JPH0714967Y2 - Laser beam reflector for laser processing machine - Google Patents

Description

[Detailed description of the device] [Industrial applications]

The present invention relates to a laser beam machine, and more particularly, to a laser beam reflecting device which is disposed on an optical path of a laser beam and reflects the laser beam.

[Prior art]

Conventionally, in a laser processing machine, in order to guide a laser beam oscillated and emitted from a laser oscillator to a focusing lens of a focus head, the laser beam is reflected by a laser beam reflecting device provided at a required position and guided to the focusing lens. I am trying to do it. As a laser beam reflecting device of a conventional laser processing machine, a first reflecting mirror that reflects a laser beam and a second reflecting mirror that is arranged at a distance from the first reflecting mirror and reflects the laser beam.
A reflecting mirror; and a supporting frame that supports the first reflecting mirror and the second reflecting mirror so that the tilt angles thereof can be adjusted, respectively, and a passage path of a laser beam emitted toward the first reflecting mirror,
What shields the passage of the laser beam reflected by the first reflecting mirror and emitted toward the second reflecting mirror and the passage of the laser beam reflected by the second reflecting mirror from the atmosphere. Are known. As described above, in the conventional laser processing machine, the passage of the laser beam is shielded from the atmosphere, or if necessary, a gas having a pressure higher than the atmospheric pressure is enclosed in the interior of the reflecting mirror so that the reflection mirror is exposed to the atmosphere. Prevents dirt from getting dirty.

[Problems to be solved by the device]

However, even if the above measures are taken,
Although it is necessary to inspect and clean the reflecting mirror regularly or as needed, when the reflecting mirror is checked and cleaned in the conventional reflecting device, the reflecting mirror must be removed from the support frame. Therefore, the inspection and cleaning work of the reflector becomes complicated,
Moreover, when mounting the reflector on the support frame after cleaning, the tilt angle of the reflector must be adjusted so that the laser beam is reflected at an appropriate angle, and this adjustment work also requires a lot of time. I was there.

[Means for Solving the Problems]

In view of the above problems, the present invention provides the above support frame with
When closed, it covers the space between the first reflecting mirror, the second reflecting boundary, and both reflecting mirrors to shield the passage path of the laser beam from the atmosphere, and when opening, the first reflecting mirror, the second reflecting boundary, and both. A cover is provided to expose the space between the reflecting mirrors to the outside, and further cooling air is supplied to the first reflecting mirror and the second reflecting mirror and the cooling air is supplied into the passage of the laser beam. Is provided.

[Action]

In the present invention, by opening the cover, the space between the two reflecting mirrors arranged at intervals can be used as a space for cleaning, and therefore, the reflecting mirrors can be removed without removing them from the support frame. The reflecting mirror can be easily cleaned. Therefore, it is not necessary to readjust the tilt angle of the reflecting mirror after cleaning, and even if it is necessary, fine adjustment is sufficient, and the work can be performed easily and in a short time. When the cover is closed, it is possible to keep the passage of the laser beam shielded from the atmosphere.
This makes it possible to prevent dust from entering the laser beam passage from the outside. Particularly, since the cooling air is supplied to the first reflecting mirror and the second reflecting mirror through the supply passage and the cooling air is supplied into the passage of the laser beam, the reflecting mirrors are cooled by the cooling air. Not only can they be cooled to prevent them from overheating, but the pressure in the passage can be made higher than atmospheric pressure by supplying the cooling air into the passage of the laser beam shielded from the atmosphere. Thus, it is possible to more effectively prevent dust from entering from the outside into the passage of the laser beam.

