JPH0721572Y2 - 赤外線加熱単結晶製造装置 - Google Patents
赤外線加熱単結晶製造装置Info
- Publication number
- JPH0721572Y2 JPH0721572Y2 JP11157289U JP11157289U JPH0721572Y2 JP H0721572 Y2 JPH0721572 Y2 JP H0721572Y2 JP 11157289 U JP11157289 U JP 11157289U JP 11157289 U JP11157289 U JP 11157289U JP H0721572 Y2 JPH0721572 Y2 JP H0721572Y2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- bearing
- infrared
- infrared heating
- crystal manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 25
- 238000010438 heat treatment Methods 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000002994 raw material Substances 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11157289U JPH0721572Y2 (ja) | 1989-09-22 | 1989-09-22 | 赤外線加熱単結晶製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11157289U JPH0721572Y2 (ja) | 1989-09-22 | 1989-09-22 | 赤外線加熱単結晶製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350053U JPH0350053U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-15 |
| JPH0721572Y2 true JPH0721572Y2 (ja) | 1995-05-17 |
Family
ID=31660042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11157289U Expired - Lifetime JPH0721572Y2 (ja) | 1989-09-22 | 1989-09-22 | 赤外線加熱単結晶製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721572Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1989
- 1989-09-22 JP JP11157289U patent/JPH0721572Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0350053U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-15 |
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