JPH07243875A - Apparatus and method for measuring device - Google Patents

Abstract

PURPOSE:To enable the building of a measuring system which allows coping with complication of measurement in a device without increasing a function which a tester should have. CONSTITUTION:A performance board 2 has an arithmetic device 13, a memory 14, first and second signal converters 11 and 12 and switches 5 and 6. Common terminals of the switches 5 and 6 are connected to an output end and an input end of a device 1 separately with signal transmission lines 4 and 3. First terminals of the switches 5 and 6 are connected to a measuring unit block 20 of a tester 17 separately with signal transmission lines 7 and 8. Moreover, the second terminals of the switches 5 and 6 are connected to an input end of a first signal converter and an output end of a second signal converter with signal transmission lines 9 and 10. Therefore, a measurement with the tester 17 and a measurement with the arithmetic device 13 are accomplished separately by turning the switches 5 and 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for measuring a device such as a semiconductor device.

[0002]

2. Description of the Related Art FIG. 12 is a block diagram showing a conventional technique for measuring a device. Devices 801a and 801b to be measured such as semiconductor devices are mounted on performance boards 802a and 802, respectively. Both the performance boards 802a and 802b are connected to the tester 817. In general, the performance board is connected to the tester via a means having a buffer function called a test head, but it is omitted in FIG.

The tester 817 includes a measurement unit group 820 and multiplexers 819a and 819b, which are connected to each other by a signal transmission line 821. The multiplexer 819a and the performance board 802a are connected by a signal transmission line 818a, and the multiplexer 819b and the performance board 802b are connected by a signal transmission line 818b.

Generation of signals necessary for measuring the devices 801a and 801b and measurement of signals from the devices 801a and 801b are performed by these signal transmission lines 818a and 818.
b, 821 and the measurement unit group 820. Performance boards 802a, 802b
Includes peripheral circuits necessary for measuring the devices 801a and 801b, such as pull-up resistors.

The multiplexers 819a and 819b appropriately switch the connection between the measurement unit group 820 and the devices 801a and 801b, so that the devices 801a and 801b are connected.
The measurement of 01b is performed using the measurement unit group 820.

[0006]

Since the device measurement has been conventionally performed in the above-described configuration, the functions and precisions of the devices 801a and 801b are increased, and the device 801a and 801b can cope with the increase in complexity. However, there is a problem that the functions that the measurement unit group 820 should have are increased so that the measurement can be performed by the measurement.

[0007] For example, generally, in device measurement, DC signals are evaluated, but analog / digital (hereinafter referred to as "A
/ D ". Similarly, "digital / analog" is referred to as "D / A". ) To measure the conversion function,
In order to measure the conversion accuracy, FFT (Fast Fourier Transform) must be used for the measurement. In order to enable measurement using the measurement unit group 820, the functions that the tester 817 should have become enormous, and it becomes difficult to configure these functions at the microcomputer level.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a technique capable of coping with complicated device measurement without increasing the functions that the tester should have. .

[0009]

[Means for Solving the Problems] Claim 1 of the present invention
(A) a first measuring unit for performing a first measurement on a device to be measured; (b) an intervening device between the first measuring unit and the device; -1) 1st
The first measurement is allowed by connecting the first measurement unit and the device during the period of (b-2) and the first measurement during the second period different from the first period. And a second measurement unit that performs different second measurements on the device.

According to claim 2 of the present invention,
The device for measuring a device according to claim 1, wherein the second
(B-3) outputting test data to be given to the device when performing the second measurement, giving the test data, and inputting the measurement result of the second measurement obtained from the device. In addition, a signal processing unit that evaluates the measurement result is included.

According to claim 3 of the present invention,
The measuring device for a device according to claim 2, wherein the second
(B-4) (b-4-1) a common terminal connected to the device, and (b-4-2) a first terminal connected to the first measurement unit, b-4-3) a second terminal connected to the signal processing unit, and (b-4-3)
4) In the first period, the common terminal is the first
And (b-4-5) the common terminal further includes a switch connected to the second terminal in the second period (b-4-5).

According to claim 4 of the present invention,
The device measuring apparatus according to claim 3, wherein the evaluation is performed by comparing a predetermined expected value with the measurement result. The second measuring unit further includes (b-5) storage means for storing the expected value.

According to claim 5 of the present invention,
The device for measuring a device according to claim 4, wherein the signal processing unit (b-4-1) converts a mode of a signal of the measurement result to obtain a first signal, (B-4
-2) An operation unit that inputs the first signal to perform the evaluation and outputs a second signal; and (b-4-3) converts the aspect of the second signal into the test data. Second to get
And a signal converter of.

According to claim 6 of the present invention,
The device for measuring a device according to claim 5, wherein the mode of the signal of the test data is a serial signal,
Signal converter performs parallel / serial conversion.

According to claim 7 of the present invention,
7. The device measuring apparatus according to claim 6, wherein the signal form of the measurement result is an analog signal, and the first signal converter performs analog / digital conversion.

According to claim 8 of the present invention,
7. The device measuring apparatus according to claim 6, wherein the signal form of the measurement result is a serial signal, and the first signal converter performs serial / analog conversion.

According to claim 9 of the present invention,
The device for measuring a device according to claim 1, wherein the second
A plurality of measuring units are provided, and the first measuring unit is (a-
1) A measurement processing unit which outputs test data to be given to the device when performing the first measurement, inputs the measurement result of the first measurement obtained from the device by giving the test data, and a-2) A switch provided so as to be interposed between the measurement processing unit and each of the second measurement units. Then, when one of the second measurement units corresponding to one of the switches is performing the second measurement, at least one of the other switches is connected to the corresponding second measurement unit. The measurement processing unit is electrically connected.

A tenth aspect of the present invention is a device measuring apparatus, which is connected to a device to be measured, and (a) allows the input / output of the device to pass in a first period, b) Performing a predetermined measurement on the device in a second period different from the first period.

A tenth aspect of the present invention is a device measuring apparatus according to the tenth aspect,
(C) a measuring unit for performing the predetermined measurement, and (d) (d-
1) a common terminal connected to the device, and (d-2)
A first terminal, and (d-3) a second terminal connected to the measuring unit.
And the terminal of. And (d-4) the common terminal is connected to the first terminal in the first period,
(D-5) The common terminal further includes a switch connected to the second terminal in the second period.

According to a twelfth aspect of the present invention, there is provided a measuring device for a device according to the eleventh aspect, wherein the measuring section (c-1) should provide the device when performing the predetermined measurement. A signal processing unit is provided which outputs test data, inputs the measurement result of the predetermined measurement obtained from the device by giving the test data, and evaluates the measurement result.

A thirteenth aspect of the present invention is the device measuring apparatus according to the twelfth aspect, wherein the evaluation is performed by comparing a predetermined expected value with the measurement result. The measuring unit further includes (c-2) storage means for storing the expected value.

According to a fourteenth aspect of the present invention, in the measuring apparatus for the device according to the thirteenth aspect, the signal processing section (c-1-1) converts the mode of the signal of the measurement result. A first signal converter for obtaining a first signal,
(C-1-2) An arithmetic unit that inputs the first signal to perform the evaluation and outputs a second signal;
3) A second signal converter for converting the mode of the second signal to obtain the test data.

