JPH07239209A - Method and device for activity precision measurement of automatic machine tool - Google Patents
Method and device for activity precision measurement of automatic machine toolInfo
- Publication number
- JPH07239209A JPH07239209A JP3011594A JP3011594A JPH07239209A JP H07239209 A JPH07239209 A JP H07239209A JP 3011594 A JP3011594 A JP 3011594A JP 3011594 A JP3011594 A JP 3011594A JP H07239209 A JPH07239209 A JP H07239209A
- Authority
- JP
- Japan
- Prior art keywords
- reflector
- automatic machine
- movement
- machine tool
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の利用分野】本発明は自動工作機械の運動精度測
定方法及びその装置に係り、特に、マシンニングセン
タ、ＮＣ工作機械等の自動工作機械の運動精度を測定す
る測定方法及びその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for measuring motion accuracy of an automatic machine tool, and more particularly to a method and apparatus for measuring motion accuracy of an automatic machine tool such as a machining center or NC machine tool.
【０００２】[0002]
【従来の技術】従来、マシンニングセンタ、ＮＣ工作機
械等の自動工作機械のＸ、Ｙ及びＺの各軸の運動精度
（指示精度、直角度、真直度、ピッチング、ヨーイン
グ、ローリング）を測定する方法としては、運動精度の
各要素ごとにレーザ測長器、直定規、直角定規、オート
コリメータ、電気水準器等を用いて測定する方法と、最
近使用されたばかりであるが、ダブルボールバーという
測定器を用いて総合精度として測定する方法がある。2. Description of the Related Art Conventionally, the motion accuracy (indicating accuracy, squareness, straightness, pitching, yawing, rolling) of each X, Y and Z axis of an automatic machine tool such as a machining center or NC machine tool is measured. As a method, each element of motion accuracy is measured by using a laser length measuring machine, a straight edge ruler, a right angle ruler, an autocollimator, an electric level, etc. There is a method of measuring the total accuracy using a measuring instrument.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、レーザ
測長器、直定規、直角定規、オートコリメータ、電気水
準器等を用いて測定する方法は、測定に時間がかかると
いう欠点がある。また、ダブルボールバーを用いる方法
は、工具取付け軸と自動工作機械のテーブルとの間で球
運動をさせる方法なので、測定範囲が限定されるという
欠点がある。However, the method of measuring using a laser length measuring machine, a straight ruler, a right angle ruler, an autocollimator, an electric level, etc., has a drawback that the measurement takes time. Further, the method using the double ball bar has a drawback that the measuring range is limited because it is a method in which the tool mounting shaft and the table of the automatic machine tool are moved in a spherical motion.
【０００４】更には、これらの方法は、加工中における
自動工作機械の運動精度を測定できないという欠点があ
る。本発明は、このような事情に鑑みてなされたもの
で、自動工作機械の運動精度を広い範囲に渡って短時間
で測定でき、且つ加工中でも測定できる自動工作機械の
運動精度測定方法及びその装置を提供することを目的と
する。Furthermore, these methods have the drawback that the motion accuracy of the automatic machine tool during machining cannot be measured. The present invention has been made in view of the above circumstances, and it is possible to measure the motion accuracy of an automatic machine tool over a wide range in a short time, and it is possible to measure even during machining. The purpose is to provide.
【０００５】[0005]
【課題を解決する為の手段】本発明は、前記目的を達成
する為に、自動工作機械の運動精度を測定する自動工作
機械の運動精度測定方法に於いて、前記自動工作機械の
工具取付け軸に反射体を固定し、前記反射体を追尾し
て、その追尾する反射体の移動量を測定する複数の追尾
式レーザ干渉計をそれぞれ所定位置に固定し、前記反射
体が指定位置に移動するように前記工具取付け軸を動作
させると共に、前記移動する反射体を前記追尾式レーザ
干渉計で追尾して反射体の移動量を測定し、前記測定し
た移動量から算出した前記反射体の移動後の位置と前記
指定位置を比較することによって運動精度を測定するこ
とを特徴とする。In order to achieve the above object, the present invention provides a motion accuracy measuring method for an automatic machine tool, which measures the motion accuracy of an automatic machine tool, comprising a tool mounting shaft for the automatic machine tool. A reflector is fixed to, and the reflector is tracked, and a plurality of tracking laser interferometers that measure the amount of movement of the tracked reflector are fixed to predetermined positions, respectively, and the reflector moves to a specified position. While moving the tool mounting axis, the moving amount of the reflector is measured by tracking the moving reflector with the tracking laser interferometer, and after the movement of the reflector calculated from the measured amount of movement. It is characterized in that the motion accuracy is measured by comparing the position of 1 with the specified position.