【Example】

The present invention will be described below with reference to the illustrated embodiment. In FIG. 1, a laser beam L oscillated and emitted from a laser oscillator 1 is reflected by two reflecting mirrors 3 provided in a reflecting device 2 of the present invention, and is not shown. It is designed to be guided to the condenser lens of the focus head. The reflection device 2 includes a support frame 4 arranged on one side of the laser oscillator 1. The support frame 4 is a flat plate-shaped support member 5 arranged in the vertical direction, and is disposed above and below the support member 5. It is composed of the attached bracket 6.
The supporting member 5 is attached to the machine frame 8 supporting the laser oscillator 1 via the connecting member 7, and the supporting member 5
Laser beam between the upper part of the laser oscillator 1 and the laser oscillator 1, more specifically, the case 1, and between the lower part of the support member 5 and the case 9 in which a focus head (not shown) is movably sealed. A pipe 10 covering the optical path of L is connected. As shown in FIG. 2, the pipe 10 penetrates through the upper and lower openings 5a formed in the support member 5, and the holes 6a of the brackets 6 are formed.
The holder 15 accommodating the reflecting mirror 3 is attached to each bracket 6 at an angle of about 45 degrees. Each of the holders 15 is provided with a cylindrical member 16, and the outer peripheral portion of the reflecting surface of the reflecting mirror 3 is engaged with the engaging portion formed by projecting inward in the radial direction at the tip of the inner peripheral surface thereof. The reflecting mirror 3 is attached to the holder 15, and the porous body 17 made of a sintered metal having a good thermal conductivity is closely attached to the back side of the reflecting mirror 3. The back surface of the porous body 17 is supported by a disk-shaped support member 19 via an O-ring 18, and the support member 19 is integrally fixed to the cylindrical member 16 by a bolt 20.
Then, the support member 19 is attached to the bracket 6 by a plurality of adjusting bolts 21, and the O-ring 22 is interposed between the support member 19 and the bracket 6,
The holder 15 is floatingly attached to the bracket 6.
Therefore, by inserting a screwdriver or the like through the opening 6b formed in the bracket 6 and rotating the appropriate adjusting bolt 21 (see FIG. 3), the inclination angle of the reflecting mirror 3 can be adjusted via the holder 15. . Further, a cooling passage 23 for cooling the reflecting mirror 3 heated by the laser beam L is bored in the shaft portion of the support member 19, and the cooling passage 23 is kept airtight by the O-ring 22. It communicates with a passage 24 formed in the bracket 6, and this passage 24 communicates with a supply source of cooling air (not shown) via a conduit 25. The cooling air supplied from the supply source into the cooling passage 23 flows inside the porous body 17 to cool the reflecting mirror 3 and inside the annular groove 26 formed on the inner peripheral surface of the cylindrical member 16. Into the cylindrical member
It is designed to flow to the reflecting surface side of the reflecting mirror 3, that is, into the passage path of the laser beam L via the groove formed on the inner peripheral surface of 16. However, a box-shaped cover 27 that accommodates the two brackets 6 at the same time is detachably attached to the support member 5, and
As shown in the figure, the passage of the laser beam L is shielded from the atmosphere by the case 1, the two pipes 10 of the laser oscillator, the support frame 4 and the cover 27, and the cover 9 of the focus head (not shown). Above cover 27
Form a slit 28 which allows relative entry of the conduit 25 connected to the bracket 6 and which is closed by the bracket 6, whereby the cover 27 is attached to the support frame 4 without removing the conduit 25. It is designed to be removable. According to the above configuration, when the cover 27 is attached to the support frame 4, each reflecting mirror 3 in the reflecting device 2 is adjusted so as to reflect the laser beam L at a required angle. The passage path of the laser beam L is shielded from the atmosphere by the case 1, the two pipes 10 of the laser oscillator, the support frame 4 and the cover 27, and the cover 9 of the focus head (not shown) as described above. When it is necessary to inspect and clean each reflecting mirror 3, a large opening can be formed between the pair of reflecting mirrors 3 simply by removing the cover 27. Each reflecting mirror 3 can be easily inspected and cleaned through the opening without removing it. Then, after the inspection and cleaning of the reflecting mirror 3 is finished, the cover 27 is attached in the state as it is, or if the tilt angle of the reflecting mirror 3 is finely adjusted as necessary, then the passage path of the laser beam L is sealed again. You can Further, since the cooling air is supplied to each of the reflecting mirrors 3 by the cooling passage 23, each of the reflecting mirrors can be cooled by the cooling air to prevent their overheating. Further, since the cooling air is supplied into the passage path of the sealed laser beam L, the pressure in the passage path can be made higher than the atmospheric pressure, whereby the passage path of the laser beam is increased. It is possible to more effectively prevent dust from entering from the outside.

[Effect of device]

As described above, according to the present invention, the complexity of the work for inspecting and cleaning the reflecting mirrors is eliminated, the working time can be shortened, and the cooling air prevents the reflecting mirrors from overheating. In addition to the above, it is possible to effectively prevent dust from entering from the outside into the passage of the laser beam.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of the present invention, and FIG. 2 is a first view.
FIG. 3 is an enlarged sectional view showing a main part of the figure, and FIG. 3 is a perspective view of the main part of FIG. 1 ... Laser oscillator, 2 ... Reflector 3 ... Reflector, 4 ... Support frame 6 ... Bracket, 10 ... Pipe 15 ... Holder, 21 ... Adjusting bolt 27 ... Cover, L ... Laser Ray of light

Claims (1)

[Scope of utility model registration request] 1. A first reflecting mirror which reflects a laser beam, a second reflecting mirror which is arranged at a distance from the first reflecting mirror and reflects the laser beam, the first reflecting mirror and the second reflecting mirror. And a support frame that supports the boundary and the tilt angle of each of the support frames adjustable, and a passage path of the laser beam emitted toward the first reflecting mirror and a second reflecting mirror that is reflected by the first reflecting mirror. A laser beam reflecting device of a laser processing machine in which a passage path of a radiated laser beam and a passage path of a laser beam reflected by a second reflecting mirror are shielded from the atmosphere. The passage of the laser beam is shielded from the atmosphere by covering the reflecting mirror, the second reflecting boundary, and the space between the reflecting mirrors, and at the time of opening the first reflecting mirror, the second reflecting boundary, and the space between the reflecting mirrors. A cover that exposes the space to the outside And a cooling passage for supplying cooling air to the first reflecting mirror and the second reflecting mirror and for supplying the cooling air into the passage of the laser beam. Laser beam reflector.