KR20020038133A - Mask head assembly and laser machining apparatus adopting the same - Google Patents

Abstract

PURPOSE: A mask head assembly and a laser machining apparatus is provided to obtain speedily and easily an alignment of a pattern mask with regard to a machining surface of a material to be machined by rotating the pattern mask supported by the frame. CONSTITUTION: A mask head assembly comprises a rotating portion(31), a supporting portion(33) for supporting the rotating portion(31), and a driving portion(32) for rotating the rotating portion(31). The driving portion(32) comprises a motor(321) and a driving gear(322) coupled to a rotating axis(321a) of the motor(321). A slave gear(311) for fitting to the driving gear(322) is coupled at the rotating portion(31). The motor(321) is supported by a bracket(323). The slave gear(311) is composed of a first gear(311a) and a second gear(311b) to remove a backrush, and a compressed spring(311c) is provided between the first gear(311a) and the second gear(311b) to provide an elastic rotating force. The slave gear(311) surrounds a circumference of a rotating cylinder(312), and the rotating cylinder(312) is installed through the supporting portion(33). A bearing(331) is provided between the rotating cylinder(312) and the supporting portion(33) to help a rotation of the rotating cylinder(312). A cylindrical body(313) is coupled at a rear side of the rotating cylinder(312), and a pattern mask(34) is installed at a front side of the rotating cylinder(312).

Description

Mask head assembly and laser machining apparatus adopting the same

The present invention relates to a mask head assembly and a laser processing apparatus employing the same, and more particularly, to a mask head assembly for easily aligning a mask with respect to a processing object and a laser processing apparatus employing the same.

A laser processing apparatus for processing a desired pattern on a workpiece by a mask having a predetermined pattern is provided between the laser light source 1 and the objective lens mount 6 facing the workpiece 7 as shown in FIG. A pattern mask 4 having a laser beam passing area of a predetermined pattern is located in the. The collimating lens 3 is positioned in front of the pattern mask 4, and the laser light from the light source 1 is scanned into the pattern mask 4 between the collimating lens 3 and the light source 1. A first scanner 2 for ning is provided. In addition, a second scanner 5 is arranged between the pattern mask 4 and the objective lens device 6 to scan the laser beam passing through the pattern mask 4 to the object 7.

In the conventional laser processing apparatus as described above, the pattern mask 4 is fixed on the laser light propagation path from the laser light source 1, and thus the pattern mask 4 When the machining surface was abnormally rotated in any direction, the position of the workpiece 7 itself was adjusted to match it.

Such a structure of aligning the processing plane with respect to the pattern mask 4 by changing the position of the object 7 is inconvenient in use and takes a long time. On the other hand, since the position adjustment of the object 4 has a mechanism by which the table 8 in which the object 4 is located moves on the X-Y coordinate, the rotation of the object 4 could not be adjusted.

SUMMARY OF THE INVENTION An object of the present invention is to provide a mask head assembly which is easy to align a pattern mask with respect to a processing surface of a workpiece and a laser processing apparatus employing the same.

1 is an optical structural diagram of a conventional laser processing apparatus.

Figure 2 is a plan view showing a schematic overall structure of the laser processing apparatus of the present invention to which the mask head assembly according to the present invention is applied.

3 is a right side view of the laser processing apparatus according to the present invention shown in FIG.

4 is a schematic partial cut half cross-sectional view of a mask head assembly according to the present invention.

FIG. 5 is a partial excerpt perspective view of the mask head assembly according to the invention shown in FIG. 4. FIG.

6 is a right side cross-sectional view of the mask head assembly according to the invention shown in FIG. 4.

7 is a rear view of the mask head assembly according to the invention shown in FIG. 4.

8 is a partial cutaway front view of the mask head assembly according to the invention shown in FIG. 4.

FIG. 9 is an exploded perspective view illustrating a relationship between a mask frame support and a frame in which the pattern mask is coupled in the mask head assembly according to the present invention illustrated in FIG. 4.

In order to achieve the above object, according to the present invention,

A rotating body having a laser beam propagation area through which the laser beam passes;

A fixed body supporting the rotating body;

A pattern mask positioned in a laser beam propagation region of the rotating body;

A motor for rotating the rotating body; A mask head assembly is provided.

In addition, in order to achieve the above object, according to the present invention,

A laser light source;

A pattern mask through which laser light from the laser light source passes;

An objective lens mount for focusing the laser beam passing through the pattern mask on a workpiece;

A rotating body rotatably supporting the pattern mask;

A fixed body supporting the rotating body;

A motor for rotating the rotating body; There is provided a laser processing apparatus comprising:

In the mask head assembly and the laser processing apparatus using the same of the present invention, the pattern mask is supported on the frame, it is preferable that the rotating body is provided with a mask frame support for receiving the frame.

In addition, the rotor is provided with an interrupter, it is preferable that the sensor is provided in a position adjacent to the interrupter to generate an electrical signal by the interference of the interrupter.

In the laser processing apparatus, a scanner is provided for deflecting laser light between the laser light source and the pattern mask and between the pattern mask and the objective lens mount, and in front of the pattern mask to which the laser light is incident. It is preferable that a collimating lens is provided.

Hereinafter, with reference to the accompanying drawings, it will be described in detail a preferred embodiment of the mask head assembly and laser processing apparatus to which the present invention is applied.

First, referring to Figures 2 and 3, the overall structure of the laser processing apparatus according to the present invention to which the mask head assembly according to the present invention is applied will be described.

2 is a plan view showing the overall structure of a laser processing apparatus to which the mask head assembly according to the present invention is applied, and FIG. 3 is a right side view thereof.

Referring to FIG. 2, two reflecting mirrors reflecting the laser light from the laser light source 10 to one side (left side in the drawing) of the laser light source 10 which is raised in the lateral direction and reflecting to the first scanner 20 ( 11, 12).

