JPH07168059A - Coupling method of arrayed optical elements - Google Patents
Coupling method of arrayed optical elementsInfo
- Publication number
- JPH07168059A JPH07168059A JP5313362A JP31336293A JPH07168059A JP H07168059 A JPH07168059 A JP H07168059A JP 5313362 A JP5313362 A JP 5313362A JP 31336293 A JP31336293 A JP 31336293A JP H07168059 A JPH07168059 A JP H07168059A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- array
- electrodes
- ferrule
- optical elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Led Device Packages (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はアレイ光素子の結合方法
に関し、特にアレイ光素子とアレイ状に配置した複数本
の光ファイバとの光学結合方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for coupling array optical elements, and more particularly to an optical coupling method for array optical elements and a plurality of optical fibers arranged in an array.
【０００２】[0002]
【従来の技術】従来のアレイ光素子の結合方法には例え
ば特開平３−３７６０４号公報に示す方法がある。2. Description of the Related Art As a conventional method for coupling array optical elements, for example, there is a method disclosed in Japanese Patent Laid-Open No. 3-37604.
【０００３】これは図２に示すように光素子を形成した
基板１０８に位置合せ用の穴（溝）１０７１，１０７２
を形成し、同様に位置合せ用の穴（溝）１０５１，１０
５２を設けた光ファイバ固定用のＶ溝基板１０３を位置
決め用ロッド１０１，１０２を用いて位置決めする。光
ファイバ固定用のＶ溝基板１０３には光ファイバ固定用
のＶ溝１０４１〜１０４４が設けられており、ここに光
ファイバ１０２１，１０２２を固定することにより光素
子１０９と光ファイバの光軸合わせを行う構造となって
いる。This is because holes (grooves) 1071 and 1072 for positioning are formed in a substrate 108 on which an optical element is formed as shown in FIG.
Forming holes (grooves) 1051, 10 for alignment in the same manner.
The V-groove substrate 103 for fixing the optical fiber provided with 52 is positioned using the positioning rods 101 and 102. The optical fiber fixing V-groove substrate 103 is provided with optical fiber fixing V-grooves 1041 to 1044, and by fixing the optical fibers 1021 and 1022 therein, the optical axis of the optical element 109 and the optical fiber is aligned. It is structured to do.
【０００４】[0004]
【発明が解決しようとする課題】この従来のアレイ光素
子の結合方法においては、光素子と光ファイバの光軸を
結合させるためには、基板間位置合わせ用の穴（溝）と
位置決め用ロッド，光ファイバ固定用Ｖ溝が必要であ
り、また、光素子と光ファイバの間の位置精度をだすた
めには、それぞれの部品の加工精度およびそれぞれの部
品における穴（Ｖ溝）の間に高い位置精度が必要とされ
る。In this conventional method of coupling array optical elements, in order to couple the optical axes of the optical element and the optical fiber, the holes (grooves) for positioning the substrates and the positioning rod are used. , V-grooves for fixing the optical fiber are required, and in order to obtain the positional accuracy between the optical element and the optical fiber, the processing accuracy of each component and the height between the holes (V-grooves) in each component are high. Positional accuracy is required.
【０００５】従って、従来のアレイ光素子の結合方法で
は、光ファイバ固定用Ｖ溝基板，位置決めロッド，光素
子を形成した基板が必要であり使用する部品が多いとい
う欠点があると共に、これらの部品を高精度で加工する
ことはきわめて難かしく、コストが高くなる問題があっ
た。Therefore, the conventional array optical element coupling method has a drawback in that a V-groove substrate for fixing an optical fiber, a positioning rod, and a substrate on which an optical element is formed are required, and many components are used. It was extremely difficult to machine the steel with high precision, and there was a problem that the cost became high.
【０００６】[0006]
【課題を解決するための手段】本発明のアレイ光素子の
結合方法では、複数本の光ファイバをアレイ状に固定し
た後、光ファイバと垂直な面に位置合わせ固定用の電極
を設ける。In the method of coupling an array optical element of the present invention, after fixing a plurality of optical fibers in an array, electrodes for positioning and fixing are provided on a surface perpendicular to the optical fibers.
【０００７】また、アレイ光素子の発光面または受光面
側の同様の位置に電極を設ける。この両方の電極のいず
れか一方または両方にハンダバンプを形成し、両者の電
極を向かいあわせて加熱することによりアレイ光素子と
光ファイバの位置合わせを行う。Further, electrodes are provided at the same position on the light emitting surface or the light receiving surface side of the array light element. Solder bumps are formed on either or both of the two electrodes, and the electrodes are faced to each other and heated to align the array optical element and the optical fiber.
