JP2755346B2 - Method and apparatus for measuring motion accuracy of automatic machine tool - Google Patents
Method and apparatus for measuring motion accuracy of automatic machine toolInfo
- Publication number
- JP2755346B2 JP2755346B2 JP3011594A JP3011594A JP2755346B2 JP 2755346 B2 JP2755346 B2 JP 2755346B2 JP 3011594 A JP3011594 A JP 3011594A JP 3011594 A JP3011594 A JP 3011594A JP 2755346 B2 JP2755346 B2 JP 2755346B2
- Authority
- JP
- Japan
- Prior art keywords
- reflector
- movement
- machine tool
- automatic machine
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Description
【０００１】[0001]
【発明の利用分野】本発明は自動工作機械の運動精度測
定方法及びその装置に係り、特に、マシンニングセン
タ、ＮＣ工作機械等の自動工作機械の運動精度を測定す
る測定方法及びその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring the motion accuracy of an automatic machine tool, and more particularly to a method and an apparatus for measuring the motion accuracy of an automatic machine tool such as a machining center and an NC machine tool.
【０００２】[0002]
【従来の技術】従来、マシンニングセンタ、ＮＣ工作機
械等の自動工作機械のＸ、Ｙ及びＺの各軸の運動精度
（指示精度、直角度、真直度、ピッチング、ヨーイン
グ、ローリング）を測定する方法としては、運動精度の
各要素ごとにレーザ測長器、直定規、直角定規、オート
コリメータ、電気水準器等を用いて測定する方法と、最
近使用されたばかりであるが、ダブルボールバーという
測定器を用いて総合精度として測定する方法がある。2. Description of the Related Art Conventionally, the motion accuracy (instruction accuracy, squareness, straightness, pitching, yawing, rolling) of each of the X, Y and Z axes of an automatic machine tool such as a machining center and an NC machine tool is measured. As a method, a method of measuring each element of the movement accuracy using a laser measuring instrument, a straight ruler, a square ruler, an autocollimator, an electric level, etc., or a recently used double ball bar measurement There is a method of measuring the overall accuracy using a measuring instrument.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、レーザ
測長器、直定規、直角定規、オートコリメータ、電気水
準器等を用いて測定する方法は、測定に時間がかかると
いう欠点がある。また、ダブルボールバーを用いる方法
は、工具取付け軸と自動工作機械のテーブルとの間で球
運動をさせる方法なので、測定範囲が限定されるという
欠点がある。However, the method of measuring using a laser length measuring instrument, a straight ruler, a right angle ruler, an autocollimator, an electric level, or the like has a disadvantage that the measurement takes a long time. In addition, the method using a double ball bar is a method in which a ball is moved between a tool mounting shaft and a table of an automatic machine tool, and thus has a disadvantage that a measurement range is limited.
【０００４】更には、これらの方法は、加工中における
自動工作機械の運動精度を測定できないという欠点があ
る。本発明は、このような事情に鑑みてなされたもの
で、自動工作機械の運動精度を広い範囲に渡って短時間
で測定でき、且つ加工中でも測定できる自動工作機械の
運動精度測定方法及びその装置を提供することを目的と
する。Furthermore, these methods have the disadvantage that the motion accuracy of the automatic machine tool during machining cannot be measured. The present invention has been made in view of such circumstances, and it is possible to measure the motion accuracy of an automatic machine tool over a wide range in a short time and to measure the motion accuracy of an automatic machine tool even during machining, and a device therefor. The purpose is to provide.
【０００５】[0005]
【課題を解決する為の手段】本発明は、前記目的を達成
する為に、自動工作機械の運動精度を測定する自動工作
機械の運動精度測定方法に於いて、前記自動工作機械の
工具取付け軸に反射体を固定し、前記反射体を追尾し
て、その追尾する反射体の移動量を測定する複数の追尾
式レーザ干渉計をそれぞれ所定位置に固定し、前記反射
体が指定位置に移動するように前記工具取付け軸を動作
させると共に、前記移動する反射体を前記追尾式レーザ
干渉計で追尾して反射体の移動量を測定し、前記測定し
た移動量から算出した前記反射体の移動後の位置と前記
指定位置を比較することによって運動精度を測定するこ
とを特徴とする。According to the present invention, there is provided a method for measuring the motion accuracy of an automatic machine tool for measuring the motion accuracy of the automatic machine tool. A plurality of tracking laser interferometers for measuring the amount of movement of the reflector to be tracked are fixed at predetermined positions, respectively, and the reflector is moved to a specified position. While operating the tool mounting axis, the moving reflector is tracked by the tracking laser interferometer to measure the moving amount of the reflector, and after the moving of the reflector calculated from the measured moving amount, The motion accuracy is measured by comparing the specified position with the specified position.
