JPH0719152Y2 - ウェハーカセットダム装置 - Google Patents

ウェハーカセットダム装置

Info

Publication number
JPH0719152Y2
JPH0719152Y2 JP5295290U JP5295290U JPH0719152Y2 JP H0719152 Y2 JPH0719152 Y2 JP H0719152Y2 JP 5295290 U JP5295290 U JP 5295290U JP 5295290 U JP5295290 U JP 5295290U JP H0719152 Y2 JPH0719152 Y2 JP H0719152Y2
Authority
JP
Japan
Prior art keywords
sprocket
sprockets
conveyor chain
pair
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5295290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412644U (enExample
Inventor
鏡 長谷川
Original Assignee
三友工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三友工業株式会社 filed Critical 三友工業株式会社
Priority to JP5295290U priority Critical patent/JPH0719152Y2/ja
Publication of JPH0412644U publication Critical patent/JPH0412644U/ja
Application granted granted Critical
Publication of JPH0719152Y2 publication Critical patent/JPH0719152Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP5295290U 1990-05-21 1990-05-21 ウェハーカセットダム装置 Expired - Lifetime JPH0719152Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5295290U JPH0719152Y2 (ja) 1990-05-21 1990-05-21 ウェハーカセットダム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5295290U JPH0719152Y2 (ja) 1990-05-21 1990-05-21 ウェハーカセットダム装置

Publications (2)

Publication Number Publication Date
JPH0412644U JPH0412644U (enExample) 1992-01-31
JPH0719152Y2 true JPH0719152Y2 (ja) 1995-05-01

Family

ID=31573706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5295290U Expired - Lifetime JPH0719152Y2 (ja) 1990-05-21 1990-05-21 ウェハーカセットダム装置

Country Status (1)

Country Link
JP (1) JPH0719152Y2 (enExample)

Also Published As

Publication number Publication date
JPH0412644U (enExample) 1992-01-31

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