JP3089382B2 - Laser oscillation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser oscillation device, and more particularly to a laser oscillation device having a laser chamber and an optical resonance mirror on a common base.

[0002]

2. Description of the Related Art The configuration of a conventional laser oscillation device for laser processing is shown in FIGS. FIG. 6 is a front view, and FIG. 7 is a plan view.

In this conventional laser oscillation apparatus, a total reflection mirror holder 102, an optical resonator shutter 104, and a laser chamber 1 are placed on a rectangular cylindrical support or base 100 made of a metal having high thermal conductivity, for example, aluminum.
06, the optical resonator shutter 108 and the output mirror holder 110 are arranged in a line with their optical axes aligned. Further, when viewed from the laser chamber 106 side, the output mirror holder 110
Behind, a reflection mirror 112 is disposed with the reflection surface inclined at a predetermined angle, for example, 45 ° with respect to the optical axis,
An external laser shutter 114 and an incident unit 116 are arranged on the optical axis on the reflection side of the reflection mirror 112. One end of an optical fiber 118 is connected to the exit of the incidence unit 116, and the reflection mirror 11 is provided inside the unit 116.
A condensing lens 116a for condensing the laser light from two sides on the end face of the optical fiber 118 is provided. The other end of the optical fiber 118 is connected to an emission unit (not shown) arranged at a processing location.

The total reflection mirror holder 102 holds a total reflection mirror, and the output mirror holder 110 holds an output mirror. The laser chamber 106 is made of, for example, a casing made of an acrylic resin, and has a laser rod, an excitation lamp, a reflecting lens barrel, and the like provided therein.

[0005] When the excitation lamp is turned on in the laser chamber 106, the laser rod is excited by the light energy, and laser light is emitted from both end faces of the laser rod by stimulated emission. Light is repeatedly reflected between the total reflection mirror on the side of the total reflection mirror holder 102 and the output mirror on the side of the output mirror holder 110 and is output through the output mirror after resonance amplification.

[0006] The laser light output from the output mirror is reflected by the reflecting mirror 112 at a substantially right angle, passes through the external shutter 114 and enters the incidence unit 116, where the unit 1
The light is condensed and incident on one end surface of the optical fiber 118 by the condensing lens 116a in the optical fiber 16, is transmitted through the optical fiber 118, enters the emission unit, and is collected on the workpiece (not shown) by the condensing lens of the emission unit. It is designed to be irradiated with light.

[0007]

In the above-described conventional laser oscillation device, the total reflection mirror holder 102 and the output mirror holder 110 are mounted on the base 100 so as to stand substantially vertically. 102,1
The two optical resonance mirrors (total reflection mirror and output mirror) are operated by operating the respective adjustment knobs 102a and 110a of No. 10.
The parallelism between them is adjusted, and the work of mounting the optical resonator and aligning the optical axis is troublesome, requiring much labor and time. Even in the laser chamber 106, the end face of the laser rod may be displaced or inclined with respect to the reflection surface of the optical resonance mirror because it is simply attached to the base 100 with the bolt 107 and has no positioning means. was there.

Further, if dust or dirt adheres to the end face of the laser rod or the reflection face of the optical resonance mirror, the energy of the laser beam is concentrated (absorbed) there, and the rod end face or the mirror reflection face is burned. There is a possibility that it will. Therefore, in this type of laser oscillation device, a cylindrical optical path cover is provided between adjacent optical components so as to cover the laser optical path so as to prevent dust from adhering to the rod end surface or the mirror reflection surface. .

However, in the conventional laser oscillation device, since the laser beam is bent at a right angle by the reflection mirror 112 behind the output mirror and then guided to the incidence unit 116, the laser beam path in that portion is provided with an optical path cover. It was extremely difficult to do so, and in most cases it was almost exposed, so there was no way to take measures against dust. Even in the laser beam path between the laser chamber and the mirror holder, when the laser oscillation device is downsized, it is difficult to mount the light path cover in a narrow space from the viewpoint of the mounting work and the mechanism. come.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a first object of the present invention is to provide a small-sized and simple configuration for efficient dust-proofing in a laser light path between an output mirror and an optical fiber incidence surface. The present invention provides a laser oscillation device to which the above is applied.

