JPH0719140Y2 - 減圧ｃｖｄ装置 - Google Patents

減圧ｃｖｄ装置

Info

Publication number
JPH0719140Y2
JPH0719140Y2 JP1985153706U JP15370685U JPH0719140Y2 JP H0719140 Y2 JPH0719140 Y2 JP H0719140Y2 JP 1985153706 U JP1985153706 U JP 1985153706U JP 15370685 U JP15370685 U JP 15370685U JP H0719140 Y2 JPH0719140 Y2 JP H0719140Y2
Authority
JP
Japan
Prior art keywords
quartz
inner tube
wafer
tube
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985153706U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262431U (enExample
Inventor
利一 狩野
豊 高橋
茂 武田
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1985153706U priority Critical patent/JPH0719140Y2/ja
Publication of JPS6262431U publication Critical patent/JPS6262431U/ja
Application granted granted Critical
Publication of JPH0719140Y2 publication Critical patent/JPH0719140Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985153706U 1985-10-09 1985-10-09 減圧ｃｖｄ装置 Expired - Lifetime JPH0719140Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153706U JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153706U JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6262431U JPS6262431U (enExample) 1987-04-17
JPH0719140Y2 true JPH0719140Y2 (ja) 1995-05-01

Family

ID=31072824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153706U Expired - Lifetime JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0719140Y2 (enExample)

Also Published As

Publication number Publication date
JPS6262431U (enExample) 1987-04-17

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