【０００６】[0006]
【作用】本発明によれば、自動工作機械の工具取付け軸
に反射体を取り付ける一方、この反射体を追尾し、その
追尾する反射体の移動量を測定する複数の追尾式レーザ
干渉計を所定位置に固定する。次に、反射体が指定位置
に移動するように工具取付け軸を動作させると共に、工
具取付け軸の移動と共に移動する反射体を所定位置に配
設した複数の追尾式レーザ干渉計で追尾して反射体の移
動量を測定する。そして、測定した移動量から算出され
る前記反射体の移動後の位置と前記指定位置を比較する
ようにした。即ち、予め反射体の初期位置と各追尾式レ
ーザ干渉計の位置を同一座標系、例えば自動工作機械の
座標系で求めておけば、反射体を指定位置に移動させる
ように工具取付け軸を動作させた場合、反射体の初期位
置と追尾式レーザ干渉計で求めた反射体の移動量データ
から反射体の移動後の位置を逐次算出することができ
る。従って、追尾式レーザ干渉計により求めた反射体の
移動後の位置と指定位置を比較することにより、自動工
作機械の運動精度が良ければ、移動位置と指定位置との
差は小さく、もし自動工作作機械の運動精度が悪けれ
ば、指定位置に対する追尾式レーザ干渉計で測定した移
動位置の差が大きくなる。According to the present invention, a plurality of tracking-type laser interferometers for tracking the reflector and measuring the amount of movement of the reflector while the reflector is mounted on the tool mounting shaft of the automatic machine tool are prescribed. Lock in position. Next, the tool mounting shaft is operated so that the reflector moves to the specified position, and the reflector that moves with the movement of the tool mounting shaft is tracked and reflected by a plurality of tracking laser interferometers arranged at predetermined positions. Measure the amount of body movement. Then, the position after the movement of the reflector calculated from the measured movement amount is compared with the designated position. That is, if the initial position of the reflector and the position of each tracking laser interferometer are obtained in advance in the same coordinate system, for example, the coordinate system of an automatic machine tool, the tool mounting axis is operated so as to move the reflector to the designated position. In this case, the position after the movement of the reflector can be sequentially calculated from the initial position of the reflector and the moving amount data of the reflector obtained by the tracking laser interferometer. Therefore, by comparing the position after movement of the reflector obtained by the tracking laser interferometer with the designated position, if the motion accuracy of the automatic machine tool is good, the difference between the moved position and the designated position is small, and if the automatic machining If the motion accuracy of the working machine is poor, the difference in the moving position measured by the tracking laser interferometer with respect to the designated position becomes large.
【０００７】また、各軸のうちどの軸の運動精度が悪い
かを知りたい場合には、各軸方向ごとに個々に工具取付
け軸を駆動させて移動させた反射体の指定位置と追尾式
レーザ干渉計で測定した反射体の移動後の位置を比較す
ればよい。また、２軸面内で反射体を移動させれば、２
軸面内の運動精度を測定することができる。Further, in order to know which one of the axes has a poor motion accuracy, the designated position of the reflector and the tracking laser which are individually moved by moving the tool mounting axes in each axis direction. The position after the movement of the reflector measured by the interferometer may be compared. Also, if the reflector is moved within the biaxial plane,
It is possible to measure the motion accuracy in the axial plane.
【０００８】[0008]
【実施例】以下添付図面に従って本発明に係る自動工作
機械の運動精度測定方法及びその装置の好ましい実施例
について詳説する。図１は、本発明の自動工作機械の運
動精度測定装置を具備した門型マシンニングセンタ１０
の一例である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a method for measuring motion accuracy of an automatic machine tool and its apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a gate type machining center 10 equipped with a motion accuracy measuring apparatus for an automatic machine tool according to the present invention.
Is an example.