A second object of the present invention is to provide a laser oscillation device which can easily assemble an optical resonator and adjust optical axis alignment.

A third object of the present invention is to provide a laser oscillator capable of effectively protecting all optical systems from a laser medium to an optical fiber incident surface from adhesion of dust, water, etc., contamination, damage, and the like. Is to do.

[0013]

[0014]

[0015]

In order to achieve the above object, a first laser oscillation device of the present invention comprises a laser chamber for holding a laser medium and a laser exciting means, and a laser beam emitted from the laser medium. In a laser oscillation device provided with a pair of optical resonance mirrors for resonance amplification on a common base, the base is formed in a box shape, and the pair of optical resonance mirrors is provided on one side wall of the box type base through which an optical axis of the laser medium passes. of then mounting the total reflection mirror holding portion for holding the total reflection mirror of the light resonance mirror, the laser beam through hole formed on the other side wall of the box-type base where the optical axis passes through the laser medium, this
The other side of the box-shaped base with the laser light passage hole
Formed by mounting the incident unit for entering the laser beam outputted from the output mirror and an output mirror holder for holding the output mirror of the pair of optical resonance mirrors on the side璧 one end face of the optical fiber The configuration was adopted.

Further , the second laser oscillation device of the present invention comprises:
A box-shaped base, a lower condenser having a semi-elliptically curved light reflecting surface, a laser rod disposed at a predetermined position in the lower condenser, and disposed at an upper opening of the lower condenser And a lower laser chamber assembly mounted on the box base with the light reflecting surface of the lower concentrator facing upward, and an optical axis of the laser rod. A total reflection mirror attached to one side wall of the box base passing therethrough; an output mirror attached to the other side wall of the box base passing the optical axis of the laser rod; and a light reflection curved in a semi-elliptical shape. An upper concentrator having a surface, and an excitation lamp disposed at a predetermined position in the upper concentrator, wherein the light reflecting surface of the upper concentrator faces downward to the lower laser chamber assembly. An upper laser chamber assembly that is detachably fitted; Shielding means for shielding the total reflection mirror and the output mirror from the upper laser chamber assembly and the outside of the apparatus; and the box-shaped base for causing the laser light output from the output mirror to enter one end surface of an optical fiber. And an incident unit attached to the other side wall.

[0017]

[0018]

[0019]

In the first laser oscillation device of the present invention, the base is
Mirrors on both sides of the box base, which is configured as a box and the optical axis passes through
Used as a support section, with the output mirror holding section through the base side wall
To directly connect the incident unit. Thus, the output mirror
The output unit is directly connected to the holding unit,
The optical path from the optical fiber to the optical fiber end surface (incident surface)
From the outside by the radiation unit housing
Protected. Also, at least one of the pair of optical resonance mirrors
The mirror support that supports one of the mirrors is
Formed on the body and the one mirror is mounted on the mirror support.
By mounting in a fixed state, the structure around the mirror
Simplification and downsizing make installation easy, and one side
Since the parallelism needs to be adjusted only on the mirror side,
Adjustment of the alignment is also simplified.

In the second laser oscillating device of the present invention, since the optical system of the laser oscillator and the optical resonator is shielded by the shield plate, irrespective of the state of attachment / detachment of the upper assembly, dust, water, etc. on the upper assembly side. Does not extend to the optical system, and since the incidence unit is connected to the outer surface of the box-shaped base,
The optical system behind the output mirror is also protected from external dust and the like.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 2 are a schematic partial front view and a schematic partial plan view, respectively, showing the configuration of a solid-state laser oscillation device according to an embodiment of the present invention. FIG. It is sectional drawing.

