JPH07300376A - Method for joining alumina to fe-ni-co alloy - Google Patents
Method for joining alumina to fe-ni-co alloyInfo
- Publication number
- JPH07300376A JPH07300376A JP9649194A JP9649194A JPH07300376A JP H07300376 A JPH07300376 A JP H07300376A JP 9649194 A JP9649194 A JP 9649194A JP 9649194 A JP9649194 A JP 9649194A JP H07300376 A JPH07300376 A JP H07300376A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- alumina
- joining
- brazing material
- main components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、アルミナとＦｅ−Ｎｉ
−Ｃｏ合金を接合する技術に関し、詳細にはアルミナと
Ｆｅ−Ｎｉ−Ｃｏ合金の間に強度及び真空気密性の良好
な接合部を形成し、且つこれを長期間に亘って維持する
ことができる様な接合方法に関するものであり、特に半
導体製造装置の分野等において好適に利用することがで
きる。The present invention relates to alumina and Fe-Ni.
With respect to the technique of joining a —Co alloy, specifically, a joint having good strength and vacuum airtightness can be formed between alumina and an Fe—Ni—Co alloy, and this can be maintained for a long period of time. The present invention relates to such a joining method and can be suitably used particularly in the field of semiconductor manufacturing equipment.
【０００２】[0002]
【従来の技術】アルミナと金属のように線膨張係数が異
なる材料を接合するに際しては、接合部に残留応力を生
じて接合部強度の信頼性を低下させる。そこで健全な接
合体を得るという観点から、従来、被接合材の間に応力
緩和材を配置する方法（特開昭６１−２１５２７２）、
接合体の形状を工夫する方法（特開平４−７７３６
９）、或は接合後に接合体を加工する方法（特公平３−
７１３９１）などが検討され、残留応力の緩和を図るこ
とが行われている。2. Description of the Related Art When joining materials having different linear expansion coefficients, such as alumina and metal, residual stress is generated in the joining portion, and reliability of the joining portion strength is lowered. Therefore, from the viewpoint of obtaining a sound bonded body, a conventional method of disposing a stress relaxation material between the materials to be bonded (Japanese Patent Laid-Open No. 61-215272),
A method for devising the shape of the bonded body (Japanese Patent Laid-Open No. 4-7736).
9) or a method of processing the joined body after joining (Japanese Patent Publication No.
71391) and the like have been studied to alleviate residual stress.
【０００３】[0003]
【発明が解決しようとする課題】しかしながらたとえ上
記の様な方法でアルミナとＦｅ−Ｎｉ−Ｃｏ合金を接合
したとしても、接合終了後の冷却過程で発生する残留応
力を十二分に低減することができず、接合直後から、或
は使用中にアルミナ側から割れを生じるというトラブル
は避け切れなかった。However, even if the alumina and the Fe-Ni-Co alloy are joined by the above method, the residual stress generated in the cooling process after the joining is sufficiently reduced. However, the problem of cracking from the alumina side immediately after joining or during use was inevitable.
【０００４】本発明はかかる問題に鑑みてなされたもの
であって、アルミナとＦｅ−Ｎｉ−Ｃｏ合金の接合体を
製造するに際し、割れなどの欠陥を生じることがなく、
しかも接合強度が高く、接合部の真空気密性にも優れた
接合部を得ることができる様な接合方法の提供を目的と
するものである。The present invention has been made in view of the above problems, and does not cause defects such as cracks in producing a joined body of alumina and an Fe-Ni-Co alloy,
Moreover, it is an object of the present invention to provide a joining method with which the joining strength is high and a joining portion excellent in vacuum tightness can be obtained.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成すること
のできた本発明接合方法の要旨を述べると、アルミナと
Ｆｅ−Ｎｉ−Ｃｏ合金の間に、アルミナ側からＦｅ−Ｎ
ｉ−Ｃｏ合金側に向けて、 （Ａ）ＡｇおよびＣｕを主成分とするろう材 （Ｂ）ＣｕまたはＣｕ合金からなる応力緩和材 （Ｃ）前記（Ａ）のＡｇおよびＣｕを主成分とするろう
材と同一または異なる組成のＡｇおよびＣｕを主成分と
するろう材 を順次積層し、前記ろう材を加熱溶融させて接合するに
当たり、下記（１）式The gist of the joining method of the present invention which has been able to achieve the above object is as follows. Between the alumina and the Fe-Ni-Co alloy, the Fe-N
Toward the i-Co alloy side, (A) a brazing material containing Ag and Cu as main components (B) a stress relaxation material made of Cu or a Cu alloy (C) containing Ag and Cu of (A) as main components When sequentially laminating brazing filler metal mainly composed of Ag and Cu having the same or different composition as the brazing filler metal and heating and melting the brazing filler metal to join them, the following formula (1) is used.