【０００６】[0006]
【作用】本発明によれば、自動工作機械の工具取付け軸
に反射体を取り付ける一方、この反射体を追尾し、その
追尾する反射体の移動量を測定する複数の追尾式レーザ
干渉計を所定位置に固定する。次に、反射体が指定位置
に移動するように工具取付け軸を動作させると共に、工
具取付け軸の移動と共に移動する反射体を所定位置に配
設した複数の追尾式レーザ干渉計で追尾して反射体の移
動量を測定する。そして、測定した移動量から算出され
る前記反射体の移動後の位置と前記指定位置を比較する
ようにした。即ち、予め反射体の初期位置と各追尾式レ
ーザ干渉計の位置を同一座標系、例えば自動工作機械の
座標系で求めておけば、反射体を指定位置に移動させる
ように工具取付け軸を動作させた場合、反射体の初期位
置と追尾式レーザ干渉計で求めた反射体の移動量データ
から反射体の移動後の位置を逐次算出することができ
る。従って、追尾式レーザ干渉計により求めた反射体の
移動後の位置と指定位置を比較することにより、自動工
作機械の運動精度が良ければ、移動位置と指定位置との
差は小さく、もし自動工作作機械の運動精度が悪けれ
ば、指定位置に対する追尾式レーザ干渉計で測定した移
動位置の差が大きくなる。According to the present invention, while a reflector is mounted on a tool mounting shaft of an automatic machine tool, a plurality of tracking laser interferometers for tracking the reflector and measuring the amount of movement of the reflector to be tracked are provided. Secure in position. Next, the tool mounting axis is operated so that the reflector moves to the designated position, and the reflector that moves with the movement of the tool mounting axis is tracked and reflected by a plurality of tracking laser interferometers arranged at predetermined positions. Measure body movement. Then, the position after the movement of the reflector calculated from the measured movement amount is compared with the designated position. That is, if the initial position of the reflector and the position of each tracking laser interferometer are determined in advance in the same coordinate system, for example, the coordinate system of an automatic machine tool, the tool mounting axis is operated to move the reflector to the specified position. In this case, the position of the reflector after the movement can be sequentially calculated from the initial position of the reflector and the movement amount data of the reflector obtained by the tracking laser interferometer. Therefore, by comparing the post-movement position of the reflector obtained by the tracking laser interferometer with the designated position, if the motion accuracy of the automatic machine tool is good, the difference between the movement position and the designated position is small, and If the motion accuracy of the working machine is poor, the difference between the designated position and the movement position measured by the tracking laser interferometer increases.
【０００７】また、各軸のうちどの軸の運動精度が悪い
かを知りたい場合には、各軸方向ごとに個々に工具取付
け軸を駆動させて移動させた反射体の指定位置と追尾式
レーザ干渉計で測定した反射体の移動後の位置を比較す
ればよい。また、２軸面内で反射体を移動させれば、２
軸面内の運動精度を測定することができる。When it is desired to know which of the axes has poor motion accuracy, the designated position of the reflector moved by driving the tool mounting axis individually in each axis direction and the tracking laser What is necessary is just to compare the position of the reflector after the movement measured by the interferometer. Also, if the reflector is moved in the biaxial plane, 2
Motion accuracy in the axial plane can be measured.
【０００８】[0008]
【実施例】以下添付図面に従って本発明に係る自動工作
機械の運動精度測定方法及びその装置の好ましい実施例
について詳説する。図１は、本発明の自動工作機械の運
動精度測定装置を具備した門型マシンニングセンタ１０
の一例である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method and an apparatus for measuring the motion accuracy of an automatic machine tool according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a portal-type machining center 10 equipped with a motion accuracy measuring device for an automatic machine tool according to the present invention.
