JPH0722851Y2 - イオン処理装置 - Google Patents

イオン処理装置

Info

Publication number
JPH0722851Y2
JPH0722851Y2 JP1986047042U JP4704286U JPH0722851Y2 JP H0722851 Y2 JPH0722851 Y2 JP H0722851Y2 JP 1986047042 U JP1986047042 U JP 1986047042U JP 4704286 U JP4704286 U JP 4704286U JP H0722851 Y2 JPH0722851 Y2 JP H0722851Y2
Authority
JP
Japan
Prior art keywords
disk
ball
ion
rotating shaft
housed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986047042U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62158756U (enExample
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1986047042U priority Critical patent/JPH0722851Y2/ja
Publication of JPS62158756U publication Critical patent/JPS62158756U/ja
Application granted granted Critical
Publication of JPH0722851Y2 publication Critical patent/JPH0722851Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986047042U 1986-03-29 1986-03-29 イオン処理装置 Expired - Lifetime JPH0722851Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986047042U JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986047042U JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Publications (2)

Publication Number Publication Date
JPS62158756U JPS62158756U (enExample) 1987-10-08
JPH0722851Y2 true JPH0722851Y2 (ja) 1995-05-24

Family

ID=30867268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986047042U Expired - Lifetime JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0722851Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932198U (ja) * 1982-08-23 1984-02-28 石川島播磨重工業株式会社 ポンプの回転数制御装置
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Also Published As

Publication number Publication date
JPS62158756U (enExample) 1987-10-08

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