【０００６】[0006]
【数２】 [Equation 2]
【０００７】の関係を満足する様な条件を選択して接合
を行うものである。尚前記アルミナは予め何らかの表面
処理によって金属表面を形成したものであってもよく、
またこの様な表面処理を行なわない場合のいずれであっ
てもよい。The joining is carried out by selecting the conditions that satisfy the above relationship. The alumina may have a metal surface previously formed by some surface treatment,
Further, it may be the case where such a surface treatment is not performed.
【０００８】始めに上記（１）式で示される関係をグラ
フ化して説明するが、（１）式で示される関数には ｔKo：Ｆｅ−Ｎｉ−Ｃｏ合金の厚さ ｔCu：ＣｕまたはＣｕ合金の厚さ ｄ ：接合面の最大長さ という３つの変数が含まれている。そこで本明細書では
ｔCuが１．０ｍｍである場合を代表的に取り上げてグラ
フ化することとした（図１）。尚本発明における『接合
面の最大長さ』とは、接合面の平面視形状において最も
離反した二点間の距離を言い、具体例をもって示せば図
２に例示する種々の接合面における長さｄである。First, the relationship represented by the above formula (1) will be described in the form of a graph. The function represented by the formula (1) has the following formula: t Ko : Fe-Ni-Co alloy thickness t Cu : Cu or Cu Alloy Thickness d: Includes three variables: maximum joint length. Therefore, in this specification, the case where t Cu is 1.0 mm is taken up as a representative and graphed (FIG. 1). The "maximum length of the joint surface" in the present invention means the distance between the two points that are most distant from each other in the plan view shape of the joint surface, and the lengths of various joint surfaces illustrated in FIG. d.
【０００９】[0009]
【作用】本発明における一方の接合対象であるアルミナ
は、必ずしも純アルミナである必要はなく、要はアルミ
ナが主体となるものであれば良く、例えば、ＳｉＯ2 、
Ｙ2 Ｏ3 、ＭｇＯ、ＣａＯ、ＴｉＯ2 、ＺｒＯ2 、Ｈｆ
Ｏ2 、ＳｉＣ、ＴｉＣ、ＺｒＣ、ＷＣ、ＶＣ、ＴａＣ、
Ｓｉ3 Ｎ4 、ＺｒＮ、ＴｉＮ、ＴｉＢ2 などとの複合物
質も本発明に適用することができる。The alumina which is one of the objects to be bonded in the present invention does not necessarily have to be pure alumina, and the essential point is that the main component is alumina, for example, SiO 2 ,
Y 2 O 3 , MgO, CaO, TiO 2 , ZrO 2 , Hf
O 2 , SiC, TiC, ZrC, WC, VC, TaC,
A composite material with Si 3 N 4 , ZrN, TiN, TiB 2 or the like can also be applied to the present invention.
