JPS6262431U - - Google Patents

Info

Publication number
JPS6262431U
JPS6262431U JP15370685U JP15370685U JPS6262431U JP S6262431 U JPS6262431 U JP S6262431U JP 15370685 U JP15370685 U JP 15370685U JP 15370685 U JP15370685 U JP 15370685U JP S6262431 U JPS6262431 U JP S6262431U
Authority
JP
Japan
Prior art keywords
quartz
inner tube
exhaust
adapter
quartz inner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15370685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0719140Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15370685U priority Critical patent/JPH0719140Y2/ja
Publication of JPS6262431U publication Critical patent/JPS6262431U/ja
Application granted granted Critical
Publication of JPH0719140Y2 publication Critical patent/JPH0719140Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15370685U 1985-10-09 1985-10-09 減圧cvd装置 Expired - Lifetime JPH0719140Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15370685U JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧cvd装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15370685U JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧cvd装置

Publications (2)

Publication Number Publication Date
JPS6262431U true JPS6262431U (enrdf_load_stackoverflow) 1987-04-17
JPH0719140Y2 JPH0719140Y2 (ja) 1995-05-01

Family

ID=31072824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15370685U Expired - Lifetime JPH0719140Y2 (ja) 1985-10-09 1985-10-09 減圧cvd装置

Country Status (1)

Country Link
JP (1) JPH0719140Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0719140Y2 (ja) 1995-05-01

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