According to a fifteenth aspect of the present invention, in the measuring apparatus for the device according to the fourteenth aspect, the mode of the signal of the test data is a serial signal, and the second signal converter is a parallel signal. / Perform serial conversion.

According to a sixteenth aspect of the present invention, in the measuring apparatus for the device according to the fifteenth aspect, the mode of the signal of the measurement result is an analog signal, and the first signal converter is an analog signal. / Performs digital conversion.

According to a seventeenth aspect of the present invention, there is provided the device for measuring a device according to the fifteenth aspect, wherein the mode of the signal of the measurement result is a serial signal, and the first signal converter is a serial signal. / Perform parallel conversion.

A twenty-eighth aspect of the present invention is a device measuring method for performing a first measurement and a second measurement for each of a plurality of devices, wherein the first measurement is a single measurement. The first measurement unit performs the plurality of switches provided corresponding to the device and the plurality of second measurement units provided corresponding to the device, and the second measurement is performed by the first measurement unit. Performed only by the two measuring units,
Mutually exclusive first and second periods are set for each of the second measurement units, and mutually exclusive third and fourth periods are set for each of the switches. And (a) in each of the second measurement units, the second
The measuring section of (1) makes the corresponding device and the first measuring section conductive during the first period,
(B) In each of the second measurement units, the second measurement unit insulates the corresponding device from the first measurement unit in the second period, and (c) each. In the switch, the switch includes the second measurement unit and the first measurement unit, which correspond to the switch, in the third measurement unit.
And (d) in each of the switches, the switch insulates the corresponding second measurement unit and the first measurement unit from each other during the fourth period. Equipped with. Further, in each of the second measuring units and the switches corresponding thereto, the third period is included in the first period.

According to a nineteenth aspect of the present invention, in the method for measuring a device according to the eighteenth aspect, in the second period in the one second measuring section corresponding to the one switch, , The third period in the other switch is included.

According to a twentieth aspect of the present invention, there is provided the device measuring method according to the nineteenth aspect, wherein the second period in the one second measuring section and the other period in the other switch are the same. It starts at the same time as the third period.

[0029]

According to the first aspect of the present invention, the first measurement section is in charge of the first measurement, and the second measurement section is in charge of the second measurement. Therefore, the first measurement section is in charge. It is possible to reduce the functions that should have.

In the second aspect of the present invention, the signal processing section of the second measuring section outputs the test data, inputs the measurement result and evaluates it to perform the second measurement.

According to claim 3 of the present invention, in the first period, the device is connected to the first measuring section, and in the second period, the switch connecting the device to the signal processing section is the second switch. Since the measuring part has, both the first and second measurements of the device are performed via the second measuring part.

In the fourth aspect of the present invention, the expected value is stored in the storage means, and the signal processing section compares it with the expected value.

In the fifth aspect of the present invention, the first signal converter converts the signal form of the measurement result, and the second signal converter converts the signal form of the test data. The signal processing unit can perform the second measurement even if the signal form differs between the measurement result and the test data.

According to the sixth aspect of the present invention, since the second signal converter performs parallel / serial conversion, even if the mode of the signal handled by the arithmetic unit is a parallel signal, the device is A serial signal can be given.

According to a seventh aspect of the present invention, since the first signal converter performs analog / digital conversion, even if the mode of the signal output from the device is an analog signal, the operation section is digital. A signal can be input.

According to claim 8 of the present invention, since the first signal converter performs serial / parallel conversion, even if the mode of the signal output from the device is a serial signal, the operation section is parallel. A signal can be input.

According to a ninth aspect of the present invention, a plurality of second measuring sections are provided, and a switch provided in the first measuring section corresponding to each of the second measuring sections is provided in any of the second measuring sections. It is set whether to perform the first measurement for the measurement unit.

According to the tenth aspect of the present invention, since the input and output of the device are passed in the first period, it is possible to perform other measurement than the predetermined measurement in the first period.

According to claim 11 of the present invention, a switch is provided which permits access to the device other than the measuring device of the device during the first period and connects the device to the measuring section during the second period. Therefore, even when a measurement other than the predetermined measurement is performed, the measurement is performed via the measurement device of the device.

In the twelfth aspect of the present invention, the signal processing section outputs the test data, inputs the measurement result, evaluates and performs a predetermined measurement.

In the thirteenth aspect of the present invention, the expected value is stored in the storage means, and the signal processing section compares it with the expected value.

In the fourteenth aspect of the present invention, the first signal converter converts the signal form of the measurement result and the second signal converter converts the signal form of the test data. Even if the measurement result and the test data have different signal modes, the arithmetic unit can perform a predetermined measurement.

According to the fifteenth aspect of the present invention, since the second signal converter performs parallel / serial conversion, even if the mode of the signal handled by the arithmetic unit is a parallel signal, it can be transmitted to the device. A serial signal can be given.

In the sixteenth aspect of the present invention, since the first signal converter performs analog / digital conversion, even if the mode of the signal output from the device is an analog signal, the arithmetic unit is digital. A signal can be input.

According to the seventeenth aspect of the present invention, since the first signal converter performs serial / parallel conversion, even if the mode of the signal output by the device is a serial signal, the arithmetic unit is parallel. A signal can be input.

In the eighteenth aspect of the present invention, a plurality of second measuring sections are provided, and the switch provided in the first measuring section corresponding to each of the second measuring sections is provided in any of the second measuring sections. It is set whether to perform the first measurement for the measurement unit.

According to a nineteenth aspect of the present invention, a period in which one switch connects the corresponding one second measuring section and the corresponding one measuring section, and another switch applies to this period. The corresponding period in which the second measuring unit and the corresponding other measuring unit are connected does not overlap.

In the twentieth aspect of the present invention, the time when the second measurement is started for one device and the time when the first measurement is started for the other device are made to coincide with each other. .

[0049]

Embodiments of the present invention will be described below with reference to the drawings.

First Embodiment FIG. 1 is a block diagram showing a first embodiment according to the present invention. Tester 1 as the first measuring unit
7 is connected not directly to the device under test 1 but via the performance board 2 which is the second measuring section. The device 1 is mounted on the performance board 2. Although not shown in FIG. 1, the performance board 2 is mounted on a structure called a test head as in the conventional technique. Details are described in Example 7,
The test head is interposed between the tester 17 and the performance board 2. The main mechanical function of the test head is to support the performance board 2, and the main electrical function is to shape the waveform of the signal supplied from the tester 17 to the performance board 2.

The tester 17 comprises a measuring unit group 20 and a CPU
22 is provided. The measurement unit group 20 has a voltmeter, an ammeter, and the like to perform measurement mainly on DC, but it can also have a pulse generator, a function generator, and a logic analyzer to perform possible measurements. The CPU 22 controls the operation of the measurement unit group 20.

On the other hand, the performance board 2 is the arithmetic unit 1
3, memory 14, first and second signal converters 11, 1
2, equipped with switches 5 and 6. The arithmetic unit 13 has an output end of the first signal converter 11 and a second signal converter 12
Are connected to the input terminals of. In addition, the calculator 13
The signal transmission line 15 allows the memory 14 and the tester 17 to operate.
Is also connected to the CPU 22.

