DE1160121B - Heatable slide for electron beam devices, especially electron microscopes - Google Patents

Description

INTERNAT. KL. H 01 j

GERMAN

PATENT OFFICE

S 72395 Vmc / 21g

REGISTRATION DATE: 7TH F E B RU AR 1961

NOTICE THE REGISTRATION AND ISSUE OF THE EDITORIAL: DECEMBER 27, 1963

They are heatable slides for electron beam devices, in particular electron microscopes, known in which a surrounding it is used to heat the object Independent heating coil is used or where the object cartridge is on a porcelain cylinder is assigned in a free winding arrangement applied electrical heating winding. These arrangements require, partly due to their poor thermal insulation from the environment and partly due to their low thermal conductivity to the object, with regard to the entering unwanted heat losses for heating the property, an increased heating output.

In order to remedy this situation, one has the slide in another known electron beam device designed in such a way that electricity flows through it itself; he is z. B. band-shaped. One such an arrangement presents mechanical difficulties. So must ζ. B. the tape! exactly symmetrical be attached because its passage opening for the electron beams is very small. Because of the brittleness of the strip material, there is a risk of repeated operation The tape tears. The object attachment is also cumbersome with this training.

These disadvantages are in another known heatable slide for electron beam devices, in particular electron microscopes, avoided in which the specimen cartridge with a metal tube is equipped, which receives the insulated, preferably bifilar heating coil and which is equipped with a heat-insulating, cup-shaped insert is thermally insulated from the cartridge cone.

With this arrangement, during operation, i. H. during the heating of the lens carrier, undefined, jerky movements of the object as a result of the fact that the individual components heat the specimen cartridge to different degrees and also have different expansion coefficients own. The mechanical stability of the cartridge is therefore not ensured, so that the connection between the individual parts can loosen during operation.

The invention relates to a heatable slide for electron beam devices, in particular electron microscopes, in which the specimen cartridge is equipped with a metal tube, which is the isolated, preferably bifilar heating coil takes up and that through a heat-insulating, cup-shaped insert is thermally insulated from the cartridge cone. The invention is based on the object mentioned Avoid the disadvantage of mechanical instability.

Heatable slide

for electron beam devices,

especially electron microscopes

Applicant:

Siemens & Halske Aktiengesellschaft,

Berlin and Munich,
Munich 2, Wittelsbacherplatz 2

Dr. Karl-Heinz Herrmann,
Dipl.-Math. Wolfram Loebe

and Felix Wilke, Berlin,
have been named as inventors

In particular, the jerky object movements are to be converted into uniform movements that stop after heat equilibrium has been achieved between the connected parts.

This is achieved according to the invention in that the metal tube and / or the insert and / or the cartridge cone are braced against one another by elastic members, preferably springs. This tension offers security against loosening of the connection of the individual parts elevated temperature.

To explain the device described, the object cartridge to be inserted into the object table is shown in the drawing. The metal tube 3 made of titanium, molybdenum or platinum, for example, is attached to the cartridge cone 1, which is made of heat-insulating ceramic and serves as a carrier, by means of the nut 4, which can consist of the same metals. The insulated heating winding 5, preferably made of tungsten wire, is arranged in the wall of the metal tube 3. The heating winding is wound bifilar to avoid interference fields. At the lower end of the metal tube 3 there is the specimen diaphragm 6 in a fit, which is held by a cap 7 screwed onto the end of the metal tube 3. This structure of the cartridge makes it possible to get it through in a simple manner

309 770/328

containing ζ. Β. in a

Immersion of the heating coil 5
Metal tube 3 with the cap 7
Acid clean.

The lines labeled 8 are used to supply the heating power taken from the contact 9.

In addition to the parts mentioned, a pot-like pulling part 10 and a compression spring 11 are also provided, which serve to resiliently brace individual parts of the heating cartridge against each other. To this The purpose is the pot-like pulling part 10 together with the pot-shaped insert piece 2 by means of a nut 4 attached to the metal tube 3, and the pulling part 10 has a collar 12 on which the spring 11 with at one end. With its other end it lies on a shoulder 13 on the cartridge cone 1 and presses it against the support 14 of the cup-shaped insert 2; because of that this is The metal tube is spring-tensioned against the cartridge cone 1. The spring is expediently made of non-magnetic, temperature-resistant material. It is not in direct connection with the heated ones Split the object cartridge.

It can be advantageous to make the supply of the heating power to the contact 9 resilient, for example by using resilient contact rods (not shown).

The wall of the pot-like pulling part 10 facing the beam path can protect against charging be metallized. If the pulling part is not in front, the corresponding wall of the cup-shaped insert piece 12 be metallized.

As a result of the largely rotationally symmetrical structure of the exemplary embodiment shown in the drawing, movements essentially occur in the direction of the optical axis. Due to the good thermal insulation from the object table and the easy interchangeability of the object, as well as the low heat capacity of the parts to be heated, the heating, which takes place through thermal conduction and through thermal radiation from the bifilar heating coil 5, is very effective in the arrangement described. In order to keep the heat radiation of the object small, the object diaphragm 6 is arranged so that its conical opening faces the cap 7, which has the smallest possible beam passage opening. It is thereby achieved that the beam passage openings enclose the smallest possible solid angle emanating from the object.

A heated microscope slide, in which the object is masked in this way in a through the metal tube and the metal cap formed oven-like space, the beam passage openings from the The object is to include the smallest possible solid angles, is arranged, is already proposed been.

The temperature can be determined by measuring the heating power by means of a heating coil 5 assigned Wattmeters take place, which is not shown in the drawing.

Claims (6)

PATENT CLAIMS: 1. Heatable slide for electron beam devices, in particular electron microscopes, in which the slide is equipped with a metal tube which holds the insulated, preferably bifilar heating coil and which is thermally insulated from the cartridge cone by a heat-insulating, cup-shaped insert, as characterized in that the metal tube ( 3) and / or the insert (2) and / or the cartridge cone (1) are braced against one another by elastic members, preferably springs (11). 2. Object slide according to claim 1, characterized by the use of a pot-like pulling part (10), which by a nut (4) together with the cup-shaped insert (2) on the Metal tube (3) is attached, as well as a compression spring (11), one end of which on the pot-like Pull part (10) is fixed and the other end of the cartridge cone (1) against a Support (14) on the cup-shaped insert (2) presses. 3. Object slide according to claim 2, characterized in that the spring (11) made of non-magnetic, temperature-resistant material. 4. Object slide according to claim 2 or 3, characterized in that the spring (11) is not in is in direct contact with the heated parts of the specimen cartridge. 5. Object slide according to claim 2, characterized in that the one facing the beam path Wall of the pot-like pulling part (10) or the pot-shaped insert (2) for protection is metallized against charging. 6. Object slide according to one or more of claims 1 to 5, characterized by a rotationally symmetrical structure. Legacy Patents Considered:
German Patent No. 1131 820. 1 sheet of drawings © 309 770/328 12.63