【００１０】また他方の接合対象であるＦｅ−Ｎｉ−Ｃ
ｏ合金としては、Ｆｅ−（２５〜３５重量％）Ｎｉ−
（１３〜２３重量％）Ｃｏ合金が汎用されており、代表
的なものを非限定的に例示すると、Ｆｅ−３２重量％Ｎ
ｉ−１７重量％Ｃｏ合金、Ｆｅ−２９重量％Ｎｉ−１６
重量％Ｃｏ合金、Ｆｅ−２９重量％Ｎｉ−１７重量％Ｃ
ｏ合金、Ｆｅ−２６重量％Ｎｉ−２２重量％Ｃｏ合金な
どを挙げることができる。Fe-Ni-C which is the other bonding target
As an o alloy, Fe- (25 to 35% by weight) Ni-
(13 to 23% by weight) Co alloy is widely used, and a typical example is, without limitation, Fe-32% by weight N.
i-17 wt% Co alloy, Fe-29 wt% Ni-16
Wt% Co alloy, Fe-29 wt% Ni-17 wt% C
o alloy, Fe-26 weight% Ni-22 weight% Co alloy, etc. can be mentioned.
【００１１】次にアルミナとＦｅ−Ｃｏ−Ｎｉ合金の間
に介在積層される前記（Ａ）〜（Ｃ）の各物質について
説明する。（Ａ）のＡｇおよびＣｕを主成分とするろう
材としては、Ｍｏ−Ｍｎ法やＴｉコーティング法によっ
てアルミナ接合面に表面処理を施して金属表面を形成
（金属化：メタライジング）した場合には汎用のＡｇ−
Ｃｕ合金ろう材が全て使用可能である。特に代表的なも
のを非限定的に例示すると、７２重量％Ａｇ−２８重量
％Ｃｕ合金ろう材、８５重量％Ａｇ−１５重量％Ｃｕ合
金ろう材、５０重量％Ａｇ−５０重量％Ｃｕ合金ろう
材、６７重量％Ａｇ−３３重量％Ｃｕ合金ろう材などを
挙げることができる。また、前記表面処理を行なわない
場合には主成分とするＡｇおよびＣｕに活性金属（例え
ばＴｉ、Ｚｒ、Ｂｅなど）を加えたろう材を使用するこ
とが好ましく、代表的なものを非限定的に例示すると、
７２重量％Ａｇ−２７重量％Ｃｕ−１重量％Ｔｉ合金ろ
う材、７０．５重量％Ａｇ−２７．５重量％Ｃｕ−２．
０重量％Ｔｉ合金ろう材、６３重量％Ａｇ−３５．２５
重量％Ｃｕ−１．７５重量％Ｔｉ合金ろう材、５９重量
％Ａｇ−１２．５重量％Ｉｎ−２７．２５重量％Ｃｕ−
１．２５重量％Ｔｉ合金ろう材などが挙げられる。尚前
記Ｍｏ−Ｍｎ法とは、それ自身公知の方法であり、通常
３μｍ以下のＭｏ粉末にＭｎを１５〜２０重量％含有さ
せ、有機系バインダーを用いてペースト状にしたものを
筆塗り、スプレー、スクリーン印刷等の各種方法でセラ
ミックス表面に塗布し、更に適度に加湿された水素ガス
中で１３００〜１５００℃に加熱焼結することにより、
セラミックス表面をメタライジングするものである。Next, the respective substances (A) to (C) which are laminated by interposing between the alumina and the Fe-Co-Ni alloy will be described. As the brazing material containing Ag and Cu as the main components of (A), when a metal surface is formed by applying a surface treatment to the alumina bonding surface by a Mo-Mn method or a Ti coating method (metallization: metallizing) General-purpose Ag-
All Cu alloy brazing materials can be used. Non-limiting examples of particularly representative ones are 72 wt% Ag-28 wt% Cu alloy brazing filler metal, 85 wt% Ag-15 wt% Cu alloy brazing filler metal, 50 wt% Ag-50 wt% Cu alloy brazing filler metal. Material, 67 wt% Ag-33 wt% Cu alloy brazing material, and the like. Further, when the surface treatment is not performed, it is preferable to use a brazing filler metal in which an active metal (for example, Ti, Zr, Be, etc.) is added to Ag and Cu as main components, and representative ones are not limited. For example,
72 wt% Ag-27 wt% Cu-1 wt% Ti alloy brazing filler metal, 70.5 wt% Ag-27.5 wt% Cu-2.
