JPH0718957Y2 - 高温超伝導体アニーリング炉用内槽 - Google Patents

高温超伝導体アニーリング炉用内槽

Info

Publication number
JPH0718957Y2
JPH0718957Y2 JP5248988U JP5248988U JPH0718957Y2 JP H0718957 Y2 JPH0718957 Y2 JP H0718957Y2 JP 5248988 U JP5248988 U JP 5248988U JP 5248988 U JP5248988 U JP 5248988U JP H0718957 Y2 JPH0718957 Y2 JP H0718957Y2
Authority
JP
Japan
Prior art keywords
inner tank
oxygen
high temperature
annealing furnace
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5248988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01158099U (enExample
Inventor
浩 太田
真紀 川合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP5248988U priority Critical patent/JPH0718957Y2/ja
Publication of JPH01158099U publication Critical patent/JPH01158099U/ja
Application granted granted Critical
Publication of JPH0718957Y2 publication Critical patent/JPH0718957Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
JP5248988U 1988-04-19 1988-04-19 高温超伝導体アニーリング炉用内槽 Expired - Lifetime JPH0718957Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5248988U JPH0718957Y2 (ja) 1988-04-19 1988-04-19 高温超伝導体アニーリング炉用内槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5248988U JPH0718957Y2 (ja) 1988-04-19 1988-04-19 高温超伝導体アニーリング炉用内槽

Publications (2)

Publication Number Publication Date
JPH01158099U JPH01158099U (enExample) 1989-10-31
JPH0718957Y2 true JPH0718957Y2 (ja) 1995-05-01

Family

ID=31278490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5248988U Expired - Lifetime JPH0718957Y2 (ja) 1988-04-19 1988-04-19 高温超伝導体アニーリング炉用内槽

Country Status (1)

Country Link
JP (1) JPH0718957Y2 (enExample)

Also Published As

Publication number Publication date
JPH01158099U (enExample) 1989-10-31

Similar Documents

Publication Publication Date Title
JP3069412B2 (ja) 半導体ウエハの処理装置および方法
NO882057D0 (no) Hulfiberfilter, gruppe av slike filtre og fremgangsmaate for bruk av filtrene.
JPH0718957Y2 (ja) 高温超伝導体アニーリング炉用内槽
JPH0320441B2 (enExample)
JPS5588323A (en) Manufacture of semiconductor device
US3413728A (en) Method and apparatus for drying charged battery plates
US3943002A (en) Device for drying negative plates and plates made therewith
WO2012016422A1 (zh) 保温桶及具有该保温桶的立式热处理装置
RU2036400C1 (ru) Устройство для сушки древесины
JPH086007Y2 (ja) 真空炉
JP3436328B2 (ja) シリコンウエハの加熱装置
SU1378089A1 (ru) Камера дл СВЧ-обработки диэлектриков
JPH031554A (ja) 半導体ウエハー搬送用クリーンボックス
JPS648640A (en) Device for inspecting semiconductor
JPH0517143Y2 (enExample)
JPS61237430A (ja) 半導体蒸気乾燥洗浄用石英容器
JPH02170532A (ja) 基板乾燥装置および基板乾燥方法
JPS61152020A (ja) 処理装置
KR20010053884A (ko) 회전식 진공 농축기
Andrews et al. Modification of a microwave oven for laboratory use
JPH0143860Y2 (enExample)
JPWO1991007239A1 (ja) 乾燥方法及びそのための装置
SU1377692A1 (ru) Реактор дл выделени инертных газов из минералов
JPH0519756Y2 (enExample)
JPS594021A (ja) 真空断熱スペ−サ−