【０００９】図１に示すように、門型マシンニングセン
タ１０は、Ｘ軸方向に移動自在なＸキャリッジ１２、Ｘ
キャリッジ１２の中をＺ軸方向に移動自在な工具取付け
軸１４及び基台１６上を前後方向、即ちＹ軸方向にスラ
イドするＹ軸テーブル１８を有すると共に、工具取付け
軸１４の先端部に工具１４Ａが取付けられる。また、
Ｘ、Ｙ、Ｚの各軸には、測長リニアスケールが夫々備え
られ、工具取付け軸１４の移動量が検出されるようによ
うになっている。そして、図示しない制御部からの加工
移動経路を指令する指令情報に従ってＸキャリッジ１
２、Ｙ軸テーブル１８及び工具取付け軸１４が図中Ｘ−
Ｘ方向、Ｙ−Ｙ方向、Ｚ−Ｚ方向に移動すると共に、工
具取付け軸１４の移動量は測長リニアスケールで検出さ
れて逐次フィードバックされる。これにより、工具取付
け軸１４の先端に取付けられた工具１４Ａは、加工移動
経路を沿って移動しながらＹ軸テーブル１８上に固定さ
れたワーク（図示せず）を加工する。As shown in FIG. 1, the gate type machining center 10 includes an X carriage 12 and an X carriage 12 which are movable in the X axis direction.
A tool mounting shaft 14 movable in the Z-axis direction inside the carriage 12 and a Y-axis table 18 that slides on the base 16 in the front-back direction, that is, the Y-axis direction are provided. Is installed. Also,
Each of the X, Y, and Z axes is provided with a length-measuring linear scale so that the movement amount of the tool mounting shaft 14 can be detected. Then, the X carriage 1 is operated according to command information for commanding a machining movement path from a control unit (not shown).
2. The Y-axis table 18 and the tool mounting shaft 14 are X- in the figure.
While moving in the X direction, the YY direction, and the ZZ direction, the amount of movement of the tool mounting shaft 14 is detected by the length measuring linear scale and sequentially fed back. As a result, the tool 14A attached to the tip of the tool attachment shaft 14 moves a work moving path to process a work (not shown) fixed on the Y-axis table 18.
【００１０】また、前記Ｙ軸テーブル１８上の後端に
は、レーザ追尾式の測定装置２０が設けられ、測定装置
２０はその前面４隅に追尾式レーザ干渉計２２、２２…
が図示しない回転支持機構を介して夫々設けられる。一
方、前記工具取付け軸１４の先端部近傍には、反射体２
４が前記追尾式レーザ干渉計側２２に向けて取付けられ
ている。従って、工具取付け軸１４の移動と共に移動す
る反射体２４に各追尾式レーザ干渉計２２からレーザ光
を照射して、反射体２４から反射した反射レーザ光を追
尾することにより、反射体２４の移動量を測定すること
ができる。尚、Ｙ軸テーブル１８の移動においては、反
射体２４はＹ軸テーブル１６と共に移動する追尾式レー
ザ干渉計２２に対して相対的に変位する。また、各追尾
式レーザ干渉計２２は図示しない回転支持機構により反
射レーザ光を追尾できる。また、追尾式レーザ干渉計２
２に入力される反射体２４の移動量データは測定装置２
０内の演算処理部で演算されて反射体２４の基準点から
の座標位置として表される。A laser tracking type measuring device 20 is provided at the rear end on the Y-axis table 18, and the measuring device 20 has tracking laser interferometers 22, 22, ...
Are respectively provided via a rotation support mechanism (not shown). On the other hand, in the vicinity of the tip of the tool mounting shaft 14, the reflector 2
4 is attached to the tracking laser interferometer side 22. Therefore, the reflector 24 that moves with the movement of the tool attachment shaft 14 is irradiated with laser light from each tracking laser interferometer 22 and the reflected laser light reflected from the reflector 24 is tracked to move the reflector 24. The quantity can be measured. When the Y-axis table 18 moves, the reflector 24 is displaced relative to the tracking laser interferometer 22 that moves together with the Y-axis table 16. Further, each tracking laser interferometer 22 can track the reflected laser light by a rotation support mechanism (not shown). In addition, a tracking type laser interferometer 2
The moving amount data of the reflector 24 input to the measuring device 2
It is calculated by the calculation processing unit within 0 and is represented as a coordinate position from the reference point of the reflector 24.