The common terminals of the switches 5 and 6 are connected to the output terminal and the input terminal of the device 1 by the signal transmission lines 4 and 3, respectively. The first terminals of the switches 5 and 6 are connected to the measurement unit group 20 of the tester 17 by the signal transmission lines 7 and 8, respectively. Further, the second terminals of the switches 5 and 6 are connected to the input end of the first signal converter and the output end of the second signal converter by signal transmission lines 9 and 10, respectively. Whether the common terminal of the switches 5 and 6 is connected to the first terminal or the second terminal is controlled by the CPU 22 included in the tester 17 via the control line 19.

A power line 16 for supplying power to the device 1 is provided from the tester 17 to the device 1 via the performance board 2.

The operation of the above configuration will be described. First, under the control of the CPU 22 via the control line 19, the common terminals of the switches 5 and 6 are connected to the first terminal side (first period). In this first period, the signal transmission lines 7, 8
Are connected to the output terminal and the input terminal of the device via signal transmission lines 4 and 3, respectively. Therefore, the measurement unit 20
Are connected via these signal transmission lines 3, 4, 7, 8 and switches 5, 6 to perform measurement (first measurement) such as measurement of the potential of each terminal of the device 1 and measurement of leak current. Be done.

Next, by the control of the CPU 22 via the control line 19, the common terminals of the switches 5 and 6 are connected to the second terminal side (second period). In the second period, the signal transmission lines 4 and 3 are connected to the signal transmission lines 9 and 10 via the switches 5 and 6, respectively.

The signal transmission lines 9 and 10 are connected to the input end of the first signal converter 11 and the output end of the second signal converter 12, respectively, and are connected to the output end of the first signal converter 11 and the output end of the first signal converter 11, respectively. Since the input ends of the two signal converters 12 are connected to the arithmetic unit 13, the second measurement can be performed according to the processing performed by the arithmetic unit 13 in the second period. Here, by selecting the second measurement as a measurement different from the first measurement, it is possible to omit the function required for the second measurement in the tester 17, which is the first measurement unit, and The burden can be reduced.

Specifically, the second measurement can be performed by causing the calculator 13 to execute a program. This program is stored in the memory 14. The program is stored in the memory 14 via the signal transmission line 15 in the tester 1
It can be performed using the data given from 7.

Arithmetic unit 1 made according to this program
The output of 3 is converted into test data to be provided to the device 1 in making the second measurement in the second signal converter. By such conversion, the test data can be input to the device 1 (serial or parallel, analog or digital).
Will have.

The test data is applied to the input end of the device 1 via the signal transmission line 10, the switch 6 and the signal transmission line 3 in this order. Correspondingly to this, the device 1 gives a signal (measurement result of the second measurement) to its output end, and passes through the signal transmission line 4, the switch 5, and the signal transmission line 9 in this order to obtain the first signal converter 11 Given to. The first signal converter gives the first signal obtained by converting this into a form that can be processed by the calculator 13, to the calculator 13.

The calculator 13 compares the expected value corresponding to the output (second signal) previously given to the second signal converter 12 with the first signal, and determines the device for the second measurement. evaluate. The expected value can be stored in the memory 14.

As a result of the evaluation, it is determined whether the device 1 is a non-defective product or a defective product, and the data is transmitted to the tester 17 via the signal transmission line 15.

By configuring the device measurement system in this way, when measuring a plurality of types of devices, the measurement items common to them are assigned to the tester 17 as the first measurement, and the measurement unique to each device is performed. Items can be borne by the performance board 2 as a second measurement. Therefore, the tester 17 does not have to be a large one,
It will not be expensive. Of course, it is not necessary to remove the device 1 from the performance board 2 during the first measurement.

Furthermore, since the device 1 is usually mounted on the performance board 2, the signal transmission lines 3 and 4 are very short, and the second measurement is carried out in the performance board 2, the tester 17 receives the second measurement. Compared with the case of burdening the measurement, there is an advantage that the test speed can be increased and the deterioration of the signal can be avoided easily. In this sense, it is desirable that the second measurement is a measurement dealing with a high frequency as compared with the first measurement.

There is no limitation as to what kind of second measurement is specifically, but some examples are given in Examples 2 and 3. However, if the test data necessary for the second measurement and the mode of the signal of the measurement result can be directly handled by the calculator 13, the first and second signal converters are not necessary. FIG. 2 is a block diagram showing a modification in such a case. The signal transmission lines 9 and 10 are directly connected to the calculator 13.

The switches 5 and 6 can be constructed by using mechanical relays or semiconductor relays. Also,
The first and second signal converters are A / D converters and D / D converters.
A converter, level shifter, serial / parallel converter,
A parallel / serial converter, an optical-electrical converter, an electric-optical converter, etc. can also be used.

The memory 14 is a DRAM, SRAM,
EPROM or the like can be used. The stored contents may also include a system program of the arithmetic unit 13 that is read and written when the power is turned on, data that is stored as needed during program execution, and the like.

Example 2 Example 2 is a more specific example of Example 1. FIG. 3 shows a second embodiment according to the present invention.
3 is a block diagram showing the configuration of FIG. Tester 21 of Example 2
7 corresponds to the tester 17 of the first embodiment, and includes a measurement unit group 220 and a CPU 222. These correspond to the measurement unit group 20 and the CPU 22 of the first embodiment, respectively, and the CPU 222 controls the operation of the measurement unit group 220 as in the first embodiment.

The tester 217 is a device under test D /
It is not directly connected to the A converter 201, but is connected via the performance board 202 which is the second measurement unit. D
The A / A converter 201 and the performance board 202 correspond to the device 1 and the performance board 2 of the first embodiment, respectively. The second embodiment exemplifies a case where the performance board 202 evaluates the accuracy of the D / A converter as the second measurement.

On the performance board 202, switches 205 and 206 corresponding to the switches 5 and 6, the first signal converter 11 and the second signal converter 12, and the arithmetic unit 13 of the first embodiment, and A / D conversion, respectively. A device 211, a parallel / serial converter 212, and a floating point arithmetic unit 213 are provided. These are connected in the same manner as in the first embodiment by signal transmission lines 209 and 210 provided corresponding to the signal transmission lines 9 and 10 of the first embodiment, respectively.

A memory 214 is provided corresponding to the memory 14 of the first embodiment, and is connected to the CPU 222 and the floating point arithmetic unit 213 of the tester 217 by the signal transmission line 215. In addition, the control line 219 corresponding to the control line 19 of the first embodiment causes the CPU 222 to switch the switch 20.
The operation of 5,206 is controlled. Switches 205, 20
Similar to the first embodiment, the first terminal 6 is connected to the measurement unit group 220 by signal transmission lines 207 and 208, respectively.

Power is supplied to the D / A converter 201 from the tester 217 by the power supply line 216, the input terminal thereof is switched by the signal transmission line 203 to the common terminal of the switch 206, and the output terminal thereof is switched by the signal transmission line 204. Two
05 common terminals are connected to each other.

Similar to the first embodiment, the switches 205 and 206 connect the measurement unit group 220 of the tester 217 and the input terminal and the output terminal of the D / A converter 201 during the first period. Then, the measurement unit group 220 performs a first measurement such as a potential measurement and a leak measurement.

On the other hand, in the second period, the second measurement is performed inside the performance board 202. Here, a case will be described in which the accuracy of the D / A converter 201, which is the device under measurement, is evaluated using FFT as the second measurement. The reason why the accuracy of the D / A converter 201 is evaluated by FFT will be described later.

