JPH0719140Y2 - 減圧ｃｖｄ装置 - Google Patents
減圧ｃｖｄ装置Info
- Publication number
- JPH0719140Y2 JPH0719140Y2 JP15370685U JP15370685U JPH0719140Y2 JP H0719140 Y2 JPH0719140 Y2 JP H0719140Y2 JP 15370685 U JP15370685 U JP 15370685U JP 15370685 U JP15370685 U JP 15370685U JP H0719140 Y2 JPH0719140 Y2 JP H0719140Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- inner tube
- wafer
- tube
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 title claims description 8
- 239000010453 quartz Substances 0.000 claims description 62
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 62
- 239000007789 gas Substances 0.000 claims description 32
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 55
- 239000005360 phosphosilicate glass Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000003795 desorption Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 235000015067 sauces Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15370685U JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15370685U JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6262431U JPS6262431U (enrdf_load_stackoverflow) | 1987-04-17 |
| JPH0719140Y2 true JPH0719140Y2 (ja) | 1995-05-01 |
Family
ID=31072824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15370685U Expired - Lifetime JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719140Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-10-09 JP JP15370685U patent/JPH0719140Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6262431U (enrdf_load_stackoverflow) | 1987-04-17 |
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