This is an example.
【０００９】図１に示すように、門型マシンニングセン
タ１０は、Ｘ軸方向に移動自在なＸキャリッジ１２、Ｘ
キャリッジ１２の中をＺ軸方向に移動自在な工具取付け
軸１４及び基台１６上を前後方向、即ちＹ軸方向にスラ
イドするＹ軸テーブル１８を有すると共に、工具取付け
軸１４の先端部に工具１４Ａが取付けられる。また、
Ｘ、Ｙ、Ｚの各軸には、測長リニアスケールが夫々備え
られ、工具取付け軸１４の移動量が検出されるようによ
うになっている。そして、図示しない制御部からの加工
移動経路を指令する指令情報に従ってＸキャリッジ１
２、Ｙ軸テーブル１８及び工具取付け軸１４が図中Ｘ−
Ｘ方向、Ｙ−Ｙ方向、Ｚ−Ｚ方向に移動すると共に、工
具取付け軸１４の移動量は測長リニアスケールで検出さ
れて逐次フィードバックされる。これにより、工具取付
け軸１４の先端に取付けられた工具１４Ａは、加工移動
経路を沿って移動しながらＹ軸テーブル１８上に固定さ
れたワーク（図示せず）を加工する。As shown in FIG. 1, a portal type machining center 10 has an X carriage 12 and an X carriage 12 which are movable in the X-axis direction.
It has a tool mounting shaft 14 movable in the Z-axis direction in the carriage 12 and a Y-axis table 18 that slides on the base 16 in the front-rear direction, that is, in the Y-axis direction. Is attached. Also,
Each of the X, Y, and Z axes is provided with a linear scale for length measurement, so that the movement amount of the tool mounting shaft 14 is detected. Then, the X carriage 1 is controlled in accordance with command information for commanding a machining movement path from a control unit (not shown).
2. The Y-axis table 18 and the tool mounting shaft 14 are X-
In addition to moving in the X, YY, and ZZ directions, the amount of movement of the tool mounting shaft 14 is detected by a linear measuring linear scale and is sequentially fed back. Thereby, the tool 14A attached to the tip of the tool attachment shaft 14 processes the work (not shown) fixed on the Y-axis table 18 while moving along the processing movement path.
【００１０】また、前記Ｙ軸テーブル１８上の後端に
は、レーザ追尾式の測定装置２０が設けられ、測定装置
２０はその前面４隅に追尾式レーザ干渉計２２、２２…
が図示しない回転支持機構を介して夫々設けられる。一
方、前記工具取付け軸１４の先端部近傍には、反射体２
４が前記追尾式レーザ干渉計側２２に向けて取付けられ
ている。従って、工具取付け軸１４の移動と共に移動す
る反射体２４に各追尾式レーザ干渉計２２からレーザ光
を照射して、反射体２４から反射した反射レーザ光を追
尾することにより、反射体２４の移動量を測定すること
ができる。尚、Ｙ軸テーブル１８の移動においては、反
射体２４はＹ軸テーブル１６と共に移動する追尾式レー
ザ干渉計２２に対して相対的に変位する。また、各追尾
式レーザ干渉計２２は図示しない回転支持機構により反
射レーザ光を追尾できる。また、追尾式レーザ干渉計２
２に入力される反射体２４の移動量データは測定装置２
０内の演算処理部で演算されて反射体２４の基準点から
の座標位置として表される。At the rear end of the Y-axis table 18, a laser tracking type measuring device 20 is provided, and the measuring device 20 has tracking type laser interferometers 22, 22.
Are provided via a rotation support mechanism (not shown). On the other hand, near the tip of the tool mounting shaft 14, the reflector 2
4 is attached to the tracking type laser interferometer side 22. Therefore, by irradiating the reflector 24 moving with the movement of the tool mounting shaft 14 with laser light from each tracking type laser interferometer 22 and tracking the reflected laser light reflected from the reflector 24, the movement of the reflector 24 is achieved. The amount can be measured. When the Y-axis table 18 moves, the reflector 24 is displaced relatively to the tracking laser interferometer 22 that moves together with the Y-axis table 16. Each tracking type laser interferometer 22 can track the reflected laser light by a rotation support mechanism (not shown). The tracking laser interferometer 2
The movement amount data of the reflector 24 input to the measuring device 2
It is calculated by an arithmetic processing unit within 0 and is represented as a coordinate position of the reflector 24 from the reference point.
