JPH07140097A - X-ray analyzer - Google Patents

Abstract

PURPOSE:To move spectral crystal and X-ray detector along the circumference of Rowland circle through a simple structure and easy controlling. CONSTITUTION:An X-ray analyzer is provided with a rod 18, in which an X-ray detector 1 is mounted on its one end and an adjusting mechanism for its fitting angle is prepared, a supporting part 17 which supports the rod 18 by other end and has an adjusting mechanism for supporting tilt angle, a guide rail on which the part 17 is moved, and controlling means 21 to 25 which control the position of the part 17 on the rail 11 and the tilt angle of the rod 18, and according to the position of spectral crystal 2 the position of the part 17 on the rail 11 and the tilt angle of the rod 18 are controlled by the means 21 to 25. Therefore, the rail 11 is set along a trace G that the center of Rowland circle R is traced as the position of the crystal 2 is moved, thereby separating the detector 1 mechanically from the movement of the crystal 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention arranges a sample, a dispersive crystal and an X-ray detector on the circumference of a Rowland circle and irradiates the sample with X-rays to spectroscopically measure characteristic X-rays generated from the sample. The present invention relates to an X-ray analyzer.

[0002]

2. Description of the Related Art In an X-ray analyzer, the distance between the sample and the dispersive crystal is equal to the distance between the dispersive crystal and the X-ray detector, and the sample, the dispersive crystal and the X-ray detector are circled in a Roland circle. The sample is irradiated with X-rays arranged on the circumference, and the characteristic X-rays generated from the sample are reflected by a single crystal with a known interatomic distance, and the characteristic X-rays that satisfy Bragg's law are dispersed. I'm measuring. Therefore, in the goniometer of the conventional X-ray analyzer, the entire mechanical unit is mechanically operated so that each positional relationship of the dispersive crystal and the X-ray detector with respect to the sample position satisfies a predetermined condition. All parts are mechanically connected.

[0003]

However, in the goniometer of the conventional X-ray analysis apparatus as described above, especially the support mechanism for the X-ray detector is provided at two places, and the preload mechanism is complicatedly connected. However, there were many mechanical problems, the movement was unstable, and it was not suitable for high precision movement.

The present invention is to solve the above problems and provides an X-ray analyzer capable of moving a dispersive crystal and an X-ray detector on the circumference of a Rowland circle with a simple configuration and control. The purpose is to do.

[0005]

To this end, the present invention provides a characteristic X-ray generated from a sample by arranging the sample, a dispersive crystal and an X-ray detector on the circumference of a Rowland circle and irradiating the sample with X-rays. In an X-ray analyzer for spectroscopically measuring, a rod having an X-ray detector attached at one end and a mechanism for adjusting the attachment angle, and a support portion supported at the other end of the rod and having a mechanism for adjusting the support tilt angle, The guide rail includes a guide rail on which the support unit moves, and a control unit that controls the position of the support unit on the guide rail and the tilt angle of the rod. The control unit controls the position of the support unit on the guide rail and the rod according to the position of the dispersive crystal. It is characterized in that it is configured to control the inclination angle of the.

[0006]

In the X-ray analysis apparatus of the present invention, the X-ray detector is attached to one end of the rod and has a mechanism for adjusting the attachment angle, and the support portion is supported at the other end of the rod and has a mechanism for adjusting the support inclination angle. And a guide rail on which the support moves, and a control means for controlling the position of the support on the guide rail and the tilt angle of the rod, and the position of the support on the guide rail by the control means according to the position of the dispersive crystal. Since it is configured to control the tilt angle of the rod and the rod, by providing a guide rail on the locus of the center of the Rowland circle that changes when the position of the analyzing crystal is moved, the X-ray detector can be detected from the movement of the analyzing crystal. It can be mechanically separated.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of an X-ray analysis apparatus according to the present invention. 1 is an X-ray detector, 2 is a dispersive crystal, 3 is a sample, 4 is an origin sensor, 5 is a crystal linear moving unit, 6 Is a linear encoder, 7 to 8 are rotary potentiometers, 9 is a position sensor, 10 is an optical sensor, 11 is a guide rail, and 12 to.
16 is a motor, 17 is a support part, 18 is a rod, 21 is a calculation control part, 22 is an input / output control part, 23 is a memory, 24 is a condition setting part, 25 is a driver, R is a Roland circle, G is a center locus. Show.

