JPH0718911B2 - IC test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to an improvement of an IC test apparatus for IC testing.

[Conventional technology]

FIG. 10 is a perspective view showing a conventional IC test device disclosed in, for example, JP-A-60-15941.
(1) is a tray in which the inspected objects (2) are arranged, (3) is a rack accommodating this tray (1), and (4) is a conveying means for conveying the inspected object (2) on the tray (1) , (5)
Is a socket for testing the inspected object (2), (6) is a rotary arm mechanism for transferring the inspected object (2) on the transport means (4) to the socket (5), and (7) is the inspected object after the test. The object (2) is connected to the socket (5) through the rotary arm mechanism (6).
The transfer means is a transfer means for transferring the inspection object (2) to the tray (8) on which the inspection object (2) after the test is arranged. (9) is a rack for housing the tray (8) after the test.

In the structure as described above, the inspection object (2) is transferred from the tray (1) to the transfer means (4), and then the well-known vacuum suction collet (not shown) of the rotating arm mechanism (6). (2) The object to be inspected (2) is transferred to one of the pair of sockets (5). Similarly, the next object to be inspected (2) is transferred to the other socket (5) by the rotating arm mechanism (6). When the test is completed, the rotating arm mechanism (6) transfers the transfer means (7) to the transfer means (7). Further, the inspection object (2) transported by the transporting means (7) is arranged on the tray (8), and the tray (8) is housed in the rack (9).

[Problems to be solved by the invention]

In the conventional IC test device as described above, the same object to be inspected conveyed from the conveying means is tested by a pair of sockets. Of course, not only the replacement but also the tray must be changed, and the setup becomes troublesome, and there is a problem that it is not suitable when the item to be tested is changed frequently.

The present invention has been made to solve such a problem, and even when the item to be tested is frequently changed, setup can be performed without stopping the device, and the test time itself can be shortened. The purpose is to obtain the device.

[Means for solving problems]

An IC test apparatus according to the present invention is a first test system for testing a first inspected object, a second test system for testing a second inspected object, and each of the first and second test systems. Robot hand capable of supplying the first and second inspected objects to the test box, and at the time of testing the first and second test systems, any one of the first and second test systems A test completion timing predicting means that predicts whether the test system will complete the test first and makes the robot hand stand by so as to supply the first or second inspected object to the test box of the test system that completes earlier. It is equipped with.

Further, another IC test apparatus according to the present invention is a test system on the side to which the first or second object to be inspected was previously supplied when both the first and second test systems have completed the test. It is provided with alternate supply means for making the robot hand alternately stand by so as to supply the above-mentioned first or second inspection object to another test system.

[Action]

According to the present invention, the test completion timing predicting means predicts which of the first and second test systems will complete the test first, and the predicting means predicts which test system will complete the test earlier. It is possible to control the robot hand to stand by in order to supply the inspection object to the test box, transfer the inspection object by using the waiting time during the test, and shorten the test time itself.

In addition, in another invention of the present invention, when both the first and second test systems have completed the test, the test system on the side to which the first or second object to be inspected was supplied last time. In order to supply the above-mentioned first or second inspection object to another test system, the alternate supply means alternately waits the robot hand to test the two inspection objects evenly.

Example of Invention

FIG. 1 is a block diagram and a block diagram showing an embodiment of the present invention. In the figure, (101) is the hand of the robot (100) of FIG. 2, (102) is the A side test system,
(103) is the socket A, (104) is the B side test system, (105) is the socket B, (106) is either the A side test system (102) or the B side test system (104). A controller (107) for instructing whether or not to supply a semiconductor device (19) to be described later is provided for each system (102) by checking whether the A side test system (102) and the B side test system (104) have completed the test. ) (104) Judgment based on the signal from the completed system (102)
Alternatively, when the test completion judging means for outputting a signal corresponding to (104) receives a signal from the test completion judging means (107) that both systems (102) (104) have completed the test. , And both receive a signal that has not completed the test, the A side test system (102) or B
A priority instructing means that outputs a signal instructing one of the side test systems (104) to give priority can artificially set the priority instruction. (109) is a priority instructing means (108)
If the priority instruction of No. is not set, or if the priority instruction cannot be issued due to a failure, etc., the A side test system (10
2) and a completion time predicting means for calculating the respective test completion times of the B-side test system (104) and outputting a signal corresponding to the system (102) or (104) which is completed first,
(110) indicates that the test system (102) on the A side and the test system (104) on the B side have already completed the test, or the completion timing predicting means (109) indicates both systems (102) (10).
If 4) determines that the tests will be completed at the same time, the alternate supply means that outputs a signal corresponding to another test system different from the test system previously supplied by the hand (101) of the robot (100). , (111) to any of the test systems based on a signal from the test completion judging means (107), the priority instructing means (108), the completion timing predicting means (109) or the alternate supply means (110). The supply point determining means (112) for determining whether or not to supply the test system (1) determined by the supply point determining means (111).
02) or (104) socket (103) or (105) in order to supply the semiconductor device (19) corresponding to the socket to the robot hand (101) by the robot hand drive means for outputting a drive signal to stand by, The selected system, for example, the A side test system (102) is made to execute a series of operations. (113) is this robot hand drive means (11
It is a microcomputer that consists of 2) and the supply point judgment means.

