JPH07245456A - High-frequency circuit board - Google Patents

High-frequency circuit board

Info

Publication number
JPH07245456A
JPH07245456A JP3553294A JP3553294A JPH07245456A JP H07245456 A JPH07245456 A JP H07245456A JP 3553294 A JP3553294 A JP 3553294A JP 3553294 A JP3553294 A JP 3553294A JP H07245456 A JPH07245456 A JP H07245456A
Authority
JP
Japan
Prior art keywords
frequency circuit
circuit board
molecular weight
weight polyethylene
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3553294A
Other languages
Japanese (ja)
Inventor
Hidenori Eriguchi
秀紀 江里口
Yoshinori Sato
義則 佐藤
Shinichi Kamoshita
真一 鴨志田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP3553294A priority Critical patent/JPH07245456A/en
Publication of JPH07245456A publication Critical patent/JPH07245456A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)

Abstract

PURPOSE:To enable a high-frequency circuit device to be less thermally expanded at heating and less contracted in dimensions on cooling by a method wherein sheets of ultra-high molecular weight polyethylene in which curing resin is dispersed and cured curing resin-impregnated reinforcing layers are alternately laminated, and furthermore metal conductor layers are provided. CONSTITUTION:Ultra-high molecular weight polyethylene porous sheets 11 and prepregs impregnated with uncured curing resin are alternately laminated so as to make reinforcing sheets 13 located outside, and a metal conductor layer 14 is provided to both the outmost sides of a laminate composed of porous sheets 11 and the prepregs. The laminate provided with the conductor layers 14 are thermocompressed so as to enable the uncured hardening resin contained in the prepreg to penetrate into porosities and to be cured. As mentioned above, reinforcing materials are provided not only to the surfaces of a high-frequency circuit board but also inside the circuit board, whereby the ultra-high molecular weight polyethylene porous sheet 11 large in thermal expansion and contraction in dimensions on cooling is restricted in its behaviors by the additionally provided reinforcing materials to make the high-frequency circuit board small in thermal expansion and contraction on cooling. By this setup, a high-frequency circuit board excellent in reliability of through-hole conduction and dimensional stability can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子機器用の基板、特
に高周波領域での使用に好適な高周波回路用基板に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for electronic equipment, and more particularly to a substrate for high frequency circuits suitable for use in a high frequency region.

【0002】[0002]

【従来の技術】最近の電子工業、通信工業で使用される
信号の周波数は、kHzの領域から、MHz、GHzの
領域まで拡がっている。一般に、高周波回路用基板は、
信号速度の向上を図るためには、基板の比誘電率εr
低くし、さらに損失を低減するために誘電正接tanδ
を低くしたものが要求され、比誘電率εr や誘電正接t
anδの低い誘電体としてポリテトラフルオロエチレン
やポリエチレンなどの樹脂をガラスクロスに含浸させた
ものが用いられ、これに銅はくを積層させた高周波用基
板が一般的に使用されている。
2. Description of the Related Art The frequency of signals used in the recent electronics industry and communication industry has spread from the kHz region to the MHz and GHz regions. Generally, high frequency circuit boards are
In order to improve the signal speed, the relative permittivity ε r of the substrate is lowered, and the dielectric loss tangent tan δ is further reduced in order to reduce the loss.
Is required, and the relative permittivity ε r and the dielectric loss tangent t are required.
A glass cloth impregnated with a resin such as polytetrafluoroethylene or polyethylene is used as a dielectric having a low an δ, and a high frequency substrate in which copper foil is laminated is generally used.

【0003】ガラスクロスにポリテトラフルオロエチレ
ンを含浸させ、加熱加圧成形したポリテトラフルオロエ
チレン−ガラスクロス基板は、ポリテトラフルオロエチ
レンの高融点、低流動性であるため、その製造に高温度
で長時間を要し、コストが高くなるという問題点があっ
た。一方、ガラスクロスにポリエチレンを含浸させたポ
リエチレン−ガラスクロス基板はポリエチレンの融点が
低いため、はんだ耐熱性に劣る欠点があった。
A polytetrafluoroethylene-glass cloth substrate obtained by impregnating glass cloth with polytetrafluoroethylene and molding under heat and pressure has a high melting point and low fluidity of polytetrafluoroethylene. There is a problem that it takes a long time and the cost becomes high. On the other hand, the polyethylene-glass cloth substrate obtained by impregnating glass cloth with polyethylene has a drawback that the heat resistance of solder is poor because the melting point of polyethylene is low.