The base 10 of this laser oscillation device is made of, for example, stainless steel, aluminum, or invar, and is formed in a box shape with an open upper surface. As shown in FIGS. 1 and 2, in the longitudinal direction of the box-shaped base 10, a lower laser chamber assembly 12 is fixedly arranged at the center of the base, and a total reflection mirror holder 14 and an output mirror holder 16 are fixed on both sides thereof. Are located.

As shown in FIG. 2, the lower laser chamber assembly 12 has a plurality of, for example, two positioning pins 13 erected at predetermined positions on the bottom surface of the base 10 at corresponding positions on the lower surface of the assembly. The bolt 1 is positioned on the base 10 so as to fit into the pin hole 18b provided.
Fixed at 5.

The total reflection mirror holder 14 is a substantially vertical side wall 10 on one side (right side) of the base 10 through which the optical axis of the laser rod held by the lower laser chamber assembly 12 passes.
a is attached with bolts 17 so as to sandwich it from both sides, and the total reflection mirror 19 is held in a fixed state.

The output mirror holder 16 includes the mirror holding plate 1
The output mirror 23 is attached to the reference numeral 6a with bolts 21 and holds the output mirror 23 so that the tilt can be adjusted by a mirror tilt adjusting mechanism. The mirror tilt adjusting mechanism of the output mirror holder 16
A mirror holding plate 16a for holding the output mirror 23 inside the base side wall 10b; and a plurality of sets of bolts 16b and nuts 1 screwed together so as to sandwich the base side wall 10b and the mirror holding plate 16a from outside and inside the base 10.
6c and a leaf spring 16 for positioning the mirror holding plate 16a
d, and a disc spring 16e for urging the mirror holding plate 16a toward the base center with respect to the base side wall 10a.
By adjusting the degree of tightening between the bolts 16b and the nuts 16c of each set, the inclination of the output mirror 23 with respect to the optical axis can be arbitrarily adjusted.

As described above, the parallelism between the output mirror 23 and the total reflection mirror 19 can be adjusted by the mirror tilt adjusting mechanism on the output mirror holder 16 side.
On the side of the total reflection mirror holder 14, the mirror tilt adjusting mechanism is omitted. Further, since the lower laser chamber assembly 12 is positioned and mounted in the base 10, the total reflection mirror 19 fixedly mounted on the end face of the laser rod held by the lower laser chamber assembly 12 and the side wall 10 a of the base 10. And the parallelism is ensured within a predetermined error.

Referring to FIG. 3, the lower laser chamber assembly 12 has a lower holder 18 attached to the bottom surface of the base 10 and a lower collector 18 in a longitudinal rectangular groove 18a formed in the center of the upper surface of the lower holder 18. The light body 20 is arranged upward, that is, the light reflecting surface 20a curved in a semi-elliptical shape is arranged upward. On the lower surface of the lower holding body 18, a pin hole 18b for fitting with the positioning pin 13 implanted in the base 10 is provided.

The lower light collector 20 is made of, for example, brass, and its light reflecting surface 20a is plated with gold. Gold is
There is an effect of reflecting a wavelength of about 500 nm or more useful for exciting a solid-state laser with high efficiency (reflectance). Lower light collector 2
A laser rod, for example, a YAG rod 22 is arranged at an elliptical focal position within 0, and a light transmitting plate 24 for transmitting excitation lamp light is arranged at an opening on the upper surface of the lower condenser 20. In the present embodiment, the laser rod 22 is exposed without being housed in the glass tube, and cooling water is caused to flow through a tunnel formed by the light reflecting surface 20a and the ceiling surface, that is, the light transmitting plate 24 of the lower light collector 20, The laser rod 22 is directly cooled.

