JPH0720562Y2 - アクチュエータ - Google Patents

アクチュエータ

Info

Publication number
JPH0720562Y2
JPH0720562Y2 JP1985166935U JP16693585U JPH0720562Y2 JP H0720562 Y2 JPH0720562 Y2 JP H0720562Y2 JP 1985166935 U JP1985166935 U JP 1985166935U JP 16693585 U JP16693585 U JP 16693585U JP H0720562 Y2 JPH0720562 Y2 JP H0720562Y2
Authority
JP
Japan
Prior art keywords
rod
piston
fixed electrode
cylinder tube
movable rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985166935U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6275405U (enExample
Inventor
幹夫 堀川
輝次 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1985166935U priority Critical patent/JPH0720562Y2/ja
Publication of JPS6275405U publication Critical patent/JPS6275405U/ja
Application granted granted Critical
Publication of JPH0720562Y2 publication Critical patent/JPH0720562Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Actuator (AREA)
JP1985166935U 1985-10-30 1985-10-30 アクチュエータ Expired - Lifetime JPH0720562Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985166935U JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985166935U JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Publications (2)

Publication Number Publication Date
JPS6275405U JPS6275405U (enExample) 1987-05-14
JPH0720562Y2 true JPH0720562Y2 (ja) 1995-05-15

Family

ID=31098388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985166935U Expired - Lifetime JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Country Status (1)

Country Link
JP (1) JPH0720562Y2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2768961B2 (ja) * 1988-12-26 1998-06-25 東陶機器株式会社 位置検出機能を有する圧電アクチュエータ
JP5578898B2 (ja) * 2009-03-18 2014-08-27 株式会社小林製作所 計測機能付きチャック装置及びロボットチャック装置
JP5610901B2 (ja) * 2010-07-29 2014-10-22 株式会社小林製作所 計測機能付きチャック装置及びロボットチャック装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH614042A5 (enExample) * 1977-04-20 1979-10-31 Hans Ulrich Meyer
JPS617371Y2 (enExample) * 1980-06-18 1986-03-06
JPS5945505U (ja) * 1982-09-17 1984-03-26 株式会社小松製作所 シリンダストロ−ク検出装置
DE3321510C1 (de) * 1983-06-15 1984-10-04 Boge Gmbh, 5208 Eitorf Vorrichtung zur Wegbestimmung eines Kolbens

Also Published As

Publication number Publication date
JPS6275405U (enExample) 1987-05-14

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