Under the control of the CPU 222 via the control line 219, the switches 206 and 205 are connected to the signal transmission line 210 and the signal transmission line 210 at the input and output ends of the D / A converter 201, respectively.
209 is connected. As a result, the output of the parallel / serial converter 212 is given to the input terminal of the D / A converter 201, and the output of the D / A converter 201 is given to the input terminal of the A / D converter 211.

On the other hand, according to the program used for the FFT from the memory 214, the floating point arithmetic unit 213 causes the parallel / serial converter 212 to output a second signal, for example, 1 k.
Data of sine wave of Hz is given. Such a test program is used by the tester 21 via the signal transmission line 215.
7 to memory 214.

The data output from the floating point arithmetic unit 213 is a parallel signal, which is converted into a serial signal by the parallel / serial converter 212. By providing the parallel / serial converter 212 in this way, the mode of the signal handled by the floating point arithmetic unit 213 is a parallel signal, and the D / A converter 2 that is the device under test is used.
Even if the mode of the signal to be input to 01 is a serial signal, the second measurement can be executed.

The switch 206 and the signal transmission line 203,
1 kHz sine wave data is input to the D / A converter 201 via 210. The D / A converter 201 converts this data into an analog signal and outputs it as the measurement result of the second measurement. This measurement result is the signal transmission lines 204, 20.
9 and switch 205, and is given to the input terminal of A / D converter 211. The A / D converter 211 is the D / A converter 2
A digital signal corresponding to the output level of 01 is given to the floating point arithmetic unit 213. In this way, the A / D converter 21
By providing 1, the mode of the signal handled by the floating point arithmetic unit 213 is a digital signal, and the mode of the signal output from the D / A converter 201, which is the device under measurement, is an analog signal. Execution becomes possible.

The floating point arithmetic unit 213 is the A / D converter 2
The output of 11 is input as the first signal. Then, FFT processing is performed on this digital signal. Since the data applied to the D / A converter 201 is 1 kHz sine wave data, if the accuracy of the D / A converter 201 is low, the sine wave will be distorted. And this distortion is caused by frequency components other than 1 kHz. Therefore, the greater the frequency components other than 1 kHz detected by the FFT process, the more D
This means that the accuracy of the / A converter 201 is low. That is, the frequency component at the output of the A / D converter 211 is 1 kHz.
The accuracy of the D / A converter 201 can be evaluated by obtaining the S / N ratio for the floating point arithmetic unit 213. Therefore, the evaluation of the D / A converter 201 is F
The measurement using FT is performed.

For example, the judgment standard regarding the S / N ratio is stored in the memory 214, and this is stored in the floating point arithmetic unit 213.
Then, it is determined whether or not the measurement result of the second measurement satisfies this, and it is transmitted to the tester 217 via the signal transmission line 215.

As described above, in the second embodiment, the tester 217 is used.
Since it is not necessary to use an expensive large-scale general-purpose tester having an FFT calculation function, and it is not necessary to send the input / output signal of the D / A converter 201 from the tester 217, the signal is transmitted within the performance board 202. , High speed D
There is an advantage that the A / A converter can be easily dealt with.

The present invention is similar to the present embodiment.
Naturally, it can be applied to the measurement and evaluation of the / D converter.

Example 3 Example 3 also shows Example 1 more specifically. FIG. 4 shows a third embodiment according to the present invention.
3 is a block diagram showing the configuration of FIG. In the third embodiment, the device under test is the scan-designed device 301.
Is. In the third embodiment, the tester 217, the power supply line 216, the control line 219, the switches 205 and 206 in the second embodiment,
Signal transmission lines 203, 204, 207, 208, 20
9, 210, 215, memory 214, floating point arithmetic unit 213, A / D converter 211 and parallel / serial converter 212 are connected to a tester 317, a power supply line 316,
Control line 319, switches 305, 306, signal transmission lines 303, 304, 307, 308, 309, 310, 3
15, the memory 314, the MCU (micro control unit) 313, the serial / parallel converter 311 and the parallel / serial converter 312 are replaced. The tester 317 is a measurement unit group 320 and a CPU
322, which correspond to the measurement unit group 220 and the CPU 222 in the second embodiment, respectively, but the measurement unit group 320 is connected to the scan-designed device 301 by the measurement line 340. Measuring line 3
Unlike the signal transmission lines 307 and 308, 40 is directly connected to the scan-designed device 301 without passing through the switches 305 and 306.

Similar to the first and second embodiments, the switches 305 and 306 connect the scan-designed device 301 to the tester 317 in the first period, and the first measurement such as potential measurement or leak measurement is performed by the tester 317. Done by At this time, not only the first measurement is performed using the measurement line 340, but also the first measurement is performed at the scan input end and the scan output end to which the measurement line 340 is not connected.

In the second measurement, similarly to the first and second embodiments, the switches 306 and 305 transmit signals to the scan input terminal and the scan output terminal of the scan-designed device 301 through the signal transmission lines 303 and 304, respectively. The lines 310 and 309 are connected. As a result, the output of the parallel / serial converter 312 is given to the scan input terminal of the scan-designed device 301,
The output of the scan-designed device 301 is given to the input terminal of the serial / parallel converter 309.

The MCU 313 scans the device 30 according to the program loaded from the tester 317 to the memory 314 via the signal transmission line 315.
Input the scan data in 1. In the case of the present embodiment, this program is a scan test program, and the scan output which is the serial signal of the scan-designed device 301 is checked to make a determination. This result is transmitted to the tester 317 via the signal transmission line 315.

Note that the measurement via the measurement line 340 is not performed during the second measurement. Such control is possible by controlling the measurement unit group 320 by the CPU 322.

Since this embodiment has the above-mentioned configuration,
The tester 317 has an advantage that an expensive large-scale general-purpose tester capable of scanning is not used.

Fourth Embodiment: FIG. 5 is a block diagram showing the structure of a fourth embodiment of the present invention. In the fourth embodiment, the tester 17, power supply line 16, control line 19, switch 5,
6, signal transmission lines 3, 4, 7, 8, 9, 10, memory 1
4, arithmetic unit 13, first and second signal converters 11, 12
, A tester 417, a power supply line 416, and a control line 41, respectively.
9, switches 405, 406, signal transmission lines 403, 4
04, 407, 408, 409, 410, memory 41
4, arithmetic unit 413, first and second signal converters 411,
412 has been replaced. However, the signal transmission line 15 in the first embodiment is replaced with the two signal transmission lines 415 and 416 in the fourth embodiment. Example 4
In the figure, the inside of the tester 417 is omitted for simplicity.

The signal transmission line 415 connects the arithmetic unit 413 and the tester 417 and is used for transmitting the evaluation result of the device 401 and the like. On the other hand, the signal transmission line 416 is used to connect the arithmetic unit 413 and the memory 414, and the expected value and the program are exchanged using this. That is, in the fourth embodiment, unlike the first embodiment, the memory 414 and the tester 417 are not directly connected. The test program and data are not sent from the tester 417, and are written in the memory 414 so as not to be erased.

In the fourth embodiment, since the measurement system is configured as described above, it is not necessary to transfer the data from the tester 417 to the memory on the performance board 402, the test time is shortened, and the test for operating the tester 417 is reduced. The advantage is that the program is simpler.