【００１１】追尾式レーザ干渉計２２は、測長の基準が
Ｘ、Ｙ、Ｚの各軸に備えられた測長リニアスケールを検
定するのに用いるレーザであるので、追尾式レーザ干渉
計２２で測定された値はそのまま検定の基準値として用
いることができる。次に、上記の如く構成された門型マ
シンニングセンタ１０により、本発明の自動工作機械の
運動精度測定方法を説明する。Since the tracking laser interferometer 22 is a laser used for measuring a linear measuring scale provided on each of the X, Y, and Z axes, the measuring laser interferometer 22 is used as a tracking laser interferometer 22. The measured value can be directly used as a reference value for the test. Next, the movement accuracy measuring method of the automatic machine tool of the present invention by the portal machining center 10 configured as described above will be described.
【００１２】先ず、反射体２４が指定座標位置（Ｘ、
Ｙ、Ｚ）に移動するように工具取付け軸１４を動作させ
ると共に、工具取付け軸１４と共に移動する反射体２４
を追尾式レーザ干渉計２２で追尾して反射体２４の移動
量を測定し、測定した移動量から反射体２４の移動後の
測定座標位置（x 、y 、z ）を求める。そして、指定座
標位置（Ｘ、Ｙ、Ｚ）と追尾式レーザ干渉計２２で測定
した測定座標位置（x 、y 、z ）とを比較することによ
って運動精度を測定する。即ち、門型マシンニングセン
タ１０の運動精度が良ければ、指令座標位置（Ｘ、Ｙ、
Ｚ）と測定座標位置（x 、y 、z ）との差が小さく、も
し門型マシンニングセンタ１０のＸ、Ｙ及びＺの各軸方
向の運動精度（指示精度、直角度、真直度、ピッチン
グ、ヨーイング、ローリング）が悪い場合には、指定座
標位置（Ｘ、Ｙ、Ｚ）と測定座標位置（x 、y 、z ）と
の差が大きくなる。First, the reflector 24 is moved to a designated coordinate position (X,
The reflector 24 that moves the tool mounting shaft 14 so as to move to (Y, Z) and moves together with the tool mounting shaft 14.
Is tracked by a tracking laser interferometer 22 to measure the amount of movement of the reflector 24, and the measured coordinate position (x, y, z) after the movement of the reflector 24 is obtained from the measured amount of movement. Then, the movement accuracy is measured by comparing the designated coordinate position (X, Y, Z) with the measured coordinate position (x 1, y 2, z 3) measured by the tracking laser interferometer 22. That is, if the movement accuracy of the gate type machining center 10 is good, the command coordinate position (X, Y,
Z) and the measurement coordinate position (x, y, z) are small, and if the gate type machining center 10 moves in the X, Y, and Z directions, the movement accuracy (indication accuracy, squareness, straightness, pitching). , Yawing, rolling), the difference between the designated coordinate position (X, Y, Z) and the measured coordinate position (x, y, z) becomes large.
【００１３】前記した運動精度の測定において、制御部
からの加工移動経路を指令する指令情報に従って工具取
付け軸１４を動作させ、工具取付け軸１４と共に移動す
る反射体１４を追尾式レーザ干渉計２２で追尾すれば、
加工中でも自動工作機械の運動精度を測定することがで
きる。また、各軸方向ごとに個々に工具取付け軸１４を
移動させる指令情報を使用すれば、Ｘ、Ｙ及びＺの各軸
ごとの運動精度を測定することができる。In the above-described measurement of the motion accuracy, the tool mounting shaft 14 is operated according to the command information for commanding the machining movement path from the control unit, and the reflector 14 moving together with the tool mounting shaft 14 is moved by the tracking laser interferometer 22. If you track
It is possible to measure the motion accuracy of automatic machine tools even during processing. Further, if the command information for individually moving the tool mounting shaft 14 in each axial direction is used, the motion accuracy for each X, Y, and Z axis can be measured.
