JPH0719081Y2 - イオン源 - Google Patents

イオン源

Info

Publication number
JPH0719081Y2
JPH0719081Y2 JP4813189U JP4813189U JPH0719081Y2 JP H0719081 Y2 JPH0719081 Y2 JP H0719081Y2 JP 4813189 U JP4813189 U JP 4813189U JP 4813189 U JP4813189 U JP 4813189U JP H0719081 Y2 JPH0719081 Y2 JP H0719081Y2
Authority
JP
Japan
Prior art keywords
arc chamber
shield
slit
shields
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4813189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02138839U (enExample
Inventor
裕 井内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP4813189U priority Critical patent/JPH0719081Y2/ja
Publication of JPH02138839U publication Critical patent/JPH02138839U/ja
Application granted granted Critical
Publication of JPH0719081Y2 publication Critical patent/JPH0719081Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP4813189U 1989-04-24 1989-04-24 イオン源 Expired - Lifetime JPH0719081Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4813189U JPH0719081Y2 (ja) 1989-04-24 1989-04-24 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4813189U JPH0719081Y2 (ja) 1989-04-24 1989-04-24 イオン源

Publications (2)

Publication Number Publication Date
JPH02138839U JPH02138839U (enExample) 1990-11-20
JPH0719081Y2 true JPH0719081Y2 (ja) 1995-05-01

Family

ID=31564671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4813189U Expired - Lifetime JPH0719081Y2 (ja) 1989-04-24 1989-04-24 イオン源

Country Status (1)

Country Link
JP (1) JPH0719081Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2837023B2 (ja) * 1991-05-14 1998-12-14 アプライド マテリアルズ インコーポレイテッド イオン源の寿命を向上させたイオン打ち込み装置
JP5545452B2 (ja) * 2011-09-22 2014-07-09 日新イオン機器株式会社 プラズマ閉じ込め容器およびこれを備えたイオン源

Also Published As

Publication number Publication date
JPH02138839U (enExample) 1990-11-20

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