0% by weight Ti alloy brazing material, 63% by weight Ag-35.25
% By weight Cu-1.75% by weight Ti alloy brazing material, 59% by weight Ag-12.5% by weight In-27.25% by weight Cu-
Examples include 1.25 wt% Ti alloy brazing material. The above-mentioned Mo-Mn method is a method known per se, and usually contains 15 to 20% by weight of Mn in Mo powder having a size of 3 μm or less, which is made into a paste by using an organic binder, and is then painted and sprayed. By coating the surface of the ceramics by various methods such as screen printing, and further by heating and sintering at 1300 to 1500 ° C. in appropriately humidified hydrogen gas,
Metallizing the surface of ceramics.
【００１２】また（Ｃ）のＡｇおよびＣｕを主成分とす
るろう材としては、前述した汎用のＡｇ−Ｃｕ合金ろう
材、および主成分のＡｇおよびＣｕに活性金属を加えた
ろう材が全て使用可能である。また、（Ａ）で用いるＡ
ｇおよびＣｕを主成分とするろう材と（Ｃ）で用いるＡ
ｇおよびＣｕを主成分とするろう材は同一であっても異
なっていても良い。As the brazing material containing Ag and Cu as the main components of (C), the above-mentioned general-purpose Ag-Cu alloy brazing material and the brazing materials containing active metals added to the main components Ag and Cu can all be used. Is. Also, A used in (A)
A brazing material containing g and Cu as main components and A used in (C)
The brazing materials containing g and Cu as the main components may be the same or different.
【００１３】（Ｂ）のＣｕまたはＣｕ合金からなる応力
緩和材は、ＣｕまたはＣｕ合金の柔軟性を利用するもの
であり、この柔軟性によって接合後の冷却過程で発生す
る残留応力を低減するものである。従ってこの様な柔軟
性を保持するものは全て使用でき、まずＣｕとしては、
無酸素銅、タフピッチ銅またはリン脱酸銅などの如何を
問わずに用いることができ、またＣｕ合金としては、Ｃ
ｕの柔軟性に悪影響を与えない合金元素（例えばＺｎ，
Ｓｎ，Ｐｂ，Ｆｅ，Ａｌ，Ｍｎ，Ｎｉなどが非限定的に
例示される）を含むものが全て使用できる。Ｃｕまたは
Ｃｕ合金の厚さが大きい場合にはＣｕまたはＣｕ合金自
体の変形が接合後に生じる残留応力に対して支配的にな
り、ＣｕまたはＣｕ合金が持つ大きな線膨張係数のた
め、大きな残留応力が接合体に生じる。健全な接合体を
得るためには接合面の最大長さ及びＦｅ−Ｎｉ−Ｃｏ合
金の厚さに対応して（１）式が成立する範囲内の厚さの
ＣｕまたはＣｕ合金を用いることが必要である。The stress relaxation material (B) made of Cu or Cu alloy utilizes the flexibility of Cu or Cu alloy, and this flexibility reduces residual stress generated in the cooling process after joining. Is. Therefore, anything that retains such flexibility can be used. First, for Cu,
It can be used regardless of oxygen-free copper, tough pitch copper, phosphorus deoxidized copper, etc., and Cu alloy is C
Alloying elements that do not adversely affect the flexibility of u (eg Zn,
Any of those containing Sn, Pb, Fe, Al, Mn, Ni, etc. can be used. When the thickness of Cu or Cu alloy is large, the deformation of Cu or Cu alloy itself becomes dominant with respect to the residual stress generated after joining, and due to the large linear expansion coefficient of Cu or Cu alloy, large residual stress It occurs in the zygote. In order to obtain a sound bonded body, it is preferable to use Cu or a Cu alloy having a thickness within the range where the formula (1) is satisfied, corresponding to the maximum length of the bonding surface and the thickness of the Fe-Ni-Co alloy. is necessary.