【0004】これらの欠点を改良するため、超高分子量
ポリエレンの多孔質シート1と金属導体層4とを、補強
基材2と硬化性樹脂3とからなる層を介して接着剤層5
で接着一体化した高周波回路用基板が提案された(図2
参照)。
In order to improve these drawbacks, the adhesive layer 5 is formed by interposing the porous sheet 1 of ultrahigh molecular weight polyethylene and the metal conductor layer 4 with the layer composed of the reinforcing base material 2 and the curable resin 3 interposed therebetween.
A high-frequency circuit board that has been bonded and integrated with a substrate was proposed (Fig.
reference).

【0005】[0005]

【発明が解決しようとする課題】ところが、超高分子量
ポリエレンの多孔質シート1と金属導体層4とを、補強
基材2と硬化性樹脂3とからなる層を介して接着一体化
した高周波回路用基板は、加熱した時の熱膨張と冷却後
の寸法収縮が大きいという問題点があった。本発明は、
加熱時の熱膨張と冷却後の寸法収縮の小さい高周波回路
用基板を提供するものである。
However, a high-frequency circuit in which a porous sheet 1 of ultra-high molecular weight polyethylene and a metal conductor layer 4 are bonded and integrated via a layer composed of a reinforcing base material 2 and a curable resin 3 The substrate for use has a problem that it has a large thermal expansion when heated and a large dimensional shrinkage after cooling. The present invention is
It is intended to provide a substrate for a high-frequency circuit, which has a small thermal expansion during heating and a small dimensional contraction after cooling.

【0006】[0006]

【課題を解決するための手段】本発明は、超高分子量ポ
リエチレン中に硬化性樹脂が分散されてなるシート11
の複数枚が、硬化した硬化性樹脂含浸補強層13と交互
に積層され、更に金属導体層14が設けられていること
を特徴とする高周波回路用基板である(図1参照)。本
発明の高周波回路用基板は、複数の超高分子量ポリエチ
レンの多孔質シート11を未硬化の硬化性樹脂が含浸さ
れたプリプレグと交互につみ重ね、外側が補強シート1
3となるようにし、最外側に金属導体層14を設けて、
これを加熱加圧して多孔質シートの多孔に、プリプレグ
に含まれる未硬化の硬化性樹脂を浸入させ硬化を行うこ
とにより製造することができる。
According to the present invention, a sheet 11 comprising a curable resin dispersed in ultra-high molecular weight polyethylene is used.
Is a laminated body of the cured resin-impregnated reinforcing layer 13 and the metal conductor layer 14 are further provided (see FIG. 1). The high frequency circuit substrate of the present invention comprises a plurality of ultra-high molecular weight polyethylene porous sheets 11 alternately stacked with prepreg impregnated with an uncured curable resin, and the reinforcing sheet 1 on the outside.
3 and the metal conductor layer 14 is provided on the outermost side,
It can be manufactured by heating and pressurizing this to infiltrate the uncured curable resin contained in the prepreg into the pores of the porous sheet to cure it.

【0007】超高分子量ポリエチレン多孔質シートは超
高分子量ポリエチレン粉末粒子を焼結させ、粒子同士を
融着により接合し、厚み0.5〜5mmのシートに成形
したものである。接合した粒子間には空気の連続層が存
在する。
The ultra-high molecular weight polyethylene porous sheet is obtained by sintering ultra-high molecular weight polyethylene powder particles, bonding the particles by fusion and molding them into a sheet having a thickness of 0.5 to 5 mm. There is a continuous layer of air between the bonded particles.

【0008】超高分子量ポリエチレンは、平均分子量1
00万〜500万ものがよく、例えば、ハイゼックスミ
リオン、ミペロン(三井石油化学工業株式会社の商品
名)、サンテックス(旭化成工業株式会社の商品名)、
HOSTALEN,GUR(西独ヘキスト社の商品
名)、HIFLEX,1000(米国ハーキュレス社の
商品名)などが好適である。
Ultrahigh molecular weight polyethylene has an average molecular weight of 1
It is preferably 5,000,000 to 5,000,000, for example, Hi-Zex Million, Miperon (trade name of Mitsui Petrochemical Industry Co., Ltd.), Suntex (trade name of Asahi Kasei Kogyo Co., Ltd.),
HOSTALEN, GUR (trade name of Hoechst Co., Germany), HIFLEX, 1000 (trade name of Hercules Co., USA), and the like are preferable.