Outside the light transmitting plate 24, a flange portion 28 is provided.
Are formed integrally with the lower holder 18. A shielding plate 30 made of, for example, stainless steel is provided between the upper surface of the flange portion 28 and the upper end surface of each side wall of the base 10. The outer edge of the shielding plate 30 is bent downward at a right angle to cover the upper end surface or the outer surface of the side wall of the base 10,
The inner edge portion is fixed to the upper surface of the flange portion 28 with a bolt 32. An O-ring 34 is provided on the upper surface of the flange 28 in contact with the inner edge of the shielding plate 30. This O
The lower surface side of the shielding plate 30 is sealed by the ring 34, and the space 11 in the base below the shielding plate 30 is sealed. As shown in FIG. 1, the shielding plate 30 has a mirror holder 1 at both ends in the longitudinal direction of the base 10.
4, 16 on both side walls 10a, 10
b to the upper end surface.

Above the lower laser chamber assembly 12, an upper laser chamber assembly 36 is located. The upper laser chamber assembly 36 has an upper condenser 40 fixedly disposed inside a box-shaped upper holder 38, and the semi-elliptical light reflecting surface 40a of the upper condenser 40 faces downward. Then, it is detachably fitted to the upper surface of the lower laser chamber assembly 12 with bolts or the like (not shown). The upper light collector 40 is made of, for example, brass, and its light reflection surface 40a is plated with gold. An excitation lamp 42 is arranged at an elliptical focal position in the upper light collector 40.

In the present embodiment, the excitation lamp 42 is exposed without being housed in the glass tube, and cooling water is supplied into the tunnel 41 formed by the light reflecting surface 40a and the bottom surface of the upper condenser 40, that is, the light transmitting plate 24. So that the excitation lamp 42 is directly cooled. Flange 39 of upper holding body 38
An O-ring 44 is provided on the upper surface of the flange portion 28 of the lower holder 18 in contact with the lower surface of the O-ring 44. This O-ring 44
The upper and lower laser chamber assemblies 36,1
The tunnel 41 in 2 is sealed.

Thus, the lower laser chamber assembly 1
When the upper laser chamber assembly 36 overlaps the upper part 2, the lower light collector 20 and the upper light collector 40 are united into one to form an elliptical reflecting barrel having a long axis in the vertical direction. A laser oscillator 48 in which the laser rod 22 and the excitation lamp 42 are respectively disposed at a pair of elliptical focal positions in the elliptical reflecting barrel is assembled.

In FIG. 1, an inlet 52 for taking in cooling water to be supplied to the laser rod 22 and the excitation lamp 42 and a cooling water after cooling the laser rod 22 and the excitation lamp 42 are provided at the bottom of the base 10. An outlet 54 for taking out is provided. An openable and closable bolt-shaped lid 56 is provided on the upper surface of the upper laser chamber assembly 36 for introducing air when draining water from the inside of the upper light collector 40 (tunnel 41). Electrical cords or cables 48 exiting from both ends of the upper laser chamber assembly 36 are connected to both electrode terminals of the excitation lamp 44 in the chamber. FIG. 2 shows the internal configuration of the base 10 without the shielding plate 30 (not shown).

On the optical axis of the laser rod 22, a light shielding plate 50a of the resonator shutter 50 is disposed between the laser light passage window 12a on the side surface of the lower laser chamber assembly 12 and the output mirror holder 16. . A shutter driving unit of the resonator shutter 50, for example, a rotary solenoid 50b
Is housed in a cover 50c attached to the outer surface of the base 10 on the side of the laser optical axis. The light-shielding plate 50a fixed to the rotating shaft 50d is switched between a position indicated by a solid line (light-shielded position) and a position indicated by a chain line (retracted position) by the rotational driving force of the shutter drive unit 50b.

In the base side wall 10b on which the output mirror holder 16 is mounted, a laser light passing hole 10e for letting the laser light output from the output mirror 23 out of the base.
Are formed. Then, this laser light passage hole 10e
Of the bolt 9 so that the incident unit 60 fits the laser light entrance to the outer surface of the base side wall 10b.
6 is attached.