【００１４】以上述べてきたように、本発明ではアルミ
ナとＦｅ−Ｎｉ−Ｃｏ合金との間に、ＡｇおよびＣｕを
主成分とするろう材、応力緩和材としてのＣｕまたはＣ
ｕ合金、前記ろう材と同一もしくは異なる組成のＡｇお
よびＣｕを主成分とするろう材を順次積層し、前記ろう
材を加熱溶融させて接合するが、この場合、健全な接合
体を得るためのＣｕまたはＣｕ合金の厚さ及びＦｅ−Ｎ
ｉ−Ｃｏ合金の厚さは、接合面の最大長さに応じて定め
られる。そのための条件を研究した結果、健全な接合体
を得るための条件として、接合面の最大長さ、Ｃｕまた
はＣｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃｏ合金の厚さの３つ
変数に対して前記（１）式が成立することが分かった。
（１）式を満足していない条件で接合体を製作したとき
は、接合後に発生する残留応力が大きく、アルミナ側に
割れが発生する。逆に（１）式を満足する条件で接合体
を製作すれば、残留応力を低減することができ、アルミ
ナ側に割れを生じない健全な接合体が得られる。As described above, in the present invention, between the alumina and the Fe-Ni-Co alloy, a brazing material containing Ag and Cu as main components, and Cu or C as a stress relaxation material.
A u alloy and a brazing material mainly composed of Ag and Cu having the same or different composition as the brazing material are sequentially laminated, and the brazing material is heated and melted to be joined. In this case, in order to obtain a sound joined body. Cu or Cu alloy thickness and Fe-N
The thickness of the i-Co alloy is determined according to the maximum length of the joint surface. As a result of studying the conditions therefor, as the conditions for obtaining a sound bonded body, three conditions of the maximum length of the bonding surface, the thickness of Cu or Cu alloy, and the thickness of Fe-Ni-Co alloy were determined. It was found that the above formula (1) holds.
When the bonded body is manufactured under the condition that the formula (1) is not satisfied, the residual stress generated after the bonding is large and the alumina side is cracked. On the contrary, if the bonded body is manufactured under the condition that the formula (1) is satisfied, the residual stress can be reduced, and a sound bonded body which does not cause cracks on the alumina side can be obtained.
【００１５】[0015]
【実施例】次に本発明の実施例について比較例と対比し
て説明する。実施例１ （図３参照） 厚さ６．５ｍｍのＦｅ−Ｎｉ−Ｃｏ合金（Ｆｅ−２９重
量％Ｎｉ−１７重量％Ｃｏ合金）製円筒１５とアルミナ
１１製円盤との接合において、アルミナ１１側から順に
ＡｇおよびＣｕを主成分とするろう材（７１重量％Ａｇ
−２８重量％Ｃｕ−１重量％Ｔｉ合金ろう材）１２、無
酸素銅１３（厚さ：１．０ｍｍ）、ＡｇおよびＣｕを主
成分とするろう材（７２重量％Ａｇ−２８重量％Ｃｕ合
金ろう材）１４を積層して配置し、真空炉中で８５０℃
に加熱することにより、前記各ろう材を溶融させて接合
を行った。接合した試験片について、外観観察および超
音波探傷により無酸素銅１３とアルミナ１１との接合界
面の検査を実施した。試験結果を表１に示す。EXAMPLES Next, examples of the present invention will be described in comparison with comparative examples. Example 1 (see FIG. 3) In the joining of a 6.5 mm thick Fe-Ni-Co alloy (Fe-29 wt% Ni-17 wt% Co alloy) cylinder 15 to an alumina 11 disc, the alumina 11 side was used. Brazing filler metal mainly containing Ag and Cu (from 71 wt% Ag
-28 wt% Cu-1 wt% Ti alloy brazing material) 12, oxygen-free copper 13 (thickness: 1.0 mm), brazing material containing Ag and Cu as main components (72 wt% Ag-28 wt% Cu alloy) (Brazing material) 14 are laminated and arranged in a vacuum furnace at 850 ° C.
The above brazing filler metals were melted by heating to the above to join them. With respect to the joined test piece, the joint interface between the oxygen-free copper 13 and the alumina 11 was inspected by visual observation and ultrasonic flaw detection. The test results are shown in Table 1.