FIG. 2 is a block diagram showing the whole of the present invention. In the figure, (120) is a test box of the A side test system (102), which includes a pre-alignment jig (121) and a socket (10).
Have 3). (122) is the A side test system (10
2) unmeasured pallet, (123) empty pallet, (124)
Is a non-defective pallet that contains non-defective semiconductor devices (19),
(125) is a defective product pallet for accommodating defective products, (126) is a vacuum suction by the hand (101) when a good product pallet (124) and a defective product pallet (125) are loaded, and the pallet (124) or ( 125) is an empty pallet that is stacked on top, and 127 is a pressure jig base on which a pressure jig 18 to be described later is placed before start and after stop. The B-side test system (104) also has the same test box (128),
Pre-alignment jig (129), unmeasured pallet (13
0), good product pallet (131), defective product pallet (132),
An empty pallet (133) and a pressure jig (134) are provided.

FIG. 3 is a partial sectional view showing the hand (101) of the robot (100). In the figure, (30) is the hand (10) of the robot.
A gear (30a) is formed substantially in the center of a shaft rotatably supported in 1) horizontally via an E bearing (31).
(32) is a mounting member coupled to the end of the shaft (30), and (33) is vertically coupled to the shaft (30) and the mounting member (32), respectively, as shown in FIG. A pair of spindles with (33a), for example different collets (1
2) and a pressure jig (18) are provided. (34)
Is a cylinder connected to the hand (101), and (35) is connected to a piston (34a) of this cylinder (34), and a gear (3
It is a rack that engages with 0a) and rotates the shaft (30).

FIGS. 4 to 7 are detailed views of the present invention. In FIG. 4, (12) is a collet slidably fitted in the hole (33a), which is a through hole communicating with the hole (33a). It has a hole (12a). (13) is a spring that biases the collet (12) toward the tip side, (14) is an O-ring that seals between the collet (12) and the spindle (33), and (15) is the collet (12).
A retaining ring (16) is a flange joined to the outer periphery of the spindle (33) in a flange shape, and a ring-shaped groove (16a) into which a vacuum is introduced is formed.
It is positioned by the step (33b) of 3) and the retaining ring (17). Reference numeral (18) is a pressure jig which is vacuum-adsorbed to the flange (16), and the pressing surface (18a) made of an insulating material is provided on each of the four surfaces at the tip.
Are fixed with screws (18b). (18c) is a pair of supports joined to the outer circumference of the pressure jig (18), and is provided on both the left and right sides. (18d) is a roller positioned between a pair of supports (18c), and is rotatably supported by a shaft (18e). Reference numeral (19) is a semiconductor device which is attached to the tip of the collet (12), and the lead terminal (19a) is positioned by the holding portion (18e). Reference numeral (103) is a socket provided with a measurement terminal (103a) connected to the lead terminal (19a). Next, in FIG. 5, (21) is a pressure jig (1
A pair of levers for pressing the roller (18d) of 8) to the measuring terminal (103a) side is supported by a linear guide (not shown) so as to be slidable in the horizontal direction. (22) is a pair of cylinders that drive the lever (21). In addition, (23) in FIG. 4 is a pipe (2) for introducing a vacuum into the hole (11a) of the spindle (11).
4) is a pipe for introducing a vacuum into the groove (16a) of the flange (16), and (25) is a table of the test handler, on which the socket (103), the lever (21) and the like are arranged. (1
22) is a pallet in which the semiconductor devices (19) before the test are arranged, and (124) is a non-defective pallet in which the good semiconductor devices (19) after the test are arranged.