【００１１】追尾式レーザ干渉計２２は、測長の基準が
Ｘ、Ｙ、Ｚの各軸に備えられた測長リニアスケールを検
定するのに用いるレーザであるので、追尾式レーザ干渉
計２２で測定された値はそのまま検定の基準値として用
いることができる。次に、上記の如く構成された門型マ
シンニングセンタ１０により、本発明の自動工作機械の
運動精度測定方法を説明する。The tracking type laser interferometer 22 uses a laser used for verifying the linear scale provided on each of the X, Y, and Z axes as a standard for length measurement. The measured value can be used as it is as a reference value for the test. Next, a method of measuring the motion accuracy of an automatic machine tool according to the present invention using the portal type machining center 10 configured as described above will be described.
【００１２】先ず、反射体２４が指定座標位置（Ｘ、
Ｙ、Ｚ）に移動するように工具取付け軸１４を動作させ
ると共に、工具取付け軸１４と共に移動する反射体２４
を追尾式レーザ干渉計２２で追尾して反射体２４の移動
量を測定し、測定した移動量から反射体２４の移動後の
測定座標位置（x 、y 、z ）を求める。そして、指定座
標位置（Ｘ、Ｙ、Ｚ）と追尾式レーザ干渉計２２で測定
した測定座標位置（x 、y 、z ）とを比較することによ
って運動精度を測定する。即ち、門型マシンニングセン
タ１０の運動精度が良ければ、指令座標位置（Ｘ、Ｙ、
Ｚ）と測定座標位置（x 、y 、z ）との差が小さく、も
し門型マシンニングセンタ１０のＸ、Ｙ及びＺの各軸方
向の運動精度（指示精度、直角度、真直度、ピッチン
グ、ヨーイング、ローリング）が悪い場合には、指定座
標位置（Ｘ、Ｙ、Ｚ）と測定座標位置（x 、y 、z ）と
の差が大きくなる。First, the reflector 24 is moved to the designated coordinate position (X,
(Y, Z) and the reflector 24 which moves together with the tool mounting shaft 14 while operating the tool mounting shaft 14.
Is tracked by the tracking laser interferometer 22 to measure the amount of movement of the reflector 24, and the measured coordinate position (x, y, z) after movement of the reflector 24 is determined from the measured amount of movement. Then, the motion accuracy is measured by comparing the designated coordinate position (X, Y, Z) with the measured coordinate position (x, y, z) measured by the tracking laser interferometer 22. That is, if the accuracy of the movement of the portal type machining center 10 is good, the command coordinate position (X, Y,
Z) and the difference between the measured coordinate positions (x, y, z) are small, and if the gantry machining center 10 has motion accuracy (indicating accuracy, squareness, straightness, pitching) in the X, Y, and Z axial directions. , Yawing, and rolling), the difference between the designated coordinate position (X, Y, Z) and the measured coordinate position (x, y, z) increases.
【００１３】前記した運動精度の測定において、制御部
からの加工移動経路を指令する指令情報に従って工具取
付け軸１４を動作させ、工具取付け軸１４と共に移動す
る反射体１４を追尾式レーザ干渉計２２で追尾すれば、
加工中でも自動工作機械の運動精度を測定することがで
きる。また、各軸方向ごとに個々に工具取付け軸１４を
移動させる指令情報を使用すれば、Ｘ、Ｙ及びＺの各軸
ごとの運動精度を測定することができる。In the above-described measurement of the motion accuracy, the tool mounting shaft 14 is operated in accordance with command information for commanding a machining movement path from the control unit, and the reflector 14 moving together with the tool mounting shaft 14 is moved by the tracking laser interferometer 22. If you follow,
The motion accuracy of an automatic machine tool can be measured even during machining. Also, by using the command information for individually moving the tool mounting shaft 14 in each axis direction, the motion accuracy for each of the X, Y and Z axes can be measured.