Fifth Embodiment: FIG. 6 is a block diagram showing the structure of a fifth embodiment of the present invention. The tester 617 corresponds to the tester 17 of the first embodiment, and has a measurement unit group 620 corresponding to the measurement unit group 20 therein. Further, the tester 617 has multiplexers 619a to 619d, each of which is connected to the measurement unit group 620 by a signal transmission line 621. On the other hand, the performance boards 602a to 602d are the signal transmission lines 6
18a to 618d, the multiplexer 6
19a to 619d. The tester 617 further includes a CPU 622, which is a measuring unit 62.
0 and the operations of the multiplexers 619a to 619d are controlled. The performance boards 602a to 602d are connected to the CPU 622 by the signal transmission line 615.

Here, the performance boards 602a-6
02d all have the same function as the performance board 2 described in the first embodiment, and the signal transmission lines 618a to 618 are provided via test heads (not shown).
It is connected to 8d. Although not shown, each device under test is mounted on each of the performance boards 602a to 602d. The power supply line connected to the device under test via each performance board is omitted in order to avoid complexity of the drawing.

By selecting the signal transmission line connected to the signal transmission line 621 by the multiplexers 619a to 619d, the performance boards 602a to 602 are selected.
It is possible to set which of the devices under measurement of d is to be measured by the measurement unit group 620.

Then, while one performance board (for example, 602a) is performing the second measurement (that is, the second period for the performance board 602a), another performance board (for example, 602b) is used for the first measurement. Is possible. Therefore, it is possible to efficiently and quickly measure a plurality of devices under measurement. In other words, the second for a certain performance board
By providing the first period for the other at least one performance board in the period, the efficient measurement becomes possible.

Example 6 Example 6 describes a more specific and desirable operation of the measurement system constructed according to Example 5.

FIG. 7 is a timing chart for explaining the sixth embodiment of the present invention, and only the performance boards 602a and 602b and the corresponding multiplexers 619a and 619b are shown for simplification.

[0098] The multiplexer 619a thereof third period _{(t 10 ~t 11, t 17} ~t 18) in the signal transmission line 62
1, 618a are electrically connected to each other. Then, in the fourth period (time t ₁₁ to t ₁₇ , t ₁₈ ...), the signal transmission line 6
21 and 618a are not conducted. Multiplexer 619
Similarly for b, the third period (t _{14 to} t ₁₅ , t
₂₀ ~) is connected to each other signal transmission lines 621,618a in, it does not conduct in its fourth period _{(~t 14, t 15 ~t 20} ).

On the other hand, in the performance board 602a connected to the signal transmission line 618a corresponding to the multiplexer 619a, the built-in switches (not shown but corresponding to the switches 5 and 6 in the first embodiment) are
In its first period _{(t 9 ~t 12, t 16} ~t 18),
A device under test (hereinafter referred to as "DUT (device under test)) 601a (not shown) mounted on the performance board 602a and a signal transmission line 618a.
To conduct. On the other hand, the second period (t _{12 to} t ₁₆ , t
Not conduct in ₁₈ ~). In performance board 602b connected to the corresponding multiplexer 619b to the signal transmission line 618b in a similar manner, the switch (not shown) to the built-in, its first period (t ₁₃ ~t
_16, t in ₁₉ ~), the performance board 602b
The DUT 601b (not shown) mounted on the board is electrically connected to the signal transmission line 618b. On the other hand, the second period (~
t _13, t ₁₆ ~t ₁₉₎ does not conduct in.

The third period (t _{10 to} t ₁₁ , t _{17 to} t ₁₈ ) in which the multiplexer 619a is in the conductive state is the first period (t ₉ of the performance board 602a corresponding thereto).
~t _12, t ₁₆ are included in ~t _18). By setting each period in this way, the first for the DUT 601a
(Measurement by the measurement unit group 620, for example, leak measurement) can be performed. Similarly, the multiplexer 6
19b is the third period in the conductive state (t ₁₄ ~t _15, t ₂₀
~) Is the performance board 602b corresponding to this.
Is included in the first period (t ₁₃ to t ₁₆ , t ₁₉ ). Therefore, the first measurement for the DUT 601b becomes possible.

On the other hand, the second period (t) of the performance board 602a in which the second measurement (specific measurement performed by the performance board 602a, for example, S / N measurement using FFT according to the second embodiment) for the DUT 601a is executed.
In ₁₂ ~t _16, t ₁₈ ~) in the multiplexer 619
third period b is conducting _{(t 14 ~t 15, t 20} ~)
Is set. That is, while the second measurement is being performed on the DUT 601a, the first measurement on the DUT 601b is performed.
Can be measured. Therefore, by setting each period in this way with respect to the configuration of the fifth embodiment, it is possible to quickly measure the device.

[0102] Note that the first period of the performance board _{602a (t 9 ~t 12, t} 16 ~t 18), the behavior of the switch and its second period _{(t 12 ~t 16, t 18} ~) Due to this, it is set exclusively. Therefore, the multiplexer 619
a during the third period (t _{10 to} t ₁₁ , t _{17 to} t ₁₈ ) and the third period during which the multiplexer 619b is in the conducting state (t _{14 to} t ₁₈ ).
_15, t ₂₀ ~) and there is no overlap. Therefore, when two DUTs are measured, the first measurement will not be confused.

FIG. 8 is a timing chart in the case where two DUTs can be measured while another DUT is being measured. However, the DUTs mounted on the performance boards 602c and 602d are described as 601c and 601d, respectively.

First, at time t ₀ , the period 1a starts. In the period 1a, the first measurement is performed by the measurement unit group 620 on the DUT 601a. Subsequently, the period 1a ends at time t ₁ , and the performance board 602a does not correspond to the DUT 601a in the period 2a.
Makes a second measurement. That is, at the time t ₁ , the switch in the performance board 602a (Example 1)
(Corresponding to the switches 5 and 6).

At the same time that this period 2a starts, the period 1b
Will start. In the period 1b, the first measurement is performed on the DUT 601b by the measurement unit group 620. That is, the switch switching timing on the performance board 602a and the multiplexer 619
The timing at which a becomes non-conductive and the multiplexer 6
The timing at which 19b enters the conducting state matches at time t ₁ . Such control is performed by the CPU 622 of the tester 617, as can be seen from the above description.

Period 1b is half of period 2a, and period 1b
At the same time when b ends at time t ₂ , the period 1c starts. In the period 1c, the first measurement is performed on the DUT 601c by the measurement unit group 620. That is, the timing at which the multiplexer 619b is turned off and the timing at which the multiplexer 619c is turned on match at time t ₂ .

The period 1c is half of the period 2a, and the time t
_{In 3} the period 1c ends and the period 2a ends at the same time. At the same time, the period 1d starts and the DUT 601
The first measurement is performed on the d by the measurement unit group 620. That is, the switching timing of the switch on the performance board 602a and the multiplexer 6
The timing at which 19b becomes non-conductive and the timing at which multiplexer 619c becomes conductive match at time t ₃ .

In this way, in the period 2a during which the performance board 602a performs the second measurement on the DUT 601a, two DUTs 601 are generated.
The first measurement for b and 601c is performed, and quick measurement is possible.