【００１４】このように、本発明の自動工作機械の運動
精度測定方法によれば、門型マシンニングセンタ１０の
工具取付け軸１４に固定した反射体２４を、複数の追尾
式レーザ干渉計２２で追尾して門型マシンニングセンタ
１０の運動精度を測定できるようにしたので、広い範囲
に渡って短時間で運動精度を測定でき、且つ加工中でも
測定できる。また、本発明の自動工作機械の運動精度測
定方法で測定した運動精度情報を、Ｘキャリッジ１２、
Ｙ軸テーブル１８及び工具取付け軸１４を駆動する駆動
手段にフィードバックすることにより、門型マシンニン
グセンタ１０の運動精度を向上させることができる。As described above, according to the motion accuracy measuring method of the automatic machine tool of the present invention, the reflector 24 fixed to the tool mounting shaft 14 of the portal machining center 10 is replaced by a plurality of tracking laser interferometers 22. Since the movement accuracy of the portal machining center 10 can be measured by tracking, it is possible to measure the movement accuracy in a short time over a wide range and also during machining. In addition, the motion accuracy information measured by the motion accuracy measuring method for the automatic machine tool of the present invention is used as the X carriage 12,
By feeding back to the driving means that drives the Y-axis table 18 and the tool mounting shaft 14, the motion accuracy of the portal machining center 10 can be improved.
【００１５】また、３基の追尾式レーザ干渉計２２があ
れば反射体２４の移動後の位置を測定することは可能で
あるが、本実施例のように４基の追尾式レーザ干渉計２
２を使用すれば、追尾式レーザ干渉計２２の基準点間距
離の検定を行うことができると共に、１基の追尾式レー
ザ干渉計２２と反射体２４の間の光路に障害物があって
も測定を行うことができる。Further, if there are three tracking type laser interferometers 22, it is possible to measure the position of the reflector 24 after the movement, but as in the present embodiment, four tracking type laser interferometers 2 are used.
If 2 is used, the distance between the reference points of the tracking laser interferometer 22 can be verified, and even if there is an obstacle in the optical path between one tracking laser interferometer 22 and the reflector 24. A measurement can be made.
【００１６】また、工具取付け軸１４の３軸方向（３次
元空間）の運動精度を測定することで説明したが、工具
取付け軸１４の２軸方向（Ｘキャリッジ、工具取付け軸
の２次元平面）だけの運動精度を測定する場合には、図
２に示すように、測定装置２０を門型マシンニングセン
タ１０を設置する床に固定する。また、本発明の自動工
作機械の運動精度測定方法は、門型マシンニングセンタ
１０に限定されることはなく、縦型或いは横型のマシン
ニングセンタにも適用することができる。更には、自動
工作機械でも特に２軸以上の直線運動または円弧運動
（回転運動は除く）する構造のものに適用することがで
きる。また、工具取付け軸１４に固定する反射体の数は
１個に限定するものではない。Although the explanation has been made by measuring the motion accuracy of the tool mounting shaft 14 in the three axial directions (three-dimensional space), the two axes of the tool mounting shaft 14 (X carriage, two-dimensional plane of the tool mounting shaft). When measuring only the motion accuracy, the measuring device 20 is fixed to the floor on which the portal machining center 10 is installed, as shown in FIG. Further, the method for measuring the motion accuracy of the automatic machine tool of the present invention is not limited to the gate type machining center 10 and can be applied to a vertical type or horizontal type machining center. Further, the present invention can be applied to an automatic machine tool having a structure in which linear movement or arc movement (excluding rotational movement) of two or more axes is performed. Further, the number of reflectors fixed to the tool mounting shaft 14 is not limited to one.
【００１７】[0017]
【発明の効果】以上説明したように、本発明の自動工作
機械の運動精度測定方法及びその装置によれば、自動工
作機械の工具取付け軸に固定した反射体を、追尾式レー
ザ干渉計で追尾して自動工作機械の運動精度を測定でき
るようにしたので、広い範囲に渡って短時間で運動精度
を測定でき、且つ加工中でも測定できる。As described above, according to the method and apparatus for measuring the motion accuracy of the automatic machine tool of the present invention, the reflector fixed to the tool mounting shaft of the automatic machine tool is tracked by the tracking laser interferometer. Since the motion accuracy of the automatic machine tool can be measured, the motion accuracy can be measured over a wide range in a short time and even during machining.