【００１４】このように、本発明の自動工作機械の運動
精度測定方法によれば、門型マシンニングセンタ１０の
工具取付け軸１４に固定した反射体２４を、複数の追尾
式レーザ干渉計２２で追尾して門型マシンニングセンタ
１０の運動精度を測定できるようにしたので、広い範囲
に渡って短時間で運動精度を測定でき、且つ加工中でも
測定できる。また、本発明の自動工作機械の運動精度測
定方法で測定した運動精度情報を、Ｘキャリッジ１２、
Ｙ軸テーブル１８及び工具取付け軸１４を駆動する駆動
手段にフィードバックすることにより、門型マシンニン
グセンタ１０の運動精度を向上させることができる。As described above, according to the method for measuring the motion accuracy of an automatic machine tool according to the present invention, the reflector 24 fixed to the tool mounting shaft 14 of the portal type machining center 10 is controlled by a plurality of tracking laser interferometers 22. Since the tracking can measure the motion accuracy of the portal type machining center 10, the motion accuracy can be measured in a short time over a wide range, and can be measured even during machining. The motion accuracy information measured by the motion accuracy measuring method for an automatic machine tool according to the present invention is transmitted to the X carriage 12,
By feeding back to the driving means for driving the Y-axis table 18 and the tool mounting shaft 14, the movement accuracy of the portal type machining center 10 can be improved.
【００１５】また、３基の追尾式レーザ干渉計２２があ
れば反射体２４の移動後の位置を測定することは可能で
あるが、本実施例のように４基の追尾式レーザ干渉計２
２を使用すれば、追尾式レーザ干渉計２２の基準点間距
離の検定を行うことができると共に、１基の追尾式レー
ザ干渉計２２と反射体２４の間の光路に障害物があって
も測定を行うことができる。If three tracking laser interferometers 22 are provided, it is possible to measure the position of the reflector 24 after the movement, but as in this embodiment, four tracking laser interferometers 2 are used.
2, the distance between the reference points of the tracking laser interferometer 22 can be verified, and even if there is an obstacle in the optical path between the single tracking laser interferometer 22 and the reflector 24. A measurement can be made.
【００１６】また、工具取付け軸１４の３軸方向（３次
元空間）の運動精度を測定することで説明したが、工具
取付け軸１４の２軸方向（Ｘキャリッジ、工具取付け軸
の２次元平面）だけの運動精度を測定する場合には、図
２に示すように、測定装置２０を門型マシンニングセン
タ１０を設置する床に固定する。また、本発明の自動工
作機械の運動精度測定方法は、門型マシンニングセンタ
１０に限定されることはなく、縦型或いは横型のマシン
ニングセンタにも適用することができる。更には、自動
工作機械でも特に２軸以上の直線運動または円弧運動
（回転運動は除く）する構造のものに適用することがで
きる。また、工具取付け軸１４に固定する反射体の数は
１個に限定するものではない。Although the description has been made by measuring the movement accuracy of the tool mounting shaft 14 in three axial directions (three-dimensional space), the two axial directions of the tool mounting shaft 14 (X carriage, two-dimensional plane of the tool mounting shaft). When measuring only the movement accuracy, as shown in FIG. 2, the measuring device 20 is fixed to the floor on which the portal type machining center 10 is installed. Further, the method for measuring the motion accuracy of an automatic machine tool according to the present invention is not limited to the portal type machining center 10, but may be applied to a vertical or horizontal type machining center. Further, the present invention is also applicable to an automatic machine tool having a structure in which two or more axes move linearly or circularly (excluding rotational movement). Further, the number of reflectors fixed to the tool mounting shaft 14 is not limited to one.
【００１７】[0017]
【発明の効果】以上説明したように、本発明の自動工作
機械の運動精度測定方法及びその装置によれば、自動工
作機械の工具取付け軸に固定した反射体を、追尾式レー
ザ干渉計で追尾して自動工作機械の運動精度を測定でき
るようにしたので、広い範囲に渡って短時間で運動精度
を測定でき、且つ加工中でも測定できる。As described above, according to the method and apparatus for measuring the motion accuracy of an automatic machine tool according to the present invention, the reflector fixed to the tool mounting shaft of the automatic machine tool is tracked by the tracking laser interferometer. As a result, the motion accuracy of the automatic machine tool can be measured, so that the motion accuracy can be measured in a short time over a wide range and can be measured even during machining.