【００１６】[0016]
【表１】 [Table 1]
【００１７】表１の実施例で示すように、ＣｕまたはＣ
ｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃｏ合金の厚さおよび接合
面の最大長さの関係が（１）式を満たす場合には接合後
に生じる残留応力が低減され、その結果アルミナ側に割
れが生じない健全な接合体が得られる。一方比較例に示
すように、ＣｕまたはＣｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃ
ｏ合金の厚さおよび接合面の最大長さの関係が（１）式
を満足していない場合には接合後に生じる残留応力が大
きいためアルミナ中に割れを生じ、健全な接合体は得ら
れない。As shown in the examples of Table 1, Cu or C
When the relationship between the thickness of the u alloy, the thickness of the Fe-Ni-Co alloy, and the maximum length of the joint surface satisfies the expression (1), the residual stress generated after joining is reduced, and as a result, cracks occur on the alumina side. A healthy joint that does not occur can be obtained. On the other hand, as shown in the comparative example, the thickness of Cu or Cu alloy, Fe-Ni-C
o If the relationship between the thickness of the alloy and the maximum length of the joint surface does not satisfy the expression (1), the residual stress generated after joining is large and cracks occur in the alumina, so a sound joint cannot be obtained. .
【００１８】実施例２（図４参照） いずれも外径８４ｍｍ、内径７０ｍｍの円筒形状である
アルミナ２１とＦｅ−Ｎｉ−Ｃｏ合金（Ｆｅ−３２重量
％Ｎｉ−１７重量％Ｃｏ合金）２５の接合において、ア
ルミナ接合面にＭｏ−Ｍｎ法によるメタライジングを行
なった後、アルミナ側から順にＡｇおよびＣｕを主成分
とするろう材（７２重量％Ａｇ−２８重量％Ｃｕ合金ろ
う材）２２、厚さ１．０ｍｍのタフ・ピッチ銅２３、Ａ
ｇおよびＣｕを主成分とするろう材（７２重量％Ａｇ−
２８重量％Ｃｕ合金ろう材）２４を積層して配置し、８
５０℃、Ａｒ雰囲気中で加熱溶融し接合した。接合した
試験片について、外観観察および超音波探傷によりタフ
・ピッチ銅２３とアルミナ２１との接合界面の検査を実
施した。試験結果を表２に示す。 Example 2 (see FIG. 4) Bonding of alumina 21 and Fe-Ni-Co alloy (Fe-32 wt% Ni-17 wt% Co alloy) 25 each having a cylindrical shape with an outer diameter of 84 mm and an inner diameter of 70 mm In the above, after brazing the alumina bonding surface by the Mo-Mn method, a brazing material containing Ag and Cu as main components in order from the alumina side (72 wt% Ag-28 wt% Cu alloy brazing filler metal) 22, thickness 1.0mm tough pitch copper 23, A
A brazing material containing g and Cu as main components (72 wt% Ag-
28 wt% Cu alloy brazing filler metal) 24 are stacked and arranged, and
It was heated and melted in an Ar atmosphere at 50 ° C. to be joined. With respect to the joined test piece, the joint interface between the tough pitch copper 23 and the alumina 21 was inspected by visual observation and ultrasonic flaw detection. The test results are shown in Table 2.
【００１９】[0019]
【表２】 [Table 2]
【００２０】表２の実施例に示すように、ＣｕまたはＣ
ｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃｏ合金の厚さと接合面の
最大長さの関係が（１）式を満たす場合には、接合後に
生じる残留応力が十分に低減され、その結果アルミナ側
に割れを生じない健全な接合体が得られる。一方、比較
例に示すようにＣｕまたはＣｕ合金の厚さ、Ｆｅ−Ｎｉ
−Ｃｏ合金厚さと接合面の最大長さの関係が（１）式を
満足していない場合には接合部に生じる残留応力が大き
く、結果としてアルミナ側に割れを生じ健全な接合体は
得られない。As shown in the examples of Table 2, Cu or C
When the relationship between the thickness of the u alloy, the thickness of the Fe-Ni-Co alloy and the maximum length of the joint surface satisfies the expression (1), the residual stress generated after the joint is sufficiently reduced, and as a result, the residual stress on the alumina side is reduced. A sound joined body that does not crack can be obtained. On the other hand, as shown in the comparative example, the thickness of Cu or Cu alloy, Fe-Ni
-If the relationship between the thickness of the Co alloy and the maximum length of the joint surface does not satisfy Eq. (1), the residual stress generated in the joint is large, and as a result cracks occur on the alumina side and a sound joint is obtained. Absent.