Next, in FIG. 6, (50) is a pair of fittings connected to the lever (21) via bolts (51), and the piston shaft (22a) of the cylinder (22) is connected to the fitting. (51)
Is a bush made of an elastic body that elastically fits the piston shaft (22a) to the mounting tool (50), (52) is a washer, (53) is a nut that connects the piston shaft (22a), and (54) is mounting A pair of racks (56) coupled to the tool (50) via bolts (55) are gears meshing with the pair of racks (54), and are rotatable with respect to the base (25) via a shaft (57). Is supported by.

Reference numeral (58) is a plurality of bolts for fixing the cylinder (22) to the base (25).

In the configuration as described above, as shown in the flow chart of FIG.
In step (140), the supply point determination means (111) determines whether the controller (106) outputs a signal corresponding to the A side test system (102) or the B side test system (104). . Here, if a signal corresponding to the A side test system (102) is output, the robot hand drive means (112) performs drive control so that the hand (101) performs a series of operations as in step (141). Then, in step (142), the unmeasured product is first adsorbed, then in step (143), the semiconductor device (19) is positioned by the pre-alignment jig (121), and then in step (144).
The semiconductor device (19) that has been tested with the socket (10
The semiconductor device (19) sucked from 3) and positioned at the position of the socket (103) is transferred to start the test. Next, in step (145), the semiconductor device (19) that had been tested in step (144) was replaced with a non-defective pallet (12).
4) Then, the items are sorted and arranged on the defective product pallet (125), and the process returns to the step (140) again. In addition, when the B side test system (104) is operated, the same step (1
46) will be executed.

Next, the operation of the controller (106) will be described with reference to the flowchart of FIG. First, in step (150), the A side test system (102) or the B side test system (104).
Which of the above has completed the test? A test completion judging means (107) judges based on the output signal of each test system (102) (104), and only one of the A side and the B side has completed. In this case, the signal for the completed side is output to the supply point determination means (111), and
The operation of the flowchart in the figure is executed. Here, when both tests are in progress, the priority instruction means (108) sets the priority instruction in advance, and step (151) gives priority to one according to the instruction, for example, the A side is given priority instruction. Similarly, the operation of step (141) is executed. Next, when the priority instructing means (108) does not give priority, the completion time predicting means (109) calculates the completion time of both tests, and the test is completed early as in step (152). The robot hand (101) is drive-controlled for those who do. On the other hand, if the test completion judging means (107) judges that both the test systems (102) (104) are completed, or if the completion time predicting means (109) judges that the tests are completed at the same time, the alternation is performed alternately. Supply means (11
0) stores an example of the last time supplied by the robot hand (101), and the step (15) is performed so that the semiconductor device (19) before the test is supplied to another test system different from the last time.
3) Alternate supply means (110) to supply location determination means (11
It is output to 1).

Next, the operation of the hand (101) will be described in detail. First,
In FIG. 3, the hand (101) has a shaft (30).
Above and below the collet (12) and pressure jig (1
8) is mounted, for example, the lower side is for the A side test system and the upper side is for the B side test system. Here, when the test system (102) on the A side is operated, the semiconductor device (19) before the test is sucked from the pallet (122) by the collet (12). In this state, since the vacuum is also introduced into the groove (16a) of the flange (16), the pressure jig (18) is attracted to the flange (16), and the lead terminal (19a) of the semiconductor device (19). ) Is positioned by the holding section (18a). The collet (12) is urged by a spring (13) to a position where it is positioned by a stopper theory (15) under the atmospheric pressure, and its tip projects beyond the pressure jig (18). Meanwhile, this collet (1
When the semiconductor device (19) is sucked by 2), the collet (12)
The semiconductor device (19) is also displaced upward by negative pressure, and the lead terminal (19a) of the semiconductor device (19) is positioned by the holding portion (18a) of the pressure jig (18). Next, the robot hand (10) is driven to convey the semiconductor device (19) to the position of the socket (103), and when the negative pressure of each pipe (23) (24) is released, the semiconductor device (19) is placed on the socket (103). The semiconductor device (19) is positioned, and the holding portion (18a) of the pressure jig (18) contacts the lead terminal (19a). Here, when the cylinder (22) is driven, each of the pair of levers (21) causes the roller (18d) of the pressure jig (18).
Is pressed toward the measurement terminal (20a), the lead terminal (19a) is surely brought into contact with the measurement terminal (20a), and a predetermined test is executed. By the way, in this state, the pressurizing jig (18) is separated from the spindle (33), and the collet (12) can execute the operation of another process, for example, the transportation of the pallets (126) (122). That is, the hand (101) of the robot can be driven for another work even during the test time. Then when the test is complete, the spindle (3
3) descends together with the collet (12) and moves to the pressure jig (18), where the cylinder (22) is driven and the pair of levers (21) retracts to move the pressure jig (18). Is released and negative pressure is introduced into the groove (16a) of the flange (16),
The pressure jig (18) is sucked again, and the semiconductor device (19) that has been tested is sucked by the collet (12). Next, the robot hand (101) is moved to align the good semiconductor devices (19) on the good pallet (124).
Thus, when the semiconductor is pressed by one pressing jig (18), another process can be executed by the collet (12) of the suction device or another suction device, and the processing capacity is improved. In particular, the cylinder (34) and piston (34a) make it the rack (35).
By driving, the upper and lower suction devices are changed, so that different types of semiconductor devices can be simultaneously processed.

