JP3143293B2 - X-ray analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adjusting the position of a spectral crystal and the position of an X-ray detector mechanically independently of each other. The present invention relates to an X-ray analyzer that is arranged on the circumference of a Roland circle and performs spectroscopic measurement of characteristic X-rays generated from a sample.

[0002]

2. Description of the Related Art In an X-ray analyzer, the distance between a sample and a spectral crystal is equal to the distance between the spectral crystal and the X-ray detector, and the sample, the spectral crystal and the X-ray detector are defined by a Rowland circle. X-rays are applied to the sample placed on the circumference, and the characteristic X-rays generated therefrom are reflected by a single crystal with a known interatomic distance, and the characteristic X-rays satisfying Bragg's law are spectrally separated. Measuring. Therefore, in the goniometer of the conventional X-ray analyzer, the entire mechanical unit is configured to operate mechanically so that each positional relationship between the spectral crystal and the X-ray detector with respect to the sample position satisfies a predetermined condition, All parts are mechanically connected.

[0003]

However, in the goniometer of the conventional X-ray analyzer as described above, the support mechanism for the X-ray detector is particularly provided at two places, and the preloading mechanism is complicatedly connected. However, there are many mechanical problems, the movement is unstable, and it is not suitable for high-precision movement.

The present invention has been made to solve the above problems, and provides an X-ray analyzer capable of moving a spectral crystal and an X-ray detector on the circumference of a Rowland circle with a simple configuration and control. It is intended to do so.

[0005]

To this end, the present invention provides a method of adjusting the position of a spectral crystal and the position of an X-ray detector mechanically independently of each other, so that a sample, the spectral crystal and the X-ray An X-ray analysis apparatus for spectroscopically measuring characteristic X-rays generated from a sample by disposing a detector on the circumference of a Rowland circle, a rod having the X-ray detector attached to one end and the other end serving as a support, Position adjusting means for adjusting the position by moving the support at the other end of the rod on the guide rail; angle adjusting means for rotating and driving the support at the other end of the rod to adjust the tilt angle; and the position of the spectral crystal. And control means for controlling the position adjusting means and the angle adjusting means such that the X-ray detector is arranged on the circumference of the Rowland circle.

[0006]

In the X-ray analysis apparatus of the present invention, a rod having an X-ray detector attached to one end and having a mechanism for adjusting the mounting angle, and a supporting portion supported at the other end of the rod and having a mechanism for adjusting the support tilt angle are provided. A guide rail on which the support moves, and control means for controlling the position of the support in the guide rail and the tilt angle of the rod, and the control means controls the position of the support in the guide rail in accordance with the position of the dispersive crystal. And the tilt angle of the rod are controlled. By providing a guide rail on the locus of the center of the Rowland circle that changes when the position of the spectral crystal is moved, the X-ray detector can be used based on the movement of the spectral crystal. Can be separated mechanically.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing one embodiment of the X-ray analyzer according to the present invention, wherein 1 is an X-ray detector, 2 is a spectral crystal, 3 is a sample, 4 is an origin sensor, 5 is a crystal linear moving section, 6 Is a linear encoder, 7 to 8 are rotary potentiometers, 9 is a position sensor, 10 is an optical sensor, 11 is a guide rail, 12 to
16 is a motor, 17 is a support part, 18 is a rod, 21 is a calculation control part, 22 is an input / output control part, 23 is a memory, 24 is a condition setting part, 25 is a driver, R is a Roland circle, and G is a center locus. Show.

In FIG. 1, an X-ray detector 1, a spectral crystal 2, and a sample 3 are respectively set on the circumference of a Rowland circle R, and the position and angle of the X-ray detector 1 are adjusted, and the position of the spectral crystal 2 is adjusted. The adjustment of the angle and the angle are mechanically independent of each other. The motor 12 drives the crystal linear moving unit 5 on which the spectral crystal 2 is mounted to change the position of the spectral crystal 2. The crystal linear moving unit 5 is, for example, a feed screw that is rotationally driven by the motor 12 and has an origin sensor 4. This is to move the spectral crystal 2 linearly along the line connecting the sample and the sample 3.
The motor 13 constitutes an angle adjusting mechanism for rotating the spectral crystal 2 to change the X-ray incident angle, and the motor 14 constitutes an angle adjusting mechanism for rotating the X-ray detector 1 to change the X-ray incident angle. It is. The supporting part 17 is provided with
The supporting member 17 supports the rod 18 to which it is attached and moves on the arc-shaped fixing guide rail 11.
The motor 15 constitutes a mechanism for driving and positioning the guide rail 11 on the guide rail 11, and the motor 16 constitutes an angle adjusting mechanism for rotating the rod 18 to change the angle.
It is. The rod 18 supports the distance between the spectral crystal 2 and the support 17 by the radius of the Rowland circle R. When the spectral crystal 2 is moved by the crystal linear moving unit 5, the X-ray detector 1 Crystal 2 and Sample 3 are each a Roland circle R
And the position of the support portion 17 on the guide rail 11 and the rod 18 so that the distance between the X-ray detector 1 and the dispersive crystal 2 is equal to the distance between the dispersive crystal 2 and the sample 3. Is controlled. Therefore, the center locus G is a locus of the center of the Rowland circle that changes when the position of the spectral crystal is moved, and the support portion 1
7 moves.

