GB1128752A - Improvements in or relating to electron microscopes - Google Patents

Improvements in or relating to electron microscopes

Info

Publication number
GB1128752A
GB1128752A GB9483/66A GB948366A GB1128752A GB 1128752 A GB1128752 A GB 1128752A GB 9483/66 A GB9483/66 A GB 9483/66A GB 948366 A GB948366 A GB 948366A GB 1128752 A GB1128752 A GB 1128752A
Authority
GB
United Kingdom
Prior art keywords
gimbals
turntable
rings
specimen
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB9483/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1128752A publication Critical patent/GB1128752A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,128,752. Electron microscopes. U. VALDRE. 4 March, 1966 [6 March, 1965], No. 9483/66. Heading H1D. In an electron microscpe specimen stage the specimen holder 1 is held in a gimbals mounting for rotational and tiltable adjustment, small contact areas between the bearing surfaces of the gimbals ensuring minimal heat transfer when the specimen is heated and maintained at e.g. 700‹ C. The gimbals mounting comprises inner and outer rings 2, (3), the outer ring (3) being mounted on a turntable 8 so that it can be rotated and the inner ring 2 incorporating a tilt member 9 having a spherical external surface engaged within the end of a tube 10 which is tiltable in two perpendicular directions about the centre of a ball joint 34. The driving mechanism for the turntable 8 comprises a gear train 22, 26, 28 and a worm drive which may be operated through a pair of bevel gears or a universal joint. The tilting mechanism for the tube 10 comprises a pair of driven plungers (135, 136) operating on the beaded element 39. The drive to one of the driven plungers (135, 136) may include a bell-crank lever so that the three drive couplings to the exterior for the tilting and rotating mechanisms may be associated together in a common guide block. On the inner ring 2 of the gimbals mounting is a toroidal heater coil 11 of non.ferromagnetic material, the coil being connected by stranded or braided wire to slip rings 112, 113. The gimbals bearings are point bearings, e.g. threaded pins or deformed portions (53, Fig. 5) of a turntable support (8a) and the rings may incorporate ceramic material to form a heatbarrier.
GB9483/66A 1965-03-06 1966-03-04 Improvements in or relating to electron microscopes Expired GB1128752A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT510365 1965-03-06

Publications (1)

Publication Number Publication Date
GB1128752A true GB1128752A (en) 1968-10-02

Family

ID=11117533

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9483/66A Expired GB1128752A (en) 1965-03-06 1966-03-04 Improvements in or relating to electron microscopes

Country Status (3)

Country Link
US (1) US3435210A (en)
DE (1) DE1539063C3 (en)
GB (1) GB1128752A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1789019B1 (en) * 1968-09-23 1972-04-27 Siemens Ag METHOD OF GENERATING A STEREO IMAGE BY USING ELECTRON BEAM MICROSCOPY
GB1301008A (en) * 1970-08-04 1972-12-29 Ass Elect Ind Improvements in or relating to specimen stages for electron microscopes
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus
JPS625548A (en) * 1985-07-01 1987-01-12 Hitachi Ltd Ion beam processing device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1160121B (en) * 1961-02-07 1963-12-27 Siemens Ag Heatable slide for electron beam devices, especially electron microscopes
US3240934A (en) * 1962-02-14 1966-03-15 Jeol Ltd Specimen holding device with means to tilt, rotate and shift the specimen
US3179799A (en) * 1962-05-02 1965-04-20 Valdre Ugo Goniometric apparatus for orientation of a specimen in an electron microscope
US3297869A (en) * 1963-02-13 1967-01-10 Hitachi Ltd Specimen heating device for an electron microscope specimen holder made of a single piece of material

Also Published As

Publication number Publication date
DE1539063A1 (en) 1969-09-11
DE1539063C3 (en) 1974-07-04
DE1539063B2 (en) 1973-12-13
US3435210A (en) 1969-03-25

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