【0009】超高分子量ポリエチレンの多孔質シートの
製造法としては、例えばフィルム、金属ベルトなどの基
材上に充填剤を混合した超高分子量ポリエチレンの粉末
粒子を供給し、これをロールやバーにより一定の厚みに
なるように賦形し、加熱炉に通し、粒子同士を加熱焼結
させて、超高分子量ポリエチレンの多孔質シートを連続
して成形する方法がある。超高分子量ポリエチレンの多
孔質シートの表面が平滑になるためには、超高分子量ポ
リエチレン粉末は、平均粒子径が0.001〜0.1m
mであるものが特に好ましい。
As a method for producing a porous sheet of ultra-high molecular weight polyethylene, powder particles of ultra-high molecular weight polyethylene prepared by mixing a filler on a base material such as a film or a metal belt are supplied, and the powder particles are fed by a roll or a bar. There is a method in which a porous sheet of ultrahigh molecular weight polyethylene is continuously formed by shaping the particles into a uniform thickness, passing them through a heating furnace, and heating and sintering the particles. To make the surface of the porous sheet of ultra high molecular weight polyethylene smooth, the ultra high molecular weight polyethylene powder has an average particle size of 0.001 to 0.1 m.
Particularly preferred is m.

【0010】プリプレグとしては、印刷回路用基板の製
造に通常用いられているガラス布、ガラス不織布、プラ
スチック繊維の織布、不織布の補強基材に硬化性樹脂ワ
ニスを含浸乾燥させたものが挙げられる。含浸させる硬
化性樹脂としては、ポリエステル樹脂、エポキシ樹脂、
フェノール樹脂、メラミン樹脂、ジアリルフタレート樹
脂、ポリイミド樹脂、ビスマレイミド・トリアジン樹
脂、ポリフェニレンオキサイド樹脂又はポリフェニレン
スルフィド樹脂と架橋性モノマーとの樹脂組成物が挙げ
られる。好ましくは、εr やtanδが比較的低いポリ
エステル樹脂、エポキシ樹脂、ポリイミド樹脂が好まし
い。コストの面からエポキシ樹脂が更に好ましい。プリ
プレグの使用量は50〜200g/m2が好ましく、補
強層の厚みは30〜200μmが好ましい。
Examples of the prepreg include glass cloth, glass non-woven cloth, plastic fiber woven cloth, and non-woven cloth reinforcing material impregnated with a curable resin varnish, which are usually used in the production of printed circuit boards. . As the curable resin to be impregnated, polyester resin, epoxy resin,
Examples of the resin composition include a phenol resin, a melamine resin, a diallyl phthalate resin, a polyimide resin, a bismaleimide / triazine resin, a polyphenylene oxide resin or a polyphenylene sulfide resin, and a crosslinkable monomer. Preferred are polyester resins, epoxy resins, and polyimide resins having relatively low ε r and tan δ. Epoxy resin is more preferable in terms of cost. The amount of prepreg used is preferably 50 to 200 g / m 2 , and the thickness of the reinforcing layer is preferably 30 to 200 μm.

【0011】金属導体層は、銅、アルミニウム、ニッケ
ル、金、銀、白金等のはく又は板である。また、金属は
く又は板に代えて、めっきにより所定の回路を形成する
ようにしてもよい。導体層の厚さは通常10〜50μm
である。
The metal conductor layer is a foil or plate of copper, aluminum, nickel, gold, silver, platinum or the like. Further, instead of the metal foil or the plate, a predetermined circuit may be formed by plating. The thickness of the conductor layer is usually 10 to 50 μm
Is.

【0012】超高分子量ポリエチレンのシートその他の
構成材料を加熱加圧する条件は、通常130〜250
℃、印加圧力2〜7、8MPa、印加時間20〜120
分で行われ、超高分子量ポリエチレン多孔質シート、プ
リプレグ、金属導体を鏡板で挟み、均一な条件で加熱加
圧する。
The conditions for heating and pressing the ultrahigh molecular weight polyethylene sheet and other constituent materials are usually 130 to 250.
C, applied pressure 2-7, 8 MPa, application time 20-120
The ultrahigh molecular weight polyethylene porous sheet, the prepreg, and the metal conductor are sandwiched between end plates, and heated and pressed under uniform conditions.