【００１８】また、本発明の自動工作機械の運動精度測
定装置で測定した運動精度情報を、自動工作機械の各軸
を駆動する駆動手段にフィードバックすることにより、
自動工作機械の運動精度を向上させることができる。Further, by feeding back the motion accuracy information measured by the motion accuracy measuring device for an automatic machine tool of the present invention to the driving means for driving each axis of the automatic machine tool,
The motion accuracy of the automatic machine tool can be improved.
【図面の簡単な説明】[Brief description of drawings]
【図１】図１は、本発明の自動工作機械の運動精度測定
装置を具備した門型マシンニングセンタの一例で、測定
装置をＹ軸テーブル上に配置した斜視図FIG. 1 is an example of a portal machining center equipped with a motion accuracy measuring device for an automatic machine tool according to the present invention, and is a perspective view in which the measuring device is arranged on a Y-axis table.
【図２】図２は、本発明の自動工作機械の運動精度測定
装置を具備した門型マシンニングセンタの一例で、測定
装置を床上に配置した斜視図FIG. 2 is an example of a gate type machining center equipped with a motion accuracy measuring device for an automatic machine tool according to the present invention, and is a perspective view in which the measuring device is arranged on the floor.
１０…本発明の自動工作機械の運動精度測定装置を具備
した門型マシンニングセンタ １２…Ｘキャリッジ １４…工具取付け軸 １６…基台 １８…Ｙ軸テーブル ２０…測定装置 ２２…追尾式レーザ干渉計 ２４…反射体DESCRIPTION OF SYMBOLS 10 ... Gate-type machining center equipped with the motion accuracy measuring device for an automatic machine tool of the present invention 12 ... X carriage 14 ... Tool mounting shaft 16 ... Base 18 ... Y-axis table 20 ... Measuring device 22 ... Tracking laser interferometer 24 ... Reflector
───────────────────────────────────────────────────── フロントページの続き (72)発明者 後藤 充夫 茨城県つくば市梅園１丁目１番４ 工業技 術院 計量研究所内 (72)発明者 中村 収 茨城県つくば市梅園１丁目１番４ 工業技 術院 計量研究所内 (72)発明者 谷村 吉久 茨城県つくば市梅園１丁目１番４ 工業技 術院 計量研究所内 (72)発明者 伊勢 徹 東京都三鷹市下連雀９丁目７番１号 株式 会社東京精密内 (72)発明者 真田 友宏 東京都三鷹市下連雀９丁目７番１号 株式 会社東京精密内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mitsuo Goto 1-4-1 Umezono, Tsukuba-shi, Ibaraki Industrial Technology Institute, Institute of Metrology (72) Inventor Osamu Nakamura 1-4-4 Umezono, Tsukuba-shi, Ibaraki Industrial technology Inside the Institute of Metrology (72) Inventor Yoshihisa Tanimura 1-1-4 Umezono, Tsukuba-shi, Ibaraki Inside of Institute of Industrial Science and Technology (72) Toru Ise 9-7 Shirenrenjaku, Mitaka, Tokyo Stock Company Tokyo Seimei (72) Inventor Tomohiro Sanada 9-7 Shirenrenjaku, Mitaka City, Tokyo Tokyo Seimitsu Co., Ltd.
Claims (3)
作機械の運動精度測定方法に於いて、 前記自動工作機械の工具取付け軸に反射体を固定し、 前記反射体を追尾して、その追尾する反射体の移動量を
測定する複数の追尾式レーザ干渉計をそれぞれ所定位置
に固定し、 前記反射体が指定位置に移動するように前記工具取付け
軸を動作させると共に、前記移動する反射体を前記追尾
式レーザ干渉計で追尾して反射体の移動量を測定し、 前記測定した移動量から算出した前記反射体の移動後の
位置と前記指定位置を比較することによって運動精度を
測定することを特徴とする自動工作機械の運動精度測定
方法。1. A method of measuring motion accuracy of an automatic machine tool, comprising: fixing a reflector to a tool mounting shaft of the automatic machine tool; tracking the reflector; A plurality of tracking laser interferometers that measure the amount of movement of the reflector to be tracked are respectively fixed at predetermined positions, and the tool mounting shaft is operated so that the reflector moves to a specified position, and the moving reflector Is measured by the tracking laser interferometer to measure the amount of movement of the reflector, and the movement accuracy is measured by comparing the position after movement of the reflector calculated from the measured amount of movement and the designated position. A method for measuring motion accuracy of an automatic machine tool, which is characterized by the following.