After the end of the period 2a, that is, the time t ₃ at the end of the period 1c and the start of the period 1d, the DUT 60
1a is exchanged. Already the first measurement as well as the second
Since the measurement of was completed, it is replaced with another device. The period required for this is indicated by period 3a.
Period 3a are of equal duration 1d and length, both time t ₄
Ends in. On the other hand, at time t ₄ , period 2b
Also ends. The period 2b is a period during which the second measurement is performed on the DUT 602b, and two DUTs are measured during this period.
The first measurement is performed on 601c and 601d, which enables quick measurement.

The above operation is repeated after the time t ₄ while the device is replaced. Period 3b, 3c, 3d
Is a period in which the DUTs 601b, 601c, and 601d are exchanged, and the periods 2c and 2d are in the DUT 6 respectively.
This is a period during which the second measurement is performed on 01c and 601d. Also, the periods 11a, 12a, 13a, 11b, 12
b, 11c, 12c and 11d are periods 1a and 2 respectively.
It corresponds to a, 3a, 1b, 2b, 1c, 2c, 1d, and is the period set for the device after replacement.
And the times t ₄ , t ₅ , t ₆ , t ₇ , and t ₈ are respectively t
It corresponds to ₁ , t ₂ , t ₃ , and t ₄ .

When the period is set as described above, 1
Since three DUTs can be simultaneously measured by the tester 617 of one stand and one DUT can be replaced at the same time, there is an effect that the measurement of a plurality of devices under test can be performed quickly.

Seventh Embodiment: FIG. 9 is a sectional view showing a seventh embodiment. The device under test 701 is placed on the socket 725, and the socket 725 is provided on the performance board 702. And the performance board 702
It is fixed on the test head 721.

The cable 724 is a tester 7 (not shown).
17 is connected to the test head 721, and includes the signal transmission lines 7, 8, 15 shown in FIG. 1, the power supply line 16 and the control line 19. On the other hand, performance board 70
2 and the test head 721 are the pogo pin 7
It is electrically connected by 22. Therefore, the performance board 702 is connected to the tester 717.

The performance board 702 is provided with a device 723 for measurement, which is the arithmetic unit 13, the memory 14, the first and second signal conversion circuits 1 shown in FIG.
1, 12 and the switches 5 and 6 are built in one chip.

FIG. 10 is a plan view showing the structure of the performance board 702. Pad 702a is pogo pin 7
22 is contacted. Then, the device 723 for measurement is provided in the region 702b, and the socket 725 is provided on the back side thereof.

FIG. 11 is a schematic diagram showing a test head 721 and a tester 717 connected to the test head 721 by a cable 724. A performance board 702 fixed on the test head 721 for the sake of clarity.
Is omitted.

The tester 717 is equipped with a measurement unit group 720 and a CPU 722, which are each of the first embodiment.
Tester 17, measurement unit group 20 and CPU 2 in
Corresponds to 2. The measurement unit group 720 has a plurality of pin electronics cards 720a, which are connected to the test head 721 by a signal transmission line 724 together with the CPU 722. In the test head 721, the buffer 721a connected by the signal transmission line 724 is provided corresponding to the pin electronics card 720a, and the pogo pin 722 is the buffer 7.
21a is provided corresponding to and is connected to these.

As described above, in the seventh embodiment, the arithmetic unit 13, the memory 14, the first and second signal conversion circuits 11 and 12 and the switches 5 and 6 described in the first embodiment are built in the measuring device 723. Since it is made into one chip, the signal transmission lines 3, 4, 9 and 10 can be shortened, and higher speed and highly accurate measurement becomes possible.

[0119]

In the measuring apparatus for a device according to claim 1 of the present invention, the function that the first measuring section should have can be reduced, so that the configuration of the first measuring section is increased. Can be suppressed.

In the device measuring apparatus according to the second aspect of the present invention, the signal processing unit can perform the second measurement.

In the measuring device for a device according to claim 3 of the present invention, both the first and second measurements are performed via the second measuring section, so that the first measurement is also performed. The first measurement can be easily performed without removing the device from the second measurement unit.

In the measuring device for a device according to claim 4 of the present invention, the signal processing section compares the expected value, so that the measurement result is evaluated so that the second result is obtained.
Is measured.

In the measuring device of the device according to the fifth aspect of the present invention, the signal processing unit can perform the second measurement even if the signal form differs between the measurement result and the test data. Of the signals handled by the department,
Even if the aspect of the signal handled by the device is different, the second
Can be measured. Also, if the device has the ability to translate aspects of the signal, it can be tested as a second measurement.

In the device measuring apparatus according to claim 6 of the present invention, since the serial signal can be given to the device even if the signal handled by the arithmetic unit is a parallel signal, the device handling is performed. The second measurement can be performed even if the mode of the signal is a serial signal.

In the device measuring apparatus according to claim 7 of the present invention, even if the signal output from the device is an analog signal, the arithmetic unit can input a digital signal. / Even if it has a function of performing analog conversion, the test of the function can be performed as the second measurement.

In the device measuring apparatus according to claim 8 of the present invention, even if the mode of the signal output by the device is a serial signal, the arithmetic unit can input a parallel signal, so the device handles it. Even if the mode of the signal is a serial signal and the mode of the signal handled by the arithmetic unit is a parallel signal, the second measurement can be performed.

In the measuring apparatus for a device according to claim 9 of the present invention, while one second measuring section is performing the second measurement for the corresponding device, the other second measuring section is used. The measurement unit of the first
Can be performed, and multiple devices can be quickly measured.

In the device measuring apparatus according to the tenth aspect of the present invention, since the measurement other than the predetermined measurement can be performed in the first period, the tester is in charge of the other measurement. It is possible to take charge of a predetermined measurement in the second period.

In the device measuring apparatus according to claim 11 of the present invention, since the device is accessed through the measuring apparatus of the device in the first period, the measuring unit performs the predetermined operation in the first period. It is not necessary to move the device when performing a measurement other than the above measurement, and a plurality of types of measurement can be easily performed.

In the device measuring apparatus according to the twelfth aspect of the present invention, the signal processing section can perform a predetermined measurement.

In the measuring apparatus for a device according to claim 13 of the present invention, since the signal processing section compares with the expected value, the predetermined measurement is performed by evaluating the measurement result.

In the measuring apparatus for a device according to claim 14 of the present invention, the signal processing section can perform a predetermined measurement even if the signal form differs between the measurement result and the test data. Even if the aspect of the signal handled by the device and the aspect of the signal handled by the device are different, the predetermined measurement can be performed. Also, if the device has the ability to transform aspects of the signal, it can be tested as a given measurement.

In the device measuring apparatus according to the fifteenth aspect of the present invention, since the serial signal can be given to the device even if the mode of the signal handled by the arithmetic unit is the parallel signal, the device handling is performed. Predetermined measurement can be performed even if the mode of the signal is a serial signal.

According to the sixteenth aspect of the present invention, in the measuring device for a device, even if the signal output by the device is an analog signal, the arithmetic unit can input a digital signal. /
Even if it has a function of performing analog conversion, the test of the function can be performed as a predetermined measurement.

In the measuring apparatus for a device according to claim 17 of the present invention, even if the mode of the signal output by the device is a serial signal, the arithmetic unit can input a parallel signal, so the device handles it. Even if the mode of the signal is a serial signal and the mode of the signal handled by the arithmetic unit is a parallel signal, a predetermined measurement can be performed.