【0013】[0013]

【作用】本発明では、補強基材を高周波回路用基板の表
層だけでなく、基板の中に設けることにより、とりわけ
熱膨張と冷却後の寸法収縮の大きい超高分子ポリエチレ
ン多孔質シート層の挙動を新たに設けた補強基材が拘束
する。熱膨張と冷却後の寸法収縮が低減されるために良
好なスルーホール導通信頼性と寸法安定性を得ることが
できる。
In the present invention, the reinforcing base material is provided not only on the surface layer of the high-frequency circuit substrate but also inside the substrate, so that the behavior of the ultra-high molecular weight polyethylene porous sheet layer having a large degree of thermal expansion and dimensional contraction after cooling is large. The newly provided reinforcing base material restrains. Good thermal conductivity and dimensional stability can be obtained because thermal expansion and dimensional contraction after cooling are reduced.

【0014】[0014]

【実施例】以下、本発明を実施例に基づいて詳細に説明
するが、本発明はこれに限定されるものではない。 実施例1 ミペロンXM220(三井石油化学工業株式会社製の超
高分子量ポリエチレン商品名)を原料として多孔質ポリ
エチレンシートを以下に説明するようにして製造した。
ミペロンXM220は、平均粒子径0.03mm、融点
136℃、嵩密度0.4g/cm3 、真密度0.94/
cm3 である。ミペロンXM220を100重量部、デ
クロランプラス−25(1,2,3,4,7,8,9,
10,13,14,14−ドデカクロロ−1,4,4
a,5,6,6a,7,10,10a,11,12,1
2a−ドデカヒドロ−1,4,7,10−ジメタノジベ
ンゾノ(a,e)シクロオクテノンの米国オキシデンタ
ルケミカル社商品名、塩素含有率65重量%、平均粒子
径0.003mm,嵩密度0.67g/cm3 、真密度
1.9g/cm3 )100重量部をミキサーにより混合
して、ステンレスベルト上に0.6mm厚みに賦形し、
180℃の加熱炉中で15分間加熱焼結し、見かけ密度
0.55g/cm3 の充填剤混合樹脂多孔質シートを得
た。
EXAMPLES The present invention will now be described in detail based on examples, but the present invention is not limited thereto. Example 1 A porous polyethylene sheet was produced from Miperon XM220 (trade name of ultra-high molecular weight polyethylene manufactured by Mitsui Petrochemical Industry Co., Ltd.) as a raw material as described below.
Miperon XM220 has an average particle diameter of 0.03 mm, a melting point of 136 ° C., a bulk density of 0.4 g / cm 3 , and a true density of 0.94 /.
It is cm 3 . 100 parts by weight of Miperon XM220, dechlorane plus-25 (1, 2, 3, 4, 7, 8, 9,
10,13,14,14-dodecachloro-1,4,4
a, 5, 6, 6a, 7, 10, 10a, 11, 12, 1
2a-dodecahydro-1,4,7,10-dimethanodibenzono (a, e) cyclooctenone, a trade name of Oxydental Chemical Co., USA, chlorine content 65% by weight, average particle diameter 0.003 mm, bulk density 0 0.67 g / cm 3 , true density 1.9 g / cm 3 ) 100 parts by weight are mixed by a mixer and shaped into a thickness of 0.6 mm on a stainless belt,
The mixture was heated and sintered in a heating furnace at 180 ° C. for 15 minutes to obtain a filler-mixed resin porous sheet having an apparent density of 0.55 g / cm 3 .

【0015】このシート2枚と交互に厚さ50μmのガ
ラス布に臭素化ビスフェノールA型エポキシ樹脂(Tg
130℃)を含浸させたプリプレグ(樹脂分60重量
%)3枚を重ね合わせ、最外側に35μmの電解銅はく
(古河サーキットフォイル株式会社)を更に重ね、ステ
ンレス製の鏡板を用い、175℃、2MPaの条件で9
0分間加熱加圧し、高周波回路用基板を得た。
Alternately with these two sheets, a glass cloth having a thickness of 50 μm was coated with brominated bisphenol A type epoxy resin (Tg
(130 ° C) Impregnated with 3 sheets of prepreg (resin content 60% by weight), 35 μm electrolytic copper foil (Furukawa Circuit Foil Co., Ltd.) is further laminated on the outermost side, and a stainless steel end plate is used at 175 ° C. 9 at 2 MPa
It was heated and pressed for 0 minutes to obtain a substrate for high frequency circuit.