FIG. 4 is a longitudinal sectional view showing the internal structure of the incident unit 60, and FIG. 5 is a side view showing the external structure of the optical fiber alignment adjusting unit in the incident unit 60.

The incident unit 60 has a laser beam entrance and an exit, and the laser beam entrance is connected to the laser beam passage hole 10e.
A unit main body 62 that is attached in close contact with the outer side surface of the base side wall 10b so as to match with an optical fiber attaching portion 64 for attaching one end of an optical fiber 98 to a laser beam exit of the unit main body 62; A cylindrical lens holder 68 for holding condenser lenses 66 and 67 for condensing the laser light LB entering from the laser light entrance to one end face of the optical fiber 98.

A receptacle 70 for receiving one end of the optical fiber 92 is provided at the center of the optical fiber mounting portion 64. The outer surface of this receptacle 70 has X
The tip ends of the directional position adjusting screw 72 and the coil spring 74 abut against each other, and the respective end portions of the Y direction adjusting screw 76 and a coil spring (not shown) also abut against each other. I have. The spring pressures of the X-direction coil spring 74 and the Y-direction coil spring are adjusted by screws 82 and 84 screwed to nuts 78 and 80 fixed to the side surface of the unit main body 62. By rotating the respective knobs (heads) of the X-direction position adjusting screw 72 and the Y-direction position adjusting screw 76, the position of the receptacle 70 in the XY directions is adjusted, and thus XY.
The alignment of the end face of the optical fiber 98 in the direction can be performed.

The condenser lenses 64 and 67 are provided on the lens holder 6.
The protrusion 68a and the stopper ring 8
6 and 88. Lens holder 6
8 is loosely fitted inside a cylindrical portion 62b extending from the intermediate portion of the unit main body 62 to the entrance portion. The side surface of the lens holder 68 is provided with a screw hole 68b into which a bolt 90 described later is screwed.

A guide groove 62c extending parallel to the optical axis is formed in the cylindrical portion 62b of the unit main body 62, and a bolt 90 is connected to the lens holder 18 through the guide groove 62c.
Screw hole 68b. As described above, the bolt 90 screwed to the lens holding body 68 can be moved only in the direction parallel to the optical axis by the guide groove 62c of the unit main body 62. The body 68 cannot move in the circumferential direction but can move only in the optical axis direction.

A notch 62d is formed on the outer peripheral surface of the unit body 62 on the laser beam exit side with respect to the guide groove 62c in a circumferential direction (direction perpendicular to the optical axis), for example, in a range of about 90 °.
Are formed. A position adjusting ring 92 is fitted externally to the unit main body 62 in parallel with the notch 62d,
A recess or groove 68c is formed obliquely over the outer peripheral surface of the lens holder 68, for example, in a range of about 90 ° so as to intersect with the notch 62d, and a pin 94 fixed to the inner surface of the position adjusting ring 92 is provided. Groove 6 through notch 62d
8c.

In such a configuration, the position adjusting ring 9
When the pin 94 is rotated in the circumferential direction, the pin 94 is guided by the notch 62d of the unit body 62 and also by the groove 68c of the lens holder 68, so that the lens holder 68 is actuated by the linear motion cam. Move in the optical axis direction. Thus, by rotating the position adjusting ring 92, the lens holder 68 can be moved in the optical axis direction, and the focal positions of the condenser lenses 66 and 67 can be adjusted to the end surface of the optical fiber 98.