【０００８】[0008]
【実施例】次に本発明について図面を参照して説明す
る。The present invention will be described below with reference to the drawings.
【０００９】図１は本発明の一実施例である。FIG. 1 shows an embodiment of the present invention.
【００１０】図１（Ａ）は複数の光ファイバを配置した
フェルール部分の斜視図である。FIG. 1A is a perspective view of a ferrule part in which a plurality of optical fibers are arranged.
【００１１】フォトリソグラフィー技術によりＶ溝を形
成したシリコン基板３１の上に光ファイバ１１〜１４を
載せ、さらにＶ溝を形成した基板３２を載せた後、接着
剤にて固定する。このフェルール部分を光ファイバの光
軸と垂直な方向に切断，研磨した後、位置合わせ用の電
極２１〜２４をフォトリソグラフィー技術を用いて形成
する。The optical fibers 11 to 14 are placed on the silicon substrate 31 having the V groove formed therein by the photolithography technique, and the substrate 32 having the V groove formed thereon is further placed on the silicon substrate 31 and fixed with an adhesive. After cutting and polishing the ferrule portion in the direction perpendicular to the optical axis of the optical fiber, the electrodes 21 to 24 for alignment are formed by using the photolithography technique.
【００１２】次に電極２１〜２４上に一定量のハンダバ
ンプ７１〜７４を印刷により形成することによりハンダ
バンプ付き電極が形成される。Next, a certain amount of solder bumps 71 to 74 are formed on the electrodes 21 to 24 by printing to form electrodes with solder bumps.
【００１３】図１（Ｂ）はアレイ光素子４の斜視図であ
る。FIG. 1B is a perspective view of the array optical element 4.
【００１４】アレイ光素子４の発光点（受光点）５１〜
５４が光ファイバ１１〜１４と位置合わせできるよう発
光点（受光点）側の面のフェルール側電極２１〜２４と
同じ位置に位置合わせ用電極６１〜６４を設ける。Light emitting points (light receiving points) 51 of the array optical element 4
Positioning electrodes 61 to 64 are provided at the same positions as the ferrule side electrodes 21 to 24 on the surface on the light emitting point (light receiving point) side so that 54 can be aligned with the optical fibers 11 to 14.
【００１５】図１（Ｃ）はフェルール部分と、アレイ光
素子を結合させた状態を表わす斜視図である。FIG. 1C is a perspective view showing a state in which the ferrule portion and the array optical element are combined.
【００１６】図１（Ｄ）は図１（Ｃ）のＡ−Ａ′断面図
である。FIG. 1D is a sectional view taken along the line AA 'in FIG.
【００１７】フェルール部分とアレイ光素子とを向かい
合わせ両者の電極２１〜２４と６１〜６４を密着させて
加熱するとハンダバンプが溶融する。これを冷却するこ
とにより両者の電極がハンダバンプによって固定されハ
ンダのセルフアライン効果により高精度で光ファイバと
光素子の間の光軸結合が成立する。When the ferrule portion and the array optical element are faced to each other and the electrodes 21 to 24 and 61 to 64 of both are brought into close contact with each other and heated, the solder bump is melted. By cooling this, both electrodes are fixed by the solder bumps, and the optical axis coupling between the optical fiber and the optical element is established with high accuracy by the self-alignment effect of the solder.
【００１８】[0018]
【発明の効果】以上説明したように、本発明に係るアレ
イ光素子の結合方法は、アレイ状に配置した光ファイバ
を固定したフェルールの断面とアレイ光素子の発光（受
光）面との同じ位置に電極を設け、これらの電極の一方
あるいは両方にハンダバンプを形成し、フェルールとア
レイ光素子を向い合わせて加熱することにより光ファイ
バと光素子の光軸を結合させることができるので、使用
する部品は光ファイバ固定用の基板のみであり安価に構
成でき、また、フェルール部分とアレイ光素子をハンダ
バンプで結合するだけで位置合わせを行うため電極の大
きさ，電極の個数，ハンダの量を適宜設定することによ
り高精度の位置合わせができるという効果を有する。As described above, according to the method of coupling array optical elements of the present invention, the cross section of the ferrule fixed with the optical fibers arranged in an array and the light emitting (light receiving) surface of the array optical element are at the same position. It is possible to combine the optical axis of the optical fiber with the optical axis by forming electrodes on one side and forming solder bumps on one or both of these electrodes and heating them by facing the ferrule and the array optical element. Is only a substrate for fixing optical fiber and can be constructed at low cost. In addition, the size of electrodes, the number of electrodes, and the amount of solder are set appropriately because the alignment is performed only by connecting the ferrule part and the array optical element with solder bumps. By doing so, there is an effect that highly accurate alignment can be performed.