Next, horizontal sliding of the lever (21) will be described in detail below. First, when the pair of cylinders (22) are driven,
A horizontal force is transmitted to the piston shaft (22a) → the fixture (50) → the lever (21), and the lever (21) is slid horizontally via a linear guide (not shown). Therefore, the lever (21) biases the roller (18d) downward while rolling the roller (18d), and the pressure jig (18) is pressed downward. On the other hand, since the racks (54) are respectively coupled to the pair of attachments (50) and the rack (54) is meshed with the gear (56), the horizontal movement of the pair of levers (21) is Rack (5
4) and gear (56) are synchronized, and a pair of rollers (1
8d) is simultaneously pressed downward by the lever (21) to prevent the pressing jig (18) from tilting. On the other hand, since the bush (51) is made of an elastic body, it also absorbs a dimensional error in the arrangement of the rack (54) and the gear (56), and prevents twisting when driving both. The lever (21) is being driven smoothly.

By the way, the distance (A) between the test box (120) and the pre-alignment jig (121) matches the distance between the left and right spindles (33) of the hand (101), and the hand (101)
When the pressure jig (18) is attached to the collet (12) by reversing horizontally, when only the collet (12) is reversed, by reversing horizontally, suction of other processes You will be able to perform the action.

〔The invention's effect〕

As described above, the present invention provides a first test system for testing a first inspection object, a second test system for testing a second inspection object, and each of the first and second test systems. At the time of testing the robot hand capable of supplying the first and second inspection objects to the test box, and the first and second test systems, any one of the first and second test systems is tested. A test completion time predicting means for predicting whether the system completes the test first and waiting the robot hand to supply the first or second inspected object to the test box of the test system which completes earlier. Since it is equipped with it, you can use the waiting time during the test to perform other processes such as transferring the inspected object, and since the side that completes the test quickly waits, the test time is large. There is an effect that can be achieved Do not shortened.

Next, another invention of the present invention is that when the first or second test system has both completed the test,
Or, since the alternate supply control means for making the robot hand stand by to supply the first or second inspection object to a test system different from the test system on the side to which the second inspection object is supplied, There is an effect that the tests can be evenly performed for both test systems.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a schematic configuration diagram thereof, FIG. 3 is a partial sectional side view showing a hand portion of the present invention, and FIG. FIG. 5 is a cross-sectional view showing its operating state, FIG. 6 is a plan view of essential parts, FIG. 7 is an enlarged view of essential parts such as a collet, FIG. 8 is an operation flowchart of a microcomputer, and FIG. 9 is operation of a controller. A flow chart, FIG. 10 is a perspective view of a conventional device.
In the figure, (101) is a hand, (102) is an A side test system, (104) is a B side test system, (103) and (105) are sockets, (109) is a test completion timing predicting means, and (110).
Is alternate supply means, and (112) is robot hand drive means. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (2)

[Claims] 1. A first test system for testing a first inspected object, a second test system for testing a second inspected object, and test boxes for each of the first and second test systems. At the time of testing the robot hand capable of supplying the first and second inspection objects and the first and second test systems, whichever of the first and second test systems is first IC equipped with a test completion timing predicting means for predicting whether or not to complete the test, and making the robot hand stand by in order to supply the first or second inspected object to the test box of the test system which completes earlier Test equipment. 2. A first test system for testing a first test object, a second test system for testing a second test object, and test boxes for the first and second test systems, respectively. At the time of testing the robot hand capable of supplying the first and second inspection objects and the first and second test systems, whichever of the first and second test systems is first tested. Test completion timing predicting means for predicting whether the test is completed and waiting the robot hand to supply the first or second object to be tested to the test box of the test system which completes earlier, and the first. Or, when both of the second test systems have completed the test, the test system is different from the test system on the side to which the first or second object to be inspected is supplied last time. Serial first or IC test apparatus equipped with alternate feeding means to wait alternately the robot hand to supply the second object to be inspected.