Next, the operation of the laser oscillation device in this embodiment will be described. As shown in FIG. 3, the upper laser chamber assembly 3 is placed on the lower laser chamber assembly 12.
When the excitation lamp 42 is turned on (emits light) in a state where the laser beams 6 are overlapped, that is, in a state where the laser oscillator 48 is assembled, the lamp light passes through the light transmitting plate 24 and is condensed on the laser rod 22. Then, the laser rod 22 is excited by the light energy, and the laser light L
Release B. The laser light LB is transmitted to the total reflection mirror 19 in the mirror holder 14 and the output mirror 2 in the mirror holder 16.
3, the laser light passes through the output mirror 23 and is amplified by resonance after being repeatedly reflected between the laser light passing hole 1 and the laser light through hole 1
It enters the incidence unit 60 through 0e. Incident unit 6
Within 0, the laser light LB passes through the condenser lenses 66 and 67 and is condensed and incident on the end face of the optical fiber 98. Optical fiber 98
Is transmitted through a fiber and sent to a remote, for example, an emission unit (not shown) at a processing place.

As described above, in the laser oscillation device of the present embodiment, the output mirror holder 16 and the incident unit 60 are directly connected via the one side wall 10 b of the box-shaped base 10, and the laser light output from the output mirror 23. The LB enters the incident unit 60 as it is. There is no danger of external dust entering the laser light path between the output mirror holder 16 and the incident unit 60, and there is no need to provide an optical path cover between them. Further, the direct connection structure between the output mirror holder 16 and the incidence unit 60 eliminates the need for the reflection mirror (112) for bending the laser light path, and
The entire laser oscillation device is made compact.

Further, in the laser oscillation apparatus of the present embodiment, the parallelism between the output mirror 23 and the total reflection mirror 19 can be adjusted by the mirror tilt adjustment mechanism on the output mirror holder 16 side, and the total reflection mirror holder 14 The side has a simple mirror mounting structure in which the total reflection mirror 19 is fixedly mounted on the side wall 10a (mirror supporting portion) of the box-shaped base 10 without providing a mirror tilt adjusting mechanism. This also contributes greatly to downsizing and cost reduction of the apparatus.

Further, in the laser oscillation device of this embodiment, since the box-shaped base inner space 11 is shielded from the upper laser chamber assembly 36 and the outside of the device by the shield plate 30, dust from the outside is inside the base inner space 11. Does not enter, both end faces of the laser rod 22 and both mirror holders 1
It is not necessary to provide an optical path cover between the optical path covers 4 and 16.

The cooling water supplied to the laser rod 22 and the excitation lamp 42 is supplied to the inlet 5 at the bottom of the base 10.
A predetermined flow path in the lower laser chamber assembly 12 and the upper laser chamber assembly 36 flows between the outlet 2 and the outlet 54, and does not leak into the base internal space 11. As described above, under the normal state in which the upper laser chamber assembly 36 is superimposed on the lower laser chamber assembly 12, dust and water from the outside are formed on both end surfaces of the laser rod 22 and the reflection surface of the optical resonator mirror. There is no risk of adhering.

When replacing the excitation lamp 42, only the upper laser chamber assembly 36 is removed. The lower laser chamber assembly 12 remains fixed in the base 10. The used excitation lamp 42 is removed from the removed upper laser chamber assembly 36, and a new excitation lamp is mounted instead. Then, the upper laser chamber assembly 36 is again stacked on the lower laser chamber assembly 12 as shown in FIG. You just have to match. Alternatively, it is also possible to replace the excitation lamp 42 by a one-touch method by preparing another upper condenser 40 or upper laser chamber assembly 36 on which a new excitation lamp 42 is mounted in advance. In any case, even if the upper laser chamber assembly 36 is removed, the laser rod 22 is shielded from the outside by the light transmitting plate 24 and the optical resonator mirrors in the mirror holders 14 and 16 are shielded from the outside by the shielding plate 30. There is no possibility that dust adheres to these optical components. Further, since these optical components are not touched by the hands or tools of the operator, there is no possibility of dirt or damage.