According to the eighteenth aspect of the present invention, in the device measuring method according to the eighteenth aspect, while one second measuring section is performing the second measurement on the corresponding device,
The other second measurement unit can perform the first measurement on the corresponding device, and can quickly measure the plurality of devices.

In the method for measuring a device according to claim 19 of the present invention, the third period does not overlap in one switch and another switch, and therefore the first measurement is appropriate for different devices. Can be run to.

In the device measuring method according to claim 20 of the present invention, the first method for different devices is provided.
Since it is possible to continuously perform the measurement of, the measurement of a plurality of devices can be performed quickly.

Therefore, according to the present invention, complicated measurement can be performed with an inexpensive tester. In addition, high-speed and high-precision tests can be easily realized.

[Brief description of drawings]

FIG. 1 is a block diagram showing a first embodiment of the present invention.

FIG. 2 is a block diagram showing a first embodiment of the present invention.

FIG. 3 is a block diagram showing a second embodiment of the present invention.

FIG. 4 is a block diagram showing a third embodiment of the present invention.

FIG. 5 is a block diagram showing a fourth embodiment of the present invention.

FIG. 6 is a block diagram showing a fifth embodiment of the present invention.

FIG. 7 is a timing chart illustrating a sixth embodiment of the present invention.

FIG. 8 is a timing chart illustrating a sixth embodiment of the present invention.

FIG. 9 is a sectional view showing Embodiment 7 of the present invention.

FIG. 10 is a plan view showing Embodiment 7 of the present invention.

FIG. 11 is a schematic diagram showing Embodiment 7 of the present invention.

FIG. 12 is a block diagram showing a conventional technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Device under test 2 Performance board (2nd measurement part) 4 Memory (storage means) 5, 6 switch 11 1st signal converter 12 2nd signal converter 13 Arithmetic unit (arithmetic part) 17 Tester (1st Measurement unit) 201 D / A converter (device) 205, 206 switch 211 A / D converter (first signal converter) 212 parallel / serial converter (second signal converter) 214 memory (storage means) ) 213 floating-point arithmetic unit 213 (arithmetic unit) 217 tester (first measurement unit) 301 scan-designed device 305, 306 switch 311 serial / parallel converter (first signal converter) 312 parallel / serial converter (Second signal converter) 313 MCU (micro control unit) (arithmetic unit) 314 Memory (storage means 317 Tester (first measurement unit) 405, 406 switch 411 First signal converter 412 Second signal converter 413 Operation unit (operation unit) 414 Memory (storage unit) 417 Tester (first measurement unit) 602a , 602b, 602c, 602d Performance board (second measuring section) 619a, 619b, 619c, 619d Multiplexer (switch) 620 Measuring unit group (measurement processing section)

[Procedure amendment]

[Submission date] August 29, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 11

[Correction method] Change

[Correction content]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0019

[Correction method] Change

[Correction content]

A tenth aspect of the present invention is a device measuring apparatus according to the tenth aspect,
(C) a measuring unit for performing the predetermined measurement, and (d) (d-
1) a common terminal connected to the device, and (d-2)
A first terminal, and (d-3) a second terminal connected to the measuring unit.
And the terminal of. And (d-4) the common terminal is connected to the first terminal in the first period,
The common terminal in (d-5) the second period of time obtaining Bei a switch connected to the second terminal.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0089

[Correction method] Change

[Correction content]

Fourth Embodiment: FIG. 5 is a block diagram showing the structure of a fourth embodiment of the present invention. In the fourth embodiment, the tester 17, power supply line 16, control line 19, switch 5,
6, signal transmission lines 3, 4, 7, 8, 9, 10, memory 1
4, arithmetic unit 13, first and second signal converters 11, 12
And each tester 417, the power supply line 416 a, the control line 4
19, switches 405 and 406, signal transmission line 403,
404, 407, 408, 409, 410, memory 41
4, arithmetic unit 413, first and second signal converters 411,
412 has been replaced. However, the signal transmission line 15 in the first embodiment is replaced by two signal transmission lines 415 and 416 b in Example 4. In the fourth embodiment, the inside of the tester 417 is omitted for simplicity.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0090

[Correction method] Change

[Correction content]

The signal transmission line 415 connects the arithmetic unit 413 and the tester 417 and is used for transmitting the evaluation result of the device 401 and the like. On the other hand, the signal transmission line 416 b is an arithmetic unit 413, used in connection with the memory 414, transfer of the expected value and program using this occurs. That is,
In the fourth embodiment, unlike the first embodiment, the memory 414
And the tester 417 are not directly connected. The test program and data are not sent from the tester 417, and are written in the memory 414 so as not to be erased.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0098

[Correction method] Change

[Correction content]

[0098] The multiplexer 619a thereof third period _{(t 10 ~t 11, t 17} ~t 18) in the signal transmission line 62
1, 618a are electrically connected to each other. Then, in the fourth period (time t ₁₁ to t ₁₇ , t ₁₈ ...), the signal transmission line 6
21 and 618a are not conducted. Multiplexer 619
Similarly for b, the third period (t _{14 to} t ₁₅ , t
₂₀ ~) is connected to each other signal transmission lines 621,618 b in, it does not conduct in its fourth period _{(~t 14, t 15 ~t 20} ).

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0099

[Correction method] Change

[Correction content]

On the other hand, in the performance board 602a connected to the signal transmission line 618a corresponding to the multiplexer 619a, the built-in switches (not shown but corresponding to the switches 5 and 6 in the first embodiment) are
In its first period _{(t 9 ~t 12, t 16} ~t 18),
Device under test mounted on performance board 602a (hereinafter referred to as "DUT (device under test) " )
601a (not shown) and signal transmission line 618
Conduct a. On the other hand, the second period (t _{12 to} t ₁₆ , t ₁₈
~) Do not conduct. In performance board 602b connected to the corresponding multiplexer 619b to the signal transmission line 618b in a similar manner, the switch to its internal (not shown), the first period (t ₁₃ ~
In t _16, t ₁₉ ~), the performance board 602
The DUT 601b (not shown) mounted on the device b is electrically connected to the signal transmission line 618b. On the other hand, the second period (~ t
_13, t ₁₆ ~t ₁₉₎ does not conduct in.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0103

[Correction method] Change

[Correction content]

FIG. 8 is a timing chart when two DUT first measurements can be performed while another DUT is second measurement. However, the DU mounted on the performance boards 602c and 602d
T is described as 601c and 601d, respectively.

[Procedure Amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0110

[Correction method] Change

[Correction content]

The above operation is repeated after the time t ₄ while the device is replaced. Period 3b, 3c, 3d
Is a period in which the DUTs 601b, 601c, and 601d are exchanged, and the periods 2c and 2d are in the DUT 6 respectively.
This is a period during which the second measurement is performed on 01c and 601d. Also, the periods 11a, 12a, 13a, 11b, 12
b, 11c, 12c and 11d are periods 1a and 2 respectively.
It corresponds to a, 3a, 1b, 2b, 1c, 2c, 1d, and is the period set for the device after replacement.
And the times t ₄ , t ₅ , t ₆ , t ₇ , and t ₈ are respectively t
₀ , T ₁ , t ₂ , t ₃ , t ₄ .