【0016】比較例 実施例と同様にして、ステンレスベルト上に1.3mm
厚みに賦形し、見かけ密度0.55g/cm3 の充填剤
混合樹脂多孔質シートを得た。このシートの両面に実施
例で使用したプリプレグと同じものを重ね合わせ、最外
側に35μの電解銅はくを更に重ね、実施例と同様に加
熱加圧して、高周波回路用基板を得た。
Comparative Example 1.3 mm on a stainless belt as in the example.
It was shaped into a thickness to obtain a filler-mixed resin porous sheet having an apparent density of 0.55 g / cm 3 . The same prepreg used in the examples was overlaid on both sides of this sheet, 35 μm of electrolytic copper foil was further overlaid on the outermost side, and heated and pressed in the same manner as in the example to obtain a substrate for a high frequency circuit.

【0017】上記の高周波回路用基板にJIS C50
12によるテストパターンに適合させてドリル穴あけ
し、無電解銅めっき液CUST(日立化成工業株式会社
商品名)を用い、厚さ0.5μmのめっきの後、硫酸銅
電気めっきにより厚さ30μmのめっきを行い、スルー
ホールめっきがなされた試料を得た。この試料に対し、
260℃のオイルに10秒間浸清し、室温の水中に10
秒間浸清する操作を1サイクルとする熱衝撃試験を行っ
た。
JIS C50 is used for the above high frequency circuit substrate.
Drilled in conformity with the test pattern according to No. 12, and using electroless copper plating solution CUST (trade name of Hitachi Chemical Co., Ltd.), after plating with a thickness of 0.5 μm, copper sulfate electroplating with a thickness of 30 μm Then, a sample plated with through holes was obtained. For this sample,
Immerse it in oil at 260 ° C for 10 seconds and put it in water at room temperature for 10 seconds.
A thermal shock test was conducted in which the operation of soaking for one second was one cycle.

【0018】また、実施例と比較例で得た基板の銅はく
をエッチング除去し、デュポン社製熱機械分析装置TM
Aにより室温から260℃までの厚さ方向の熱膨張量
(単位厚み当たりの変位量)を測定した。εr 、tan
δは12GHzの空胴共振器法により測定した。
Further, the copper foils of the substrates obtained in Examples and Comparative Examples were removed by etching, and a thermomechanical analyzer TM manufactured by DuPont was used.
The amount of thermal expansion (the amount of displacement per unit thickness) in the thickness direction from room temperature to 260 ° C. was measured by A. ε r , tan
δ was measured by a 12 GHz cavity resonator method.

【0019】実施例と比較例で得た基板を330mm×
250mmに切断し、基準穴を四隅から10mm内側に
穴あけし、穴間距離を測定し、銅はくをエッチング除去
してから、140℃で20分間加熱し、室温に冷却後、
再び穴間距離を測定し、穴間距離の収縮量(単位長さ当
たりの変位量)を測定し、寸法変化率を算出した。これ
らの結果を表1に示す。なお、熱衝撃試験の結果は、ス
ルーホール間の導通抵抗が20%以上変化するまでのサ
イクル数である。実施例と比較例とを比べるとεr 及び
tanδがわずかに上昇するだけで熱衝撃で1.5倍、
寸法変化率は半分となっていることがわかる。
The substrates obtained in the examples and the comparative examples are 330 mm ×
After cutting into 250 mm, drilling reference holes from the four corners to the inside of 10 mm, measuring the distance between the holes, etching away the copper foil, heating at 140 ° C. for 20 minutes, cooling to room temperature,
The interhole distance was measured again, the shrinkage amount of the interhole distance (the displacement amount per unit length) was measured, and the dimensional change rate was calculated. The results are shown in Table 1. The result of the thermal shock test is the number of cycles until the conduction resistance between the through holes changes by 20% or more. Comparing the example and the comparative example, ε r and tan δ slightly increase by 1.5 times due to thermal shock,
It can be seen that the dimensional change rate is halved.

【0020】[0020]

【表1】 ──────────────────────────────── 実施例 比較例 ──────────────────────────────── 熱衝撃試験(サイクル数) 60 40 熱膨張量 (%) 10 12 εr 2.75 2.65 tanδ (×10-4) 75 65 寸法変化率(%) 0.05 0.12 ────────────────────────────────[Table 1] ──────────────────────────────── Examples Examples Comparative Examples ─────────── ────────────────────── Thermal shock test (number of cycles) 60 40 Thermal expansion (%) 10 12 ε r 2.75 2.65 tan δ (× 10 -4 ) 75 65 Dimensional change rate (%) 0.05 0.12 ─────────────────────────────────

【0021】[0021]