The linear encoder 6 detects a distance L from the sample 3 to the spectral crystal 2 by the origin sensor 4, and the rotary potentiometer 7 detects an X-ray incident angle on the spectral crystal 2. The optical sensor 10 detects the distance from the spectral crystal 2 to the X-ray detector 1, and the rotary potentiometer 8 detects the X-ray incident angle on the X-ray detector 1. The position sensor 9 detects the position of the support 17 on the guide rail 11.

The memory 23 includes a linear encoder 6, rotary potentiometers 7, 8, a position sensor 9, and an optical sensor 10.
Are stored in the condition setting control unit 24.
Sets the operating conditions of the motors 12 to 16 in the driver 25. The arithmetic control unit 21 performs setting control on the driver 25 through the condition setting control unit 24 with reference to each detection value stored in the memory 23.
The input / output control unit 22 controls input / output of information between the control unit 3 and the condition setting control unit 24 and the arithmetic control unit 21. The driver 25 controls the motor 12 according to the set operating conditions.
To 16 are driven.

Next, the operation will be described. First, the position of the analysis crystal 2 is determined according to the analysis conditions, and when the position information is input to the operation control unit 21 by the analyst, the motor 12 is transmitted through the input / output control unit 22 and the driver 25 according to the instruction from the operation control unit 21. Is driven. Dispersion crystal 2
Moves linearly, the position of which is detected by the linear encoder 6 and stored in the memory 23 and input to the arithmetic and control unit 21;
When the dispersive crystal 2 stops at the designated predetermined position, the distance between the sample 3 and the dispersive crystal 2 is detected by the linear encoder 6, and the sample 3 and the dispersive crystal are arranged on the circumference of the Rowland circle according to the distance. 2. The inclination angle of the spectral crystal 2, the position of the X-ray detector 1, the inclination angle, the position of the support part 17, and the inclination angle of the rod 18 are obtained so that the X-ray detector 1 comes. Then, the motors 13 to 16 are driven through the input / output control unit 22 and the driver 25. The control result is obtained by rotating potentiometers 7, 8,
The position is detected by the position sensor 9 and the optical sensor 10, stored in the memory 23, and input to the arithmetic and control unit 21.

It should be noted that the present invention is not limited to the above embodiment, and various modifications are possible. For example, in the above embodiment, the tilt angle of the rod 18 is controlled by detecting the distance between the X-ray detector 1 and the spectral crystal 2 by the optical sensor 10, but a rotary potentiometer is provided on the support 17 instead of the optical sensor 10. To directly control the tilt angle of the rod 18
Control may be performed such that the distance between the line detector 1 and the spectral crystal 2 becomes a predetermined value. When the position of the spectral crystal 2 is determined, each control value is uniquely determined. Therefore, each control value corresponding to the position of the spectral crystal 2 is set and stored in a table by the arithmetic and control unit 21, and the control value of each spectral crystal 2 is stored. The table may be read using the position as an address to control each motor. Furthermore, the rod was made the radius of the Roland circle and the guide rail was shaped to match the center locus of the Roland circle, but the X-ray detector was moved on the circumference of the Roland circle according to the position of the spectral crystal. Needless to say, if possible, the length of the rod and the shape of the guide rail may be changed.

[0013]

As is apparent from the above description, according to the present invention, since the position of the supporting portion on the guide rail and the inclination angle of the rod are controlled in accordance with the position of the spectral crystal, the X-axis is determined from the movement of the spectral crystal. The line detector can be separated mechanically, and the configuration can be simplified. In addition, since the shape of the guide rail is an arc shape that matches the locus of the center of the Rowland circle, the X-ray detector can be positioned by rotating the rod according to the position with a rod having a radius of the Rowland circle. , Control values can be easily set.

[Brief description of the drawings]

FIG. 1 is a view showing one embodiment of an X-ray analyzer according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... X-ray detector, 2 ... Dispersion crystal, 3 ... Sample, 4 ... Origin sensor, 5 ... Crystal linear moving part, 6 ... Linear encoder, 7
-8: rotary potentiometer, 9: position sensor, 10 ...
Optical sensor, 11: guide rail, 12 to 16: motor,
17: Supporting part, 18: Rod, 21: Operation control part, 22
... I / O control unit, 23 ... Memory, 24 ... Condition setting unit, 2
5: Driver, R: Roland circle, G: Guide rail circle

Claims (3)

(57) [Claims] An adjustment of a position of a spectral crystal and a position of an X-ray detector are mechanically and independently performed, and a sample, the spectral crystal and the X-ray detector are positioned on a circumference of a Rowland circle. An X-ray analyzer for spectroscopically measuring characteristic X-rays generated from a sample, wherein the rod has the X-ray detector attached to one end and the other end is a support, and the support at the other end of the rod is a guide rail. Position adjusting means for adjusting the position by moving the X-ray detector on the X-ray detector corresponding to the position of the spectral crystal; An X-ray detector comprising: a control unit that controls the position adjustment unit and the angle adjustment unit so as to be arranged on the circumference of the Rowland circle. 2. The X-ray analysis according to claim 1, wherein the rod has a radius of the Rowland circle, and the guide rail has a shape conforming to a locus of the center of the Rowland circle. apparatus. 3. The control device according to claim 1, wherein the control unit includes a memory that stores, as control values, a position on the guide rail of the support portion corresponding to each position of the dispersive crystal and the tilt angle. X-ray analyzer.