In FIG. 1, an X-ray detector 1, a dispersive crystal 2 and a sample 3 are respectively installed on the circumference of a Rowland circle R, and the position and angle of the X-ray detector 1 are adjusted and the dispersive crystal 2 is positioned. The adjustment of angles and angles are mechanically independent. The motor 12 drives the crystal linear moving unit 5 to which the dispersive crystal 2 is attached to change the position of the dispersive crystal 2. The crystal linear moving unit 5 is, for example, a feed screw rotationally driven by the motor 12 and is used as the origin sensor 4 The dispersive crystal 2 is linearly moved along the line connecting the sample 3 and the sample 3.
The motor 13 constitutes an angle adjusting mechanism that rotationally drives the dispersive crystal 2 to change the X-ray incident angle, and the motor 14 constitutes an angle adjusting mechanism that rotationally drives the X-ray detector 1 to change the X-ray incident angle. Is. The supporting part 17 has a dispersive crystal 2 at the tip.
It supports the rod 18 to which it is attached and moves on the arc-shaped fixing guide rail 11.
The motor 15 constitutes a mechanism for driving and positioning the rod on the guide rail 11, and the motor 16 constitutes an angle adjusting mechanism for rotationally driving the rod 18 to change the angle.
Is. The rod 18 supports the distance between the dispersive crystal 2 and the support portion 17 by the radius length of the Rowland circle R, and when the dispersive crystal 2 is moved by the crystal linear movement unit 5, the X-ray detector 1 and the spectroscopic Crystal 2 and sample 3 are Roland circle R respectively
Of the support portion 17 and the rod 18 on the guide rail 11 so that the distance between the X-ray detector 1 and the dispersive crystal 2 is equal to the distance between the dispersive crystal 2 and the sample 3. The angle of is controlled. Therefore, the center locus G is the locus of the center of the Rowland circle that changes when the position of the dispersive crystal is moved, and the support portion 1 moves on this locus.
7 moves.

The linear encoder 6 detects the distance L from the sample 3 to the dispersive crystal 2 by the origin sensor 4, and the rotary potentiometer 7 detects the X-ray incident angle on the dispersive crystal 2. The optical sensor 10 detects the distance from the dispersive crystal 2 to the X-ray detector 1, and the rotary potentiometer 8 detects the X-ray incident angle on the X-ray detector 1. The position sensor 9 detects the position of the support portion 17 on the guide rail 11.

The memory 23 includes a linear encoder 6, rotary potentiometers 7, 8, a position sensor 9, and an optical sensor 10.
Is stored in the condition setting control unit 24.
Is for setting the operating conditions of the motors 12 to 16 in the driver 25. The arithmetic control unit 21 refers to each detection value stored in the memory 23 and controls the setting of the driver 25 through the condition setting control unit 24.
3, the input / output control unit 22 controls input / output of information between the condition setting control unit 24 and the calculation control unit 21. The driver 25 uses the motor 12 according to the set operating conditions.
˜16 are driven.

Next, the operation will be described. First, the position of the analysis crystal 2 is determined according to the analysis conditions, and when the position information is input to the arithmetic control unit 21 by the analyst, the motor 12 is input through the input / output control unit 22 and the driver 25 according to the instruction from the arithmetic control unit 21. Is driven. Dispersive crystal 2
Moves linearly, its position is detected by the linear encoder 6, stored in the memory 23, and input to the arithmetic control unit 21,
When the dispersive crystal 2 stops at the designated predetermined position, the distance from the sample 3 to the dispersive crystal 2 is detected by the linear encoder 6. Therefore, according to the distance, the sample 3, the dispersive crystal and the dispersive crystal are arranged on the circumference of the Rowland circle. 2. The tilt angle of the dispersive crystal 2, the position of the X-ray detector 1, the tilt angle of the X-ray detector 1, the position of the support portion 17, and the tilt angle of the rod 18 are obtained so that the X-ray detector 1 comes, and the calculation control portion 21 is obtained. The motors 13 to 16 are driven through the input / output control unit 22 and the driver 25. The control result is the rotary potentiometers 7, 8,
It is detected by the position sensor 9 and the optical sensor 10, stored in the memory 23, and input to the arithmetic control unit 21.

