のアルミナ中の残留応力が低減され、アルミナ側に割
れの無い健全な接合体を提供することが可能であった。
一方比較例で示すように、Ｔｉ母材とＦｅ−Ｎｉ−Ｃｏ
合金の厚さおよび接合面の最大長さ（ｄ）の関係が
（１）式の条件を満足しない場合には、残留応力が十分
に軽減されないため、アルミナ側に割れがみられ、健全
な接合はなされなかった。As shown in the examples of Table 3, Ti base material and F
When the relationship between the thickness of the e-Ni-Co alloy and the maximum length (d) of the joint surface satisfies the condition of formula (1), the residual stress in the alumina after joining is reduced and cracks occur on the alumina side. It was possible to provide a sound joined body that does not have any.
On the other hand, as shown in the comparative example, the Ti base material and Fe-Ni-Co
When the relationship between the thickness of the alloy and the maximum length (d) of the joint surface does not satisfy the condition of the expression (1), the residual stress is not sufficiently reduced, so that cracks are seen on the alumina side and a sound joint is obtained. It wasn't done.
【００２７】[0027]
【発明の効果】以上詳述したように、本発明によれば、
アルミナとＴｉまたはＴｉ合金とを接合した際の残留応
力を低減することができ、割れや界面剥離の無い健全な
接合体を提供することが可能になる。As described in detail above, according to the present invention,
Residual stress when alumina and Ti or a Ti alloy are bonded can be reduced, and a sound bonded body without cracks or interfacial peeling can be provided.
【図１】本発明に係る接合方法を示す模式図。FIG. 1 is a schematic diagram showing a joining method according to the present invention.
【図２】本発明に係る接合面の最大長さが５０ｍｍの場
合の（１）式の関係を示すグラフ。FIG. 2 is a graph showing the relationship of expression (1) when the maximum length of the joint surface according to the present invention is 50 mm.
【図３】本発明に係る（２）式の関係を示すグラフ。FIG. 3 is a graph showing the relationship of equation (2) according to the present invention.
【図４】本発明に係る接合面の形状と接合面の最大長さ
との関係を示す模式図。FIG. 4 is a schematic diagram showing the relationship between the shape of the joint surface and the maximum length of the joint surface according to the present invention.
【図５】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 5 is a schematic diagram showing a joining method according to an example and a comparative example of the present invention.
【図６】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 6 is a schematic diagram showing a joining method according to examples and comparative examples of the present invention.
【図７】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 7 is a schematic diagram showing a joining method according to examples and comparative examples of the present invention.
１１ Ｔｉ母材 １２，１４ Ａｇ−Ｃｕろう材 １３ Ｆｅ−Ｎｉ−Ｃｏ合金 １５ Ｃｕ １６ Ａｇ−Ｃｕ−Ｔｉろう材 １７ アルミナ ２１ 純Ｔｉ ２２，２４ Ａｇ−Ｃｕろう材 ２３ Ｆｅ−Ｎｉ−Ｃｏ合金 ２５ 無酸素Ｃｕ ２６ Ａｇ−Ｃｕ−Ｔｉろう材 ２７ アルミナ ３１ 純Ｔｉ ３２，３４ Ａｇ−Ｃｕろう材 ３３ Ｆｅ−Ｎｉ−Ｃｏ合金 ３５ タフピッチＣｕ ３６ Ａｇ−Ｃｕ−Ｔｉろう材 ３７ アルミナ ４１ Ｔｉ−６重量％Ａｌ−４重量％Ｖ ４２，４４ Ａｇ−Ｃｕろう材 ４３ Ｆｅ−Ｎｉ−Ｃｏ合金 ４５ りん脱酸Ｃｕ ４６ Ａｇ−Ｃｕ−Ｔｉろう材 ４７ アルミナ 11 Ti base material 12,14 Ag-Cu brazing material 13 Fe-Ni-Co alloy 15 Cu 16 Ag-Cu-Ti brazing material 17 Alumina 21 Pure Ti 22,24 Ag-Cu brazing material 23 Fe-Ni-Co alloy 25 Oxygen-free Cu 26 Ag-Cu-Ti brazing material 27 Alumina 31 Pure Ti 32,34 Ag-Cu brazing material 33 Fe-Ni-Co alloy 35 Tough pitch Cu 36 Ag-Cu-Ti brazing material 37 Alumina 41 Ti-6 wt% Al-4 wt% V 42,44 Ag-Cu brazing material 43 Fe-Ni-Co alloy 45 Phosphorus deoxidized Cu 46 Ag-Cu-Ti brazing material 47 Alumina
Claims (1)
に、アルミナ側からＴｉもしくはＴｉ合金側に向けて、
Ａｇ−Ｃｕ−Ｔｉ合金からなるろう材、ＣｕまたはＣｕ
合金からなる応力緩和材、Ａｇ−Ｃｕ合金からなるろう
材、Ｆｅ−Ｎｉ−Ｃｏ合金、前記Ａｇ−Ｃｕ合金と同一
または異なったＡｇ−Ｃｕ合金からなるろう材を順次積
層し、前記ろう材を加熱溶融させて接合する方法におい
て、 （１）接合面の最大長さが３４ｍｍより長い場合は、下
記（１）式 【数１】 の関係を満足する様な条件下に、また （２）接合面の最大長さが３４ｍｍ以下の場合は、下記
（２）式 【数２】 の関係を満足する様な条件下に接合することを特徴とす
る接合方法。1. Between Ti or Ti alloy and alumina, from the alumina side to the Ti or Ti alloy side,
Brazing material made of Ag-Cu-Ti alloy, Cu or Cu
A stress relaxation material made of an alloy, a brazing material made of an Ag-Cu alloy, a Fe-Ni-Co alloy, and a brazing material made of an Ag-Cu alloy which is the same as or different from the Ag-Cu alloy are sequentially laminated to form the brazing material. In the method of joining by heating and melting, (1) when the maximum length of the joining surface is longer than 34 mm, the following (1) formula Under the conditions that satisfy the relationship of (2) and (2) the maximum length of the joint surface is 34 mm or less, the following (2) equation (2) The joining method is characterized in that the joining is carried out under the conditions satisfying the relationship.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3867294A JPH07247178A (en) | 1994-03-09 | 1994-03-09 | Method for cementing ti or ti-alloy with alumina |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3867294A JPH07247178A (en) | 1994-03-09 | 1994-03-09 | Method for cementing ti or ti-alloy with alumina |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07247178A true JPH07247178A (en) | 1995-09-26 |
Family
ID=12531771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3867294A Withdrawn JPH07247178A (en) | 1994-03-09 | 1994-03-09 | Method for cementing ti or ti-alloy with alumina |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07247178A (en) |
-
1994
- 1994-03-09 JP JP3867294A patent/JPH07247178A/en not_active Withdrawn
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