【００１８】また、本発明の自動工作機械の運動精度測
定装置で測定した運動精度情報を、自動工作機械の各軸
を駆動する駆動手段にフィードバックすることにより、
自動工作機械の運動精度を向上させることができる。Further, the motion accuracy information measured by the motion accuracy measuring device for an automatic machine tool of the present invention is fed back to driving means for driving each axis of the automatic machine tool,
The motion accuracy of the automatic machine tool can be improved.
【図１】図１は、本発明の自動工作機械の運動精度測定
装置を具備した門型マシンニングセンタの一例で、測定
装置をＹ軸テーブル上に配置した斜視図FIG. 1 is an example of a portal type machining center provided with a motion accuracy measuring device for an automatic machine tool according to the present invention, and is a perspective view in which the measuring device is arranged on a Y-axis table.
【図２】図２は、本発明の自動工作機械の運動精度測定
装置を具備した門型マシンニングセンタの一例で、測定
装置を床上に配置した斜視図FIG. 2 is an example of a portal-type machining center provided with a motion accuracy measuring device for an automatic machine tool according to the present invention, and is a perspective view in which the measuring device is arranged on a floor.
１０…本発明の自動工作機械の運動精度測定装置を具備
した門型マシンニングセンタ １２…Ｘキャリッジ １４…工具取付け軸 １６…基台 １８…Ｙ軸テーブル ２０…測定装置 ２２…追尾式レーザ干渉計 ２４…反射体DESCRIPTION OF SYMBOLS 10 ... Portal-type machining center provided with the motion accuracy measuring device of the automatic machine tool of this invention 12 ... X carriage 14 ... Tool mounting shaft 16 ... Base 18 ... Y-axis table 20 ... Measuring device 22 ... Tracking type laser interferometer 24 ... Reflector
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中村 収 茨城県つくば市梅園１丁目１番４ 工業 技術院 計量研究所内 (72)発明者 谷村 吉久 茨城県つくば市梅園１丁目１番４ 工業 技術院 計量研究所内 (72)発明者 伊勢 徹 東京都三鷹市下連雀９丁目７番１号 株 式会社東京精密内 (72)発明者 真田 友宏 東京都三鷹市下連雀９丁目７番１号 株 式会社東京精密内 審査官 岡田 卓弥 (56)参考文献 特開 平５−302813（ＪＰ，Ａ) 特開 平２−159504（ＪＰ，Ａ) 特開 昭60−216204（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G01B 11/00 - 11/30 B23Q 17/00 - 23/00────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Osamu Nakamura 1-1-4 Umezono, Tsukuba, Ibaraki Pref., National Institute of Metrology (72) Inventor Yoshihisa Tanimura 1-4-1, Umezono, Tsukuba, Ibaraki Pref. Inside the Metrology Research Institute (72) Inventor Toru Ise 9-7-1, Shimorenjaku, Mitaka, Tokyo, Japan Inside Tokyo Seimitsu Co., Ltd. (72) Inventor Tomohiro Sanada 97-1 Shimorenjaku, Mitaka, Tokyo, Japan Examiner Takuya Okada (56) References JP-A-5-302813 (JP, A) JP-A-2-159504 (JP, A) JP-A-60-216204 (JP, A) (58) Fields investigated ( Int.Cl. 6 , DB name) G01B 11/00-11/30 B23Q 17/00-23/00
Claims (3)
作機械の運動精度測定方法に於いて、 前記自動工作機械の工具取付け軸に反射体を固定し、 前記反射体を追尾して、その追尾する反射体の移動量を
測定する複数の追尾式レーザ干渉計をそれぞれ所定位置
に固定し、 前記反射体が指定位置に移動するように前記工具取付け
軸を動作させると共に、前記移動する反射体を前記追尾
式レーザ干渉計で追尾して反射体の移動量を測定し、 前記測定した移動量から算出した前記反射体の移動後の
位置と前記指定位置を比較することによって運動精度を
測定することを特徴とする自動工作機械の運動精度測定
方法。An automatic machine tool motion accuracy measuring method for measuring the motion accuracy of an automatic machine tool, comprising: fixing a reflector to a tool mounting axis of the automatic machine tool; A plurality of tracking laser interferometers for measuring the amount of movement of the reflector to be tracked are respectively fixed at predetermined positions, and the tool mounting axis is operated so that the reflector moves to a specified position, and the moving reflector is moved. Is measured by the tracking laser interferometer to measure the movement amount of the reflector, and the movement accuracy is measured by comparing the position after movement of the reflector calculated from the measured movement amount with the designated position. A method for measuring the motion accuracy of an automatic machine tool, characterized in that:
移動経路に従って前記工具取付け軸を動作させるときの
運動精度を測定することを特徴とする請求項１の自動工
作機械の運動精度測定方法。2. The method according to claim 1, wherein the movement accuracy of the automatic machine tool is measured when the tool mounting shaft is operated in accordance with a processing movement path for processing a workpiece.