The present invention is not limited to the above embodiment, but various modifications can be made. For example, in the above-described embodiment, the optical sensor 10 detects the distance between the X-ray detector 1 and the dispersive crystal 2 to control the tilt angle of the rod 18, but instead of the optical sensor 10, a rotary potentiometer is provided on the support portion 17. X is provided by directly controlling the tilt angle of the rod 18.
The distance between the line detector 1 and the dispersive crystal 2 may be controlled to be a predetermined value. Further, since each control value is uniquely determined when the position of the dispersive crystal 2 is determined, each control value corresponding to the position of the dispersive crystal 2 is set and stored as a table in the calculation control unit 21, and each control value of each dispersive crystal 2 is stored. A table may be read using the position as an address to control each motor. Furthermore, although the rod has a radius of the Roland circle and the guide rail has a shape matching the locus of the center of the Roland circle, the X-ray detector should be moved on the circumference of the Roland circle according to the position of the dispersive crystal. Needless to say, the length of the rod and the shape of the guide rail may be changed as long as it is possible.

[0013]

As is apparent from the above description, according to the present invention, since the position of the support portion on the guide rail and the tilt angle of the rod are controlled according to the position of the dispersive crystal, the movement of the dispersive crystal causes X The line detector can be mechanically separated, and the configuration can be simplified. Moreover, the shape of the guide rail is an arc that matches the locus of the center of the Rowland circle, and the X-ray detector can be positioned by the rotation corresponding to the position of the rod having the radius of the Rowland circle. The control value can also be set easily.

[Brief description of drawings]

FIG. 1 is a diagram showing one embodiment of an X-ray analysis apparatus according to the present invention.

[Explanation of symbols]

1 ... X-ray detector, 2 ... Spectroscopic crystal, 3 ... Sample, 4 ... Origin sensor, 5 ... Crystal linear moving part, 6 ... Linear encoder, 7
~ 8 ... Rotation potentiometer, 9 ... Position sensor, 10 ...
Optical sensor, 11 ... Guide rail, 12-16 ... Motor,
17 ... Supporting part, 18 ... Rod, 21 ... Arithmetic control part, 22
Input / output control unit, 23 ... Memory, 24 ... Condition setting unit, 2
5 ... Driver, R ... Roland circle, G ... Guide rail circle

Claims (3)

[Claims] 1. An X-ray analyzer for arranging a sample, a dispersive crystal, and an X-ray detector on the circumference of a Rowland circle and irradiating the sample with X-rays to spectroscopically measure characteristic X-rays generated from the sample, A rod having an X-ray detector attached to one end thereof and having a mechanism for adjusting the attachment angle; a support portion having the other end of the rod and having a mechanism for adjusting the support tilt angle; and a guide rail on which the support portion moves, A control unit for controlling the position of the support unit on the guide rail and the tilt angle of the rod is provided, and the control unit controls the position of the support unit on the guide rail and the tilt angle of the rod according to the position of the dispersive crystal. An X-ray analyzer characterized by the above. 2. The X-ray analysis apparatus according to claim 1, wherein the rod has a radius length of a Rowland circle, and the guide rail has a shape conforming to the locus of the center of the Rowland circle. 3. The X-ray according to claim 1, wherein the control means has a memory which stores a position on the guide rail of the support portion corresponding to each position of the dispersive crystal and a tilt angle of the rod as control values. Analysis equipment.