【００２１】実施例３（図５参照） ともに断面形状が一辺２８ｍｍの正方形であるアルミナ
３１と厚さ３．５ｍｍのＦｅ−Ｎｉ−Ｃｏ合金（Ｆｅ−
２９重量％Ｎｉ−１６重量％Ｃｏ合金）３５との接合に
おいて、アルミナ接合面にＴｉコーティングを施した
後、アルミナ側から順にＡｇおよびＣｕを主成分とする
ろう材（７２重量％Ａｇ−２８重量％Ｃｕ合金ろう材）
３２、リン脱酸銅３３、ＡｇおよびＣｕを主成分とする
ろう材（７２重量％Ａｇ−２８重量％Ｃｕ合金ろう材）
３４を積層して配置し、上記ろう材を真空炉中で８５０
℃に加熱溶融することにより接合体を得た。アルミナ３
１とリン脱酸銅３３との接合界面の検査を外観検査およ
び超音波探傷によって行なった。試験結果を表３に示
す。 Example 3 (see FIG. 5) In each case, alumina 31 having a square cross section of 28 mm on a side and Fe--Ni--Co alloy (Fe--
29 wt% Ni-16 wt% Co alloy) 35, after applying a Ti coating on the alumina joining surface, a brazing material containing Ag and Cu as main components in order from the alumina side (72 wt% Ag-28 wt% % Cu alloy brazing material)
32, phosphorous deoxidized copper 33, a brazing material containing Ag and Cu as main components (72% by weight Ag-28% by weight Cu alloy brazing material)
34 are stacked and arranged, and the brazing material is placed in a vacuum furnace for 850
A joined body was obtained by heating and melting at ℃. Alumina 3
The joint interface between 1 and phosphorous deoxidized copper 33 was inspected by visual inspection and ultrasonic flaw detection. The test results are shown in Table 3.
【００２２】[0022]
【表３】 [Table 3]
【００２３】表３の実施例に示すように、ＣｕまたはＣ
ｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃｏ合金の厚さ、接合面の
最大長さの関係が（１）式の関係を満たす場合には、ア
ルミナ側に割れが発生せず、健全な接合体が得られてい
ることが分かる。一方比較例に示すように、Ｃｕまたは
Ｃｕ合金の厚さ、Ｆｅ−Ｎｉ−Ｃｏ合金の厚さ、接合面
の最大長さの関係が（１）式を満たさない場合にはアル
ミナ側に割れが発生するため、健全な接合体が得られな
い。As shown in the examples of Table 3, Cu or C
When the relationship between the thickness of the u alloy, the thickness of the Fe-Ni-Co alloy, and the maximum length of the bonding surface satisfies the relationship of formula (1), no cracks occur on the alumina side and a sound bonded body is obtained. It can be seen that is obtained. On the other hand, as shown in the comparative example, when the relationship between the thickness of Cu or Cu alloy, the thickness of Fe-Ni-Co alloy, and the maximum length of the joint surface does not satisfy the expression (1), cracks occur on the alumina side. Therefore, a healthy bonded body cannot be obtained.
【００２４】[0024]
【発明の効果】以上詳述したように、本発明に示す方法
でアルミナとＦｅ−Ｎｉ−Ｃｏ合金との接合を行なった
場合には接合部に生じる残留応力を低減することがで
き、結果として割れや界面剥離のない健全な接合体が得
られる。As described in detail above, when the alumina and the Fe-Ni-Co alloy are joined by the method shown in the present invention, the residual stress generated at the joint can be reduced, and as a result, A sound bonded body without cracking or interfacial peeling can be obtained.
