JPH0722040Y2 - 電子線マイクロアナライザー - Google Patents

電子線マイクロアナライザー

Info

Publication number
JPH0722040Y2
JPH0722040Y2 JP1988026257U JP2625788U JPH0722040Y2 JP H0722040 Y2 JPH0722040 Y2 JP H0722040Y2 JP 1988026257 U JP1988026257 U JP 1988026257U JP 2625788 U JP2625788 U JP 2625788U JP H0722040 Y2 JPH0722040 Y2 JP H0722040Y2
Authority
JP
Japan
Prior art keywords
electron beam
detector
light
electron
microanalyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988026257U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01130253U (enrdf_load_stackoverflow
Inventor
俊行 正木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988026257U priority Critical patent/JPH0722040Y2/ja
Publication of JPH01130253U publication Critical patent/JPH01130253U/ja
Application granted granted Critical
Publication of JPH0722040Y2 publication Critical patent/JPH0722040Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1988026257U 1988-02-29 1988-02-29 電子線マイクロアナライザー Expired - Lifetime JPH0722040Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988026257U JPH0722040Y2 (ja) 1988-02-29 1988-02-29 電子線マイクロアナライザー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988026257U JPH0722040Y2 (ja) 1988-02-29 1988-02-29 電子線マイクロアナライザー

Publications (2)

Publication Number Publication Date
JPH01130253U JPH01130253U (enrdf_load_stackoverflow) 1989-09-05
JPH0722040Y2 true JPH0722040Y2 (ja) 1995-05-17

Family

ID=31247723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988026257U Expired - Lifetime JPH0722040Y2 (ja) 1988-02-29 1988-02-29 電子線マイクロアナライザー

Country Status (1)

Country Link
JP (1) JPH0722040Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226757A (ja) * 1985-07-25 1987-02-04 Shimadzu Corp 誘導結合プラズマ質量分析装置

Also Published As

Publication number Publication date
JPH01130253U (enrdf_load_stackoverflow) 1989-09-05

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