JPS62158756U - - Google Patents
Info
- Publication number
- JPS62158756U JPS62158756U JP4704286U JP4704286U JPS62158756U JP S62158756 U JPS62158756 U JP S62158756U JP 4704286 U JP4704286 U JP 4704286U JP 4704286 U JP4704286 U JP 4704286U JP S62158756 U JPS62158756 U JP S62158756U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- rotating shaft
- wafer
- rotating
- rotating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047042U JPH0722851Y2 (ja) | 1986-03-29 | 1986-03-29 | イオン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047042U JPH0722851Y2 (ja) | 1986-03-29 | 1986-03-29 | イオン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62158756U true JPS62158756U (enExample) | 1987-10-08 |
| JPH0722851Y2 JPH0722851Y2 (ja) | 1995-05-24 |
Family
ID=30867268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986047042U Expired - Lifetime JPH0722851Y2 (ja) | 1986-03-29 | 1986-03-29 | イオン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722851Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5932198U (ja) * | 1982-08-23 | 1984-02-28 | 石川島播磨重工業株式会社 | ポンプの回転数制御装置 |
| JPS5986143A (ja) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | ウエハ自動交換装置 |
-
1986
- 1986-03-29 JP JP1986047042U patent/JPH0722851Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5932198U (ja) * | 1982-08-23 | 1984-02-28 | 石川島播磨重工業株式会社 | ポンプの回転数制御装置 |
| JPS5986143A (ja) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | ウエハ自動交換装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0722851Y2 (ja) | 1995-05-24 |