The collimating lens 3, the pattern mask assembly 30 according to the present invention, and the second scanner 3 are positioned on the laser light traveling path from the first scanner 20. In addition, as shown in FIG. 3, an objective lens mount 60 for focusing the laser light from the second scanner 30 on the object 70 is positioned below the second scanner 30.

In the above structure, the first scanner 20 and the second scanner 50 are so-called galvanometer laser beam deflectors, and first mirrors 21 and 51 for deflecting the laser light in X and Y coordinates, respectively. And second mirrors 22 and 52, respectively, and motors 21a, 22a, 51a, and 52a are provided in each mirror.

Hereinafter, a preferred embodiment of the mask head assembly of the present invention will be described in detail. FIG. 4 is a schematic partial cut half sectional view of the mask head assembly, FIG. 5 is a partial excerpt perspective view thereof, FIG. 6 is a right sectional view thereof, and FIG. 7 is a rear view of the mask head assembly viewed from the rear.

4 and 7, the mask head assembly includes a rotating part 31, a supporting part 33 for supporting the rotating part 31, and a driving part 32 for rotating the rotating part 31.

The driving unit 32 includes a motor 321 and a driving gear 322 coupled to the rotation shaft 321a of the motor 321, and the rotating unit 31 is driven by meshing with the driving gear 322 to rotate. 311 is combined. The motor 321 is supported by the bracket 323. As shown in Figs. 5 and 7, the driven gear 311 is an assembly of the first gear 311a and the second gear 311b for removing the backlash, and a compression spring that provides a mutual rotational force therebetween. 311c is interposed. The driven gear 311 surrounds the rotation cylinder 312, and the rotation cylinder 312 is installed through the support 33. A bearing 331 is interposed between the rotary cylinder 312 and the support 33 to assist the rotation of the rotary cylinder 312.

On the other hand, as shown in Figure 5, the rear of the rotating cylinder 312, that is, the side that the laser light is incident, the ordinary body 313 through which the laser light passes is coupled, in front of it as shown in FIG. Similarly, a pattern mask 34 is provided. The pattern mask 34 is supported by the frame 341, and a mask frame support 342 is installed in front of the body 313 to accommodate the frame 341 to which the pattern mask 34 is coupled. have. The mask frame support 342 has a structure in which the frame 341 may be inserted and separated.

6 and 7, an annular interrupter member 314 for recognizing the rotational position of the rotating cylindrical body 312 is coupled to the rear of the rotating cylindrical body 312 and adjacent thereto. Behind the support portion 33 is a sensor 315 and a bracket 315a for supporting the same is installed.

8 is a partially cut-away front view of the mask head assembly viewed from the front, and FIG. 9 is an exploded perspective view illustrating a relationship between a mask frame support 342 and a frame 341 to which the pattern mask 34 is coupled.

8 and 9, a mask frame support 342 is installed in front of the rotating cylindrical body 312 to accommodate the frame 341 to which the pattern mask 34 is coupled.

On both sides of the mask frame support part 342, a spacer wall 346 is formed at a predetermined height to provide a space into which the rectangular frame-shaped frame 341 to which the pattern mask 34 is coupled enters.

The wall 346 is provided with a guider 343 for guiding the frame 341, and the guider 343 is provided with a plurality of flap springs 344 for elastically pressing the frame 341. The flap spring 344 is in contact with the frame 341 through a through hole 343a formed in the guider 343.

The support plate 347 is positioned on the upper portion of the flap spring 344 to more stably fix the flap spring 344. A handle 341a is provided on the frame 341 supporting the pattern mask 34.

Since the mask head assembly of the present invention as described above has a structure capable of rotating the pattern mask supported on the frame, alignment of the pattern mask with respect to the processing surface of the object to be processed can be made quickly and easily.

The mask head assembly of the present invention can be applied to various types of laser processing apparatus in which laser processing is performed by a mask.

Although the present invention has been described with reference to the embodiments shown in the drawings, it is merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention should be defined only in the appended claims.

Claims (10)

A rotating body having a laser beam propagation area through which the laser beam passes; A fixed body supporting the rotating body; A pattern mask positioned in a laser beam propagation region of the rotating body; A motor for rotating the rotating body; Mask head assembly characterized in that it comprises. The method of claim 1, And the pattern mask is supported by a frame, and the rotating body is provided with a mask frame support for accommodating the frame. The method according to claim 1 or 2, The rotor is provided with an interrupter, the mask head assembly characterized in that the sensor is provided in a position adjacent to the interrupter for generating an electrical signal by the interference of the interrupter. A laser light source; A pattern mask through which laser light from the laser light source passes; An objective lens mount for focusing the laser beam passing through the pattern mask on a workpiece; A rotating body rotatably supporting the pattern mask; A fixed body supporting the rotating body; A motor for rotating the rotating body; Laser processing apparatus characterized in that it comprises. The method of claim 4, wherein The pattern mask is supported by a frame, and the rotating body is provided with a mask frame support for accommodating the frame. The method according to claim 4 or 5, The rotating body is provided with an interrupter, the laser processing apparatus, characterized in that provided in the position adjacent to the interrupter for generating an electrical signal by the interference of the interrupter. The method according to claim 4 or 5, And a scanner for deflecting laser light between the laser light source and the pattern mask and between the pattern mask and the objective lens mount. The method of claim 6, And a scanner for deflecting laser light between the laser light source and the pattern mask and between the pattern mask and the objective lens mount. The method according to claim 4, 5, 7, and 8, A collimating lens is provided in front of the pattern mask to which laser light is incident. The method of claim 6, A collimating lens is provided in front of the pattern mask to which laser light is incident.