JPH07178Y2 - 真空容器の圧力調整バルブ - Google Patents
真空容器の圧力調整バルブInfo
- Publication number
- JPH07178Y2 JPH07178Y2 JP4705287U JP4705287U JPH07178Y2 JP H07178 Y2 JPH07178 Y2 JP H07178Y2 JP 4705287 U JP4705287 U JP 4705287U JP 4705287 U JP4705287 U JP 4705287U JP H07178 Y2 JPH07178 Y2 JP H07178Y2
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- vacuum container
- outer cylinder
- adjusting
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011261 inert gas Substances 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 208000024891 symptom Diseases 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4705287U JPH07178Y2 (ja) | 1987-03-30 | 1987-03-30 | 真空容器の圧力調整バルブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4705287U JPH07178Y2 (ja) | 1987-03-30 | 1987-03-30 | 真空容器の圧力調整バルブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63157240U JPS63157240U (enrdf_load_stackoverflow) | 1988-10-14 |
| JPH07178Y2 true JPH07178Y2 (ja) | 1995-01-11 |
Family
ID=30867288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4705287U Expired - Lifetime JPH07178Y2 (ja) | 1987-03-30 | 1987-03-30 | 真空容器の圧力調整バルブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07178Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-03-30 JP JP4705287U patent/JPH07178Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63157240U (enrdf_load_stackoverflow) | 1988-10-14 |
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