In the above-described embodiment, the base 10 is formed in a box shape and the base side wall through which the optical axis passes is used for the mirror support. However, a base structure other than the box shape is also possible. It is also possible to provide a clogged tooth-shaped mirror support that extends vertically upwards. Further, in the above embodiment, the total reflection mirror 19 is fixedly attached to the base side surface 10a, and the output mirror 23 is attached to the base side surface 10b so as to adjust the inclination.
That is, the total reflection mirror 19 can be attached to the base side surface 10a so as to be adjustable in tilt, and the output mirror 23 can be fixedly attached to the base side surface 10b.

[0050]

[0051]

[0052]

According to the laser oscillation device of the first aspect , the base is formed in a box shape, and both side walls of the box base through which the optical axis passes are used as mirror support portions, and the incidence unit is mounted on the side wall of the base. This makes it possible to take effective dustproof measures with a small and simple configuration on the laser optical path between the output mirror and the optical fiber incident surface, and to easily assemble the optical resonator and adjust the optical axis alignment. .

According to the laser oscillation device of the second aspect, it is possible to completely prevent dust, water and the like from adhering, contaminating, damaging, etc. in all optical systems from the laser medium to the optical fiber incidence surface.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a configuration of a laser oscillation device according to an embodiment of the present invention.

FIG. 2 is a plan view illustrating a configuration of a laser oscillation device according to an embodiment.

FIG. 3 is a cross-sectional view taken along line AA of FIG. 1;

FIG. 4 is a longitudinal sectional view showing an internal configuration of an incidence unit in the laser oscillation device of the embodiment.

FIG. 5 is a side view showing an external structure of an optical fiber alignment adjusting unit of the incident unit in the laser oscillation device of the embodiment.

FIG. 6 is a front view showing a configuration of a conventional laser oscillation device.

FIG. 7 is a plan view showing a configuration of a conventional laser oscillation device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Box type base 10a, 10b Box type base side wall 12 Lower laser chamber assembly 14 Total reflection mirror holder 16 Output mirror holder 19 Total reflection mirror 22 Laser rod 23 Output mirror 30 Shielding plate 36 Upper laser chamber assembly 60 Incident unit 98 Optical fiber

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01S 3/08 G02B 6/42 H01S 3/02 H01S 3/086

Claims (2)

(57) [Claims] 1. A laser oscillation device having a common base having a laser chamber for holding a laser medium and a laser excitation means and a pair of optical resonance mirrors for resonantly amplifying laser light emitted from the laser medium, Is formed in a box shape, and a total reflection mirror holding portion for holding a total reflection mirror of the pair of optical resonance mirrors is attached to one side wall of the box base through which the optical axis of the laser medium passes, and the laser A laser light passage hole is formed in the other side wall of the box base through which the optical axis of the medium passes, and this laser light
An output mirror holding unit for holding an output mirror of the pair of optical resonance mirrors on the other side wall of the box-shaped base with a through hole interposed therebetween, and a laser beam output from the output mirror is connected to an optical fiber. A laser oscillation device, comprising: an incidence unit for causing incidence on an end face. 2. A box-shaped base, a lower concentrator having a semi-elliptically curved light reflecting surface,
Laser rod placed in place in the lower light collector
And a light transmissivity disposed in the upper opening of the lower light collector
Plate body, and the light reflecting surface of the lower light collector is
The lower laser channel attached to the box base
Bar assembly and one of the box-shaped bases through which the optical axis of the laser rod passes.
A total reflection mirror attached to a side wall, and the other of the box-shaped base through which the optical axis of the laser rod passes
An output mirror mounted on the side wall, an upper concentrator having a semi-elliptically curved light reflecting surface,
An excitation lamp arranged at a predetermined position in the upper light collector.
Having the light reflecting surface of the upper light collector facing downward
Removably matched to the lower laser chamber assembly
An upper laser chamber assembly and the total reflection mirror and the output mirror to the upper laser
Shielding means for shielding from the outside of the chamber assembly and apparatus
And the laser light output from the output mirror
The other side wall of the box base to be incident on one end face
And an incidence unit attached to the
That laser oscillation device.