【図１】本発明の一実施例を示し、（Ａ）はフェルール
部分の斜視図、（Ｂ）はアレイ光素子の斜視図、（Ｃ）
は光結合状態を示す斜視図、（Ｄ）は（Ｃ）のＡ−Ａ′
における断面図。1A and 1B show an embodiment of the present invention, in which FIG. 1A is a perspective view of a ferrule part, FIG. 1B is a perspective view of an array optical element, and FIG.
Is a perspective view showing an optical coupling state, (D) is A-A 'of (C).
FIG.
【図２】従来の技術の一例を示す分解斜視図。FIG. 2 is an exploded perspective view showing an example of a conventional technique.
４ アレイ光素子 １１〜１４ 光ファイバ ２１〜２４ 電極 ３１，３２ Ｖ溝を形成した基板 ５１〜５４ 発光（受光）点 ６１〜６４ 電極 ７１〜７４ ハンダバンプ １０１，１０２ 位置決め用ロッド １０３ 光ファイバ固定用Ｖ溝基板 １０８ 光素子を形成した基板 １０９ 光素子 １０２１，１０２２ 光ファイバ １０４１〜１０４４ 光ファイバ固定用Ｖ溝 １０５１，１０５２，１０７１，１０７２ 基板間位
置合わせ用の穴（溝）4 Array Optical Elements 11-14 Optical Fibers 21-24 Electrodes 31, 32 V-Grooved Substrate 51-54 Light Emitting (Receiving) Points 61-64 Electrodes 71-74 Solder Bumps 101, 102 Positioning Rod 103 Optical Fiber Fixing V Groove substrate 108 Substrate on which optical element is formed 109 Optical element 1021, 1022 Optical fiber 1041-1044 V groove for fixing optical fiber 1051, 1052, 1071, 1072 Holes (grooves) for inter-substrate alignment
Claims (1)
と、１チップ上に複数個の光，電気変換素子または電
気，光変換素子を配置したアレイ光素子の光軸を合わせ
て固定するアレイ光素子の結合方法において、 アレイ状に配置した光ファイバを固定したフェルールの
光ファイバの光軸と垂直な面に電極を設け、さらに、ア
レイ光素子の発光面または受光面側に前記フェルールと
同じ位置に電極を設け、次に、前記フェルール側の電極
と前記アレイ光素子側の電極のいずれか一方または両方
にハンダバンプを作成した、後前記フェルールと前記ア
レイ光素子とを向かいあわせて密着配置し、前記ハンダ
バンプを加熱，溶融，冷却することによりフェルールと
アレイ光素子を位置合わせし、固定することを特徴とす
るアレイ光素子の結合方法。1. An optical fiber having a plurality of optical fibers arranged in an array, and an array light having a plurality of light, electrical conversion elements or array optical elements having a plurality of electrical and optical conversion elements arranged on one chip. In the element coupling method, an electrode is provided on the surface perpendicular to the optical axis of the optical fiber of the ferrule with fixed optical fibers arranged in an array, and the light emitting surface or the light receiving surface of the array optical element has the same position as the ferrule. An electrode is provided on the electrode, and then a solder bump is formed on either or both of the electrode on the ferrule side and the electrode on the array light element side, and the ferrule and the array light element are placed in close contact with each other, A method for coupling array optical elements, characterized in that the ferrule and the array optical element are aligned and fixed by heating, melting and cooling the solder bumps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5313362A JPH07168059A (en) | 1993-12-14 | 1993-12-14 | Coupling method of arrayed optical elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5313362A JPH07168059A (en) | 1993-12-14 | 1993-12-14 | Coupling method of arrayed optical elements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07168059A true JPH07168059A (en) | 1995-07-04 |
Family
ID=18040349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5313362A Pending JPH07168059A (en) | 1993-12-14 | 1993-12-14 | Coupling method of arrayed optical elements |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07168059A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05303023A (en) * | 1992-04-13 | 1993-11-16 | Nec Corp | Connecting structure between optical waveguide element and optical fiber |
-
1993
- 1993-12-14 JP JP5313362A patent/JPH07168059A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05303023A (en) * | 1992-04-13 | 1993-11-16 | Nec Corp | Connecting structure between optical waveguide element and optical fiber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19961203 |