移動経路に従って前記工具取付け軸を動作させるときの
運動精度を測定することを特徴とする請求項１の自動工
作機械の運動精度測定方法。2. A method for measuring motion accuracy of an automatic machine tool according to claim 1, wherein the motion accuracy when the tool mounting shaft is operated according to a machining movement path for machining the work is measured by the automatic machine tool.
作機械の運動精度測定装置に於いて、 前記自動工作機械の工具取付け軸に固定された反射体
と、 前記反射体を追尾して、その追尾する反射体の移動量を
測定する複数の追尾式レーザ干渉計と、 前記測定した反射体の移動量から反射体の移動後の位置
を算出する演算装置と、 前記反射体が指定位置に移動するように前記工具取付け
軸を動作させる制御手段と、から成り、 前記算出した前記反射体の移動後の位置と前記指定位置
を比較することによって運動精度を測定することを特徴
とする自動工作機械の運動精度測定装置。3. A motion accuracy measuring device for an automatic machine tool for measuring motion accuracy of an automatic machine tool, wherein a reflector fixed to a tool mounting shaft of the automatic machine tool and the reflector are tracked, A plurality of tracking laser interferometers that measure the amount of movement of the reflector to be tracked, an arithmetic unit that calculates the position after movement of the reflector from the amount of movement of the measured reflector, and the reflector is at a specified position. Control means for moving the tool mounting shaft so as to move, and measuring the motion accuracy by comparing the calculated position after movement of the reflector with the designated position. Machine motion accuracy measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3011594A JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3011594A JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07239209A true JPH07239209A (en) | 1995-09-12 |
| JP2755346B2 JP2755346B2 (en) | 1998-05-20 |
Family
ID=12294791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3011594A Expired - Lifetime JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2755346B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999012697A1 (en) * | 1997-09-09 | 1999-03-18 | Geodetic Technology International Holdings N.V. | Improvements relating to mechanical manipulators |
| US6463667B1 (en) | 1999-09-20 | 2002-10-15 | Orio Precision Co., Ltd | Machine tool precision-measuring apparatus |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999012697A1 (en) * | 1997-09-09 | 1999-03-18 | Geodetic Technology International Holdings N.V. | Improvements relating to mechanical manipulators |
| US6463667B1 (en) | 1999-09-20 | 2002-10-15 | Orio Precision Co., Ltd | Machine tool precision-measuring apparatus |
| DE10126753A1 (en) * | 2001-06-01 | 2002-12-12 | Bundesrep Deutschland | Method for increasing the accuracy of coordinate measurement devices and machine tools by incorporation of an additional coordinate measurement system and mathematical optimization of the resultant equation systems |
| DE10126753B4 (en) * | 2001-06-01 | 2005-02-10 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Method for increasing the accuracy of coordinate measuring machines and machine tools |
| JP2008260093A (en) * | 2007-04-12 | 2008-10-30 | Toshiba Corp | Machining device of cylindrical structure |
| JP2014087882A (en) * | 2012-10-30 | 2014-05-15 | Toshiba Mach Co Ltd | Method for measuring tool length, and machine tool |
| CN105538038A (en) * | 2016-01-27 | 2016-05-04 | 清华大学 | Method for identifying geometric errors of machine tool translational shafts |
| CN105538038B (en) * | 2016-01-27 | 2018-01-16 | 清华大学 | Lathe translation shaft geometric error discrimination method |
| CN106624816A (en) * | 2016-11-22 | 2017-05-10 | 浙江大学 | Website establishing method for work fixture coordinate system of horizontal automatic drilling and riveting machine for aircraft wallplate |
| CN106624816B (en) * | 2016-11-22 | 2018-07-06 | 浙江大学 | A kind of frock clamp coordinate system establishing method of the horizontal automatic drill riveter of aircraft target ship |
| CN112621387A (en) * | 2020-12-28 | 2021-04-09 | 齐重数控装备股份有限公司 | Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe |
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