【図１】本発明に係る（１）式の関係を示すグラフ。FIG. 1 is a graph showing the relationship of equation (1) according to the present invention.
【図２】本発明に係る接合面形状と接合面の最大長さと
の関係を示す模式図。FIG. 2 is a schematic diagram showing the relationship between the shape of the joint surface and the maximum length of the joint surface according to the present invention.
【図３】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 3 is a schematic diagram showing a joining method according to examples and comparative examples of the present invention.
【図４】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 4 is a schematic diagram showing a joining method according to an example and a comparative example of the present invention.
【図５】本発明の実施例および比較例に係る接合方法を
示す模式図。FIG. 5 is a schematic diagram showing a joining method according to an example and a comparative example of the present invention.
１１ アルミナ １２、１４ ＡｇおよびＣｕを主成分とするろう材 １３ 無酸素銅 １５ Ｆｅ−Ｎｉ−Ｃｏ合金 ２１ アルミナ ２２、２４ ＡｇおよびＣｕを主成分とするろう材 ２３ タフ・ピッチ銅 ２５ Ｆｅ−Ｎｉ−Ｃｏ合金 ３１ アルミナ ３２、３４ ＡｇおよびＣｕを主成分とするろう材 ３３ リン脱酸銅 ３５ Ｆｅ−Ｎｉ−Ｃｏ合金 11 Alumina 12, 14 Brazing material containing Ag and Cu as main components 13 Oxygen-free copper 15 Fe-Ni-Co alloy 21 Alumina 22, 24 Brazing material containing Ag and Cu as main components 23 Tough pitch copper 25 Fe-Ni -Co alloy 31 Alumina 32, 34 Brazing material containing Ag and Cu as main components 33 Phosphorus deoxidized copper 35 Fe-Ni-Co alloy
Claims (1)
に、アルミナ側からＦｅ−Ｎｉ−Ｃｏ合金側に向けて、
ＡｇおよびＣｕを主成分とするろう材、ＣｕまたはＣｕ
合金からなる応力緩和材、前記ＡｇおよびＣｕを主成分
とするろう材と同一または異なった組成のＡｇおよびＣ
ｕを主成分とするろう材を順次積層し、前記ろう材を加
熱溶融させて接合する方法において、 下記（１）式 【数１】 の関係を満足する様な条件下に接合することを特徴とす
る接合方法。1. Between the alumina and the Fe-Ni-Co alloy, from the alumina side toward the Fe-Ni-Co alloy side,
A brazing material mainly composed of Ag and Cu, Cu or Cu
Stress relaxation material composed of alloy, Ag and C having the same or different composition as the brazing material containing Ag and Cu as the main components.
In a method of sequentially laminating brazing filler metal containing u as a main component and heating and melting the brazing filler metal, the following formula (1) The joining method is characterized in that the joining is carried out under the conditions satisfying the relationship.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9649194A JPH07300376A (en) | 1994-05-10 | 1994-05-10 | Method for joining alumina to fe-ni-co alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9649194A JPH07300376A (en) | 1994-05-10 | 1994-05-10 | Method for joining alumina to fe-ni-co alloy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07300376A true JPH07300376A (en) | 1995-11-14 |
Family
ID=14166557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9649194A Withdrawn JPH07300376A (en) | 1994-05-10 | 1994-05-10 | Method for joining alumina to fe-ni-co alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07300376A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9806380B2 (en) | 2013-05-31 | 2017-10-31 | General Electric Company | High temperature electrochemical cell structures, and methods for making |
| CN115229378A (en) * | 2022-08-09 | 2022-10-25 | 哈尔滨工业大学（威海） | High-entropy alloy brazing filler metal and preparation method and application thereof |
-
1994
- 1994-05-10 JP JP9649194A patent/JPH07300376A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9806380B2 (en) | 2013-05-31 | 2017-10-31 | General Electric Company | High temperature electrochemical cell structures, and methods for making |
| CN115229378A (en) * | 2022-08-09 | 2022-10-25 | 哈尔滨工业大学（威海） | High-entropy alloy brazing filler metal and preparation method and application thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
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