【発明の効果】本発明によれば、補強基材を基板の表層
だけでなく、基板の中に設けることにより基板の熱膨張
と冷却後の寸法収縮が低減するために、スルーホール導
通信頼性と寸法安定性が良好な高周波回路用基板を得る
ことができる。
According to the present invention, since the reinforcing base material is provided not only in the surface layer of the substrate but also in the substrate, the thermal expansion of the substrate and the dimensional contraction after cooling are reduced. Thus, it is possible to obtain a high-frequency circuit board having good dimensional stability.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明一実施例の高周波回路用基板の構成を示
す断面図である。
FIG. 1 is a cross-sectional view showing a configuration of a high-frequency circuit board according to an embodiment of the present invention.

【図2】従来の高周波回路用基板の構成を示す断面図で
ある。
FIG. 2 is a cross-sectional view showing a configuration of a conventional high-frequency circuit board.

【符号の説明】[Explanation of symbols]

1 超高分子量ポリエチレンの多孔質シート 2 補強基材 3 硬化性樹脂 4 金属導体層 5 接着剤層 11 超高分子量ポリエチレン中に硬化性樹脂が分散さ
れてなるシート 13 硬化した硬化性樹脂含浸補強層 14 金属導体層
DESCRIPTION OF SYMBOLS 1 Porous sheet of ultra-high molecular weight polyethylene 2 Reinforcing base material 3 Curable resin 4 Metal conductor layer 5 Adhesive layer 11 Sheet in which curable resin is dispersed in ultra-high molecular weight polyethylene 13 Cured curable resin impregnated reinforcing layer 14 Metal conductor layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 超高分子量ポリエチレン中に硬化性樹脂
が分散されてなるシートの複数枚が、硬化した硬化性樹
脂含浸補強層と交互に積層され、更に金属導体層が設け
られていることを特徴とする高周波回路用基板。
1. A plurality of sheets in which a curable resin is dispersed in ultra-high molecular weight polyethylene are alternately laminated with a cured curable resin-impregnated reinforcing layer, and a metal conductor layer is further provided. Characteristic high frequency circuit board.
JP3553294A 1994-03-07 1994-03-07 High-frequency circuit board Pending JPH07245456A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3553294A JPH07245456A (en) 1994-03-07 1994-03-07 High-frequency circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3553294A JPH07245456A (en) 1994-03-07 1994-03-07 High-frequency circuit board

Publications (1)

Publication Number Publication Date
JPH07245456A true JPH07245456A (en) 1995-09-19

Family

ID=12444353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3553294A Pending JPH07245456A (en) 1994-03-07 1994-03-07 High-frequency circuit board

Country Status (1)

Country Link
JP (1) JPH07245456A (en)

Similar Documents

Publication Publication Date Title
US7174632B2 (en) Method of manufacturing a double-sided circuit board
US6500529B1 (en) Low signal loss bonding ply for multilayer circuit boards
US6807729B2 (en) Method of manufacturing metal foil
US7121000B2 (en) Method for manufacturing multilayer wiring board
US6761790B2 (en) Wiring board and method of manufacturing the same
EP1408726B1 (en) Method of manufacturing a printed wiring board
WO2005057997A1 (en) Method of manufacturing circuit board
WO2003009656A1 (en) Circuit-formed substrate and method of manufacturing circuit-formed substrate
JP2007109697A (en) Multilayer printed wiring board and method of manufacturing same
JPH07245456A (en) High-frequency circuit board
JPH05299796A (en) Multi-layer printed wiring board adhesive sheet and metal clad laminated board using the sheet
JPH0818178A (en) Production of high frequency circuit board
JP4089671B2 (en) Circuit forming substrate manufacturing method and circuit forming substrate
EP0523421B1 (en) Boards for high frequency circuits
JPH07240578A (en) Manufacture of substrate for high-frequency circuit
JPH08204334A (en) Manufacture of printed wiring board
JP3342565B2 (en) Method for producing sintered sheet and laminate for high-frequency circuit
JPH0521950A (en) Manufacture of board for high-frequency circuit
JPH05167211A (en) Laminated board for printed circuit and manufacture thereof
JPH0584214B2 (en)
JPH04215496A (en) Manufacture of multilayer circuit board
JPH0444386A (en) High frequenct circuit board and manufacture method
JPH10335820A (en) Multilayered wiring board
JP2533689B2 (en) Method for manufacturing multilayer circuit board
JPH01244851A (en) Manufacture of electric laminate