[Procedure Amendment 9]

[Document name to be amended] Statement

[Name of item to be corrected] 0113

[Correction method] Change

[Correction content]

The cable 724 is a tester 7 (not shown).
17 is connected to the test head 721, and includes the signal transmission lines 7, 8, 15 shown in FIG. 1, the power supply line 16 and the control line 19. On the other hand, performance board 70
2 and the test head 721 are the pogo pin 7
22a electrically connects. Therefore, the performance board 702 is connected to the tester 717.

[Procedure Amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0115

[Correction method] Change

[Correction content]

FIG. 10 is a plan view showing the structure of the performance board 702. Pad 702a is pogo pin 7
22 a . Then, the device 723 for measurement is provided in the region 702b, and the socket 725 is provided on the back side thereof.

[Procedure Amendment 11]

[Document name to be amended] Statement

[Correction target item name] 0117

[Correction method] Change

[Correction content]

[0117] The tester 717 includes a measuring unit group 720 and CPU722 b, tester 17 in each of these Examples 1, measurement unit group 20 and the CPU
It corresponds to 22. Measurement unit group 720 has a plurality of pin electronics cards 720a, which are connected to the test head 721 by signal transmission line 724 with CPU722 b. Test head 72
1, the buffer 721a connected by the signal transmission line 724 is connected to the pin electronics card 720.
A pogo pin 722 a is provided corresponding to a and a buffer 721 a is provided corresponding to the buffer 721 a.

[Procedure Amendment 12]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 5

[Correction method] Change

[Correction content]

[Figure 5]

[Procedure Amendment 13]

[Document name to be corrected] Drawing

[Correction target item name] Figure 9

[Correction method] Change

[Correction content]

[Figure 9]

[Procedure Amendment 14]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 11

[Correction method] Change

[Correction content]

FIG. 11

Claims (20)

[Claims] 1. (a) a first measuring unit for performing a first measurement on a device to be measured; (b) being interposed between the first measuring unit and the device; -1) Connecting the first measurement unit and the device during the first period to allow the first measurement, (b
-2) In a second period different from the first period,
A device measuring apparatus, comprising: a second measuring unit that performs a second measurement different from the first measurement on the device. 2. The second measuring section outputs (b-3) test data to be given to the device when performing the second measurement, and gives the test data to obtain the test data. The device measuring apparatus according to claim 1, further comprising a signal processing unit that inputs a measurement result of the second measurement and evaluates the measurement result. 3. The second measuring section comprises: (b-4) (b-4-1) a common terminal connected to the device; and (b-4-2) connecting to the first measuring section. A second terminal connected to the signal processing unit, and (b-4-4) the common terminal in the first period, A switch connected to the first terminal, and (b-4-5) the common terminal further includes a switch connected to the second terminal in the second period.
The device for measuring a device according to claim 2. 4. The evaluation is performed by comparing a predetermined expected value with the measurement result, and the second measurement unit further includes (b-5) a storage unit that stores the expected value. The measuring device of the device according to 3. 5. The signal processing unit comprises: (b-3-1) a first signal converter that obtains a first signal by converting the signal form of the measurement result; and (b-3-2). An arithmetic unit that inputs the first signal to perform the evaluation and outputs a second signal; and (b-3-3) obtains the test data by converting the aspect of the second signal. The device for measuring a device according to claim 4, further comprising two signal converters. 6. The device measuring apparatus according to claim 5, wherein the mode of the signal of the test data is a serial signal, and the second signal converter performs parallel / serial conversion. 7. The device measuring apparatus according to claim 6, wherein the mode of the signal of the measurement result is an analog signal, and the first signal converter performs analog / digital conversion. 8. The device measuring apparatus according to claim 6, wherein the mode of the signal of the measurement result is a serial signal, and the first signal converter performs serial / parallel conversion. 9. A plurality of the second measurement units are provided, and the first measurement unit outputs (a-1) test data to be given to the device when performing the first measurement,
A measurement processing unit which gives the test data and inputs the measurement result of the first measurement obtained from the device;
(A-2) a switch provided by being inserted between each of the measurement processing unit and each of the second measurement units, wherein one second measurement unit corresponding to one switch is ,
The device measuring apparatus according to claim 1, wherein at least one of the other switches electrically connects the corresponding second measurement unit and the measurement processing unit to each other when performing the second measurement. 10. Connected to a device to be measured, (a) passing the input and output of the device in a first period, and (b) performing a predetermined measurement in a second period different from the first period. A device measuring apparatus for performing the above-mentioned device. 11. (c) a measuring unit for performing the predetermined measurement; (d) (d-1) a common terminal connected to the device; (d-2) a first terminal; and (d- 3) A second terminal connected to the measuring unit, and (d-4) the first terminal.
The switch further comprises: (d-5) the common terminal connected to the first terminal during the period, and (d-5) the common terminal connected to the second terminal during the second period. 10. The measuring device of the device according to 10. 12. The measuring section outputs (c-1) test data to be given to the device when performing the predetermined measurement, and gives the test data to obtain the predetermined measurement of the device. The device measuring apparatus according to claim 11, further comprising a signal processing unit that inputs a measurement result and evaluates the measurement result. 13. The method according to claim 12, wherein the evaluation is performed by comparing a predetermined expected value with the measurement result, and the measuring unit further includes (c-2) a storage unit that stores the expected value. Device measuring equipment. 14. The signal processing unit comprises: (c-1-1) a first signal converter that obtains a first signal by converting a signal aspect of the measurement result; and (c-1-2). An arithmetic unit for inputting the first signal to perform the evaluation and outputting a second signal; and (c-1-3) converting the aspect of the second signal to obtain the test data. 14. The device measuring apparatus according to claim 13, further comprising two signal converters. 15. The device measuring apparatus according to claim 14, wherein a mode of the signal of the test data is a serial signal, and the second signal converter performs parallel / serial conversion. 16. The device measuring apparatus according to claim 15, wherein the signal form of the measurement result is an analog signal, and the first signal converter performs analog / digital conversion. 17. The device measuring apparatus according to claim 15, wherein the signal form of the measurement result is a serial signal, and the first signal converter performs serial / parallel conversion. 18. A device measuring method for performing a first measurement and a second measurement on each of a plurality of devices, wherein the first measurement is performed on the device by a single first measurement unit. Performed through a plurality of switches provided correspondingly and a plurality of second measurement units provided corresponding to the device, wherein the second measurement is performed only by the second measurement unit, Mutually exclusive first and second periods are set for each of the second measurement units, and mutually exclusive third and fourth periods are set for each of the switches, (a) In each of the second measurement units, the second measurement unit electrically connects the corresponding device to the first measurement unit in the first period, and (b) each of the second measurement units. In the second measuring section, the second measuring section corresponds to this. Insulating the device from the first measurement unit during the second period, and (c) in each of the switches, the switch corresponds to the second measurement unit and the first measurement unit. A step of electrically connecting the measuring section to the third period; and (d) in each of the switches, the second measuring section and the first measuring section corresponding to the switch are connected to the fourth measuring section. And a step of insulating during a period, wherein in each of the second measuring units and the switches corresponding thereto, the third period is included in the first period. 19. The device measurement according to claim 18, wherein the second period in one of the second measurement units corresponding to one of the switches includes the third period in another of the switches. Method. 20. The device measuring method according to claim 19, wherein the second period in the one second measuring unit and the third period in the other switch are started at the same time.