作機械の運動精度測定装置に於いて、 前記自動工作機械の工具取付け軸に固定された反射体
と、 前記反射体を追尾して、その追尾する反射体の移動量を
測定する複数の追尾式レーザ干渉計と、 前記測定した反射体の移動量から反射体の移動後の位置
を算出する演算装置と、 前記反射体が指定位置に移動するように前記工具取付け
軸を動作させる制御手段と、から成り、 前記算出した前記反射体の移動後の位置と前記指定位置
を比較することによって運動精度を測定することを特徴
とする自動工作機械の運動精度測定装置。3. A motion accuracy measuring device for an automatic machine tool for measuring motion accuracy of an automatic machine tool, comprising: a reflector fixed to a tool mounting shaft of the automatic machine tool; A plurality of tracking laser interferometers that measure the amount of movement of the reflector to be tracked; an arithmetic device that calculates the position of the reflector after movement from the measured amount of movement of the reflector; and the reflector is located at a designated position. Control means for operating the tool mounting axis so as to move, wherein the movement accuracy is measured by comparing the calculated position after the movement of the reflector with the designated position. Machine movement accuracy measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3011594A JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3011594A JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07239209A JPH07239209A (en) | 1995-09-12 |
| JP2755346B2 true JP2755346B2 (en) | 1998-05-20 |
Family
ID=12294791
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3011594A Expired - Lifetime JP2755346B2 (en) | 1994-02-28 | 1994-02-28 | Method and apparatus for measuring motion accuracy of automatic machine tool |
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| Country | Link |
|---|---|
| JP (1) | JP2755346B2 (en) |
Cited By (1)
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|---|---|---|---|---|
| JP2014163757A (en) * | 2013-02-22 | 2014-09-08 | Kyoto Univ | Spatial precision measuring method of machine tool and spatial precision measuring device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2329349A (en) * | 1997-09-09 | 1999-03-24 | Geodetic Technology Internatio | Control of mechanical manipulators |
| JP3305288B2 (en) | 1999-09-20 | 2002-07-22 | 折尾精密株式会社 | Machine tool precision measuring device |
| DE10126753B4 (en) * | 2001-06-01 | 2005-02-10 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Method for increasing the accuracy of coordinate measuring machines and machine tools |
| JP4834596B2 (en) * | 2007-04-12 | 2011-12-14 | 株式会社東芝 | Cylindrical structure machining equipment |
| JP6013139B2 (en) * | 2012-10-30 | 2016-10-25 | 東芝機械株式会社 | Tool length measuring method and machine tool |
| CN105538038B (en) * | 2016-01-27 | 2018-01-16 | 清华大学 | Lathe translation shaft geometric error discrimination method |
| CN106624816B (en) * | 2016-11-22 | 2018-07-06 | 浙江大学 | A kind of frock clamp coordinate system establishing method of the horizontal automatic drill riveter of aircraft target ship |
| CN112621387A (en) * | 2020-12-28 | 2021-04-09 | 齐重数控装备股份有限公司 | Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe |
-
1994
- 1994-02-28 JP JP3011594A patent/JP2755346B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014163757A (en) * | 2013-02-22 | 2014-09-08 | Kyoto Univ | Spatial precision measuring method of machine tool and spatial precision measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07239209A (en) | 1995-09-12 |
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